An electroplating and etching cleaning device with adjustable cleaning solution concentration

By designing an electroplating and etching cleaning device with adjustable cleaning solution concentration and uniformity, the problems of fixed cleaning solution concentration and poor uniformity in traditional devices are solved, achieving efficient cleaning effect and synchronous shift control, thus improving the cleaning efficiency of electroplated and etched items.

CN224272450UActive Publication Date: 2026-05-26TAIXING CITY QIXING ADVANCED SEMICONDUCTOR MATERIALS CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
TAIXING CITY QIXING ADVANCED SEMICONDUCTOR MATERIALS CO LTD
Filing Date
2025-06-09
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Traditional electroplating and etching cleaning equipment uses a fixed concentration of cleaning solution, which is difficult to adapt to different materials and process requirements. The uniformity of cleaning solution distribution is poor, and it is time-consuming to change the cleaning frame, affecting the cleaning effect and efficiency.

Method used

A cleaning device was designed, comprising a concentration monitor, a metering pump, a motor-driven high-efficiency stirring mechanism, and a synchronous shifting mechanism. This device enables the adjustment of the cleaning solution concentration and the control of its uniformity. Furthermore, the synchronous shifting of the cleaning frame driven by the motor improves work efficiency.

Benefits of technology

It achieves adjustable and uniform cleaning solution concentration, improves cleaning effect and work efficiency, and ensures consistent and efficient cleaning.

✦ Generated by Eureka AI based on patent content.

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Abstract

An electroplating and etching cleaning device with adjustable cleaning solution concentration is disclosed. This invention relates to the field of electroplating and etching technology. Concentration monitors are fixedly installed on the left and right inner walls of the cleaning tank. A controller is fixedly installed on the front wall of the cleaning tank and electrically connected to the concentration monitors. Metering pumps are installed on the additive pipe and the inlet pipe, and are electrically connected to the controller. A primary motor is fixedly installed at the bottom of the cleaning tank and electrically connected to the controller. A high-efficiency stirring mechanism connected to the primary motor is located below the cleaning frames inside the cleaning tank. A synchronous shifting mechanism connected to the two cleaning frames is provided on the cleaning tank. This device not only allows for adjustment of the cleaning solution concentration but also ensures the uniformity of the cleaning solution concentration, while also achieving better working efficiency.
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Description

Technical Field

[0001] This utility model relates to the field of electroplating and etching technology, specifically to an electroplating and etching cleaning device with adjustable cleaning solution concentration. Background Technology

[0002] In electroplating and etching processes, the cleaning process is a crucial step in ensuring product quality. The concentration of the cleaning solution directly affects the cleaning effect; if the concentration is too low, it may not be able to effectively remove contaminants, affecting subsequent processes. Traditional electroplating and etching cleaning devices have a fixed cleaning solution concentration, which is difficult to adapt to different materials, process requirements, and changes in cleaning solution concentration during use. Moreover, the uniformity of the cleaning solution distribution within the cleaning device is also difficult to guarantee, easily affecting the consistency of the cleaning effect. In addition, existing cleaning devices generally only have a single cleaning frame. When removing the cleaning frame from the cleaning device to replace the electroplated and etched items, the cleaning time of the cleaning device will be wasted, and the work efficiency needs to be improved. Therefore, there is an urgent need for an electroplating and etching cleaning device with adjustable cleaning solution concentration. Utility Model Content

[0003] The purpose of this invention is to address the shortcomings and deficiencies of the existing technology by providing a reasonably designed electroplating etching cleaning device with adjustable cleaning solution concentration, thereby solving the aforementioned problems.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: it includes a cleaning tank and a cleaning frame, with cleaning frames provided on both the inner and outer sides of the cleaning tank, an additive pipe and an inlet pipe respectively provided on the left and right sides of the rear side wall of the cleaning tank, and a drain pipe provided on the left side wall of the cleaning tank.

[0005] It also includes:

[0006] Concentration monitors, there are two concentration monitors, which are fixedly installed on the left and right inner side walls of the cleaning tank respectively. A controller is fixedly installed on the front side wall of the cleaning tank, and the controller is electrically connected to the concentration monitors.

