Heat treatment apparatus and sheet production line

Abstract

The present disclosure relates to the field of semiconductor and photovoltaic technology, and particularly relates to a heat treatment device and a sheet production line, which solves the problem that high productivity and high uniformity of perovskite solution crystallization and growth cannot be simultaneously considered in the related art. The heat treatment device comprises a heat furnace assembly, including a plurality of first accommodation chambers, each first accommodation chamber is provided with an air inlet and an air outlet on two sides in the vertical direction, and the air inlet is located below the air outlet, and a conveying assembly is arranged in the heat furnace assembly; a plurality of heating assemblies are arranged in the heat furnace assembly, and each heating assembly corresponds to a first accommodation chamber. The heat treatment device and the sheet production line provided by the present disclosure can improve the productivity of sheet heat treatment while improving the uniformity of the film thickness on the surface of the sheet.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a heat treatment equipment and a sheet production line. Background Technology

[0002] Perovskite solar cells are a type of solar cell that uses perovskite crystals as the photosensitive material to convert solar energy into electrical energy. They offer advantages such as high efficiency and low cost. A crystallization furnace is one of the key pieces of equipment in the production of perovskite solar cells. Its main function is to promote the crystallization and growth of the perovskite solution coated on a substrate under high-temperature conditions, forming a perovskite thin film on the substrate surface. Currently, commonly used heat treatment equipment includes baking ovens, heating platforms, and tunnel furnaces. However, with increasing demands for production capacity, it is impossible to simultaneously achieve high production capacity and high uniformity in the crystallization and growth of the perovskite solution. Utility Model Content

[0003] In view of this, the present disclosure provides a heat treatment equipment and a sheet production line to solve the problem in the related art that it is impossible to simultaneously achieve high production capacity and high uniformity of perovskite solution crystallization and growth.

[0004] In a first aspect, one embodiment of this disclosure provides a heat treatment apparatus configured to heat treat a sheet material, the sheet material being supported on a carrier plate. The heat treatment apparatus includes: a furnace assembly comprising a plurality of first receiving chambers arranged and interconnected along a first direction, each first receiving chamber being configured to receive the carrier plate supporting the sheet material, wherein each first receiving chamber has an air inlet and an air outlet on both sides in a vertical direction, with the air inlet located below the air outlet, the first direction being perpendicular to the vertical direction; a conveying assembly disposed in the furnace assembly, the conveying assembly being configured to carry at least one carrier plate and drive the carrier plate to move along the first direction between the plurality of first receiving chambers; and a plurality of heating assemblies disposed in the furnace assembly, each heating assembly corresponding to one first receiving chamber.

[0005] In some embodiments, the heating assembly includes: a first heating assembly disposed on at least one side wall of a first accommodating chamber; a second heating assembly disposed in the first accommodating chamber, the second heating assembly being vertically arranged near an air inlet; and a third heating assembly disposed in the first accommodating chamber, the third heating assembly being vertically arranged near an air outlet and positioned above the second heating assembly. The first accommodating chamber has a placement area configured for placing a carrier plate. The first heating assembly, the second heating assembly, and the third heating assembly enclose an accommodating space, and the placement area is located within the accommodating space.

[0006] In some embodiments, the second heating component has a first distance in the vertical direction to the bottom wall of the first receiving chamber, and in a plurality of first receiving chambers arranged along the first direction, the first distance in one or more first receiving chambers located in the middle position is greater than the first distance in one or more first receiving chambers located at the edge position; and / or, the third heating component has a second distance in the vertical direction to the bottom wall of the first receiving chamber, and in a plurality of first receiving chambers arranged along the first direction, the second distance in one or more first receiving chambers located in the middle position is less than the second distance in one or more first receiving chambers located at the edge position.

[0007] In some embodiments, the first heating assembly includes: a plurality of first heating elements, respectively disposed on the sidewalls surrounding the first accommodating chamber; the second heating assembly includes: a first flow equalizing plate disposed in the first accommodating chamber, the first flow equalizing plate having a plurality of first air holes; second heating elements, dispersedly arranged on the first flow equalizing plate, the projection of the second heating elements onto the first flow equalizing plate in the vertical direction not overlapping or partially overlapping with the first air holes; the third heating assembly includes: a second flow equalizing plate disposed in the first accommodating chamber, the second flow equalizing plate having a plurality of second air holes; a third heating element, dispersedly arranged on the second flow equalizing plate, the projection of the third heating element onto the second flow equalizing plate in the vertical direction not overlapping or partially overlapping with the second air holes; wherein, the first accommodating chamber is correspondingly provided with the sidewalls of the first heating elements, the first flow equalizing plate and the second flow equalizing plate to form an accommodating space, there is a gap between the edge of the placement area and the sidewall of the accommodating chamber, the first air holes face the lower surface of the placement area, the second air holes face the upper surface of the placement area, and the gap is configured to allow gas to pass through and diffuse into the placement area.

[0008] In some embodiments, the system further includes: multiple sets of temperature detection components, each disposed in a heating furnace assembly, each temperature detection component corresponding to a first receiving chamber; when the carrier plate is located in a first receiving chamber, the temperature detection component is configured to detect the temperature of the carrier plate in the corresponding first receiving chamber and generate a detection signal; and a control component electrically connected to the multiple sets of temperature detection components and the multiple sets of heating components, the control component being configured to receive the detection signal from the temperature detection components and adjust the heating temperature of the heating component in the corresponding first receiving chamber according to the detection signal, so that the temperature of the carrier plate remains the same when it moves to any first receiving chamber.

[0009] In some embodiments, the conveying assembly includes: a plurality of conveyors disposed opposite to each other on both sides of the furnace assembly along a second direction perpendicular to the first direction, the conveyors extending at least partially into a first receiving chamber, the conveyors being configured to carry at least one carrier plate; and a drive member disposed in the furnace assembly, the drive member being connected to the conveyors, the drive member being configured to drive the conveyors to move such that the carrier plate carried by the conveyors can move along the first direction from one end of the plurality of first receiving chambers to the other end.

