A sampling device for single crystal silicon chip manufacturing

Abstract

The utility model relates to monocrystalline silicon chip manufacturing technical field, and disclose a kind of for monocrystalline silicon chip manufacturing sampling inspection device, including processing platform and support, the support fixedly connected at the top of processing platform, the top inner wall of the support is fixedly connected with controller, the bottom of the controller is electrically connected with detection probe.The utility model provides the output shaft of motor drives bidirectional screw rod to rotate in the cavity of processing platform inner wall, since the thread rotation direction of two sections of bidirectional screw rod is opposite, the two sliders of thread connection on its rod wall will slide in bar-shaped mouth in opposite direction when screw rod rotates, slider moves by link to drive clamping plate, the guide rod of clamping plate side wall slides in the guide sliding groove of processing platform bar-shaped mouth inner wall, ensure that clamping plate moves stably, until two clamping plates respectively adhere on the chip on the both sides of needle pin plugboard, the friction between the chip is increased by the antiskid rubber pad of clamping plate side wall, prevent chip from sliding in detection process.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon chip manufacturing technology, and in particular to a sampling inspection device for monocrystalline silicon chip manufacturing. Background Technology

[0002] Monocrystalline silicon chips are semiconductor chips made from monocrystalline silicon materials. They are the core carriers of integrated circuits (ICs) and are widely used in fields such as computers, consumer electronics, communications, automotive electronics, and aerospace. Their performance and quality directly affect the functionality, reliability, and energy efficiency of electronic devices.

[0003] In the existing technology, in order to ensure the quality of chip manufacturing, it is necessary to conduct random inspections on chips in the same batch. During the inspection process, various tests are required to check the chip's external tube damage, power consumption, stability, and other performance aspects. The chips need to be quickly and efficiently disassembled and assembled to the inspection point, which makes it difficult to ensure that the chips maintain stable connection during the inspection process, thus affecting the inspection quality. Utility Model Content

[0004] The purpose of this invention is to solve the problem in the prior art that in order to ensure the quality of chip manufacturing, it is necessary to conduct random inspections of chips in the same batch. During the inspection process, various tests are required on the chip's outer tube damage, power consumption, stability, and other performance aspects. The chips need to be quickly and efficiently disassembled and assembled to the inspection point, but it is difficult to ensure that the chips maintain stable connection during the inspection process, which affects the inspection quality. Therefore, this invention proposes a random inspection device for the manufacturing of single-crystal silicon chips.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A sampling inspection device for manufacturing single-crystal silicon chips includes a processing table and a support. The support is fixedly connected to the top of the processing table. A controller is fixedly connected to the inner wall of the top of the support. A detection probe is electrically connected to the bottom of the controller. A groove is formed in the inner wall of the top of the processing table. A pin insertion plate is provided in the inner wall of the groove. A cavity is formed in the inner wall of the top of the processing table. A bidirectional lead screw is rotatably connected to the inner wall of the cavity. A motor is fixedly connected to the side wall of the processing table. The output shaft of the motor is fixedly connected to the end of the bidirectional lead screw. Two sliders are threadedly connected to the rod wall of the bidirectional lead screw. A strip-shaped opening is formed in the inner wall of the processing table above the cavity. The tops of the two sliders are respectively fixedly connected to connecting rods. The tops of the connecting rods pass through the strip-shaped opening and are fixedly connected to clamps. The clamps extend to both sides of the pin insertion plate.

[0007] Preferably, the connection between the controller and the bracket is also threaded with a reinforcing plate.

[0008] Preferably, an anti-slip rubber pad is fixedly connected to the side wall of the clamp.

[0009] Preferably, a handle is provided above the clamping plate, a threaded connecting rod is fixedly connected to the bottom of the handle, a threaded hole is provided on the inner wall of the top of the clamping plate, and the threaded connecting rod is threadedly connected to the inner wall of the threaded hole.

[0010] Preferably, a housing is movably fitted onto the handle's rod wall, a connecting frame is fixedly connected to the side wall of the housing, an LED lighting panel is fixedly connected to the end of the connecting frame away from the housing, a threaded rotating rod is threadedly connected to the inner wall of the housing, a pressure plate is fixedly connected to the end of the threaded rotating rod located inside the housing, and the pressure plate is pressed tightly onto the handle's rod wall.

[0011] Preferably, a guide rod is fixedly connected to the side wall of the clamping plate, and a guide groove is provided on the inner wall of the processing table located at the slot, with the end of the guide rod slidably disposed on the inner wall of the guide groove.

