A sealing device for high-purity chemical production

Abstract

This utility model discloses a sealing device for the production of high-purity chemicals, belonging to the field of chemical equipment. The sealing device for high-purity chemical production of this utility model has a first protrusion on one side of a first pipe and a second protrusion on one side of a second pipe. The sealing device includes: a gasket placed between the first and second pipes; and a locking member sleeved on the first and second pipes. The locking member includes a first locking part, a second locking part, and a fastening part. The first protrusion, the second protrusion, and the gasket are all located within the locking space formed by the first and second locking parts, and the first and second protrusions abut against the inner wall of the locking space. This utility model patent allows for the selection of gaskets of different materials according to different working conditions, and can adapt to various working conditions such as high and low temperatures, high pressure, high vacuum, and corrosive materials. It has excellent sealing characteristics and ensures a clean environment for the storage of high-purity chemicals.

Description

Technical Field

[0001] This utility model relates to the field of sealing technology for high-purity chemicals, and more specifically, to a sealing device for the production of high-purity chemicals. Background Technology

[0002] In the production and manufacturing process of high-purity chemicals, it is often necessary to simultaneously meet operating conditions such as high pressure, high temperature or low temperature, and vacuum, and sometimes it is also necessary to switch between various operating conditions. It is necessary to ensure the stability of high-purity chemical production and the leakage rate can be <10-9mbar*L / s. Therefore, the sealing of the containers for high-purity chemicals or the sealing between the pipelines for transportation are particularly important.

[0003] Existing pipe sealing structures typically involve placing two flanges at both ends of the pipe, with a rubber sealing ring positioned between the two flanges. By tightening the two flanges, the rubber sealing ring is compressed, thus achieving a pipe seal.

[0004] However, the above sealing methods are not suitable for sealing high-purity chemicals because high-purity chemicals are often highly corrosive and will react chemically with the rubber sealing ring. Moreover, the rubber sealing ring may harden and fail when switching between high pressure, high temperature or low temperature, vacuum and other operating conditions, leading to leakage of high-purity chemicals and thus causing safety accidents. Utility Model Content

[0005] The purpose of this utility model is to overcome the above-mentioned shortcomings and provide a sealing device for the production of high-purity chemicals. By setting a sealing element, a gasket, and a locking element at the end of the pipeline to seal the pipeline, the leakage of high-purity chemicals can be effectively prevented.

[0006] To achieve the above objectives, the technical solution provided by this utility model is as follows:

[0007] The sealing device for high-purity chemical production of this utility model is used to seal the first pipeline and the second pipeline. The high-purity chemicals include, but are not limited to, TEOS, BDEAS, 3DMAS, DIPAS, TiCl4, TMA, TDMAT, HCDS, SiH2Cl2, Si2H6, WCl5, WF6, AlCl3, HfCl4 and ZrCl4.

[0008] The first pipe has a first protrusion on one side, and the second pipe has a second protrusion on the side of the second pipe that is close to the first pipe; the sealing device for high-purity chemical production includes: a gasket, the gasket being placed between the first pipe and the second pipe; and a locking member, the locking member being sleeved on the first pipe and the second pipe;

[0009] The locking component includes a first locking part, a second locking part, and a fastening part. The first protrusion, the second protrusion, and the gasket are all located within the locking space formed by the first locking part and the second locking part. The first protrusion and the second protrusion abut against the inner wall of the locking space so that the first protrusion, the second protrusion, and the gasket fit tightly together when the fastening part locks the first locking part and the second locking part. The length direction of the fastening part is perpendicular to the length direction of the first pipe and the second pipe.

[0010] As a further improvement of this utility model, the side of the first protrusion and the second protrusion that are close to each other is defined as the sealing surface, and a first sealing element is provided on the sealing surface of the first protrusion.

[0011] As a further improvement of this utility model, a second sealing element is provided on the sealing surface of the second protrusion.

[0012] As a further improvement of this utility model, the distance from the first seal to the axis of the first pipe is equal to the distance from the second seal to the axis of the second pipe.

[0013] As a further improvement of this utility model, the first sealing element is constructed as two sealing rings of equal height, and the ratio between the distance between the two sealing rings and the width of the first protrusion is in the range of 0.5 to 0.8.

[0014] As a further improvement of this utility model, the second seal is constructed as two sealing rings of equal height, and the ratio between the distance between the two sealing rings and the width of the second protrusion is in the range of 0.5 to 0.8.

[0015] As a further improvement of this utility model, the cross-section of the sealing ring is trapezoidal or semi-circular.

[0016] As a further improvement of this utility model, the side of the first protrusion and the second protrusion that is far away from each other is defined as the abutting surface, and the distance from the abutting surface to the sealing surface on the first protrusion gradually decreases from the position close to the outer wall of the first pipe to the position far away from the outer wall of the first pipe.