[0010] In some embodiments, the number of the plurality of first receiving chambers arranged along the first direction is a first quantity, and the conveying component can drive the carrier plate to move from one end of the plurality of first receiving chambers to the other end along the first direction at a first speed. When the number of the plurality of first receiving chambers is set to a second quantity, the conveying component can drive the carrier plate to move from one end of the plurality of first receiving chambers to the other end along the first direction at a second speed, wherein the second quantity is greater than the first quantity, and the second speed is greater than the first speed.

[0011] In some embodiments, the device further includes: an air inlet assembly disposed at an air inlet, the air inlet assembly being configured to introduce gas from the air inlet into a first receiving chamber; and an air extraction assembly disposed at an air outlet, the air extraction assembly being configured to exhaust gas diffused over the sheet from the air outlet.

[0012] In some embodiments, the assembly further includes: a feeding assembly disposed on one side of the plurality of first receiving chambers in a first direction, the feeding assembly being configured to receive an empty carrier plate and place a sheet on the carrier plate, and being configured to feed the carrier plate carrying the sheet to a furnace assembly for being carried by a conveying assembly; an unloading assembly disposed on the other side of the plurality of first receiving chambers in the first direction, the unloading assembly being configured to receive a carrier plate carrying a heat-treated sheet from the furnace assembly and unload the sheet from the carrier plate; and a transfer assembly disposed between the feeding assembly and the unloading assembly, the transfer assembly being configured to transfer the empty carrier plate after the sheet has been removed from the unloading assembly back to the feeding assembly.

[0013] In some embodiments, the furnace assembly further includes: at least one second receiving chamber disposed on one side of a plurality of first receiving chambers in a first direction, the second receiving chamber communicating with the first receiving chambers, the second receiving chamber being configured to receive a carrier plate carrying a sheet, and a conveying assembly capable of driving the carrier plate carrying the sheet into the second receiving chamber for preheating before entering the first receiving chamber for heating; and / or, at least one third receiving chamber disposed on the other side of the plurality of first receiving chambers in a first direction, the third receiving chamber communicating with the first receiving chambers, the third receiving chamber being configured to receive a carrier plate carrying a sheet, and a conveying assembly capable of driving the carrier plate carrying the sheet through the first receiving chamber for heating before entering the third receiving chamber for cooling.

[0014] Secondly, embodiments of this disclosure also provide a sheet production line, including: the heat treatment equipment described above, configured to heat treat the sheet; and a sheet transfer mechanism disposed on at least one side of the heat treatment equipment, configured to transfer untreated sheet to the heat treatment equipment and to transfer sheet after heat treatment by the heat treatment equipment away.

[0015] This disclosure provides a heat treatment apparatus and sheet production line. A conveying assembly allows multiple carrier plates to carry sheets sequentially between multiple first accommodating chambers. Heating components in each of the first accommodating chambers simultaneously heat the sheets entering different chambers for heat treatment. This allows multiple sheets to undergo heat treatment while moving between the chambers, enabling more sheets to be heat-treated within the same timeframe and increasing production capacity. Simultaneously, in the heat treatment apparatus, each first accommodating chamber has an inlet and an outlet. When a carrier plate is located in a first accommodating chamber, the inlet faces the carrier plate, and the outlet faces the sheet. Gas entering through the inlet carries heat generated by the heating components to the carrier plate, heating it. The carrier plate then transfers the heat to the sheet, promoting the crystallization and growth of perovskite solution on the sheet's surface. This method of heating the carrier plate and then transferring the heat to the sheet can improve the heating uniformity of the sheet, thereby improving the uniformity of perovskite solution crystallization and growth on the sheet. Thus, the heat treatment equipment provided in this disclosure can achieve both high production capacity and uniform thickness of the perovskite film.

[0016] In addition, the air inlet and outlet are vertically positioned on both sides of the first accommodating chamber, with the air inlet located below the air outlet. This bottom-up air intake and exhaust method avoids hot air being directly blown onto the perovskite solution, which would cause the solution to flow. This, in turn, improves the uniformity of perovskite solution crystallization and growth on the sheet. Attached Figure Description

[0017] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The diagram shown is a schematic diagram of a sheet production line provided in an embodiment of this disclosure.

[0019] Figure 2 The image shown is a top view of a heat treatment apparatus provided in an embodiment of this disclosure.

[0020] Figure 3 The image shown is a front view of a heat treatment apparatus provided in an embodiment of this disclosure.

[0021] Figure 4 The diagram shown is a schematic diagram of a heat treatment furnace in a furnace assembly provided according to an embodiment of the present disclosure.

[0022] Figure 5The image shown is a partial cross-sectional view of a heat treatment furnace provided in an embodiment of this disclosure.

[0023] Figure 6 As shown Figure 5 The image shows a partially enlarged view of section N in a heat treatment furnace.

[0024] Figure 7 The image shown is a cross-sectional view of a first accommodating chamber in a heat treatment furnace according to an embodiment of this disclosure.

[0025] Figure 8 As shown Figure 7 A partially enlarged view of the middle M portion of the first accommodating chamber in a heat treatment furnace, as shown.

