Target material airtightness testing device and equipment

Abstract

This utility model relates to the field of target material airtightness testing technology, and discloses a target material airtightness testing device and a target material airtightness testing equipment. The target material airtightness testing device includes a target material airtightness testing platform and connecting components. The target material is placed on the target material airtightness testing platform, which is used to introduce a testing liquid between the target material and the platform. The connecting components are located circumferentially on the target material airtightness testing platform and are connected to both the platform and the target material. The connecting components are used to seal the target material airtightness testing platform and the target material. When the testing liquid is introduced between the target material and the platform, the airtightness of the target material can be tested under normal conditions, and the specific location causing poor airtightness can be seen more intuitively.

Description

Technical Field

[0001] This utility model relates to the field of target material airtightness testing technology, and in particular to a target material airtightness testing device and target material airtightness testing equipment. Background Technology

[0002] During the coating process, atoms or molecules from the target material need to be evaporated or sputtered out under a high vacuum environment and deposited on the substrate to form a thin film. If the target material is not airtight, air can enter and introduce impurity gases such as oxygen and nitrogen. These impurities may react chemically with the evaporated or sputtered target atoms to form impurity phases such as oxides and nitrides, reducing the purity and performance of the film. Simultaneously, fluctuations in vacuum level can cause instability in the atomic deposition rate during the coating process, leading to uneven film structure, defects such as pores and cracks, affecting the film's density and integrity, and ultimately reducing its mechanical and protective properties. Therefore, the airtightness of the target material needs to be checked before use.

[0003] Currently, there are some target material airtightness testing devices that require the use of sealing plates, flange plates, etc. to form a sealed space in the target material area and evacuate it, and then release helium into the sealed space and use a helium mass spectrometer to detect the helium. However, the above setup needs to be carried out in a specific environment, and it is not possible to visually see the specific location that causes poor airtightness of the target material.

[0004] Therefore, there is an urgent need for a target material airtightness testing device that can solve the problem of airtightness testing of target materials under normal conditions, and at the same time, intuitively show the specific location that causes poor airtightness of the target material. Utility Model Content

[0005] The purpose of this invention is to provide a target material airtightness testing device, which can solve the problem of airtightness testing of target materials under normal conditions, and at the same time, intuitively see the specific location that causes poor airtightness of the target material.

[0006] Based on the above concept, the technical solution adopted by this utility model is as follows:

[0007] A target material airtightness testing device is used to test the airtightness of a target material. The target material airtightness testing device includes:

[0008] A target material airtightness testing platform, wherein the target material is placed on the target material airtightness testing platform, and the target material airtightness testing platform is used to introduce the testing liquid between the target material and the target material airtightness testing platform;

[0009] A connecting component is disposed circumferentially on the target material airtightness testing platform. The connecting component is connected to both the target material airtightness testing platform and the target material, and is used to seal the target material airtightness testing platform and the target material.

[0010] As an optional solution for the target air tightness testing device, the connecting assembly includes a clamp with a groove recessed along the circumferential direction of the target, in which both the target air tightness testing platform and the target are secured.

[0011] As an optional solution for the target material airtightness testing device, the clamp is made of stainless steel.

[0012] As an optional solution for the target material airtightness testing device, the connecting assembly also includes a first seal, which is disposed on the inner side wall of the clamp.

[0013] As an optional solution for the target material airtightness testing device, the first seal is made of silicone material.

[0014] As an optional solution for the target air tightness testing device, the target air tightness testing device also includes a second sealing element, which is disposed between the target and the target air tightness testing platform.

[0015] As an optional solution for the target material airtightness testing device, the second seal is made of silicone material.

[0016] As an optional solution for the target material airtightness testing device, the target material airtightness testing platform is provided with a liquid outlet hole. The target material airtightness testing device also includes a first liquid flow pipe, which is connected to the liquid outlet hole. The test liquid can flow into or out of the target material airtightness testing platform through the first liquid flow pipe and the liquid outlet hole.

