Disassembling jig

Abstract

A disassembly and assembly fixture is disclosed for disassembling and installing an inner tube assembly in a chemical vapor deposition (CVD) apparatus. The CVD apparatus includes a flange ring with a groove on its inner circumference. The inner tube assembly includes an inner tube and an inner tube support at one end of the inner tube. The outer circumference of the inner tube support has a protrusion that matches the groove. The disassembly and assembly fixture includes: a coaxially arranged limiting pin and a support plate, with the support plate rotatably connected to the limiting pin; a handle and an adjustable-diameter positioning pin on the support plate; wherein the positioning pin is configured to fit inside the inner tube support and form a tight fit with the inner wall of the inner tube support through diameter adjustment; the handle drives the support plate to rotate the inner tube assembly, causing the protrusion of the inner tube support to align or misalign with the groove of the flange ring, thereby achieving disassembly or installation of the inner tube assembly on the flange ring; the limiting pin limits the rotation angle. This application solves the technical problems of inefficient angle adjustment and significant safety risks in related technologies.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically to a disassembly and assembly fixture. Background Technology

[0002] In the maintenance and repair of chemical vapor deposition (CVD) equipment, the disassembly and assembly of the inner tube assembly is one of the key procedures. The inner tube assembly typically includes an inner tube and a process tube support located at one end of the inner tube. It is installed inside the equipment cavity via a flange. The inner circumference of the flange has a groove for positioning, and the outer circumference of the inner tube support has a matching protrusion. The mounting position is locked or unlocked by circumferential rotation.

[0003] In related technologies, the disassembly and assembly of the inner tube assembly usually rely on the cooperation of the machine's lifting mechanism and rotating axis: first, the lifting mechanism is raised to the position of the inner tube support, and then the rotating axis is manually rotated to drive the inner tube support to rotate, so that the protrusion and the groove are aligned or misaligned, thereby realizing disassembly or installation.

[0004] However, the current disassembly and assembly process has at least the following technical defects: operators need to visually observe the relative position of the flange ring and the inner tube support to adjust the angle. This process relies on manual experience and requires repeated adjustments, resulting in a long time consumption for each disassembly and assembly. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To address the existing problems, this application provides a disassembly and assembly fixture for disassembling and installing an inner tube assembly in a chemical vapor deposition (CVD) apparatus. The CVD apparatus includes a flange ring for mounting the inner tube assembly, the flange ring having a groove on its inner circumference. The inner tube assembly includes an inner tube and an inner tube support at one end of the inner tube, the outer circumference of the inner tube support having a protrusion matching the groove. The disassembly and assembly fixture includes:

[0007] A limiting pin and a support plate are coaxially arranged, and the support plate and the limiting pin are rotatably connected;

[0008] A handle and an adjustable diameter positioning pin are provided on the support plate;

[0009] The positioning pin is configured to be fitted inside the inner tube support and to form a tight fit with the inner wall of the inner tube support by adjusting its diameter.

[0010] The handle is used to drive the support plate to rotate the inner tube assembly, so that the protrusion of the inner tube support and the groove of the flange ring are aligned or misaligned, so as to realize the disassembly or installation of the inner tube assembly on the flange ring.

[0011] The limiting pin is used to limit the rotation angle of the support plate, thereby limiting the rotation angle of the inner tube assembly.

[0012] In some embodiments of this application, the support plate is provided with a rotatable lead screw, the positioning pin is connected to the lead screw through a threaded pair, and the lead screw is configured to drive the diameter of the positioning pin to increase or decrease by its own forward or reverse rotation, so as to achieve a tight fit or separation between the positioning pin and the inner wall of the inner tube support.

[0013] In some embodiments of this application, the positioning pin includes two symmetrically arranged semi-annular plates, the lead screw has two threaded sections with opposite directions of rotation along its own axial direction, and the two semi-annular plates are respectively provided with threaded portions that mate with the corresponding threaded sections. The lead screw is configured to drive the two semi-annular plates to move away from or closer to each other in the axial direction of the lead screw by its own forward or reverse rotation, so as to increase or decrease the diameter of the positioning pin.