[0007] Metering pumps, there are two metering pumps, which are respectively installed on the additive pipe and the liquid inlet pipe, and the metering pumps are electrically connected to the controller;

[0008] The first motor is fixedly installed at the bottom of the cleaning tank and is electrically connected to the controller. A high-efficiency stirring mechanism connected to the first motor is located below the cleaning frame inside the cleaning tank. A synchronous shifting mechanism connected to the two cleaning frames is provided on the cleaning tank.

[0009] Furthermore, the high-efficiency stirring mechanism includes:

[0010] A fixed cylinder is fixedly installed on the inner bottom wall of the cleaning tank, and the fixed cylinder is rotatably sleeved on the output shaft of motor No. 1 through a sealed bearing. A rotating head is rotatably sleeved on the fixed cylinder through a sealed bearing, and the output shaft of motor No. 1 is fixedly connected to the rotating head.

[0011] The stirring shaft, comprising several shafts, is rotatably inserted into the rotating head via sealed bearings with equal rounded corners. A driven bevel gear is fixedly sleeved on one end of the stirring shaft, and a fixed bevel gear is fixedly sleeved on the fixed cylinder, with the fixed bevel gear located inside the rotating head. All driven bevel gears are meshed with the fixed bevel gear.

[0012] Furthermore, the synchronous shifting mechanism includes:

[0013] The second motor is fixedly installed on the front side wall of the cleaning tank. The second motor is electrically connected to the controller. A worm gear is fixedly installed on the output shaft of the second motor. Rotating rods are rotatably connected to the left and right sides of the rear side wall and the front side wall of the cleaning tank through bearings. A worm wheel that meshes with the worm gear is fixedly sleeved on the rotating rod on the front side.

[0014] The connecting frame consists of two frames, which are fixedly installed on the front and rear sides of the two cleaning frames respectively, and the connecting frames are abutted against the cleaning box. One end of each of the three rotating rods is fixedly provided with a connecting rod, and the connecting rods on the front and rear sides are rotatably connected to the two connecting frames through rotating shafts.

[0015] Furthermore, a protective shell is fixedly installed on the front side wall of the cleaning tank, and the protective shell covers the No. 2 motor, worm gear and worm, and the rotating rod on the front side rotates through the protective shell via a bearing.

[0016] Furthermore, one end of the worm gear is rotatably connected to the protective shell via a bearing, and the second motor is fixedly connected to the inner wall of the protective shell.

[0017] Furthermore, a reinforcing rib is fixedly provided on the side wall of the connecting rod, and several reinforcing rib plates connected to the connecting rod are fixedly provided on both sides of the reinforcing rib.

[0018] Compared with the prior art, the beneficial effects of this utility model are: the electroplating etching cleaning device with adjustable cleaning solution concentration described in this utility model can not only adjust the cleaning solution concentration, but also ensure the uniformity of the cleaning solution concentration, and at the same time have better working efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model.

[0020] Figure 2 This is a schematic diagram of the structure at the lower rear side of this utility model.

[0021] Figure 3 This is a cross-sectional view of the rotating head in this utility model.

[0022] Figure 4 This is an exploded view of the No. 2 motor, worm gear, rotating rod, worm wheel, and protective shell in this utility model.

[0023] Explanation of reference numerals in the attached figures:

[0024] 1. Cleaning box; 2. Cleaning frame; 3. Additive tube; 4. Inlet pipe; 5. Drain pipe; 6. Concentration monitor; 7. Controller; 8. Metering pump; 9. Motor 1; 10. High-efficiency stirring mechanism; 10. Fixed cylinder; 10-1. Rotating head; 10-2. Stirring shaft; 10-3. Driven bevel gear; 10-4. Fixed bevel gear; 10-5. Synchronous shifting mechanism; 11. Motor 2; 11-1. Worm gear; 11-2. Rotating rod; 11-3. Worm wheel; 11-4. Connecting frame; 11-5. Connecting rod; 11-6. Protective shell; 12. Reinforcing rib; 13. Reinforcing rib plate; 14. Detailed Implementation