[0026] Figure label:

[0027] 100. Sheet production line; 10. Heat treatment equipment; 1. Furnace assembly; 1a. Outlet; 1b. Inlet; 1c. First receiving chamber; 1d. Receiving space; 1e. Gap; 1f. Placement area; 11. Furnace; 111. Exhaust assembly; 112. Inlet assembly; 113. Temperature detection assembly; 114. Inlet / outlet; 12. Preheating furnace; 13. Cooling furnace; 2. Feeding assembly; 3. Discharging assembly; 4. Conveying assembly; 41. Conveying component; 42. Driving component; 5. Transfer assembly; 6. Heating assembly; 61. First heating assembly; 611. First heating component; 62. Two heating components; 621, first flow equalizer; 621a, first air hole; 622, second heating element; 63, third heating component; 631, second flow equalizer; 631a, second air hole; 632, third heating element; 64, third flow equalizer; 64a, third air hole; 65, fourth heating element; 66, fifth flow equalizer; 66a, fifth air hole; 67, fourth flow equalizer; 67a, fourth air hole; 20, sheet material transfer mechanism; 201, sheet material feeding mechanism; 202, sheet material unloading mechanism; 30, carrier plate; 40, sheet material; X, first direction; Y, second direction; Z, vertical direction. Detailed Implementation

[0028] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0029] This disclosure provides a heat treatment apparatus, such as... Figures 1 to 7The heat treatment equipment 10 is configured to heat treat sheet 40, which is supported on a carrier plate 30. The heat treatment equipment 10 includes a furnace assembly 1, a conveying assembly 4, and multiple sets of heating assemblies 6. The furnace assembly 1 includes multiple first receiving chambers 1c arranged and interconnected along a first direction X. Each first receiving chamber 1c is configured to house the carrier plate 30 carrying the sheet 40. Each first receiving chamber 1c has an air inlet 1b and an air outlet 1a on both sides in the vertical direction Z, with the air inlet 1b located below the air outlet 1a. The conveying assembly 4 is disposed in the furnace assembly 1 and is configured to carry at least one carrier plate 30 and drive the carrier plate 30 along the first direction X at least one of the multiple heating assemblies 6. The first receiving chamber 1c moves between the two; multiple sets of heating components 6 are disposed on the furnace assembly 1, each heating component 6 corresponding to a first receiving chamber 1c; wherein, the first receiving chamber 1c is provided with a placement area 1f, the placement area 1f is configured for placing the carrier plate 30, the air outlet 1a faces the lower surface of the placement area 1f, the air inlet 1b faces the upper surface of the placement area 1f, at least part of the heating components 6 is located between the air inlet 1b and the placement area 1f, the gas entering from the air inlet 1b can carry the heat generated by the heating components 6 to the placement area 1f and be discharged from the air outlet 1a.

[0030] It is understood that the placement area 1f can be understood as the area enclosed by the space occupied by the empty carrier plate 30 or the carrier plate 30 carrying the sheet 40 in the first accommodating chamber 1c. The position, size and shape of the placement area 1f can be matched according to the position, size and shape of the carrier plate 30 and / or the sheet 40 placed in the first accommodating chamber 1c, without specific limitations.

[0031] It should be emphasized that the direction pointed to by arrow X in the diagram is the first direction, the direction pointed to by arrow Y is the second direction, and the direction pointed to by arrow Z is the vertical direction. The first direction X, the second direction Y, and the vertical direction Z are all perpendicular to each other, and will not be emphasized separately thereafter.

[0032] It is understandable that the sheet 40 can be a substrate coated with a perovskite solution on its upper surface. When the sheet 40 is placed in the first accommodating chamber 1c for heat treatment, the perovskite solution crystallizes and grows under high temperature, thereby forming a perovskite thin film on the surface of the substrate, thus obtaining a perovskite battery.

[0033] Optionally, the carrier plate 30 used to support the sheet 40 can be a metal plate or a non-metal plate that is resistant to high temperatures and has thermal conductivity. The upper surface of the carrier plate 30 is flat to ensure the stability of the sheet 40 placed on the carrier plate 30 and to ensure the uniformity of the perovskite solution coated on the substrate.

[0034] The heat treatment apparatus 10 provided in this embodiment utilizes a conveying component 4 to allow multiple carrier plates 30 to carry sheets 40 and sequentially move between multiple first receiving chambers 1c. Heating components 6, each provided in one of the multiple first receiving chambers 1c, can simultaneously heat the sheets 40 entering different first receiving chambers 1c for heat treatment. This allows multiple sheets 40 to complete heat treatment while moving between the multiple first receiving chambers 1c, enabling more sheets 40 to be heat treated within the same time period and increasing production capacity. Meanwhile, in the heat treatment equipment 10, each first accommodating chamber 1c utilizes an inlet 1b and an outlet 1a. When the carrier plate 30 is located in a first accommodating chamber 1c, the inlet 1b faces the carrier plate 30, and the outlet 1a faces the sheet 40. This allows the gas entering from the inlet 1b to carry the heat generated by the heating component 6 to the carrier plate 30 to heat it. The carrier plate 30 then conducts the heat to the sheet 40, thereby promoting the crystallization and growth of the perovskite solution on the surface of the sheet 40. This method of heating the carrier plate 30 and then conducting the heat to the sheet 40 improves the heating uniformity of the sheet 40, thereby improving the uniformity of perovskite solution crystallization and growth on the sheet 40. Thus, the heat treatment equipment 10 provided in this disclosure can achieve both high production capacity and uniform thickness of the perovskite film.

[0035] In addition, the air inlet 1b and the air outlet 1a are arranged vertically in the Z direction on both sides of the first accommodating chamber 1c, and the air inlet 1b is located below the air outlet 1a. This bottom-up air inlet and outlet method avoids the situation where hot air is directly blown onto the perovskite solution and causes the solution to flow, thereby improving the uniformity of perovskite solution crystallization and growth on the sheet 40.

[0036] like Figures 2 to 4 The heat treatment equipment 10 includes a plurality of furnaces 11 arranged sequentially along a first direction X. Each furnace 11 is provided with a first receiving chamber 1c. Each pair of adjacent furnaces 11 has an inlet / outlet port 114 on its opposite side walls, so that the conveying assembly 4 can move the carrier plate 30 carrying the sheet 40 to the placement area 1f of different first receiving chambers 1c. In this embodiment, the conveying assembly 4 can move the carrier plate 30 carrying the sheet 40 from one end of the plurality of first receiving chambers 1c to the other end. The plurality of sheets 40 move unidirectionally along the first direction X to pass through the plurality of first receiving chambers 1c in sequence, thereby realizing that the plurality of sheets 40 complete heat treatment during the sequential movement process.

