Silane-containing off-gas treatment system

Abstract

The utility model belongs to waste gas technical field, concretely relates to a kind of silane-containing waste gas treatment system.The silane-containing waste gas treatment system includes: the exhaust gas conveying pipe, exhaust gas combustion jar, centrifugal fan, gas-solid separator, primary efficiency plate filter connected in sequence.Silane-containing waste gas is first mixed with air in lower jar body and combusts to treat silane, and flammable and explosive gas is heated and catalytically oxidized by infrared burner in upper jar body;Silicon dioxide dust generated by silane combustion is partly left in lower jar body by orifice plate, can be regularly discharged through discharge port, and the rest can be sequentially treated by gas-solid separator and primary efficiency plate filter.The silane-containing waste gas treatment system of the utility model can improve silane treatment capacity by the multiple fresh air inlet valves arranged on the side wall of lower jar body, and the flammable and explosive gas in the entire upper jar body is heated by infrared radiation generated by infrared burner, so the treatment capacity is also improved.

Description

Technical Field

[0001] This utility model belongs to the field of waste gas technology, specifically relating to a silane-containing waste gas treatment system. Background Technology

[0002] In the semiconductor and photovoltaic manufacturing industries, silane (SiH4) is a crucial electronic gas, a methane-like compound composed of silicon and hydrogen atoms. With the rise of semiconductor technology, silane has found increasingly widespread applications in the electronics industry, with hundreds of tons of silane gas being directly used annually to manufacture a wide variety of new materials and devices. Simultaneously, silane gas also finds extensive applications in high-definition flat panel displays, high-efficiency, low-cost solar cells, and high-performance ceramic engine components.

[0003] In the production process of TOPCON solar cells, the PE-poly process uses a large amount of silane gas and hydrogen as reactants, thus generating a large amount of process waste gas containing silane and other flammable and explosive gases. Existing technologies, such as the waste gas treatment system for the Topcon cell Poly process disclosed in CN118729299A, employ multiple parallel combustion processors and silane combustion chambers to treat silane and flammable and explosive gases. However, for processes producing large volumes of exhaust gas, this method suffers from drawbacks such as a large number of combustion processors and silane combustion chambers, high cost, complex installation, and incomplete treatment of flammable and explosive gases. Utility Model Content

[0004] The purpose of this invention is to provide a silane-containing waste gas treatment system to at least solve one of the above-mentioned technical problems.

[0005] This application provides a silane-containing waste gas treatment system, comprising:

[0006] The exhaust gas delivery pipe, exhaust gas combustion tank, centrifugal fan, gas-solid separator, and primary plate filter are connected in sequence; among them

[0007] The exhaust gas combustion tank includes an upper tank and a lower tank separated by a perforated plate;

[0008] The lower tank is connected to the exhaust gas delivery pipe, nitrogen pipe, and compressed air pipe; multiple fresh air inlet valves are provided on the side wall of the lower tank, and a slag discharge port is provided at the bottom; and an air outlet connected to a centrifugal fan is provided at the top of the upper tank, and an infrared burner is provided inside.

[0009] In one embodiment of this application, the perforated plate is provided with a plurality of through holes penetrating the upper tank and the lower tank.

[0010] In one embodiment of this application, the perforation rate of the perforated plate is 70%-80%.

[0011] In one embodiment of this application, explosion relief valves are provided on the side walls of the upper tank and the lower tank.

[0012] In one embodiment of this application, the infrared burner is fixed above the center of the perforated plate.

[0013] In one embodiment of this application, a combustion observation hole is provided on the tank wall of the upper tank.

[0014] In one embodiment of this application, the primary plate filter has a filtration level of G4.

[0015] In one embodiment of this application, the number of centrifugal fans is at least two, and they are arranged in parallel.

[0016] In one embodiment of this application, a flame arrestor valve and a check valve are provided on the exhaust gas delivery pipe.

[0017] In one embodiment of this application, the connecting pipe between the centrifugal fan and the upper tank is provided with a flexible connection, a check valve, and a regulating valve.