[0025] The technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. The preferred embodiments described are only examples. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0026] like Figures 1-4 As shown, the specific embodiment adopts the following technical solution: it includes a cleaning tank 1 and a cleaning frame 2. The cleaning tank 1 is provided with cleaning frames 2 on both the inner and outer sides. The left and right sides of the rear side wall of the cleaning tank 1 are respectively provided with an additive pipe 3 and an inlet pipe 4. The left side wall of the cleaning tank 1 is provided with a drain pipe 5.

[0027] It also includes:

[0028] Concentration monitor 6, there are two concentration monitors 6, which are respectively fixedly installed on the left and right inner side walls of the cleaning tank 1. A controller 7 is fixedly installed on the front side wall of the cleaning tank 1, and the controller 7 is electrically connected to the concentration monitor 6.

[0029] Metering pump 8, there are two metering pumps 8, which are respectively installed on additive pipe 3 and liquid inlet pipe 4, and the metering pump 8 is electrically connected to controller 7;

[0030] Motor 9 is fixedly installed at the bottom of the cleaning tank 1. Motor 9 is electrically connected to controller 7. A high-efficiency stirring mechanism 10 connected to motor 9 is provided in the cleaning tank 1 at the position below the cleaning frame 2. A synchronous shifting mechanism 11 connected to the two cleaning frames 2 is provided on the cleaning tank 1.

[0031] The high-efficiency stirring mechanism 10 includes:

[0032] Fixed cylinder 10-1 is fixedly installed on the inner bottom wall of cleaning tank 1, and fixed cylinder 10-1 is rotatably sleeved on the output shaft of motor 9 through a sealed bearing. Rotating head 10-2 is rotatably sleeved on fixed cylinder 10-1 through a sealed bearing. The output shaft of motor 9 is fixedly connected to rotating head 10-2.

[0033] A stirring shaft 10-3, comprising several shafts, is rotatably mounted on a rotating head 10-2 via sealed bearings with equal rounded corners. A driven bevel gear 10-4 is fixedly sleeved at one end of the stirring shaft 10-3, and a fixed bevel gear 10-5 is fixedly sleeved on a fixed cylinder 10-1, with the fixed bevel gear 10-5 located inside the rotating head 10-2. The driven bevel gears 10-4 are all meshed with the fixed bevel gears 10-5. When the first motor 9 drives the stirring shaft 10-3 to rotate inside the cleaning tank 1 via the rotating head 10-2, it achieves mixing and stirring of the cleaning liquid. At the same time, the cooperation of the fixed cylinder 10-1, the fixed bevel gears 10-5, and the driven bevel gears 10-4 allows the stirring shaft 10-3 to rotate, thereby improving the mixing effect of the cleaning liquid.

[0034] The synchronous shifting mechanism 11 includes:

[0035] The second motor 11-1 is fixedly installed on the front side wall of the cleaning tank 1. The second motor 11-1 is electrically connected to the controller 7. A worm gear 11-2 is fixedly installed on the output shaft of the second motor 11-1. Rotating rods 11-3 are rotatably connected to the left and right sides of the rear side wall and the front side wall of the cleaning tank 1 through bearings. A worm wheel 11-4 that meshes with the worm gear 11-2 is fixedly sleeved on the rotating rod 11-3 on the front side.