[0014] In some embodiments of this application, the limiting pin includes an angle limiting adjustment mechanism for adjusting a limiting value of the rotation angle of the support plate.

[0015] In some embodiments of this application, the limiting pin is provided with an angle scale line, which is used to indicate the limiting value of the rotation angle of the support plate by the angle limiting adjustment mechanism.

[0016] In some embodiments of this application, the rotation angle of the support plate limited by the limiting pin is 20° to 60°.

[0017] In some embodiments of this application, the inner tube and the inner tube support are detachably connected by a threaded connection structure. The threaded connection structure includes an external thread portion on the outer periphery of one end of the inner tube and an internal thread portion on the inner periphery of the inner tube support that is adapted to the external thread portion.

[0018] In some embodiments of this application, the chemical vapor deposition apparatus further includes a lifting mechanism used in conjunction with the disassembly and assembly fixture.

[0019] The lifting mechanism is used to drive the disassembly and assembly fixture to rise or fall, so that the positioning pin is fastened or separated from the inner tube support, and when the protrusion of the inner tube support is aligned with the groove of the flange ring, it drives the inner tube assembly to pass through the flange ring to achieve disassembly or installation.

[0020] In some embodiments of this application, the lifting mechanism is configured as follows:

[0021] During disassembly, the positioning pin of the disassembly fixture is driven to rise and be fitted inside the inner tube support; and after adjusting the diameter of the positioning pin to form a tight fit with the inner wall of the inner tube support, and after the handle drives the protrusion of the inner tube support to be aligned with the groove of the flange ring, the disassembly fixture is driven to lower the inner tube assembly through the flange ring.

[0022] During installation, after the positioning pin is fitted inside the inner tube support and forms a tight fit with the inner wall of the inner tube support through diameter adjustment, and after the protrusion of the inner tube support is aligned with the groove of the flange ring, the disassembly fixture is driven to move the inner tube assembly upward through the flange ring; and after the handle drives the protrusion of the inner tube support to be misaligned with the groove of the flange ring, and after the positioning pin is separated from the inner wall of the inner tube support through diameter adjustment, the disassembly fixture is driven to descend.

[0023] According to the disassembly and assembly fixture of this application embodiment, the rotation angle of the support plate is mechanically limited by the limiting pin, and the alignment of the protrusion of the inner tube support and the groove of the flange ring is changed from manual visual adjustment to precise mechanical control, eliminating the need for repeated observation and adjustment, and significantly shortening the time for a single disassembly and assembly. At the same time, the adjustable diameter structure of the positioning pin forms a tight fit with the inner tube support, effectively preventing the inner tube assembly from tipping over during angle adjustment. With the drive of the handle and the limiting control of the limiting pin, the safety risks caused by human operation deviation are eliminated, and the stability of the disassembly and assembly process is improved. This fundamentally solves the technical problems of inefficient angle adjustment and prominent safety risks in related technologies. Attached Figure Description

[0024] The following drawings, which are incorporated herein by reference and are used to understand this application, illustrate embodiments of the invention and their descriptions to explain the principles of the invention.

[0025] Figure 1 A schematic diagram of the disassembly and assembly fixture according to an embodiment of this application is shown.

[0026] Figure 2 A schematic diagram of the structure of a limit pin according to an embodiment of this application is shown.

[0027] Figure 3 A side view of a limit pin according to an embodiment of this application is shown.

[0028] Figure 4 An exploded view of an inner tube assembly according to one embodiment of this application is shown.

[0029] Figure 5 A schematic diagram of the flange ring and gas pipeline according to an embodiment of this application is shown.

[0030] Figure 6 An exploded view of a lifting mechanism according to one embodiment of this application is shown.

