Auxiliary tool for installing furnace chamber on single crystal furnace

Abstract

This utility model relates to the field of auxiliary tooling technology for single crystal furnaces, specifically an auxiliary tooling for installing the upper chamber of a single crystal furnace. It includes a single crystal furnace body, with a guide tube installed at the upper end inside the furnace body. Multiple crucibles and insulation layers are installed inside the furnace body. A moving assembly is located at one end of the furnace body. The moving assembly includes a moving base, a support block fixed to the top surface of the moving base, and a lifting assembly at the upper end of the support block. The lifting assembly includes an adjusting block, a round rod fixed to the bottom surface of the adjusting block, a round block slidably connected to the round rod, multiple hinge seats fixed to the bottom surface of the round block, and a connecting rod rotatably connected to the hinge seats. A cylindrical clamping block is fixed to the lower end of the connecting rod. This achieves stable gripping of internal components, reducing component shaking or displacement, lowering the risk of component collision damage, ensuring uniform and controllable radial displacement when the cylindrical clamping block expands or contracts, reducing positioning errors, and minimizing component assembly deviations.

Description

Technical Field

[0001] This utility model relates to the field of auxiliary tooling technology for single crystal furnaces, and in particular to an auxiliary tooling for installing the upper chamber of a single crystal furnace. Background Technology

[0002] As a core piece of equipment in the semiconductor and photovoltaic industries, the installation accuracy of the internal components of a single crystal furnace directly affects the crystal growth quality and the stability of equipment operation. The upper furnace chamber, as an important component of the single crystal furnace, requires the precise installation of high-temperature components such as crucibles and insulation layers.

[0003] A search revealed Chinese patent CN221019637U, which provides an auxiliary tooling for installing an upper furnace chamber. The tooling is designed with a connecting rod, which allows the centers of the upper and lower furnace chambers to be aligned. The straightening fork ensures that the upper furnace chamber remains vertical, thus facilitating installation with the lifting mechanism on the single crystal furnace. This ensures the stable operation of the upper furnace chamber during installation and that the upper furnace chamber can be stably connected with the lower furnace chamber after installation.

[0004] However, during use, it was found that external alignment assistance could not ensure that internal components would not shake or shift during the lifting process, which could easily lead to component collision damage or installation deviation. It was also difficult to achieve accurate fixation of the crucible and insulation layer. Especially when installing multiple components, positioning errors could affect the overall assembly accuracy, which was not conducive to the installation and use of the furnace chamber in the single crystal furnace. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides an auxiliary tooling for installation in the furnace chamber of a single crystal furnace. The connecting rod expands outward around the hinge seat, thereby pushing the lower cylindrical clamping block to expand radially, achieving stable gripping of internal components, reducing component shaking or displacement problems, lowering the risk of component collision damage, ensuring uniform and controllable radial displacement when the cylindrical clamping block expands or contracts, reducing positioning errors, and reducing component assembly deviations.

[0006] To solve the above technical problems, the present invention provides the following technical solution: an auxiliary tooling for installing the upper chamber of a single crystal furnace, including a single crystal furnace body, a guide tube installed at the upper end of the single crystal furnace body, multiple crucibles and insulation layers installed inside the single crystal furnace body, and a moving component provided at one end of the single crystal furnace body;

[0007] The movable component includes a movable base, a support block is fixedly provided on the top surface of the movable base, and a lifting component is provided on the upper end of the support block;

[0008] The lifting assembly includes an adjusting block, a round rod fixedly mounted on the bottom surface of the adjusting block, a round block slidably connected to the round rod, multiple hinge seats fixedly mounted on the bottom surface of the round block, a connecting rod rotatably connected to the hinge seats, a cylindrical locking block fixedly mounted at the lower end of the connecting rod, a disc fixedly mounted on the bottom surface of the round rod, multiple limiting grooves opened on the top surface of the disc, a limiting rod fixedly mounted inside the limiting groove, a through groove opened on the connecting rod, and the outer peripheral wall of the limiting rod slidably connected to the groove wall of the through groove.