[0012] Compared with the prior art, this utility model provides a sampling inspection device for the manufacture of single-crystal silicon chips, which has the following beneficial effects:

[0013] 1. This sampling inspection device for monocrystalline silicon chip manufacturing drives a bidirectional lead screw to rotate in the cavity inside the processing table via the output shaft of a motor. Since the two threads of the bidirectional lead screw rotate in opposite directions, the two sliders connected by threads on the rod wall slide in opposite directions within the slot when the lead screw rotates. The sliders drive the clamping plates to move via connecting rods. The guide rods on the side walls of the clamping plates slide within the guide grooves on the inner wall of the slot of the processing table, ensuring that the clamping plates move smoothly until the two clamping plates are respectively attached to the chips on both sides of the pin insertion plate. The anti-slip rubber pads on the side walls of the clamping plates increase the friction between the chips and prevent the chips from sliding during the inspection process.

[0014] 2. This sampling inspection device for monocrystalline silicon chip manufacturing controls the detection probe to start working through the controller. The detection probe performs various performance tests on the chip, and the test data is transmitted to the controller in real time for analysis and processing. The reinforcing plate at the connection between the controller and the bracket enhances the stability of the controller installation and ensures the reliable operation of the inspection work.

[0015] 3. This sampling inspection device for monocrystalline silicon chip manufacturing uses a threaded rod on the inner wall of the housing to loosen the pressure plate from pressing against the handle rod wall, adjusting the position of the LED lighting board to illuminate the chip inspection area and provide sufficient lighting for the inspection work. After adjusting the position, the threaded rod is rotated again to press the pressure plate against the handle, fixing the position of the LED lighting board and ensuring stable lighting. After the inspection is completed, the motor is started in reverse to loosen the clamping plate, allowing the inspected chip to be removed, completing one sampling inspection operation. The guide rod can improve the stability of the clamping plate movement. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a sampling inspection device for manufacturing single-crystal silicon chips according to the present invention.

[0017] Figure 2 for Figure 1 Enlarged structural diagram of part A in the middle section;

[0018] Figure 3 for Figure 2 Three-dimensional view of the guide rod structure.

[0019] In the diagram: 1. Processing table, 2. Support, 3. Controller, 4. Detection probe, 5. Reinforcing plate, 6. Pin insertion plate, 7. Two-way lead screw, 8. Motor, 9. Slider, 10. Connecting rod, 11. Clamping plate, 12. Anti-slip rubber pad, 13. Handle, 14. Threaded connecting rod, 15. Housing, 16. Connecting frame, 17. LED lighting board, 18. Threaded rotating rod, 19. Pressure plate, 20. Guide rod. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0021] Reference Figure 1-3 A sampling inspection device for manufacturing single-crystal silicon chips includes a processing table 1 and a support 2. The support 2 is fixedly connected to the top of the processing table 1. A controller 3 is fixedly connected to the inner wall of the top of the support 2. A detection probe 4 is electrically connected to the bottom of the controller 3. A groove is formed in the inner wall of the top of the processing table 1. A pin insertion plate 6 is provided in the inner wall of the groove. A cavity is formed in the inner wall of the top of the processing table 1. A bidirectional lead screw 7 is rotatably connected to the inner wall of the cavity. A motor 8 is fixedly connected to the side wall of the processing table 1. The output shaft of the motor 8 is fixedly connected to the end of the bidirectional lead screw 7. Two sliders 9 are threadedly connected to the rod wall of the bidirectional lead screw 7. A strip-shaped opening is formed in the inner wall of the processing table 1 above the cavity. The tops of the two sliders 9 are respectively fixedly connected to connecting rods 10. The tops of the connecting rods 10 pass through the strip-shaped opening and are fixedly connected to clamping plates 11. The clamping plates 11 extend to both sides of the pin insertion plate 6.

[0022] The connection between the controller 3 and the bracket 2 is threaded with a reinforcing plate 5, and an anti-slip rubber pad 12 is fixedly connected to the side wall of the clamp 11.

[0023] When performing random inspection of single-crystal silicon chips, the chip to be inspected is first placed on the pin insertion plate 6. The pin insertion plate 6 is located in the groove on the inner wall of the top of the processing table 1 and is used to fix the pins of the chip, providing a stable foundation for the chip.

[0024] Next, the motor 8 is started. The output shaft of the motor 8 drives the bidirectional lead screw 7 to rotate in the cavity inside the processing table 1. Since the two threads of the bidirectional lead screw 7 rotate in opposite directions, the two sliders 9 connected by threads on its rod wall will slide in opposite directions in the slot when the lead screw 7 rotates. The sliders 9 drive the clamping plate 11 to move through the connecting rod 10. The guide rod 20 on the side wall of the clamping plate 11 slides in the guide groove on the inner wall of the slot of the processing table 1, ensuring that the clamping plate 11 moves smoothly until the two clamping plates 11 are respectively attached to the chips on both sides of the pin insertion plate 6. The anti-slip rubber pad 12 on the side wall of the clamping plate 11 increases the friction between the chip and the chip, preventing the chip from sliding during the testing process. At the same time, the operator can also install the handle 13 on the clamping plate 11 by rotating the threaded connecting rod 14 at the bottom of the handle 13.