[0031] In the attached image:

[0032] 110 Limit pin;

[0033] 111 Angle limiting adjustment mechanism;

[0034] 121 Support plate;

[0035] 1221 Semi-circular plate;

[0036] 123 Handle;

[0037] 124 lead screw;

[0038] 210 Inner tube;

[0039] 211 External thread section;

[0040] 220 Inner tube support;

[0041] 221. Protrusion;

[0042] 310 flange ring;

[0043] 311 Groove;

[0044] 320 gas pipeline;

[0045] 330 Lifting mechanism;

[0046] 331 Rotation axis. Detailed Implementation

[0047] The following description provides numerous specific details to offer a more thorough understanding of this application. However, it will be apparent to those skilled in the art that this application can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described to avoid confusion with this application.

[0048] It should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this application to those skilled in the art. In the drawings, for clarity, the dimensions and relative dimensions of layers and regions may be exaggerated. The same reference numerals denote the same elements throughout.

[0049] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this application, the first element, component, area, layer, or portion discussed below may be referred to as the second element, component, area, layer, or portion.

[0050] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0051] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of this application. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0052] In related technologies, refer to Figures 4-6 The disassembly and assembly of the inner tube assembly usually rely on the cooperation of the lifting mechanism 330 and the rotating shaft 331 of the machine: first, the lifting mechanism 330 is raised to the position of the inner tube support 220, and then the rotating shaft 331 is manually rotated to drive the inner tube support 220 to rotate, so that the protrusion 221 and the groove 311 are aligned or misaligned, thereby realizing disassembly or installation.

[0053] However, the current disassembly and assembly process has at least the following technical defects: On the one hand, operators need to visually observe the relative position of the flange ring 310 and the inner tube support 220 to adjust the angle. This process relies on manual experience and requires repeated adjustments, resulting in a long time consumption for each disassembly and assembly. On the other hand, due to the lack of a mechanical limiting structure, the rotating shaft 331 cannot effectively constrain the rotation range of the inner tube assembly during the angle adjustment process. The inner tube assembly is prone to tipping over due to excessive rotation or uneven force, making it difficult to guarantee the reliability and safety of the disassembly and assembly process.

[0054] To address at least one of the aforementioned technical problems, this application provides a disassembly and assembly fixture for disassembling and installing an inner tube assembly in a chemical vapor deposition (CVD) apparatus. The CVD apparatus includes a flange ring for mounting the inner tube assembly, the flange ring having a groove on its inner circumference. The inner tube assembly includes an inner tube and an inner tube support located at one end of the inner tube. The outer circumference of the inner tube support has a protrusion matching the groove. The disassembly and assembly fixture includes:

[0055] A limiting pin and a support plate are coaxially arranged, and the support plate and the limiting pin are rotatably connected;

[0056] A handle and an adjustable diameter positioning pin are provided on the support plate;

[0057] The positioning pin is configured to be fitted inside the inner tube support and to form a tight fit with the inner wall of the inner tube support by adjusting its diameter.

[0058] The handle is used to drive the support plate to rotate the inner tube assembly, so that the protrusion of the inner tube support and the groove of the flange ring are aligned or misaligned, so as to realize the disassembly or installation of the inner tube assembly on the flange ring.

[0059] The limiting pin is used to limit the rotation angle of the support plate, thereby limiting the rotation angle of the inner tube assembly.

[0060] According to the disassembly and assembly fixture of this application, the rotation angle of the support plate is mechanically limited by the limiting pin, and the alignment of the protrusion of the inner tube support and the groove of the flange ring is changed from manual visual adjustment to precise mechanical control, eliminating the need for repeated observation and adjustment, and significantly shortening the time for a single disassembly and assembly. At the same time, the adjustable diameter structure of the positioning pin forms a tight fit with the inner tube support, effectively preventing the inner tube assembly from tipping over during angle adjustment. Combined with the drive of the handle and the limiting control of the limiting pin, the safety risks caused by human operation deviation are eliminated, and the stability of the disassembly and assembly process is improved. This fundamentally solves the technical problems of inefficient angle adjustment and prominent safety risks in related technologies.