[0017] As a further improvement of this utility model, the distance between the abutting surface and the sealing surface of the second protrusion gradually decreases from the position close to the outer wall of the second pipe to the position far away from the outer wall of the second pipe.

[0018] As a further improvement of this utility model, the surface of the locking member that contacts the abutment surface is constructed as an inclined surface, and the inclination angle of the inclined surface is consistent with that of the abutment surface.

[0019] Beneficial effects

[0020] Compared with the prior art, the technical solution provided by this utility model has the following advantages:

[0021] (1) This utility model uses a metal gasket to contact the sealing element of the pipe, and locks the sealing element and the metal gasket together with a locking element, which effectively avoids the corrosion of the sealing ring by high-purity chemicals and avoids the leakage of high-purity chemicals.

[0022] (2) The contact surface and the surface of the locking member that are in contact with the contact surface of the present invention are both constructed as inclined surfaces. During the locking process, the locking member can apply force evenly to the first protrusion and the second protrusion, so that the seal between the first pipe and the second pipe is tighter. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of a sealing device for the production of high-purity chemicals according to an embodiment of this application;

[0024] Figure 2 This is a cross-sectional structural schematic diagram of a sealing device for the production of high-purity chemicals according to an embodiment of this application;

[0025] Figure 3 This is a schematic diagram of the structure of the first or second pipe of a sealing device for the production of high-purity chemicals according to an embodiment of this application;

[0026] Explanation of the labels in the diagram:

[0027] 100. First pipe; 110. First protrusion; 120. First seal;

[0028] 200. Second pipe; 210. Second protrusion; 220. Second seal;

[0029] 300. Gasket;

[0030] 400. Locking component; 410. First locking part; 420. Second locking part; 430. Fastening part;

[0031] 500, sealing surface;

[0032] 600, contact surface. Detailed Implementation

[0033] To further understand the content of this utility model, a detailed description of this utility model will be provided in conjunction with the accompanying drawings and embodiments.

[0034] The structures, proportions, and sizes illustrated in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the invention. They are not intended to limit the scope of the invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of the invention, should still fall within the scope of the technical content disclosed in this utility model. Furthermore, terms such as "upper," "lower," "left," "right," and "middle" used in this specification are merely for clarity and not intended to limit the scope of implementation. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention's implementation.

[0035] Combination Figures 1 to 3 The sealing device in this embodiment is used to seal the first pipe 100 and the second pipe 200. The high-purity chemicals are aluminum trichloride / zirconium tetrachloride / hafnium tetrachloride, which are highly corrosive and react with rubber.

[0036] like Figure 1 and Figure 2 As shown, the sealing device for high-purity chemical production in this embodiment includes a gasket 300 and a locking member 400. The gasket 300 is placed between the first pipe 100 and the second pipe 200; a first protrusion 120 is provided on one side of the first pipe 100, and a second protrusion 210 is provided on the side of the second pipe 200 closest to the first pipe 100; the locking member 400 is sleeved on the first pipe 100 and the second pipe 200; the locking member 400 includes a first locking part 410, a second locking part 420, and a fastening part 430, and the first protrusion 110 and the second protrusion 420 are... Both 210 and 300 are located within the locking space formed by the first locking part 410 and the second locking part 420. The first protrusion 110 and the second protrusion 210 abut against the inner wall of the locking space so that when the fastening part 430 locks the first locking part 410 and the second locking part 420, the first protrusion 110, the second protrusion 210 and the 300 fit tightly together. The length direction of the fastening part 430 is perpendicular to the length direction of the first pipe 100 and the second pipe 200.

[0037] Specifically, such as Figure 3As shown, the first protrusion 110 and the first pipe 100 are integrally manufactured, and the second protrusion 210 and the second pipe 200 are integrally manufactured. The first protrusion 110 and the second protrusion 210 are the same size and shape. When sealing the pipe, the first protrusion 110 and the second protrusion 210 approach each other and compress the gasket 300 placed between the first protrusion 110 and the second protrusion 210. The gasket 300 is compressed until there are no gaps between it and the first protrusion 110 and the second protrusion 210, thus achieving a sealing effect.

[0038] It should be noted that the locking member 400 provides the driving force for the first protrusion 110 and the second protrusion 210 to compress the pad 300. Specifically, the first locking part 410 and the second locking part 420 of the locking member 400 can be fixedly connected by the fastening part 430. After the first locking part 410 and the second locking part 420 are pressed together, they form a locking space. The first protrusion 110, the second protrusion 210, and the pad 300 are placed in the locking space. When the first locking part 410 and the second locking part 420 slowly close under the action of the fastening part 430, the locking space is closed. As the volume decreases, the first protrusion 110 and the second protrusion 210 slowly move closer to each other under the action of the inner walls of the first locking part 410 and the second locking part 420. Finally, the first protrusion 110 and the second protrusion 210 squeeze the gasket 300 until the first locking part 410 and the second locking part 420 stop moving under the action of the fastening part 430, and the locking space can no longer be reduced. At this time, the first protrusion 110 and the second protrusion 210 squeeze the gasket 300 until there are no gaps between it and the first protrusion 110 and the second protrusion 210, thus achieving a sealing effect.