[0037] It is understood that the conveying assembly 4 includes multiple conveying elements 41 and a driving element 42. The multiple conveying elements 41 are arranged opposite each other on both sides of the furnace assembly 1 along the second direction Y. The conveying elements 41 extend at least partially into the placement area 1f of the first receiving chamber 1c to carry at least one carrier plate 30 (not shown in the figure). The driving element 42 is disposed on the furnace assembly 1 and connected to the conveying elements 41. The driving element 42 is configured to drive the conveying elements 41 to move, so that one or more carrier plates 30 carried on the conveying elements 41 move along the first direction X from one end of the multiple first receiving chambers 1c to the other end. It should be emphasized that the conveying elements 41 can be, for example, a conveyor belt group, a conveyor roller group, etc. arranged along the first direction X on the furnace assembly 1, and the driving element 42 can be a motor that drives the conveying elements 41 to drive the transmission along the first direction X. The appropriate structure can be selected according to actual needs, and will not be described in detail.

[0038] In an optional embodiment, the heat treatment apparatus 10 may further include a preheating furnace 12 and a cooling furnace 13 respectively disposed on both sides of a plurality of hot furnaces 11. The preheating furnace 12 is disposed in the first direction X before the plurality of hot furnaces 11, and the cooling furnace 13 is disposed in the first direction X after the plurality of hot furnaces 11. The preheating furnace 12 has a second receiving chamber communicating with the first receiving chamber 1c. The preheating furnace 12 is configured to preheat the sheet 40 before it enters the plurality of hot furnaces 11, so that the sheet 40 after entering the hot furnaces 11 can quickly reach the process temperature required for heat treatment. The cooling furnace 13 has a third receiving chamber communicating with the first receiving chamber 1c. The cooling furnace 13 is configured to cool the sheet 40 exiting the hot furnaces 11, so that the sheet 40 of the hot furnaces 11 can quickly return to room temperature.

[0039] It is understood that there can be one or more preheating furnaces 12. The specific structure of the preheating furnace 12 can be the same as that of the hot furnace 11. The conveying component 4 can drive the carrier plate 30 carrying the sheet 40 into the second accommodating chamber for preheating and then into the first accommodating chamber 1c for heating. The only difference between the preheating furnace 12 and the hot furnace 11 is the set heating temperature of the sheet 40. The heating temperature in the preheating furnace 12 is lower than that in the hot furnace 11. The specific structure of the preheating furnace 12 can be referred to the relevant description of the hot furnace 11, and will not be repeated here. Similarly, the number of cooling furnaces 13 can be one or more, and the specific structure of the cooling furnace 13 can be the same as that of the hot furnace 11. The conveying component 4 can drive the carrier plate 30 carrying the sheet 40 through the first accommodating chamber 1c for heating and then into the third accommodating chamber for cooling. The only difference between the cooling furnace 13 and the hot furnace 11 is that the heating component 6 is replaced with a cooling component in the cooling furnace 13. The specific structure of the cooling furnace 13 can be referred to the relevant description of the hot furnace 11, and will not be repeated here.

[0040] In an alternative embodiment, such as Figure 2 and Figure 3 The heat treatment equipment 10 may further include a feeding assembly 2, a discharging assembly 3, and a transfer assembly 5. The feeding assembly 2 is disposed on one side of a plurality of first receiving chambers 1c in a first direction X. The feeding assembly 2 is configured to receive an empty carrier plate 30 and place a sheet 40 on the carrier plate 30, and is configured to feed the carrier plate 30 carrying the sheet 40 to the furnace assembly 1 and be carried by the conveying assembly 4. The discharging assembly 3 is disposed on the other side of the plurality of first receiving chambers 1c in the first direction X. The discharging assembly 3 is configured to receive the carrier plate 30 carrying the heat-treated sheet 40 from the furnace assembly 1 and discharge the sheet 40 from the carrier plate 30. The transfer assembly 5 is disposed between the feeding assembly 2 and the discharging assembly 3. The transfer assembly 5 is configured to transfer the empty carrier plate 30 after the sheet 40 has been removed from the discharging assembly 3 back to the feeding assembly 2. By utilizing the feeding component 2, unloading component 3, and transfer component 5, the automatic circulation of the carrier plate 30 can be achieved, realizing the automation of the heat treatment equipment 10 and further improving the production capacity.

[0041] Optionally, the feeding assembly 2 and the unloading assembly 3 can be configured as lifting machines capable of carrying the carrier plate 30 and driving the carrier plate 30 to rise or fall in the vertical direction Z, i.e., a first lifting machine and a second lifting machine. The transfer assembly 5 is configured as a conveying mechanism extending in the first direction X below the heat treatment equipment 10. The first lifting machine has a first placement plate capable of moving in the vertical direction Z, and the second lifting machine has a second placement plate capable of moving in the vertical direction Z. Taking the flow of a sheet 40 as an example, the first placement plate and the second placement plate are initially located at the same horizontal plane as the inlet / outlet 114 of the first accommodating chamber 1c. An empty carrier plate 30 is placed on the first placement plate. After the unprocessed sheet 40 is placed on the carrier plate 30, the carrier plate 30 carrying the sheet 40 on the first placement plate is fed into the furnace. The sheet 40 is then heat-treated while moving through the conveying assembly 4 and then unloaded onto the second placement plate. After the second placement plate receives the carrier plate 30 carrying the processed sheet 40, the processed sheet 40 is unloaded to other processes. The second elevator lowers the second placement plate carrying the empty carrier plate 30 to the same horizontal plane as the conveying mechanism, and the empty carrier plate 30 is unloaded onto the conveying mechanism. Simultaneously, the first elevator lowers the first placement plate to the same horizontal plane as the conveying mechanism. The conveying mechanism then moves the empty carrier plate 30 along the first direction X to the position corresponding to the first placement plate and loads it onto the first placement plate. The first elevator then raises the first placement plate, which carries the empty carrier plate 30, to the same horizontal plane as the inlet / outlet 114 of the first accommodating chamber 1c, for the next loading. It should be emphasized that the specific cooperative structure of the first elevator, the second elevator, and the conveying mechanism is not described in detail.