[0061] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0062] The following is for reference. Figures 1-6 This application describes a disassembly and assembly fixture according to one embodiment. The fixture is used to disassemble and install an inner tube assembly in a chemical vapor deposition (CVD) apparatus. The CVD apparatus includes a flange 310 for mounting the inner tube assembly. The flange 310 has a groove 311 on its inner circumference. The inner tube assembly includes an inner tube 210 and an inner tube support 220 located at one end of the inner tube 210. The outer circumference of the inner tube support 220 has a protrusion 221 that matches the groove 311. The disassembly and assembly fixture includes:

[0063] The limiting pin 110 and the support plate 121 are coaxially arranged, and the support plate 121 and the limiting pin 110 are rotatably connected.

[0064] A handle 123 and an adjustable diameter positioning pin are provided on the support plate 121;

[0065] The positioning pin is configured to be fitted inside the inner tube support 220 and to form a tight fit with the inner wall of the inner tube support 220 by adjusting its diameter.

[0066] The handle 123 is used to drive the support plate 121 to rotate the inner tube assembly, so that the protrusion 221 of the inner tube support 220 and the groove 311 of the flange ring 310 are aligned or misaligned, so as to realize the disassembly or installation of the inner tube assembly on the flange ring 310.

[0067] The limiting pin 110 is used to limit the rotation angle of the support plate 121, thereby limiting the rotation angle of the inner tube assembly.

[0068] Specifically, during disassembly, first, the locating pin is fitted inside the inner tube support 220, and the diameter of the locating pin is adjusted to form a tight fit with the inner wall of the inner tube support 220. Then, the handle 123 is operated to drive the support plate 121 to rotate, which in turn drives the inner tube assembly to rotate, so that the protrusion 221 of the inner tube support 220 is aligned with the groove 311 of the flange ring 310. After that, the inner tube assembly is removed through the flange ring 310, thereby removing the inner tube assembly from the flange ring 310 in the chemical vapor deposition equipment. To remove and install, first, place the locating pin inside the inner tube support 220 and adjust the diameter of the locating pin to form a tight fit with the inner wall of the inner tube support 220. Then, raise the inner tube assembly through the flange ring 310, and then operate the handle 123 to drive the support plate 121 to rotate, which in turn drives the inner tube assembly to rotate, so that the protrusion 221 of the inner tube support 220 and the groove 311 of the flange ring 310 are misaligned, thereby installing the inner tube assembly onto the flange ring 310 in the chemical vapor deposition equipment.

[0069] On the one hand, the limiting pin 110 and the support plate 121 are connected by coaxial rotation. The limiting pin 110 mechanically limits the rotation angle of the support plate 121, so that the alignment accuracy of the protrusion 221 of the inner tube support 220 and the groove 311 of the flange ring 310 is changed from manual visual adjustment to mechanical precision control. The rotation stroke of the inner tube assembly can be directly limited within the target angle range. Operators do not need to observe and adjust repeatedly, and the time spent on a single disassembly and assembly is significantly shortened.

[0070] On the other hand, by designing the locating pin with an adjustable diameter: during disassembly, the locating pin is fitted onto the inner circumference of the inner tube support 220, and its diameter expands to achieve a close fit to the inner wall, forming a stable support structure; during installation, the locating pin, in its constricted state, can be quickly fitted into the inner tube support 220, and after being in place, its diameter expands to achieve rigid fixation. This structure ensures that the central axis of the inner tube assembly remains coaxial with the locating pin during rotation, effectively avoiding the risk of the inner tube assembly tipping over due to human error, significantly reducing the probability of collision damage between the inner tube assembly and the flange, and eliminating safety threats to operators.