[0017] As an optional solution for the target material airtightness testing device, one liquid outlet is provided, and the liquid outlet is located at the center of the target material airtightness testing platform.

[0018] A target material airtightness testing device includes a water supply device, a main liquid flow pipe, and a target material airtightness testing device. The water supply device is connected to the main liquid flow pipe, and the main liquid flow pipe is connected to at least one target material airtightness testing platform.

[0019] The beneficial effects of this utility model are as follows:

[0020] This invention proposes a target material airtightness testing device. The target material is placed on a target material airtightness testing platform, which is used to introduce a testing liquid between the target material and the target material airtightness testing platform. A connecting component is set around the target material airtightness testing platform and is connected to both the target material airtightness testing platform and the target material. The connecting component is used to seal the target material airtightness testing platform and the target material. When the testing liquid is introduced between the target material and the target material airtightness testing platform, the testing liquid can fill the space between the target material and the target material airtightness testing platform. If the target material airtightness is poor, the testing liquid will flow out from the location causing the airtightness problem. This allows for the detection of the target material airtightness under normal conditions and also provides a more intuitive view of the specific location causing the airtightness problem. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the target material airtightness testing device provided in this embodiment of the utility model;

[0022] Figure 2 This is a schematic diagram of the target material airtightness testing device provided in this embodiment of the utility model.

[0023] In the picture:

[0024] 10. Target material airtightness testing device; 20. Target material; 30. Water supply device;

[0025] 1. Target material airtightness testing platform; 11. Liquid outlet;

[0026] 2. Connecting assembly; 21. Clamp; 22. First sealing element;

[0027] 3. Second seal; 4. First liquid flow pipe; 5. Inlet valve. Detailed Implementation

[0028] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining this utility model and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts related to this utility model are shown in the accompanying drawings, not all of them.

[0029] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0031] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0032] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0033] This embodiment provides a target material airtightness testing platform 1 for testing the airtightness of the target material 20, such as... Figure 1As shown, in this embodiment, the target airtightness testing device 10 includes a target airtightness testing platform 1 and a connecting component 2. The target 20 is disposed on the target airtightness testing platform 1. The target airtightness testing platform 1 is used to introduce the testing liquid between the target 20 and the target airtightness testing platform 1. The connecting component 2 is disposed around the target airtightness testing platform 1 and is connected to both the target airtightness testing platform 1 and the target 20. The connecting component 2 is used to seal the target airtightness testing platform 1 and the target 20, so that the target 20 and the target airtightness testing platform 1 form a testing space. When the testing liquid is introduced into the testing space... When the target 20 is between the target material 20 and the target material airtightness testing platform 1, the testing liquid can fill the testing space. If the target material 20 has poor airtightness, the testing liquid will flow out from the location causing the airtightness problem, thus enabling the airtightness of the target material 20 to be tested under normal conditions. The above setup has low requirements for the testing environment and can be performed under normal conditions without special environmental conditions. The operation is relatively simple, reducing testing costs and limitations on the testing environment. At the same time, the above setup can also make it easier to see the specific location causing the airtightness problem of the target material 20, which is convenient for subsequent targeted repair or improvement of the target material 20, improving the accuracy and effectiveness of the test.

[0034] Optionally, such as Figure 1 As shown, in this embodiment, the connecting component 2 includes a clamp 21 with a groove recessed along the circumferential direction of the target material. Both the target material airtightness testing platform 1 and the target material 20 are secured in the groove, ensuring a tight connection between them and creating a stable testing space. The groove of the clamp 21 positions the target material 20 and the testing platform, maintaining a relatively fixed position during testing and preventing displacement or shaking, thus improving the accuracy and reliability of the test. Simultaneously, the clamp 21's tightening action presses the target material 20 and the testing platform together, enhancing the sealing at the connection point and ensuring the testing space remains sealed, preventing leakage of the testing fluid and guaranteeing the accuracy of the test results. In other embodiments, the clamp 21 can be replaced with a quick-connect fitting or flange assembly, as long as it effectively connects the target material airtightness testing platform 1 and the target material 20.