[0042] It is understandable that, such as Figure 1The heat treatment equipment 10 can be applied to a sheet production line 100, which may be equipped with a sheet transfer mechanism 20. The sheet transfer mechanism 20 is disposed on at least one side of the heat treatment equipment 10 and is configured to transfer untreated sheet 40 to the heat treatment equipment 10 and to transfer sheet 40 after heat treatment by the heat treatment equipment 10. For example, Figure 1 The sheet material transfer mechanism 20 includes a sheet material feeding mechanism 201 and a sheet material unloading mechanism 202 respectively disposed on both sides of the heat treatment equipment 10. The sheet material feeding mechanism 201 can drive the unprocessed sheet material 40 to move in the direction indicated by the arrow to the position of the corresponding feeding component 2, so that the unprocessed sheet material 40 can be placed on the hollow carrier plate 30 in the feeding component 2. The sheet material unloading mechanism 202 can receive the processed sheet material 40 carried by the carrier plate 30 in the unloading component 3, and make the processed sheet material 40 flow to other processes in the direction indicated by the arrow. The sheet material feeding mechanism 201 and the sheet material unloading mechanism 202 can be configured as a conveyor belt, conveyor roller or other structure for conveying the carrier plate 30, which will not be described in detail.

[0043] In some embodiments, the heat treatment equipment 10 further includes multiple sets of temperature detection components 113 and a control component. The multiple sets of temperature detection components 113 are respectively disposed in the furnace assembly 1. Each temperature detection component 113 corresponds to a first accommodating chamber 1c. The temperature detection component 113 is configured to detect the temperature of the placement area 1f in the corresponding first accommodating chamber 1c and generate a detection signal. The control component is electrically connected to the multiple sets of temperature detection components 113 and the multiple sets of heating components 6. The control component is configured to receive the detection signal from the temperature detection component 113 and adjust the heating temperature of the heating component 6 in the corresponding first accommodating chamber 1c according to the detection signal, so that the temperature of the placement area 1f in any first accommodating chamber 1c remains the same. This ensures that the sheet 40 carrying the carrier plate 30 can be maintained at the temperature required by the process no matter which first accommodating chamber 1c it moves to, avoiding the temperature difference generated when the sheet 40 moves to different first accommodating chambers 1c, which would affect the uniformity of perovskite solution crystallization and growth.

[0044] Optionally, when the carrier plate 30 is located in a first receiving chamber 1c, the temperature detection component 113 can be specifically configured to detect the temperature of the carrier plate 30 or sheet 40 within the corresponding first receiving chamber 1c. In this embodiment, the temperature detection component 113 is configured to detect the temperature of the carrier plate 30 within the corresponding first receiving chamber 1c, but is not limited thereto.

[0045] It is understood that the temperature detection component 113 can be configured as a furnace 11 and extend into the first accommodating chamber 1c as a temperature sensor to detect the temperature of the carrier plate 30, so as to monitor the temperature of the sheet 40 on the carrier plate 30 in real time and adjust the heating temperature of the heating component 6 accordingly based on the actual temperature, thereby maintaining the sheet 40 on the carrier plate 30 at the temperature required by the process and ensuring the uniformity of the thickness of the perovskite film on the sheet 40 after heat treatment.

[0046] In some embodiments, the number of the plurality of first receiving chambers 1c arranged along the first direction X is a first quantity. The conveying component 4 can drive the carrier plate 30 to move from one end of the plurality of first receiving chambers 1c to the other end along the first direction X at a first speed. When the number of the plurality of first receiving chambers 1c is set to a second quantity, the conveying component 4 can drive the carrier plate 30 to move from one end of the plurality of first receiving chambers 1c to the other end along the first direction X at a second speed. The second quantity is greater than the first quantity, and the second speed is greater than the first speed, so as to meet the demand for greater production capacity. The number of first receiving chambers 1c and the speed at which the conveying component 4 drives the carrier plate 30 to move along the first direction X can be adaptively adjusted according to the actual production capacity demand and are not specifically limited.

[0047] In some embodiments, such as Figures 5 to 8 The heating assembly 6 in a furnace 11 specifically includes a first heating assembly 61, a second heating assembly 62, and a third heating assembly 63. The first heating assembly 61 is arranged on at least one side wall of the first accommodating chamber 1c. The second heating assembly 62 is arranged in the first accommodating chamber 1c and is positioned in the vertical direction Z near the air inlet 1b. The third heating assembly 63 is arranged in the first accommodating chamber 1c and is positioned in the vertical direction Z near the air outlet 1a. The third heating assembly 63 is located above the second heating assembly 62. The first heating assembly 61, the second heating assembly 62, and the third heating assembly 63 enclose an accommodating space 1d. The placement area 1f is located in the accommodating space 1d. Gas can enter the accommodating space 1d from the air inlet 1b and carry heat to the placement area 1f. After diffusing above the placement area 1f, the gas is discharged from the accommodating space 1d through the air outlet 1a. Specifically, when the carrier plate 30 moves to a first accommodating chamber 1c, the carrier plate 30 is located in the accommodating space 1d. Gas can enter the accommodating space 1d from the air inlet 1b and carry heat to the carrier plate 30. After diffusing above the sheet 40, it is discharged from the accommodating space 1d through the air outlet 1a.

[0048] Understandably, the first heating element 61 is arranged on each side wall of the first accommodating chamber 1c, so that the carrier plate 30 is surrounded by the first heating element 61, the second heating element 62, and the third heating element 63. The arrangement of the first heating element 61, the second heating element 62, and the third heating element 63 around the carrier plate 30 results in higher temperature uniformity around the carrier plate 30 carrying the sheet 40, avoiding the situation where the temperature is higher in a localized area of ​​the carrier plate 30 and lower in other areas, which would occur if heating elements 6 are only placed on one or both sides of the carrier plate 30. Furthermore, by placing the carrier plate 30 carrying the sheet 40 within the accommodating space 1d enclosed by the first heating element 61, the second heating element 62, and the third heating element 63, compared to the original method of heating the entire first accommodating chamber 1c to the heat treatment temperature and maintaining it at a constant temperature, the first heating element 61, the second heating element 62, and the third heating element 63 only need to heat the accommodating space 1d to the heat treatment temperature and maintain it at a constant temperature, thus improving the temperature rise rate.