[0009] Preferably, the bottom surface of the movable seat is equipped with multiple brake wheels, and two L-shaped blocks are fixed on the support block, with a positioning clamp slidably connected to the outer peripheral wall of the L-shaped blocks.

[0010] Preferably, a dual-axis motor is mounted on the support block, and a lead screw is coaxially connected to the output shaft of the dual-axis motor. One end of the lead screw is rotatably connected to the outer peripheral wall of the L-shaped block, and the positioning clamp is threadedly connected to the lead screw through a threaded hole.

[0011] Through the above technical solution, the lead screw is driven by a dual-axis motor to rotate, and the positioning clamps will move linearly along the outer peripheral wall of the L-shaped block, so that the two positioning clamps abut against the outer wall of the single crystal furnace body, thus completing the positioning of the support block.

[0012] Preferably, a servo motor is mounted on the top surface of the support block, a gear is sleeved on the output shaft of the servo motor, and multiple tooth grooves are opened on the side wall of the adjustment block, with the gear meshing with the tooth grooves.

[0013] The above technical solution uses the output shaft of a servo motor to drive a gear to rotate. The gear meshes with the tooth groove, pushing the adjusting block to slide along the support block, thus moving the adjusting block and the round rod to a suitable height.

[0014] Preferably, two limiting blocks are fixed on the outer peripheral wall of the round rod, and the round blocks are slidably connected to the limiting blocks.

[0015] Preferably, an electric actuator is installed on the outer peripheral wall of the round rod, and the piston rod of the electric actuator is fixedly connected to the round block.

[0016] The above technical solution uses an electric actuator to extend and retract, pushing the circular block to slide up and down along the rod. A limiting block restricts the radial displacement of the circular block, ensuring that it slides only along the axial direction.

[0017] Preferably, the outer peripheral wall of the cylindrical block is provided with a plurality of protrusions, and the outer wall of the connecting rod is slidably connected to the wall of the limiting groove.

[0018] With the above technical solution, when the circular block slides downward, the connecting rod unfolds outward, the cylindrical block expands radially, and the convex strips on its outer peripheral wall embed into the crucible or the inner wall of the insulation layer, achieving tight gripping.

[0019] Preferably, the diameter of the disk is smaller than the inner diameter of the lower end of the guide tube.

[0020] The above technical solution facilitates the grasping of the guide tube.

[0021] The beneficial effects of this utility model are:

[0022] 1. After the adjusting block drives the circular rod to a suitable height, the circular block slides along the circular rod, causing the hinge seat to move synchronously. During the movement, the connecting rod is constrained by the limiting rod, forcing the connecting rod to expand outward around the hinge seat, thereby pushing the lower cylindrical clamping block to expand radially, ultimately squeezing the inner wall of the crucible or insulation layer, achieving stable gripping of the internal components. Conversely, when the circular block slides in the opposite direction, the connecting rod is constrained by the limiting rod and contracts inward, the cylindrical clamping block is released, and the component is released. This reduces component shaking or displacement problems, lowers the risk of component collision damage, ensures uniform and controllable radial displacement when the cylindrical clamping block expands or contracts, reduces positioning errors, and reduces component assembly deviations.

[0023] 2. The brake wheel facilitates the movement of the tooling to the required position. When it is necessary to install the crucible or insulation layer, the lead screw is driven to rotate by the dual-axis motor. Since the lead screw is threadedly connected to the positioning clamp plate and the positioning clamp plate is slidably connected to the L-shaped block, the positioning clamp plate will move linearly along the outer peripheral wall of the L-shaped block as the lead screw rotates. This allows the distance between the two positioning clamp plates to be adjusted according to the different sizes of the single crystal furnace body, so that the two positioning clamp plates abut against the outer wall of the single crystal furnace body respectively, thus completing the positioning of the support block. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0025] Figure 2 This is a schematic diagram of the crucible structure of this utility model;

[0026] Figure 3 This is a schematic diagram of the movable seat structure of this utility model;

[0027] Figure 4 This is a schematic diagram of the adjusting block structure of this utility model;

[0028] Figure 5 This is a schematic diagram of the circular rod structure of this utility model;

[0029] Figure 6 This is a bottom-view perspective view of the disc structure of this utility model.

