A metal basket for storing silicon wafers

Abstract

The utility model provides a kind of metal flower basket of storage silicon wafer, it includes first side plate, second side plate, first slot plate, second slot plate, bottom plate and cushion block, the bottom plate is set in the lower portion of flower basket frame inside and is connected respectively with the first side plate and second side plate and forms a pocket structure, the bottom plate is also provided with the slot position of placing silicon wafer corresponding with the first slot plate and second slot plate, the cushion block is strip-shaped and set in the bottom of the first side plate, when the cushion block elevates the first side plate when flower basket is horizontally placed, the bottom surface of flower basket and horizontal plane form an acute angle included angle.The utility model has the advantages of simple structure, ingenious design, can be inverted to the same direction, avoid silicon wafer scratch etc.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, specifically to a metal basket for storing silicon wafers. Background Technology

[0002] In the semiconductor industry, silicon wafers are the fundamental material for integrated circuit manufacturing, and their quality and integrity are crucial to the performance of the final product. To ensure the safety of silicon wafers during handling, transportation, and storage, specially designed baskets are typically used to carry them.

[0003] However, as Figure 1 The existing metal flower basket shown has design flaws. While its size is the same as a regular flower basket, it only has 13 slots, compared to 25 in a regular basket. This results in large gaps between the slots, causing significant misalignment when silicon wafers are manually transferred from a regular basket to these slots using a suction pen. The wafers may even come into contact with each other. Since silicon wafers are very fragile and expensive, even slight contact can cause irreparable scratches, leading to economic losses.

[0004] Therefore, it is necessary to provide a new technical solution. Utility Model Content

[0005] To address the technical problems existing in the prior art, this utility model discloses a metal basket for storing silicon wafers, the specific technical solution of which is as follows:

[0006] This utility model provides a metal basket for storing silicon wafers, which includes a first side plate, a second side plate, a first slot plate, a second slot plate, and a pad.

[0007] The first side plate and the second side plate are arranged opposite to each other, and the first groove plate and the second groove plate are arranged opposite to each other. The first side plate, the second side plate, the first groove plate, and the second groove plate are connected in pairs to form the frame of the flower basket.

[0008] The pad is a strip-shaped object set at the bottom of the first side plate. When the flower basket is placed horizontally, the pad lifts the first side plate, and the bottom surface of the flower basket and the horizontal plane form an acute angle. The tops of the silicon wafers in the flower basket all tilt towards the second side plate.

[0009] Furthermore, the pad and the bottom of the first side plate are detachably connected.

[0010] Furthermore, the pad and the first side plate are provided with corresponding threaded holes, and the pad is connected and fixed to the first side plate by screws.

[0011] Furthermore, the cross-section of the pad is trapezoidal, the first trapezoidal side of the pad contacts and is completely fitted to the bottom of the first side plate, and the second trapezoidal side of the pad contacts and is completely fitted to the horizontal plane.

[0012] Furthermore, the cross-section of the pad is a right trapezoid, the first trapezoidal side of the pad is a right-angled side, the second trapezoidal side of the pad is an inclined side, the right-angled side of the pad is in contact with the bottom of the first side plate, the length and width of the right-angled side of the pad are the same as the length and width of the bottom of the first side plate, and the inclined side of the pad is in contact with the horizontal surface.

[0013] Furthermore, the angle formed between the bottom of the flower basket and the horizontal plane is 3°-4°.

[0014] Furthermore, it also includes a base plate, which is disposed on the lower inner side of the basket frame and is connected to the first side plate and the second side plate to form a pocket-shaped structure. The base plate is also provided with slots for placing silicon wafers corresponding to the first slot plate and the second slot plate. The bottom of the first side plate protrudes from the base plate, the first slot plate and the second slot plate.

[0015] Furthermore, the pad is made of the same metal as the metal flower basket.

[0016] This utility model has the following beneficial effects:

[0017] 1. The metal flower basket for storing silicon wafers provided by this utility model adopts a detachable pad structure, which is simple and convenient, and can be manufactured and modified without affecting production efficiency.