[0071] The disassembly and assembly fixtures in this embodiment can effectively improve the efficiency of preventive maintenance (PM) operations, increase machine uptime utilization, and reduce the operational risks of disassembling inner tube components during preventive maintenance.

[0072] In some embodiments, such as Figure 4As shown, the inner tube 210 and the inner tube support 220 are detachably connected by a threaded connection structure. The threaded connection structure includes an external thread portion 211 located on the outer periphery of one end of the inner tube 210, and an internal thread portion located on the inner periphery of the inner tube support 220 and adapted to the external thread portion 211.

[0073] When the two need to be installed, by applying a torque in the same direction as the assembly (usually clockwise), the inner tube 210 is rotated outward relative to the inner tube support 220 in the axial direction, and the helical surfaces of the external thread 211 and the internal thread gradually engage until the two are installed together; when disassembly is required, by applying a torque in the opposite direction to the assembly (usually counterclockwise), the inner tube 210 is rotated outward relative to the inner tube support 220 in the axial direction, and the helical surfaces of the external thread 211 and the internal thread gradually disengage until the two are separated.

[0074] As an alternative implementation, the inner tube 210 and the inner tube support 220 can also be detachably connected through a snap-fit ​​connection structure, a flange connection structure, a key pin connection structure, etc., and there is no limitation on this.

[0075] In some embodiments, such as Figure 6 As shown, the chemical vapor deposition equipment also includes a lifting mechanism 330 used in conjunction with the disassembly and assembly fixture.

[0076] The lifting mechanism 330 is used to drive the disassembly and assembly fixture to rise or fall, so that the positioning pin is fastened or separated from the inner tube support 220, and when the protrusion 221 of the inner tube support 220 is aligned with the groove 311 of the flange ring 310, it drives the inner tube assembly to pass through the flange ring 310 to achieve disassembly or installation.

[0077] For example, during disassembly, the lifting mechanism 330 is configured to first drive the positioning pin of the disassembly fixture to rise until it is fitted inside the inner tube support 220. Then, after adjusting the diameter of the positioning pin to form a tight fit with the inner wall of the inner tube support 220, and after the handle 123 drives the protrusion 221 of the inner tube support 220 to align with the groove 311 of the flange ring 310, the lifting mechanism 330 drives the disassembly fixture to lower the inner tube assembly through the flange ring 310, thereby removing the inner tube assembly from the flange ring 310. During installation, the lifting mechanism 330 is configured to first drive the positioning pin to rise until it is fitted inside the inner tube support 220. The inner tube support 220 is tightened with the inner wall of the inner tube support 220 by adjusting the diameter, and the protrusion 221 of the inner tube support 220 is aligned with the groove 311 of the flange ring 310. Then, the disassembly fixture is driven to lift the inner tube assembly through the flange ring 310. After that, the handle 123 drives the protrusion 221 of the inner tube support 220 to be misaligned with the groove 311 of the flange ring 310, and the positioning pin is separated from the inner wall of the inner tube support 220 by adjusting the diameter. Then, the lifting mechanism 330 drives the disassembly fixture to descend and remove the disassembly fixture after the installation is completed.

[0078] In some embodiments, such as Figure 1 As shown, the support plate 121 is provided with a rotatable lead screw 124. The positioning pin is connected to the lead screw 124 through a threaded pair. The lead screw 124 is configured to drive the diameter of the positioning pin to increase or decrease by its own forward or reverse rotation, so as to achieve a tight fit or separation between the positioning pin and the inner wall of the inner tube support 220.