[0030] In the diagram: 100, Single crystal furnace body; 101, Flow guide tube; 102, Crucible; 103, Insulation layer;

[0031] 200. Moving component; 201. Moving base; 202. Brake wheel; 203. Support block; 204. L-shaped block; 205. Positioning clamp; 206. Dual-axis motor; 207. Lead screw;

[0032] 300. Lifting assembly; 301. Adjusting block; 302. Round rod; 303. Round block; 304. Hinge seat; 305. Connecting rod; 306. Cylindrical locking block; 307. Disc; 308. Limiting groove; 309. Limiting rod; 310. Through groove; 311. Servo motor; 312. Gear; 313. Tooth groove; 314. Limiting block; 315. Electric push rod; 316. Protrusion. Detailed Implementation

[0033] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0034] like Figure 1-6 As shown, this embodiment provides an auxiliary tooling for installing the upper chamber of a single crystal furnace, including a single crystal furnace body 100, a guide tube 101 installed at the upper end of the single crystal furnace body 100, a plurality of crucibles 102 and a heat insulation layer 103 respectively installed inside the single crystal furnace body 100, and a moving component 200 provided at one end of the single crystal furnace body 100.

[0035] The movable component 200 includes a movable base 201, a support block 203 is fixedly provided on the top surface of the movable base 201, and a lifting component 300 is provided on the upper end of the support block 203;

[0036] The lifting assembly 300 includes an adjusting block 301. A round rod 302 is fixedly mounted on the bottom surface of the adjusting block 301. A round block 303 is slidably connected to the round rod 302. A plurality of hinge seats 304 are fixedly mounted on the bottom surface of the round block 303. A connecting rod 305 is rotatably connected to the hinge seat 304. A cylindrical locking block 306 is fixedly mounted at the lower end of the connecting rod 305. A disc 307 is fixedly mounted on the bottom surface of the round rod 302. A plurality of limiting grooves 308 are opened on the top surface of the disc 307. A limiting rod 309 is fixedly mounted inside the limiting groove 308. A through groove 310 is opened on the connecting rod 305. The outer peripheral wall of the limiting rod 309 is slidably connected to the groove wall of the through groove 310.

[0037] Multiple brake wheels 202 are installed on the bottom surface of the movable seat 201. Two L-shaped blocks 204 are fixed on the support block 203. Positioning clamps 205 are slidably connected to the outer peripheral wall of the L-shaped blocks 204. A dual-axis motor 206 is installed on the support block 203. A lead screw 207 is coaxially connected to the output shaft of the dual-axis motor 206. One end of the lead screw 207 is rotatably connected to the outer peripheral wall of the L-shaped blocks 204. The positioning clamps 205 are threadedly connected to the lead screw 207 through a threaded hole. When the dual-axis motor 206 drives the lead screw 207 to rotate, the positioning clamps 205 will move linearly along the outer peripheral wall of the L-shaped blocks 204, so that the two positioning clamps 205 respectively abut against the outer wall of the single crystal furnace body 100, thus completing the positioning of the support block 203.

[0038] A servo motor 311 is mounted on the top surface of the support block 203. A gear 312 is sleeved on the output shaft of the servo motor 311. Multiple toothed grooves 313 are opened on the side wall of the adjusting block 301. The gear 312 meshes with the toothed grooves 313. The output shaft of the servo motor 311 drives the gear 312 to rotate. The gear 312 meshes with the toothed grooves 313, pushing the adjusting block 301 to slide along the support block 203, thus moving the adjusting block 301 and the round rod 302 to a suitable height.