[0049] Optionally, for the heating components 6 disposed in the plurality of first receiving chambers 1c, the positions of the heating components 6 in each of the first receiving chambers 1c can be set to be exactly the same or different. For example, the second heating component 62 has a first distance from the bottom wall of the first receiving chamber 1c in the vertical direction Z. Among the plurality of first receiving chambers 1c arranged along the first direction X, the first distance in one or more first receiving chambers 1c located in the middle position is greater than the first distance in one or more first receiving chambers 1c located at the edge position. As another example, the third heating component 63 has a second distance from the bottom wall of the first receiving chamber 1c in the vertical direction Z. Among the plurality of first receiving chambers 1c arranged along the first direction X, the second distance in one or more first receiving chambers 1c located in the middle position is less than the second distance in one or more first receiving chambers 1c located at the edge position. Considering that the heat loss of one or more accommodating chambers located in the middle position is lower than that of one or more accommodating chambers located on both sides, the distance between the second heating component 62 / third heating component 63 in the first accommodating chamber 1c located on both sides and the carrier plate 30 can be set closer, so that the sheet 40 can maintain a constant temperature when moving to different first accommodating chambers 1c, reducing the temperature difference in different first accommodating chambers 1c, thereby improving the uniformity of film thickness.

[0050] It is understandable that one or more first receiving chambers 1c located in the middle position and one or more first receiving chambers 1c located at the edge position can be understood as follows: assuming that the total number of first receiving chambers 1c arranged along the first direction X is eleven, then the sixth first receiving chamber 1c is located at the center of the eleven first receiving chambers 1c. Taking the sixth first receiving chamber 1c as the center as a reference, if only the sixth first receiving chamber 1c located at the center is selected as the first receiving chamber 1c at the center position, then the other first receiving chambers located on both sides in the first direction X, excluding the sixth first receiving chamber 1c, are... All chambers 1c are referred to as the first receiving chambers 1c at the edge positions. If the sixth first receiving chamber 1c at the center and the three first receiving chambers 1c adjacent to it on both sides (a total of three first receiving chambers 1c) are selected as the first receiving chambers 1c at the middle positions, then all other first receiving chambers 1c except these three are referred to as the first receiving chambers 1c at the edge positions. If the second to tenth first receiving chambers 1c are selected as the first receiving chambers 1c at the center positions, then the first and eleventh first receiving chambers 1c are referred to as the first receiving chambers 1c at the edge positions. It is understood that among the multiple first receiving chambers 1c arranged, the first receiving chambers 1c at the middle positions and the first receiving chambers 1c at the edge positions can be adaptively adjusted according to actual needs, without specific limitations.

[0051] like Figures 6 to 8The first heating assembly 61 includes a plurality of first heating elements 611, which are respectively disposed on the side walls surrounding the first accommodating chamber 1c; the second heating assembly 62 includes a first flow equalizing plate 621 and a second heating element 622. The first flow equalizing plate 621 is disposed in the first accommodating chamber 1c and has a plurality of first air holes 621a; the second heating element 622 is distributed on the first flow equalizing plate 621 and is oriented along the vertical direction Z in the first flow equalizing plate 621. The orthographic projection of plate 621 does not overlap with or partially overlaps with the first vent 621a; the third heating component 63 includes a second flow equalizing plate 631 and a third heating element 632. The second flow equalizing plate 631 is disposed in the first accommodating chamber 1c. The second flow equalizing plate 631 is provided with a plurality of second vents 631a. The third heating element 632 is distributed on the second flow equalizing plate 631. The orthographic projection of the third heating element 632 in the vertical direction Z of the second flow equalizing plate 631 does not overlap with or partially overlaps with the second vent 631a. The first accommodating chamber 1c is formed by the side wall of the first heating element 611, the first flow equalizing plate 621, and the second flow equalizing plate 631, which together form an accommodating space 1d. The placement area 1f is located within the accommodating space 1d. That is, when the carrier plate 30 moves to the placement area 1f within the accommodating space 1d, there is a gap 1e between the edge of the carrier plate 30 and the side wall of the accommodating chamber (as a gas flow channel for the gas after heat exchange with the carrier plate 30 to diffuse to the top of the sheet 40). The first vent 621a faces the lower surface of the placement area 1f (also facing the carrier plate 30), and the second vent 631a faces the upper surface of the placement area 1f (also facing the sheet 40). The gas entering from the inlet 1b can flow from the first vent 621a to the carrier plate 30 and diffuse to the top of the sheet 40 through the gap 1e before being discharged from the outlet 1a through the second vent 631a.

[0052] Understandably, the gas entering from the air inlet 1b can be dispersed into the accommodating space 1d through multiple first air holes 621a and carry heat to the carrier plate 30, so that the carrier plate 30 is heated more evenly; the gas diffused above the sheet 40 can be discharged from the air outlet 1a through multiple second air holes 631a, so that the hot gas distribution above the sheet 40 is more even, thereby further improving the uniformity of heating of the sheet 40 on the carrier plate 30, and enabling the hot gas to quickly and evenly fill the accommodating space 1d, so that the accommodating space 1d can quickly reach the constant temperature state required for heat treatment.

[0053] Optionally, a plurality of first air holes 621a are evenly arranged on the first flow equalizer 621. The size of the plurality of first air holes 621a and the density of their arrangement on the first flow equalizer 621 can be adaptively adjusted according to actual needs. A plurality of second air holes 631a are evenly arranged on the second flow equalizer 631. The size of the plurality of second air holes 631a and the density of their arrangement on the second flow equalizer 631 can be adaptively adjusted according to actual needs, without being specifically limited.