[0079] In a specific implementation, a lead screw 124, rotatable about its own axis, is mounted on the support plate 121. The axial direction of the lead screw 124 is consistent with the direction in which the diameter of the locating pin increases or decreases. Exemplarily, the locating pin adopts a radially opening and closing petal structure, with a threaded section that mates with the lead screw 124, thus forming a threaded transmission pair with the lead screw 124. When the lead screw 124 is driven to rotate in the forward direction, the lead screw 124 drives the petal structure of the locating pin to displace along the axial direction of the lead screw 124 through the threaded pair, causing the radial diameter of the locating pin to increase until it forms an interference fit with the inner wall of the inner tube support 220. Conversely, when the lead screw 124 rotates in the reverse direction, the petal structure of the locating pin moves in the opposite direction along the axial direction of the lead screw 124, and the radial diameter of the locating pin decreases, achieving a separation from the inner wall of the inner tube support 220. This structural design, which drives the radial dimension change of the locating pin through the helical transmission of the lead screw 124, can reliably achieve rapid fastening and separation operations between the locating pin and the inner tube support 220.

[0080] In a specific embodiment, such as Figure 1 As shown, the locating pin includes two symmetrically arranged semi-annular plates 1221. The semi-annular plates 1221 are connected to the lead screw 124 through a threaded pair. The lead screw 124 is configured to drive the two semi-annular plates 1221 to move away from or closer to each other in the axial direction of the lead screw 124 by its own forward or reverse rotation, so as to increase or decrease the diameter of the locating pin.

[0081] Specifically, each semi-annular plate 1221 is provided with a threaded portion that matches the external thread of the lead screw 124, thereby achieving a transmission connection with the lead screw 124. The lead screw 124 is divided into two threaded sections with opposite directions along the axial direction, and the two threaded sections respectively mate with the threaded portions of the two semi-annular plates 1221. When the lead screw 124 rotates in the forward direction, the two threaded sections drive the corresponding semi-annular plates 1221 to move in opposite directions along the axial direction of the lead screw 124, causing the two semi-annular plates 1221 to move away from each other in the axial direction. At this time, the outer diameter of the locating pin increases due to the radial expansion of the semi-annular plates 1221. Conversely, when the lead screw 124 rotates in the reverse direction, the two threaded sections drive the corresponding semi-annular plates 1221 to move towards each other in the axial direction of the lead screw 124, causing the two semi-annular plates 1221 to move closer to each other in the axial direction. At this time, the outer diameter of the locating pin decreases due to the radial contraction of the semi-annular plates 1221. This threaded transmission method enables the conversion of the rotational motion of the lead screw 124 into the axial linear motion of the semi-annular plate 1221, thereby reliably controlling the diameter change of the positioning pin.

[0082] In some embodiments, such as Figure 2 As shown, the limiting pin 110 includes an angle limiting adjustment mechanism 111, which is used to adjust the limiting value of the rotation angle of the support plate 121. When disassembling and installing the inner tube assembly in different chemical vapor deposition equipment, to meet the differentiated locking angle requirements of different models of equipment, it is only necessary to adjust the limiting value of the rotation angle of the support plate 121 by the limiting pin 110, which can quickly adapt to various equipment specifications and significantly reduce the cumulative labor cost of maintaining multiple units.

[0083] For example, the angle limiting adjustment mechanism 111 can be implemented as a slide block adjustment mechanism, in which the position of the slide block is adjusted by sliding the slide block in the slide groove, thereby limiting the maximum rotation angle of the support plate 121; or, the angle limiting adjustment mechanism 111 can be implemented as a screw and nut adjustment stop mechanism, in which the nut is driven to move along the guide groove by rotating the screw, thereby changing the position of the stop block and limiting the maximum rotation angle of the support plate 121; or, the angle limiting adjustment mechanism 111 can be implemented as a wedge block inclined plane adjustment mechanism, in which the lateral position of the wedge block is adjusted by the screw using the inclined plane transmission principle of the wedge block, thereby changing the rotation limit of the support plate 121; or the angle limiting adjustment mechanism 111 can be implemented as any other suitable mechanism, without limitation.