[0035] Optionally, in this embodiment, the clamp 21 is made of stainless steel. Stainless steel has high strength and hardness, and the clamp 21 made of it can provide sufficient fastening force to ensure a tight connection between the target material airtightness testing platform 1 and the target material 20, effectively maintaining the airtightness of the testing space and ensuring that the testing liquid will not leak during the testing process, thereby achieving accurate airtightness testing. At the same time, stainless steel has good corrosion resistance and oxidation resistance, and can adapt to a variety of different working environments. It can maintain stable performance in humid, acidic, and alkaline environments, ensuring the normal use of the clamp 21 and thus ensuring the reliability of the testing device. In other embodiments, the clamp 21 can be made of materials such as copper alloy or aluminum alloy, as long as it can provide sufficient fastening force.

[0036] Preferably, such as Figure 1 As shown, in this embodiment, the connecting assembly 2 further includes a first sealing element 22. The first sealing element 22 is disposed on the inner wall of the clamp 21, which can further enhance the sealing effect between the target material airtightness testing platform 1 and the target material 20, making the connection between the two tighter. The presence of the first sealing element 22 can better prevent the detection fluid from leaking from the connection between the target material airtightness testing platform 1 and the target material 20. Without the first sealing element 22, relying solely on the clamp 21 to hold the target material airtightness testing platform 1 and the target material 20 in the groove may result in some tiny gaps, causing the detection fluid to seep out from these gaps, thereby interfering with the judgment of the airtightness of the target material 20 itself. The first sealing element 22 can fill these possible tiny gaps, ensuring that the detection fluid only flows out at the location where the target material 20 has an airtightness problem, thereby more accurately detecting the airtightness of the target material 20.

[0037] Optionally, in this embodiment, the first sealing element 22 is made of silicone material. Silicone material has excellent elasticity and flexibility, allowing it to tightly conform to the inner wall of the clamp 21 and the target material airtightness testing platform 1, while also tightly conforming to the inner wall of the clamp 21 and the surface of the target material 20, effectively filling tiny gaps and further enhancing the sealing effect. Even if slight displacement occurs between components due to the pressure of the testing fluid or other factors during the testing process, the silicone sealing element can maintain a good sealing state, preventing leakage of the testing fluid and ensuring the accuracy of the target material 20 airtightness testing. Silicone material generally has good resistance to various chemicals, resisting corrosion from the testing fluid and is not prone to deterioration, damage, or loss of elasticity, thus ensuring the long-term effective use of the sealing element, extending the service life of the entire testing device, and also avoiding the impact of corrosion of the first sealing element 22 on the accuracy of the test results. In other embodiments, the first sealing element 22 can also be made of materials such as rubber or plastic, as long as it can improve the sealing effect of the connecting component 2.

[0038] Preferably, such as Figure 1As shown, in this embodiment, the target airtightness testing device 10 further includes a second sealing element 3. The second sealing element 3 is disposed between the target 20 and the target airtightness testing platform 1. The second sealing element 3 can further fill any small gaps that may exist between the target 20 and the target airtightness testing platform 1. Working together with the connecting component 2, it improves the sealing performance of the testing space, ensuring that the testing fluid will not leak from the contact surface between the target 20 and the testing platform, thereby improving the accuracy and reliability of the testing results. Without the second sealing element 3, relying solely on the connecting component 2 for sealing may lead to leakage of the testing fluid due to unevenness or processing precision issues on the surfaces of the target 20 and the testing platform, affecting the judgment of the airtightness of the target 20. The second sealing element 3 can act as a buffer and isolation between the target 20 and the testing platform, reducing direct friction and collision between the two during the testing process, avoiding damage to the surface of the target 20 or the testing platform, and extending the service life of the target 20 and the target airtightness testing platform 1.