[0025] After the chip is fixed, the controller 3 controls the detection probe 4 to start working. The detection probe 4 performs various performance tests on the chip, and the test data is transmitted to the controller 3 in real time for analysis and processing. The reinforcing plate 5 at the connection between the controller 3 and the bracket 2 enhances the stability of the controller 3 installation and ensures the reliable operation of the test.

[0026] To provide sufficient lighting for the inspection work, such as Figure 1-3 As shown, a handle 13 is provided above the clamping plate 11. A threaded connecting rod 14 is fixedly connected to the bottom of the handle 13. A threaded hole is opened on the inner wall of the top of the clamping plate 11. The threaded connecting rod 14 is threadedly connected to the inner wall of the threaded hole. A housing 15 is movably sleeved on the rod wall of the handle 13. A connecting frame 16 is fixedly connected to the side wall of the housing 15. An LED lighting panel 17 is fixedly connected to the end of the connecting frame 16 away from the housing 15. A threaded rotating rod 18 is threadedly connected to the inner wall of the housing 15. A pressure plate 19 is fixedly connected to the end of the threaded rotating rod 18 located inside the housing 15. The pressure plate 19 is pressed tightly onto the rod wall of the handle 13.

[0027] A guide rod 20 is fixedly connected to the side wall of the clamping plate 11. A guide groove is provided on the inner wall of the processing table 1 located in the strip-shaped opening. The end of the guide rod 20 is slidably disposed on the inner wall of the guide groove.

[0028] In addition, if the light is insufficient during the testing process, the threaded rotating rod 18 on the inner wall of the housing 15 can be rotated to loosen the pressure plate 19 from pressing against the handle 13, thereby adjusting the position of the LED lighting plate 17 to illuminate the chip testing area and provide sufficient lighting for the testing work. After adjusting the position, the threaded rotating rod 18 can be rotated again to press the pressure plate 19 against the handle 13, fixing the position of the LED lighting plate 17 and ensuring stable lighting. After the test is completed, the motor 8 can be started in reverse to loosen the clamping plate 11, allowing the tested chip to be removed and completing one sampling operation. The guide rod 20 can improve the stability of the movement of the clamping plate 11.

[0029] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A sampling inspection device for manufacturing single-crystal silicon chips, comprising a processing table (1) and a support (2), characterized in that: The bracket (2) is fixedly connected to the top of the processing table (1). A controller (3) is fixedly connected to the inner wall of the top of the bracket (2). A detection probe (4) is electrically connected to the bottom of the controller (3). A groove is opened on the inner wall of the top of the processing table (1). A pin insertion plate (6) is provided on the inner wall of the groove. A cavity is opened on the inner wall of the top of the processing table (1). A bidirectional lead screw (7) is rotatably connected to the inner wall of the cavity. A motor (8) is fixedly connected to the side wall of the processing table (1). The output shaft of the motor (8) is fixedly connected to the end of the bidirectional lead screw (7). Two sliders (9) are threaded on the rod wall of the bidirectional lead screw (7). A strip-shaped opening is opened on the inner wall of the processing table (1) above the cavity. A connecting rod (10) is fixedly connected to the top of the two sliders (9). The top of the connecting rod (10) passes through the strip-shaped opening and is fixedly connected to a clamp (11). The clamp (11) extends to both sides of the pin insertion plate (6).

2. The sampling inspection device for manufacturing single-crystal silicon chips according to claim 1, characterized in that: The connection between the controller (3) and the bracket (2) is also threaded with a reinforcing plate (5).

3. The sampling inspection device for manufacturing single-crystal silicon chips according to claim 1, characterized in that: Anti-slip rubber pads (12) are fixedly connected to the side wall of the clamp (11).

4. The sampling inspection device for manufacturing single-crystal silicon chips according to claim 1, characterized in that: A handle (13) is provided above the clamp (11), and a threaded connecting rod (14) is fixedly connected to the bottom of the handle (13). A threaded hole is provided on the inner wall of the top of the clamp (11), and the threaded connecting rod (14) is threadedly connected to the inner wall of the threaded hole.

5. The sampling inspection device for manufacturing single-crystal silicon chips according to claim 4, characterized in that: A housing (15) is movably sleeved on the rod wall of the handle (13). A connecting frame (16) is fixedly connected to the side wall of the housing (15). An LED lighting board (17) is fixedly connected to the end of the connecting frame (16) away from the housing (15). A threaded rotating rod (18) is threadedly connected to the inner wall of the housing (15). A pressure plate (19) is fixedly connected to the end of the threaded rotating rod (18) located inside the housing (15). The pressure plate (19) is pressed tightly onto the rod wall of the handle (13).

6. The sampling inspection device for manufacturing single-crystal silicon chips according to claim 1, characterized in that: A guide rod (20) is fixedly connected to the side wall of the clamping plate (11). The processing table (1) has a guide groove on the inner wall of the strip opening. The end of the guide rod (20) is slidably disposed on the inner wall of the guide groove.

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