[0084] In some embodiments, the limit pin 110 is provided with an angle scale line, which is used to indicate the limit value of the rotation angle of the support plate 121 by the angle limiting adjustment mechanism 111. By combining the mechanical limiting function of the limit pin 110 with the visual scale indication, it can be ensured that the rotation angle of the inner tube assembly is within the set range during each disassembly and assembly process. Especially in multi-unit maintenance scenarios, the specific angle parameters required by different machines can be quickly reproduced through the scale line, which significantly improves the consistency of operation and the reliability of the process.

[0085] For example, the angle scale lines can be set on the outer circumference of the limit pin 110 or at any other suitable position. The scale lines can be evenly marked with angle values ​​from 0° to 60° (or any other arbitrary angle range value) at preset angle intervals (such as 0.5°, 1°, 2°, etc.). When the limit value of the rotation angle of the support plate 121 is adjusted by the angle limiting adjustment mechanism 111, the angle scale lines can indicate the limit value, so that the operator can intuitively confirm the limit value of the rotation angle of the support plate 121 by the limit pin 110 through the scale lines, thereby transforming the rotation angle control of the inner tube support 220 from experience-based operation to quantitative and precise adjustment.

[0086] In some embodiments, such as Figure 5 As shown, a gas supply pipe 320 can be installed inside the flange ring 310 to transport the gas required for the chemical vapor deposition process. The gas supply pipe 320 is set by an injector support ring. When the limiting pin 110 limits the rotation angle of the inner tube support 220 through the support plate 121, the position of the inner tube support 220 can correspond to the position of the gas supply pipe support ring.

[0087] In some embodiments, the rotation angle of the support plate 121 defined by the limiting pin 110 is 20° to 60°, and consequently the rotation angle of the inner tube assembly defined by the limiting pin is also 20° to 60°. Of course, depending on the actual situation, the rotation angles of the support plate 121 and the inner tube assembly may also exist in other numerical ranges, which are not limited thereto.

[0088] In some embodiments, the wafer compatibility of the chemical vapor deposition (CVD) equipment is not limited by size specifications and can accommodate wafers of different diameters, such as 6-inch, 8-inch, and 12-inch. The equipment's process capabilities cover the deposition of a variety of functional materials, including but not limited to triethylsilane (TES) precursor films, high-temperature oxide (HTO) layers, silicon nitride (SiN) layers, and polycrystalline silicon (Poly-Si) films. The above list of material types is merely illustrative; the actual application scope of the equipment is not limited to the specific materials mentioned and can be flexibly expanded to the deposition of other semiconductor thin film materials according to process requirements.

[0089] In summary, the disassembly and assembly fixture according to the embodiments of this application mechanically limits the rotation angle of the support plate by means of a limiting pin, and changes the alignment of the protrusion of the inner tube support and the groove of the flange ring from manual visual adjustment to precise mechanical control, eliminating the need for repeated observation and adjustment, and significantly shortening the time required for a single disassembly and assembly. At the same time, the adjustable diameter structure of the positioning pin forms a tight fit with the inner tube support, effectively preventing the inner tube assembly from tipping over during angle adjustment. Combined with the drive of the handle and the limiting control of the limiting pin, it eliminates the safety risks caused by human operation deviations, improves the stability of the disassembly and assembly process, and fundamentally solves the technical problems of inefficient angle adjustment and prominent safety risks in related technologies.