[0018] 2. The metal basket for storing silicon wafers provided by this utility model uses pads to raise one side of the basket, so that the silicon wafers in the metal basket are uniformly tilted to one side, and there will be no more tilting to one side. This reduces the probability of scratching the silicon wafers when taking them out and putting them in, and avoids the economic losses caused by scratched silicon wafers.

[0019] 3. The metal flower basket for storing silicon wafers provided by this utility model has a pad in the shape of a right-angled trapezoid, wherein the right-angled side is connected to the bottom of the first side plate, and the shape of the right-angled side is the same as the shape of the bottom of the first side plate, which facilitates the fixing of the pad to the first side plate. The inclined side is in contact with the horizontal workbench, increasing the contact area and ensuring the stability of the flower basket when placed horizontally.

[0020] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a metal basket for storing silicon wafers in the prior art.

[0023] Figure 2 This is a schematic diagram of the structure of the metal basket for storing silicon wafers provided in this embodiment of the present invention.

[0024] Figure 3 This is a cross-sectional view of the metal basket for storing silicon wafers provided in this embodiment of the present invention.

[0025] Figure 4 This is a cross-sectional view of the metal basket for storing silicon wafers provided in this embodiment of the present invention.

[0026] The attached figures are labeled as follows: 1-first side plate, 2-second side plate, 3-first groove plate, 4-second groove plate, 5-bottom plate, and 6-pad block. Detailed Implementation

[0027] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0028] In the description of this utility model, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0029] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] This utility model discloses a metal basket for storing silicon wafers, referenced... Figures 2 to 4 The basket includes a first side plate 1, a second side plate 2, a first slotted plate 3, a second slotted plate 4, a base plate 5, and a pad 6. The first side plate 1 and the second side plate 2 are positioned opposite each other, as are the first slotted plate 3 and the second slotted plate 4. The first side plate 1, the second side plate 2, the first slotted plate 3, and the second slotted plate 4 are connected in pairs to form the frame of the basket. The base plate 5 is located on the lower inner side of the basket frame and is connected to both the first side plate 1 and the second side plate 2 to form a pocket-like structure. The base plate 5 also has slots for placing silicon wafers, corresponding to the slotted plates 3 and 4. The pad 6 is a strip-shaped component located at the bottom of the first side plate 1. When the basket is placed horizontally, the pad 6 raises the first side plate 1, forming an acute angle between the bottom surface of the basket and the horizontal plane. The tops of the silicon wafers in the basket all face towards the second side plate 2. This horizontal plane is typically the work surface on which the basket is placed.

[0031] On the other hand, new pads can also be added to the bottom of the second side panel, but the height of the new pads should be less than that of pad 6 to ensure that the bottom of the flower basket and the horizontal plane maintain an acute angle.

[0032] In one embodiment, the pad 6 and the bottom of the first side plate 1 are detachably connected. Specifically, the pad 6 and the first side plate 1 are provided with corresponding threaded holes, and the pad 6 is connected and fixed to the first side plate 1 by screws. This facilitates the assembly and disassembly of the pad 6.

[0033] In one embodiment, the cross-section of the pad 6 is trapezoidal. The first trapezoidal side of the pad 6 contacts and fully fits the bottom of the first side plate 1, and the second trapezoidal side of the pad 6 contacts and fully fits the horizontal plane. Specifically, the cross-section of the pad 6 is a right-angled trapezoid. The first trapezoidal side of the pad 6 is a right-angled side, and the second trapezoidal side of the pad 6 is an inclined side. The right-angled side of the pad 6 contacts and fits the bottom of the first side plate 1, and the inclined side of the pad 6 contacts and fits the horizontal plane. The pad 6 is set to a trapezoidal or right-angled trapezoidal shape for ease of manufacturing. It can be understood that the pad 6 can also be an irregular quadrilateral structure. For example, the top surface of the pad 6 contacts and fits the bottom surface of the first side plate, the bottom surface of the pad 6 contacts and fits the horizontal plane, and the other two sides of the pad 6 are V-shaped, narrower at the top and wider at the bottom, thus better stabilizing the flower basket on the horizontal plane.