[0018] The beneficial effects of this utility model are:

[0019] Unlike existing technologies, this utility model provides a silane-containing waste gas treatment system. This system includes: a tail gas delivery pipe, a tail gas combustion tank, a centrifugal fan, a gas-solid separator, and a primary plate filter connected in sequence; wherein the lower tank of the tail gas combustion tank is connected to the tail gas delivery pipe, a nitrogen pipe, and a compressed air pipe; multiple fresh air inlet valves are installed on the side wall of the lower tank, and a slag discharge port is installed at the bottom; and an air outlet connected to the centrifugal fan is installed at the top of the upper tank, and an infrared burner is installed inside. The silane-containing waste gas is first mixed with air in the lower tank to burn the silane. The flammable and explosive gases are heated and catalytically oxidized by the infrared burner in the upper tank; part of the silica dust generated by the silane combustion is retained in the lower tank by a perforated plate and can be periodically discharged through the slag discharge port, while the remainder can be treated sequentially by the gas-solid separator and the primary plate filter. The silane-containing waste gas treatment system of this invention can increase the silane treatment capacity by setting multiple fresh air inlet valves on the side wall of the lower tank, and also increases the treatment capacity by heating the flammable and explosive gases in the entire upper tank with infrared radiation generated by the infrared burner.

[0020] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0021] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0022] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of a preferred embodiment of the silane-containing waste gas treatment system of this utility model;

[0024] Figure 2 This is a schematic diagram of a preferred embodiment of the exhaust gas combustion tank of this utility model;

[0025] Figure 3 This is a schematic diagram of a perforated plate according to a preferred embodiment of the present invention.

[0026] In the picture:

[0027] 1. Exhaust gas delivery pipe, 11. Flame arrestor valve, 12. Check valve, 2. Exhaust gas combustion tank, 21. Orifice plate, 211. Through hole, 22. Upper tank body, 221. Air outlet, 222. Infrared burner, 222. Lower tank body, 23. Nitrogen pipe, 231. Compressed air pipe, 232. Fresh air inlet valve, 233. Slag discharge port, 234. Explosion relief valve, 24. Combustion observation hole, 25. Centrifugal fan, 31. Flexible connection, 32. Check valve, 33. Regulating valve, 4. Gas-solid separator, 5. Primary plate filter. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0029] This application provides a silane-containing waste gas treatment system, which will be described in detail below. It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of the embodiments of this application. Furthermore, the descriptions of each embodiment have their own emphasis; parts not described in detail in a certain embodiment can be referred to in the relevant descriptions of other embodiments.

[0030] See Figure 1 and Figure 2 In one embodiment, the silane-containing waste gas treatment system includes: a tail gas conveying pipe 1, a tail gas combustion tank 2, a centrifugal fan 3, a gas-solid separator 4, and a primary plate filter 5 connected in sequence; wherein the tail gas combustion tank 2 includes: an upper tank 22 and a lower tank 23 separated by a perforated plate 21; the lower tank 23 is connected to the tail gas conveying pipe 1, a nitrogen pipe 231, and a compressed air pipe 232; a plurality of fresh air inlet valves 233 are provided on the side wall of the lower tank 23, and a slag discharge port 234 is provided at the bottom; and an air outlet 221 connected to the centrifugal fan 3 is provided at the top of the upper tank 22, and an infrared burner 222 is provided inside.

[0031] In this embodiment, the silane-containing waste gas is first mixed with air in the lower tank to burn the silane. The flammable and explosive gases are then heated and catalytically oxidized by an infrared burner in the upper tank. Part of the silica dust generated from the silane combustion is retained in the lower tank by a perforated plate and can be periodically discharged through the slag discharge port. The remainder is sequentially treated by a gas-solid separator and a primary plate filter. This silane-containing waste gas treatment system increases the silane processing capacity through multiple fresh air inlet valves installed on the side wall of the lower tank. Furthermore, the infrared radiation generated by the infrared burner heats the flammable and explosive gases in the entire upper tank, further increasing the processing capacity.

[0032] In this embodiment, compressed air pipe 232 can supply air into the lower tank 23. Nitrogen pipe 231 can supply nitrogen into the tank 23, which can be used to dilute the concentration of flammable and explosive gases and to agitate the airflow in the lower tank 23, so that the silane and air are fully mixed. Fresh air inlet valve 233 can be a one-way valve that only allows air to enter and not exit, because the centrifugal fan 3 will generate negative pressure in the exhaust gas combustion tank 2, and fresh air can be supplied through fresh air inlet valve 233.

[0033] For example, in one application scenario, silane-containing waste gas may include silane, hydrogen, acetylene, etc. The exhaust gas delivery pipe 1 transports the collected silane-containing waste gas to the lower tank 23, where the silane in the waste gas first reacts with oxygen in the air. The reacted exhaust gas then enters the upper tank 22, where an infrared burner 222 heats the exhaust gas to its oxidation temperature. For example, hydrogen reacts with oxygen in the air at around 570°C, and acetylene reacts with oxygen in the air at 300°C to 400°C. Therefore, the infrared burner 222 can heat the exhaust gas to 600°C, sufficient to catalytically oxidize the flammable and explosive gases in the exhaust gas.