[0039] Two limiting blocks 314 are fixed on the outer peripheral wall of the round rod 302. The round block 303 is slidably connected to the limiting blocks 314. An electric push rod 315 is installed on the outer peripheral wall of the round rod 302. The piston rod of the electric push rod 315 is fixedly connected to the round block 303. The electric push rod 315 pushes the round block 303 to slide up and down along the round rod 302 by extending and retracting. The limiting blocks 314 restrict the radial displacement of the round block 303 to ensure that it slides only along the axial direction.

[0040] The cylindrical block 306 has multiple protrusions 316 fixed on its outer peripheral wall, and the outer wall of the connecting rod 305 is slidably connected to the groove wall of the limiting groove 308. When the circular block 303 slides downward, the connecting rod 305 unfolds outward, the cylindrical block 306 expands radially, and the protrusions 316 on its outer peripheral wall are embedded in the inner wall of the crucible 102 or the insulation layer 103 to achieve tight gripping.

[0041] The diameter of the disc 307 is smaller than the inner diameter of the lower end of the guide tube 101; this facilitates the gripping of the guide tube 101.

[0042] Working principle: First, the tooling is moved to the vicinity of the installation position of the single crystal furnace body 100 by the moving component 200, and the support block 203 provides stable support for the lifting component 300. When it is necessary to grip and fix the guide tube 101, crucible 102 or insulation layer 103, the adjusting block 301 drives the round rod 302 to adjust to a suitable height, and then the round block 303 slides along the round rod 302 to drive the hinge seat 304 to move synchronously. During the movement, the connecting rod 305 is restricted by the limiting rod 309, which forces the connecting rod 305 to unfold outward around the hinge seat 304, thereby pushing the lower cylindrical clamping block 306 to expand radially, and finally squeezing the inner wall of the crucible 102 or insulation layer 103 to achieve stable gripping of internal components.

[0043] Conversely, when the circular block 303 slides in the opposite direction, the connecting rod 305 is constrained by the limiting rod 309 and retracts inward, the cylindrical block 306 is released, and the component is released; this reduces the problem of component shaking or displacement, reduces the risk of component collision damage, ensures that the radial displacement of the cylindrical block 306 is uniform and controllable when it expands or contracts, reduces positioning error, and reduces component assembly deviation.

[0044] The brake wheel 202 facilitates the movement of the tooling to the required position. When it is necessary to install the crucible 102 or the insulation layer 103, the lead screw 207 is rotated by the dual-axis motor 206. Since the lead screw 207 is threadedly connected to the positioning clamp 205 and the positioning clamp 205 is slidably connected to the L-shaped block 204, as the lead screw 207 rotates, the positioning clamp 205 will move linearly along the outer peripheral wall of the L-shaped block 204. Thus, the distance between the two positioning clamps 205 can be adjusted according to the different sizes of the single crystal furnace body 100, so that the two positioning clamps 205 abut against the outer wall of the single crystal furnace body 100 respectively, and the positioning of the support block 203 is completed.

[0045] The adjusting block 301 is positioned at the middle of the upper end of the single crystal furnace body 100. Then, the output shaft of the servo motor 311 drives the gear 312 to rotate. The gear 312 meshes with the tooth groove 313, pushing the adjusting block 301 to slide along the support block 203. After the adjusting block 301 and the round rod 302 are moved to a suitable height, the electric push rod 315 extends and retracts to push the round block 303 to slide up and down along the round rod 302. The limiting block 314 restricts the radial displacement of the round block 303 to ensure that it slides only along the axial direction. The round block 303 drives the hinge seat 304 to move. Through the cooperation of the connecting rod 305 and the limiting rod 309, the connecting rod 305 is forced to swing around the hinge seat 304 to better position and fix it.