[0090] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0091] Similarly, it should be understood that, in order to simplify this application and aid in understanding one or more aspects of the application, various features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the point of application is that the corresponding technical problem can be solved with fewer features than all of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0092] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0093] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. A disassembly and assembly fixture, characterized in that, This fixture is used to disassemble and install an inner tube assembly in a chemical vapor deposition (CVD) apparatus. The CVD apparatus includes a flange ring for mounting the inner tube assembly, the flange ring having a groove on its inner circumference. The inner tube assembly includes an inner tube and an inner tube support at one end of the inner tube. The outer circumference of the inner tube support has a protrusion that matches the groove. The disassembly / installation fixture includes: A limiting pin and a support plate are coaxially arranged, and the support plate and the limiting pin are rotatably connected; A handle and an adjustable diameter positioning pin are provided on the support plate; The positioning pin is configured to be fitted inside the inner tube support and to form a tight fit with the inner wall of the inner tube support by adjusting its diameter. The handle is used to drive the support plate to rotate the inner tube assembly, so that the protrusion of the inner tube support and the groove of the flange ring are aligned or misaligned, so as to realize the disassembly or installation of the inner tube assembly on the flange ring. The limiting pin is used to limit the rotation angle of the support plate, thereby limiting the rotation angle of the inner tube assembly.

2. The disassembly and assembly fixture as described in claim 1, characterized in that, The support plate is provided with a rotatable lead screw, and the positioning pin is connected to the lead screw through a threaded pair. The lead screw is configured to drive the diameter of the positioning pin to increase or decrease by its own forward or reverse rotation, so as to achieve a tight fit or separation between the positioning pin and the inner wall of the inner tube support.

3. The disassembly and assembly fixture as described in claim 2, characterized in that, The positioning pin includes two symmetrically arranged semi-annular plates. The lead screw has two threaded sections with opposite directions along its own axis. The two semi-annular plates are respectively provided with threaded portions that mate with the corresponding threaded sections. The lead screw is configured to drive the two semi-annular plates to move away from or closer to each other in the axial direction of the lead screw by its own forward or reverse rotation, so as to increase or decrease the diameter of the positioning pin.

4. The disassembly and assembly fixture as described in claim 1, characterized in that, The limiting pin includes an angle limiting adjustment mechanism, which is used to adjust the limiting value of the rotation angle of the support plate.

5. The disassembly and assembly fixture as described in claim 4, characterized in that, The limiting pin is provided with an angle scale line, which is used to indicate the limiting value of the rotation angle of the support plate by the angle limiting adjustment mechanism.

6. The disassembly and assembly fixture as described in claim 1, characterized in that, The rotation angle of the support plate limited by the limiting pin is 20° to 60°.

7. The disassembly and assembly fixture as described in claim 1, characterized in that, The inner tube and the inner tube support are detachably connected by a threaded connection structure. The threaded connection structure includes an external thread portion on the outer periphery of one end of the inner tube and an internal thread portion on the inner periphery of the inner tube support that is adapted to the external thread portion.

8. The disassembly and assembly fixture as described in claim 1, characterized in that, The chemical vapor deposition equipment also includes a lifting mechanism used in conjunction with the disassembly and assembly fixture. The lifting mechanism is used to drive the disassembly and assembly fixture to rise or fall, so that the positioning pin is fastened or separated from the inner tube support, and when the protrusion of the inner tube support is aligned with the groove of the flange ring, it drives the inner tube assembly to pass through the flange ring to achieve disassembly or installation.

9. The disassembly and assembly fixture as described in claim 8, characterized in that, The lifting mechanism is configured as follows: During disassembly, the positioning pin of the disassembly fixture is driven to rise and be fitted inside the inner tube support; and after adjusting the diameter of the positioning pin to form a tight fit with the inner wall of the inner tube support, and after the handle drives the protrusion of the inner tube support to be aligned with the groove of the flange ring, the disassembly fixture is driven to lower the inner tube assembly through the flange ring. During installation, after the positioning pin is fitted inside the inner tube support and forms a tight fit with the inner wall of the inner tube support through diameter adjustment, and after the protrusion of the inner tube support is aligned with the groove of the flange ring, the disassembly fixture is driven to move the inner tube assembly upward through the flange ring; and after the handle drives the protrusion of the inner tube support to be misaligned with the groove of the flange ring, and after the positioning pin is separated from the inner wall of the inner tube support through diameter adjustment, the disassembly fixture is driven to descend.

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