Temperature-adjustable shower tray
By setting cooling and heating channels within the spray plate, combined with a liquid exchange channel, rapid temperature regulation of the spray plate is achieved, solving the problem that traditional spray plates cannot heat up or cool down quickly. This improves temperature control accuracy and uniformity, making it suitable for various processes in semiconductor manufacturing.
CN224293563UActive Publication Date: 2026-05-29SUZHOU XWC ELECTRONIC TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU XWC ELECTRONIC TECH CO LTD
- Filing Date
- 2025-06-20
- Publication Date
- 2026-05-29
Smart Images
Figure CN224293563U_ABST
Abstract
The utility model provides a kind of temperature-adjustable spray tray, including base and the spray tray body of being fixed in the bottom of base. Liquid exchange passage is equipped in base. The inside of spray tray body is equipped with temperature control passage for adjusting the temperature of spray tray. Temperature control passage includes adjacent cooling passage and heating passage. Heating passage is equipped with heat source. Liquid exchange passage is communicated with cooling passage, for guiding liquid source to flow into / out of cooling passage through liquid exchange passage, to adjust the temperature of spray tray. Compared with prior art, the utility model is equipped with adjacent cooling passage and heating passage in temperature control passage, realizes the rapid heating or rapid cooling of spray tray by double-channel cooperative temperature control mechanism. Heating passage is embedded with heat source, which can realize the rapid heating of spray tray. Cooling passage is directly connected with liquid exchange passage, and through the inflow / outflow forced circulation of liquid source, the rapid cooling of spray tray is realized.
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