[0054] Optionally, the size of the first vent 621a can be the same as the size of the second vent 631a; the density of the plurality of first vents 621a arranged on the first flow equalizer 621 can be the same as the density of the plurality of second vents 631a arranged on the second flow equalizer 631; in the orthographic projection of the first flow equalizer 621 onto the second flow equalizer 631 along the vertical direction ZZ, the first vents 621a and the second vents 631a can be staggered, and can be adaptively adjusted according to actual needs without specific limitation.

[0055] In an optional embodiment, the first heating element 611, the second heating element 622 and the third heating element 632 can be radiant heating elements such as hot wires and heating rods located at corresponding positions, and can be adaptively adjusted according to actual needs.

[0056] Understandably, for the first heating element 611, the hot wires are respectively arranged on the inner sidewalls surrounding the first accommodating chamber 1c, and the hot wires on each sidewall are arranged in a wavy pattern. The hot wires arranged on multiple sidewalls are at the same height within the first accommodating chamber 1c, and the hot wires on multiple sidewalls are connected or disconnected from each other. When the carrier plate 30 is located in the first accommodating chamber 1c, the hot wires surround the periphery of the carrier plate 30. It should be emphasized that when the inlet and outlet ports 114 are arranged horizontally on opposite sidewalls of the furnace 11, the hot wires need to be arranged to avoid the inlet and outlet ports 114 in order to facilitate the entry and exit of the carrier plate 30. This will not be described in detail.

[0057] In some embodiments, each furnace 11 further includes an air inlet assembly 112 and an air extraction assembly 111. The air inlet assembly 112 is disposed at an air inlet 1b and is configured to introduce gas from the air inlet 1b into a first receiving chamber 1c. The air extraction assembly 111 is disposed at an air outlet 1a and is configured to exhaust gas diffused above the placement area 1f from the air outlet 1a.

[0058] During operation, the air intake component 112 and the air extraction component 111 enable the gas in the first accommodating chamber 1c to move from bottom to top. The gas entering from the air intake port 1b carries the heat from the heating component 6 and exchanges heat with the carrier plate 30 before being discharged from the air outlet 1a, thus completing one gas cycle. Multiple gas cycles enable the carrier plate 30 and its surroundings to quickly reach a constant temperature and maintain it at a constant temperature, thereby improving the temperature uniformity of the sheet 40 and thus improving the uniformity of perovskite solution crystallization and growth.

[0059] Optionally, the air intake assembly 112 may include an air intake device connected to the air intake port 1b, and the air extraction assembly 111 may include an air extraction device connected to the air outlet 1a. The air intake device and the air extraction device may be, for example, an air pump, a fan, etc., and can be adapted to actual needs, without further details.

[0060] In some optional embodiments, each furnace 11's first accommodating chamber 1c may further include a third flow equalizing plate 64 and a fourth heating element 65. The third flow equalizing plate 64 separates the first flow equalizing plate 621 and the air inlet 1b. The third flow equalizing plate 64 is provided with a plurality of uniformly distributed third air holes 64a. The fourth heating element 65 is disposed on the third flow equalizing plate 64 and does not interfere with the third air holes 64a. Further, a fourth flow equalizing plate 67 may be provided between the third flow equalizing plate 64 and the first flow equalizing plate 621. The fourth flow equalizing plate 67 is provided with a plurality of uniformly distributed fourth air holes 67a. In the vertical direction Z of the fourth flow equalizing plate 67 projected onto the first flow equalizing plate 621 and the third flow equalizing plate 64 respectively, the fourth air holes 67a are staggered with the first air holes 621a and staggered with the third air holes 64a. The staggered arrangement of the air holes and the heating element 6 further improves the uniform flow effect and temperature rise rate of the gas entering from the air inlet 1b.

[0061] Optionally, each furnace 11 may further include a fifth flow equalizer 66 in its first accommodating chamber 1c. The fifth flow equalizer 66 is disposed between the second flow equalizer 631 and the gas outlet 1a. The fifth flow equalizer 66 is provided with a plurality of uniformly distributed fifth gas holes 66a. In the vertical Z-direction orthogonal projection of the fifth flow equalizer 66 onto the second flow equalizer 631, the fifth gas holes 66a and the second gas holes 631a are staggered to improve the uniformity and stability of the gas in the accommodating space 1d.

[0062] This disclosure also provides a sheet production line, such as... Figure 1 The sheet production line 100 includes a heat treatment device 10 and a sheet transfer mechanism 20. The heat treatment device 10 is configured to heat treat the sheet 40. The sheet transfer mechanism 20 is disposed on at least one side of the heat treatment device 10 and is configured to transfer the untreated sheet 40 to the heat treatment device 10 and to transfer the heat-treated sheet 40 away.

[0063] Optionally, the heat treatment equipment 10, the sheet transfer mechanism 20, and their cooperation can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0064] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0065] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0066] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0067] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0068] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0069] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A heat treatment apparatus, characterized in that, Configured to heat treat a sheet material supported on a carrier plate, the heat treatment apparatus includes: A furnace assembly includes a plurality of first receiving chambers arranged and interconnected along a first direction, each first receiving chamber being configured to receive a carrier plate carrying the sheet material, wherein each first receiving chamber has an air inlet and an air outlet on both sides in a vertical direction, and the air inlet is located below the air outlet, and the first direction is perpendicular to the vertical direction. A conveying assembly is disposed in the furnace assembly, the conveying assembly being configured to carry at least one of the carrier plates and drive the carrier plates to move along the first direction between a plurality of the first receiving chambers; Multiple heating components are disposed in the furnace assembly, and each heating component corresponds to a first accommodating chamber.