[0034] The length and width of the right-angled side of the pad 6 are the same as the length and width of the bottom of the first side plate 1. This structure facilitates the connection and fixation of the pad 6 to the first side plate 1, and increases the contact area to ensure the flower basket is placed stably on a horizontal surface. Furthermore, the threaded hole on the pad 6 is perpendicular to the bottom of the first side plate 1 from the second trapezoidal side, and a groove is provided on the second trapezoidal side. When a screw is screwed into the threaded hole from the second trapezoidal side, its head falls into the groove, without affecting the contact between the second trapezoidal side and the horizontal surface.

[0035] Furthermore, the angle between the bottom of the flower basket and the horizontal plane is 3°-4°. This not only ensures a sufficient tilt angle but also does not affect the stability of the flower basket.

[0036] In one embodiment, the bottom of the first side plate 1 protrudes from the bottom plate 5, the first groove plate 3, and the second groove plate 4.

[0037] The pad 6 is made of the same metal as the metal flower basket to prevent other materials from rubbing against the silicon wafer and generating particles, which would affect the quality of the silicon wafer.

[0038] The working principle of this utility model is as follows: a pad block 6 is set on the bottom plate 5 of the first side plate 1 to raise the side where the first side plate 1 is located, causing the metal basket to tilt, so that the silicon wafers in the basket all fall in the same direction.

[0039] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0040] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications and variations to the above embodiments within the scope of the present invention.

Claims

1. A metal basket for storing silicon wafers, characterized in that, It includes a first side plate, a second side plate, a first groove plate, a second groove plate, and a pad. The first side plate and the second side plate are arranged opposite to each other, and the first groove plate and the second groove plate are arranged opposite to each other. The first side plate, the second side plate, the first groove plate, and the second groove plate are connected in pairs to form the frame of the flower basket. The pad is a strip-shaped object set at the bottom of the first side plate. When the flower basket is placed horizontally, the pad lifts the first side plate, and the bottom surface of the flower basket and the horizontal plane form an acute angle. The tops of the silicon wafers in the flower basket all tilt towards the second side plate.

2. The metal basket for storing silicon wafers according to claim 1, characterized in that, The pad and the bottom of the first side plate are detachably connected.

3. The metal basket for storing silicon wafers according to claim 2, characterized in that, The pad and the first side plate are provided with corresponding threaded holes, and the pad is connected and fixed to the first side plate by screws.

4. The metal basket for storing silicon wafers according to claim 1, characterized in that, The cross-section of the pad is trapezoidal. The first trapezoidal side of the pad contacts and is completely fitted to the bottom of the first side plate, and the second trapezoidal side of the pad contacts and is completely fitted to the horizontal plane.

5. The metal basket for storing silicon wafers according to claim 4, characterized in that, The cross-section of the pad is a right trapezoid. The first trapezoidal side of the pad is a right-angled side, and the second trapezoidal side of the pad is an inclined side. The right-angled side of the pad is in contact with the bottom of the first side plate. The length and width of the right-angled side of the pad are the same as the length and width of the bottom of the first side plate. The inclined side of the pad is in contact with the horizontal surface.

6. The metal basket for storing silicon wafers according to claim 1, characterized in that, The angle between the bottom of the flower basket and the horizontal plane is 3°-4°.

7. The metal basket for storing silicon wafers according to claim 1, characterized in that, It also includes a base plate, which is disposed on the lower inner side of the basket frame and connected to the first side plate and the second side plate to form a pocket-shaped structure. The base plate is also provided with slots for placing silicon wafers corresponding to the first and second slot plates. The bottom of the first side plate protrudes from the bottom plate, the first groove plate, and the second groove plate.

8. The metal basket for storing silicon wafers according to claim 1, characterized in that, The pad is made of the same metal as the metal flower basket.

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