[0034] Furthermore, the perforated plate 21 is provided with multiple through holes 211 penetrating the upper tank 22 and the lower tank 23. The perforated plate 21 allows some silica to remain in the lower tank 23. It can be periodically removed through the slag discharge port 234.

[0035] Optionally, the perforation rate on the perforated plate 21 is 70%-80%.

[0036] Optionally, explosion relief valves 24 are provided on the side walls of the upper tank 22 and the lower tank 23. The explosion relief valves 24 are commercially available and can release pressure in the event of an explosion, thus preventing the explosion from damaging other equipment.

[0037] Furthermore, the infrared burner 222 is fixed above the center of the perforated plate 21. The infrared burner 222 can be a commercially available infrared burner. It can also be, but is not limited to, an infrared burner 222 in the prior art, such as those disclosed in patents CN219674247U and CN211119344U.

[0038] Optionally, the upper tank 22 is provided with a combustion observation hole 25 on the tank wall to observe the working status of the infrared burner 222.

[0039] In this embodiment, both the gas-solid separator 4 and the pre-filter 5 can be commercially available. The gas-solid separator 4 can be, but is not limited to, a cyclone separator, and can be used to capture dust particles with a diameter of 5 to 10 μm or larger. The pre-filter 5 can have a filtration grade of G4, which has the highest filtration efficiency and can block particles with a diameter greater than 0.5 micrometers, making it suitable for environments with extremely strict air quality requirements.

[0040] Optionally, the number of centrifugal fans 3 is at least two, and they are arranged in parallel. They can be used simultaneously, or some can work together while others are in backup.

[0041] Optionally, the exhaust gas delivery pipe 1 is equipped with a flame arrestor valve 11 and a check valve 12.

[0042] Optionally, the connecting pipe between the centrifugal fan 3 and the upper tank 22 is equipped with a flexible connection 31, a check valve 32, and a regulating valve 33.

[0043] It should be noted that all the devices (parts whose specific structures are not specified) selected in this application are general standard parts or parts known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods.

[0044] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0045] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0046] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification.

Claims

1. A silane-containing waste gas treatment system, characterized in that, include: The exhaust gas delivery pipe (1), exhaust gas combustion tank (2), centrifugal fan (3), gas-solid separator (4), and primary plate filter (5) are connected in sequence; among which The exhaust gas combustion tank (2) includes an upper tank (22) and a lower tank (23) separated by a perforated plate (21); The lower tank (23) is connected to the exhaust gas delivery pipe (1), nitrogen pipe (231), and compressed air pipe (232); the lower tank (23) is equipped with multiple fresh air inlet valves (233) on its side wall and a slag discharge port (234) at its bottom; and The top of the upper tank (22) is provided with an air outlet (221) that communicates with the centrifugal fan (3), and an infrared burner (222) is provided inside.

2. The silane-containing waste gas treatment system according to claim 1, characterized in that, The perforated plate (21) is provided with a plurality of through holes (211) penetrating the upper tank (22) and the lower tank (23).

3. The silane-containing waste gas treatment system according to claim 2, characterized in that, The perforation rate on the perforated plate (21) is 70%-80%.

4. The silane-containing waste gas treatment system according to claim 1, characterized in that, Explosion relief valves (24) are provided on the side walls of the upper tank (22) and the lower tank (23).

5. The silane-containing waste gas treatment system according to claim 1, characterized in that, The infrared burner (222) is fixed above the middle part of the perforated plate (21).

6. The silane-containing waste gas treatment system according to claim 1, characterized in that, The upper tank (22) is provided with a combustion observation hole (25) on the tank wall.

7. The silane-containing waste gas treatment system according to claim 1, characterized in that, The primary plate filter (5) has a filtration grade of G4.

8. The silane-containing waste gas treatment system according to claim 1, characterized in that, The number of centrifugal fans (3) is at least two, and they are arranged in parallel.

9. The silane-containing waste gas treatment system according to claim 1, characterized in that, The exhaust gas delivery pipe (1) is equipped with a flame arrestor valve (11) and a check valve (12).

10. The silane-containing waste gas treatment system according to claim 1, characterized in that, The centrifugal fan (3) and the upper tank (22) are connected by a flexible connection (31), a check valve (32) and a regulating valve (33).

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