2. The heat treatment equipment according to claim 1, characterized in that, The heating component includes: A first heating component is disposed on at least one side wall of the first accommodating chamber; The second heating component is disposed in the first accommodating chamber, and the second heating component is arranged vertically near the air inlet; A third heating component is disposed in the first accommodating chamber. The third heating component is arranged vertically near the air outlet and is located above the second heating component. The first accommodating chamber has a placement area configured for placing the carrier plate. The first heating component, the second heating component, and the third heating component enclose an accommodating space, and the placement area is located in the accommodating space.

3. The heat treatment equipment according to claim 2, characterized in that, The second heating component has a first distance in the vertical direction to the bottom wall of the first receiving chamber. Among the plurality of first receiving chambers arranged along the first direction, the first distance in one or more first receiving chambers located in the middle position is greater than the first distance in one or more first receiving chambers located at the edge position. And / or, The third heating component has a second distance in the vertical direction to the bottom wall of the first receiving chamber. Among the plurality of first receiving chambers arranged along the first direction, the second distance in one or more first receiving chambers located in the middle position is smaller than the second distance in one or more first receiving chambers located at the edge position.

4. The heat treatment equipment according to claim 2, characterized in that, The first heating component includes: Multiple first heating elements are respectively disposed on the side walls around the first accommodating chamber; The second heating component includes: A first flow equalizer is disposed in the first accommodating chamber, and the first flow equalizer is provided with a plurality of first air holes; The second heating element is distributed on the first flow equalization plate, and the projection of the second heating element in the vertical direction onto the first flow equalization plate does not overlap with or partially overlaps with the first air hole. The third heating component includes: A second flow equalizer is disposed in the first accommodating chamber, and the second flow equalizer is provided with a plurality of second air holes; The third heating element is distributed on the second flow equalization plate, and the vertical projection of the third heating element onto the second flow equalization plate does not overlap or partially overlaps with the second air hole. The first accommodating chamber is formed by the side wall of the first heating element, the first flow equalizing plate, and the second flow equalizing plate. There is a gap between the edge of the placement area and the side wall of the first accommodating chamber. The first air hole faces the lower surface of the placement area, and the second air hole faces the upper surface of the placement area. The gap is configured to allow gas to pass through and diffuse into the placement area.

5. The heat treatment equipment according to claim 1, characterized in that, Also includes: Multiple temperature detection components are respectively disposed in the furnace assembly. Each temperature detection component corresponds to a first accommodating chamber. When the carrier plate is located in a first accommodating chamber, the temperature detection component is configured to detect the temperature of the carrier plate in the corresponding first accommodating chamber and generate a detection signal. A control component is electrically connected to multiple sets of temperature detection components and multiple sets of heating components. The control component is configured to receive detection signals from the temperature detection components and adjust the heating temperature of the heating components in the corresponding first accommodating chambers according to the detection signals, so that the temperature of the carrier plate remains the same when it moves to any of the first accommodating chambers.

6. The heat treatment equipment according to claim 1, characterized in that, The transmission component includes: Multiple conveyors are disposed opposite each other on both sides of the furnace assembly along a second direction perpendicular to the first direction. The conveyors extend at least partially into the first receiving chamber and are configured to carry at least one of the carrier plates. A drive unit, disposed in the furnace assembly, is connected to the conveyor and is configured to drive the conveyor to move such that the carrier plate carried by the conveyor can move along the first direction from one end of the plurality of first receiving chambers to the other end.

7. The heat treatment equipment according to claim 6, characterized in that, The number of the plurality of first receiving chambers arranged along the first direction is a first quantity. The conveying component can drive the carrier plate to move from one end of the plurality of first receiving chambers to the other end along the first direction at a first speed. When the number of the plurality of first receiving chambers is set to a second quantity, the conveying component can drive the carrier plate to move from one end of the plurality of first receiving chambers to the other end along the first direction at a second speed. The second quantity is greater than the first quantity, and the second speed is greater than the first speed.

8. The heat treatment equipment according to any one of claims 1-7, characterized in that, Also includes: An air intake assembly is disposed at the air intake port, and the air intake assembly is configured to introduce gas from the air intake port into the first accommodating chamber; An extraction assembly is disposed at the air outlet, the extraction assembly being configured to exhaust gas diffused over the sheet from the air outlet.

9. The heat treatment equipment according to any one of claims 1-7, characterized in that, Also includes: A feeding assembly is disposed on one side of a plurality of first receiving chambers in the first direction. The feeding assembly is configured to receive an empty carrier plate and place the sheet on the carrier plate, and is configured to feed the carrier plate carrying the sheet to the furnace assembly and be carried by the conveying assembly. A feeding assembly is disposed on the other side of the plurality of first receiving chambers in the first direction, the feeding assembly being configured to receive the carrier plate carrying the heat-treated sheet from the hot furnace assembly and to feed the sheet from the carrier plate; A transfer component is disposed between the feeding component and the unloading component, the transfer component being configured to transfer the empty carrier plate after the sheet has been removed from the unloading component back to the feeding component.

10. The heat treatment equipment according to any one of claims 1-7, characterized in that, The furnace assembly also includes: At least one second receiving chamber is disposed on one side of a plurality of first receiving chambers in the first direction. The second receiving chamber communicates with the first receiving chamber. The second receiving chamber is configured to receive the carrier plate carrying the sheet. The conveying assembly is capable of driving the carrier plate carrying the sheet into the second receiving chamber for preheating and then into the first receiving chamber for heating. And / or, At least one third receiving chamber is disposed on the other side of the plurality of first receiving chambers in the first direction. The third receiving chamber is in communication with the first receiving chamber. The third receiving chamber is configured to receive the carrier plate carrying the sheet. The conveying assembly is capable of driving the carrier plate carrying the sheet to be heated in the first receiving chamber and then entering the third receiving chamber for cooling.

11. A sheet production line, characterized in that, include: The heat treatment apparatus according to any one of claims 1 to 10, wherein the heat treatment apparatus is configured to perform heat treatment on a sheet; A sheet transfer mechanism is disposed on at least one side of the heat treatment equipment. The sheet transfer mechanism is configured to transfer the untreated sheet to the heat treatment equipment and to transfer the heat-treated sheet away.

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