[0039] Optionally, in this embodiment, the second seal 3 is made of silicone material. Silicone has excellent elasticity and flexibility, enabling it to tightly conform to the surfaces of the target 20 and the target airtightness testing platform 1. Even if there are some unevenness or small gaps on the surfaces, the silicone seal can fill these gaps through its own deformation, thereby achieving efficient sealing, preventing leakage of the test liquid, and ensuring the accuracy of the test results. Silicone material has good corrosion resistance and can resist the erosion of the test liquid. This helps ensure that the seal maintains its performance stability even when in long-term contact with the test liquid, and will not be damaged or lose its sealing effect due to corrosion by the test liquid, thus extending the service life of the seal. In other embodiments, the second seal 3 can also be made of materials such as rubber or plastic, as long as it can improve the sealing effect between the target 20 and the target airtightness testing platform 1.

[0040] Specifically, such as Figure 1 As shown, in this embodiment, the target material airtightness testing platform 1 is provided with a liquid outlet 11, and the target material airtightness testing device 10 also includes a first liquid flow pipe 4, which is connected to the liquid outlet 11. The test liquid can flow into or out of the target material airtightness testing platform 1 through the first liquid flow pipe 4 and the liquid outlet 11. By setting the first liquid flow pipe 4 and the liquid outlet 11, the flow of the test liquid into the testing space between the target material 20 and the target material airtightness testing platform 1 can be controlled to perform airtightness testing; at the same time, after the test is completed, the test liquid can flow out of the testing space to prepare for the next test, realizing the orderly entry and exit of the test liquid and ensuring the smooth progress of the testing process.

[0041] Preferably, such as Figures 1-2As shown, in this embodiment, the target material airtightness testing device 10 also includes a liquid inlet valve 5, which is disposed on the first liquid flow pipe 4. The liquid inlet valve 5 can precisely control whether the test liquid flows in and the speed and flow rate of the flow. Before performing the target material 20 airtightness test, closing the liquid inlet valve 5 can prevent the test liquid from flowing into the test space in advance, thus preparing for the test. When preparing to perform the test, the liquid inlet valve 5 is opened, allowing the test liquid to flow into the test space between the target material 20 and the target material airtightness testing platform 1 through the first liquid flow pipe 4 and the liquid outlet 11, and the test process begins.

[0042] Optionally, such as Figure 1 As shown, in this embodiment, there is one liquid outlet 11, located at the center of the target material airtightness testing platform 1. When the test liquid is injected, it flows in from the central outlet 11, which facilitates the uniform distribution of the test liquid within the testing space between the target material 20 and the testing platform. This avoids uneven distribution of the test liquid due to the offset position of the outlet 11, which would affect the test results of the airtightness of the target material 20. In other embodiments, there may be two, three, or four outlets 11, as long as they can inject test liquid into the testing space.

[0043] like Figures 1-2 As shown, this embodiment also provides a target material airtightness testing device. The device includes a water supply device 30, a main liquid flow pipe, and at least one target material airtightness testing device 10. The water supply device 30 is connected to the main liquid flow pipe, which is connected to at least one first liquid flow pipe 4. The water supply device 30 provides water, which is then transported to the target material airtightness testing device 10 through the main liquid flow pipe and the first liquid flow pipe 4, allowing the water to be transported into the testing space between the target material 20 and the target material airtightness testing platform 1. By observing whether bubbles emerge from the target material 20 in the water, it is determined whether the target material 20 has an airtightness problem. Since the main liquid flow pipe can be connected to at least one first liquid flow pipe 4 of the target material airtightness testing platform 1, thereby connecting multiple target material airtightness testing devices 10, multiple targets 20 can be tested for airtightness simultaneously, improving testing efficiency.

[0044] Preferably, in this embodiment, the water supply device 30 includes a water pump, which is connected to the main liquid flow pipe, so that the test liquid flows into the test space between the target material 20 and the target material airtightness test platform 1 through the first liquid flow pipe 4 and the liquid outlet 11, and the airtightness of the target material 20 is tested.