[0046] When the circular block 303 slides downward, the connecting rod 305 expands outward, and the cylindrical clamping block 306 expands radially. The protrusion 316 on its outer peripheral wall embeds into the inner wall of the crucible 102 or the insulation layer 103, achieving a tight grip. When the circular block 303 slides upward, the connecting rod 305 retracts inward, and the cylindrical clamping block 306 releases, completing the release. This facilitates the gripping of the crucible 102 or the insulation layer 103 for maintenance or replacement, reduces angular deviation, improves gripping stability, ensures smooth and reliable gripping action, meets the installation requirements inside the single crystal furnace body 1, and improves the installation efficiency of the upper furnace chamber.

[0047] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An auxiliary tooling for installing the upper chamber of a single crystal furnace, characterized in that, include: A single crystal furnace body (100) is provided with a flow guide tube (101) installed at the upper end of the interior of the single crystal furnace body (100), and multiple crucibles (102) and heat insulation layers (103) are installed inside the single crystal furnace body (100). A moving component (200) is provided at one end of the single crystal furnace body (100). The movable component (200) includes a movable base (201), a support block (203) is fixedly provided on the top surface of the movable base (201), and a lifting component (300) is provided on the upper end of the support block (203); The lifting assembly (300) includes an adjusting block (301), a round rod (302) is fixedly mounted on the bottom surface of the adjusting block (301), a round block (303) is slidably connected to the round rod (302), a plurality of hinge seats (304) are fixedly mounted on the bottom surface of the round block (303), a connecting rod (305) is rotatably connected to the hinge seat (304), a cylindrical locking block (306) is fixedly mounted at the lower end of the connecting rod (305), a disc (307) is fixedly mounted on the bottom surface of the round rod (302), a plurality of limiting grooves (308) are opened on the top surface of the disc (307), a limiting rod (309) is fixedly mounted inside the limiting groove (308), a through groove (310) is opened on the connecting rod (305), and the outer peripheral wall of the limiting rod (309) is slidably connected to the groove wall of the through groove (310).

2. The auxiliary tooling for installing the furnace chamber of a single crystal furnace as described in claim 1, characterized in that: The bottom surface of the movable seat (201) is equipped with multiple brake wheels (202), and two L-shaped blocks (204) are fixed on the support block (203). The outer peripheral wall of the L-shaped block (204) is slidably connected to a positioning clamp (205).

3. The auxiliary tooling for installing the furnace chamber of a single crystal furnace as described in claim 2, characterized in that: A dual-axis motor (206) is installed on the support block (203). A lead screw (207) is coaxially connected to the output shaft of the dual-axis motor (206). One end of the lead screw (207) is rotatably connected to the L-shaped block (204). The positioning clamp (205) is threadedly connected to the lead screw (207) through a threaded hole.

4. The auxiliary tooling for installing the furnace chamber of a single crystal furnace as described in claim 1, characterized in that: A servo motor (311) is mounted on the top surface of the support block (203). A gear (312) is sleeved on the output shaft of the servo motor (311). Multiple tooth grooves (313) are opened on the side wall of the adjustment block (301). The gear (312) meshes with the tooth grooves (313).

5. The auxiliary tooling for installing the furnace chamber of a single crystal furnace as described in claim 4, characterized in that: Two limiting blocks (314) are fixed on the outer peripheral wall of the round rod (302), and the round block (303) is slidably connected to the limiting block (314).

6. The auxiliary tooling for installing the upper chamber of a single crystal furnace as described in claim 5, characterized in that: An electric actuator (315) is installed on the outer peripheral wall of the round rod (302), and the piston rod of the electric actuator (315) is fixedly connected to the round block (303).

7. The auxiliary tooling for installing the upper chamber of a single crystal furnace as described in claim 6, characterized in that: The cylindrical block (306) has multiple protrusions (316) fixed on its outer peripheral wall, and the outer wall of the connecting rod (305) is slidably connected to the groove wall of the limiting groove (308).

8. The auxiliary tooling for installing the upper chamber of a single crystal furnace as described in claim 7, characterized in that: The diameter of the disk (307) is smaller than the inner diameter of the lower end of the guide tube (101).

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