[0036] Two connecting frames 11-5 are fixedly installed on the front and rear sides of the two cleaning frames 2, respectively, and the connecting frames 11-5 abut against the cleaning tank 1. One end of each of the three rotating rods 11-3 is fixedly equipped with a connecting rod 11-6. Reinforcing ribs 13 are fixedly installed on the side walls of the connecting rods 11-6, and several reinforcing plates 14 connected to the connecting rods 11-6 are fixedly installed on the side walls of the reinforcing ribs 13. Through the cooperation of the reinforcing ribs 13 and the reinforcing plates 14, the structural strength of the connecting rods 11-6 can be improved, enabling the connecting rods 11-6 to have stronger load-bearing capacity. The connecting rods 11-6 on the front and rear sides are rotatably connected to the two connecting frames 11-5 via rotating shafts. The front side wall of the cleaning tank 1... A protective shell 12 is fixedly installed on the upper part, and the protective shell 12 covers the second motor 11-1, worm gear 11-4 and worm 11-2. The rotating rod 11-3 on the front side is rotatably inserted through the protective shell 12 via a bearing. The protective shell 12 can protect the second motor 11-1, worm gear 11-4 and worm 11-2, and prevent external objects from accidentally contacting the worm gear 11-4 and worm 11-2 and causing the worm gear 11-4 and worm 11-2 to jam. One end of the worm 11-2 is rotatably connected to the protective shell 12 via a bearing. The second motor 11-1 is fixedly connected to the inner wall of the protective shell 12. The rotatable connection between the worm 11-2 and the protective shell 12 can effectively improve the rotational stability of the worm 11-2.

[0037] When using this invention, the concentration monitor 6 can monitor the concentration of the cleaning solution in the cleaning tank 1. When it is necessary to adjust the concentration of the cleaning solution, the amount of additive in the cleaning tank 1 can be discharged through the metering pump 8 on the additive pipe 3, thereby controlling the concentration of the cleaning solution in the cleaning tank 1. Then, the first motor 9 can be started, which drives the rotating head 10-2 to rotate. The rotating head 10-2 drives several stirring shafts 10-3 to rotate in the cleaning tank 1. At the same time, through the meshing of the fixed bevel gear 10-5 and the driven bevel gear 10-4, the driven bevel gear 10-4 can drive the stirring shaft 10-3 to rotate, providing more efficient mixing and stirring of the cleaning solution in the cleaning tank 1, so as to ensure the uniformity of the cleaning solution concentration in all parts of the cleaning tank 1. Each cleaning frame 2 is filled with electroplated etched material. After the electroplated etched material in the cleaning frame 2 located in the cleaning box 1 is cleaned, the second motor 11-1 can be started. The second motor 11-1 drives the worm gear 11-2 to rotate. By using the meshing of the worm gear 11-2 and the worm wheel 11-4, the worm wheel 11-4 can drive the front rotating rod 11-3 to rotate. Through the cooperation of the connecting rod 11-6 and the two rear rotating rods 11-3, the cleaned electroplated etched material can be moved to the outside of the cleaning box 1 along with the placed cleaning frame 2. The other cleaning frame 2 can move the uncleaned electroplated etched material into the cleaning box 1 for cleaning. This allows the electroplated etched material in the cleaning frame 2 on one side to be cleaned while the electroplated etched material in the other cleaning frame 2 can be replaced.

[0038] Compared with the prior art, the beneficial effects of this utility model are:

[0039] 1. By cooperating with the concentration monitor 6, controller 7 and metering pump 8, the concentration of cleaning solution in cleaning tank 1 can be adjusted as needed;

[0040] 2. Through the cooperation of motor 9 and high-efficiency stirring mechanism 10, the cleaning liquid in the cleaning tank 1 can be efficiently mixed and stirred to ensure the uniformity of the concentration of the cleaning liquid in the cleaning tank 1.

[0041] 3. With the cooperation of the synchronous shifting mechanism 11, the synchronous shifting control of the two cleaning frames 2 can be realized, thereby improving the cleaning effect of electroplated etched objects.

[0042] 4. By combining the reinforcing ribs 13 and rib plates 14, the structural strength of the connecting rod 11-6 can be improved, enabling the connecting rod 11-6 to have stronger load-bearing capacity.