[0045] For ease of understanding, combined with Figures 1-2 The working process of the target material airtightness testing equipment is described below. Specifically, the working process of the target material airtightness testing equipment includes the following steps:

[0046] S1: Place the target material 20 on top of the target material airtightness testing platform 1, and connect the target material 20 and the target material airtightness testing platform 1 with clamps 21.

[0047] S2: Turn on the water pump, open the inlet valve 5, and pressurize the hydraulic pressure at 0.1 MPa / s until it reaches 10 MPa. Then maintain the pressure for 5 minutes and check the surface of the target material 20 for any liquid leakage. If there is leakage, check the location of the leakage.

[0048] S3: Turn off the water pump and wait for the liquid to flow out of the target material airtightness testing platform 1 on its own before closing the water inlet valve.

[0049] In other embodiments, the hydraulic pressure can be increased from 0.05 MPa / s to 0.2 MPa / s to 8-12 MPa, and then held for 4-7 minutes. Exemplarily, the hydraulic pressure can also be increased to 0.05 MPa / s, 0.15 MPa / s, or 0.2 MPa / s. Exemplarily, the hydraulic pressure can also be increased to 8 MPa, 9 MPa, 11 MPa, or 12 MPa. Exemplarily, the hydraulic pressure can also be held for 4 minutes, 6 minutes, or 7 minutes.

[0050] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A target material airtightness testing device, used to test the airtightness of a target material (20), characterized in that, The target material airtightness testing device (10) includes: A target material airtightness testing platform (1) is provided, wherein the target material (20) is disposed on the target material airtightness testing platform (1), and the target material airtightness testing platform (1) is used to introduce the testing liquid between the target material (20) and the target material airtightness testing platform (1); A connecting component (2) is disposed in the circumferential direction of the target material airtightness testing platform (1). The connecting component (2) is connected to the target material airtightness testing platform (1) and the target material (20) respectively. The connecting component (2) is used to seal the target material airtightness testing platform (1) and the target material (20).

2. The target material airtightness testing device according to claim 1, characterized in that, The connecting component (2) includes a clamp (21), which has a groove recessed along the circumferential direction of the target material. The target material airtightness testing platform (1) and the target material (20) are both stuck in the groove.

3. The target material airtightness testing device according to claim 2, characterized in that, The clamp (21) is made of stainless steel.

4. The target material airtightness testing device according to claim 2, characterized in that, The connecting assembly (2) further includes a first seal (22), which is disposed on the inner sidewall of the clamp (21).

5. The target material airtightness testing device according to claim 4, characterized in that, The first seal (22) is made of silicone material.

6. The target material airtightness testing device according to any one of claims 1-5, characterized in that, The target material airtightness testing device (10) further includes a second sealing element (3), which is disposed between the target material (20) and the target material airtightness testing platform (1).

7. The target material airtightness testing device according to claim 6, characterized in that, The second seal (3) is made of silicone material.

8. The target material airtightness testing device according to any one of claims 1-5, characterized in that, The target material air tightness testing platform (1) is provided with a liquid outlet hole (11), and the target material air tightness testing device (10) further includes a first liquid flow pipe (4), which is connected to the liquid outlet hole (11). The test liquid can flow into or out of the target material air tightness testing platform (1) through the first liquid flow pipe (4) and the liquid outlet hole (11).

9. The target material airtightness testing device according to claim 8, characterized in that, One liquid outlet (11) is provided, and one liquid outlet (11) is located at the center of the target material airtightness testing platform (1).

10. A target material airtightness testing device, characterized in that, It includes a water supply device (30), a main liquid flow pipe, and at least one target material air tightness testing device (10) as described in any one of claims 1-9, wherein the water supply device (30) is connected to the main liquid flow pipe, and the main liquid flow pipe is connected to at least one of the target material air tightness testing platforms (1).

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