[0043] For those skilled in the art, modifications can be made to the technical solutions described in the foregoing embodiments, and equivalent substitutions can be made to some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An electroplating etching cleaning device with adjustable cleaning solution concentration, comprising a cleaning tank (1) and a cleaning frame (2), the cleaning tank (1) is provided with cleaning frames (2) on both the inner and outer sides, the cleaning tank (1) is provided with an additive pipe (3) and an inlet pipe (4) on the left and right sides of the rear side wall, and the cleaning tank (1) is provided with a drain pipe (5). Its features are: It also includes: Concentration monitor (6), there are two concentration monitors (6), which are fixedly installed on the left and right inner side walls of the cleaning box (1) respectively. A controller (7) is fixedly installed on the front side wall of the cleaning box (1), and the controller (7) is electrically connected to the concentration monitor (6). Metering pump (8), there are two metering pumps (8), which are respectively installed on the additive pipe (3) and the liquid inlet pipe (4), and the metering pump (8) is electrically connected to the controller (7); The first motor (9) is fixedly installed at the bottom of the cleaning tank (1). The first motor (9) is electrically connected to the controller (7). The cleaning tank (1) is provided with a high-efficiency stirring mechanism (10) connected to the first motor (9) at the position below the cleaning frame (2). The cleaning tank (1) is provided with a synchronous shifting mechanism (11) connected to the two cleaning frames (2).

2. The electroplating etching cleaning device with adjustable cleaning solution concentration according to claim 1, characterized in that: The high-efficiency stirring mechanism (10) includes: A fixed cylinder (10-1) is fixedly installed on the inner bottom wall of the cleaning tank (1), and the fixed cylinder (10-1) is rotatably sleeved on the output shaft of the No. 1 motor (9) through a sealed bearing. A rotating head (10-2) is rotatably sleeved on the fixed cylinder (10-1) through a sealed bearing. The output shaft of the No. 1 motor (9) is fixedly connected to the rotating head (10-2). A stirring shaft (10-3) is provided. Several stirring shafts (10-3) are rotatably inserted into a rotating head (10-2) through sealed bearings with equal rounded corners. A driven bevel gear (10-4) is fixedly sleeved on one end of the stirring shaft (10-3). A fixed bevel gear (10-5) is fixedly sleeved on the fixed cylinder (10-1), and the fixed bevel gear (10-5) is located inside the rotating head (10-2). Several driven bevel gears (10-4) are meshed with the fixed bevel gears (10-5).

3. The electroplating etching cleaning device with adjustable cleaning solution concentration according to claim 1, characterized in that: The synchronous shifting mechanism (11) includes: The second motor (11-1) is fixedly installed on the front side wall of the cleaning tank (1). The second motor (11-1) is electrically connected to the controller (7). A worm gear (11-2) is fixedly installed on the output shaft of the second motor (11-1). Rotating rods (11-3) are rotatably connected to the left and right sides of the rear side wall and the front side wall of the cleaning tank (1) through bearings. A worm wheel (11-4) that meshes with the worm gear (11-2) is fixedly sleeved on the rotating rod (11-3) on the front side. There are two connecting frames (11-5), which are fixedly installed on the front and rear sides of the two cleaning frames (2) respectively, and the connecting frames (11-5) are abutted against the cleaning box (1). One end of each of the three rotating rods (11-3) is fixedly provided with a connecting rod (11-6). The connecting rods (11-6) on the front and rear sides are rotatably connected to the two connecting frames (11-5) through rotating shafts respectively.

4. The electroplating etching cleaning device with adjustable cleaning solution concentration according to claim 3, characterized in that: A protective shell (12) is fixedly installed on the front side wall of the cleaning tank (1), and the protective shell (12) covers the No. 2 motor (11-1), worm gear (11-4) and worm (11-2). The rotating rod (11-3) on the front side is rotated through the protective shell (12) via a bearing.

5. The electroplating etching cleaning device with adjustable cleaning solution concentration according to claim 4, characterized in that: One end of the worm gear (11-2) is rotatably connected to the protective shell (12) via a bearing, and the second motor (11-1) is fixedly connected to the inner wall of the protective shell (12).

6. The electroplating etching cleaning device with adjustable cleaning solution concentration according to claim 3, characterized in that: A reinforcing rib (13) is fixedly provided on the side wall of the connecting rod (11-6), and several reinforcing rib plates (14) connected to the connecting rod (11-6) are fixedly provided on both sides of the reinforcing rib (13).