[0039] The device of this invention effectively avoids the corrosion of the sealing ring by high-purity chemicals and prevents the leakage of high-purity chemicals. According to a large amount of usage data, the leakage rate is reduced by at least 10% during the maintenance period, ensuring the smooth operation of production.

[0040] More specifically, the first locking part 410 and the second locking part 420 are sleeved on the first pipe 100 and the second pipe 200. Screw holes are provided at corresponding positions on the first locking part 410 and the second locking part 420. The fastening part 430 is a screw adapted to the screw hole. When the fastening part 430 is tightened, the first locking part 410 and the second locking part 420 will move towards each other until they are tightly pressed together. Two screws are provided, located on different sides of the first pipe 100 and the second pipe 200.

[0041] The first locking part 410 and the second locking part 420 "wrap" the first protrusion 110 and the second protrusion 210, and then lock the first locking part 410 and the second locking part 420 through the fastening part 430. The length direction of the fastening part 430 is perpendicular to the length direction of the first pipe 100 and the second pipe 200, that is, the tightening direction of the screw is consistent with the movement direction of the first locking part 410 and the second locking part 420. The advantage of this is that, compared with traditional flange locking, only two screws are needed to lock the first locking part 410 and the second locking part 420, while traditional flange locking requires a large number of screws. In addition, the volume of the first locking part 410 and the second locking part 420 can be set to be smaller, only needing to form a locking space that wraps the first protrusion 110, the second protrusion 210 and the gasket 300. Therefore, the volume and weight of the locking part 400 are smaller than those of traditional flanges, which meets the requirements of high-purity chemical production.

[0042] In one specific embodiment, the surfaces of the first protrusion 110 and the second protrusion 210 that are close together form a sealing surface 500. A first sealing element 120 is provided on the sealing surface 500 of the first protrusion 110, and a second sealing element 220 is provided on the sealing surface 500 of the second protrusion 210. The first sealing element 120 and the second sealing element 220 contact the gasket 300, making the fit between the gasket 300 and the first protrusion 110 and the second protrusion 210 tighter. Two sealing rings are provided on both the first protrusion 110 and the second protrusion 210. When sealing the first pipe 100 and the second pipe 200, the two sealing rings abut against the gasket 300, causing the gasket 300 to deform and thus achieving a full seal between the first pipe 100 and the second pipe 200.

[0043] Specifically, the distance from the first seal 120 to the axis of the first pipe 100 is equal to the distance from the second seal 220 to the axis of the second pipe 200. That is, the positions of the two sealing rings on the first protrusion 110 and the two sealing rings on the second protrusion 210 are symmetrically arranged. When the first pipe 100 and the second pipe 200 are placed coaxially, the two sealing rings on the first protrusion 110 and the two sealing rings on the second protrusion 210 are located on the same horizontal line. This ensures that when the two sealing rings on the first protrusion 110 and the two sealing rings on the second protrusion 210 abut against the gasket 300, the gasket 300 will not shift during deformation.

[0044] Furthermore, the first sealing element 120 is constructed as two sealing rings of equal height, and the ratio between the distance between the two sealing rings and the width of the first protrusion 110 ranges from 0.5 to 0.8, specifically 0.6, 0.7, or 0.8. The second sealing element 220 is also constructed as two sealing rings of equal height, and the ratio between the distance between the two sealing rings and the width of the second protrusion 210 ranges from 0.5 to 0.8, specifically 0.6, 0.7, or 0.8. Within these ranges, when the sealing rings abut against the gasket 300, the deformation of the gasket 300 ensures relatively uniform stress distribution throughout, thus increasing the sealing life of the gasket 300.

[0045] More specifically, the cross-section of the sealing ring is trapezoidal or semi-circular, that is, the width of the end of the sealing ring away from the first protrusion 110 or the second protrusion 210 is smaller than the width of the end of the sealing ring close to the first protrusion 110 or the second protrusion 210.

[0046] In one feasible solution, the gasket 300 is made of high-purity PTFE or pure nickel, 316L silver-plated materials, etc. When the gasket 300 comes into contact with the sealing ring, the gasket 300 will be squeezed and deformed by the sealing ring to form a tight sealing structure.

[0047] In one specific embodiment, the surfaces of the first protrusion 110 and the second protrusion 210 that are far apart are abutment surfaces 600. The distance from the abutment surface 600 to the sealing surface 500 on the first protrusion 110 gradually decreases from a position near the outer wall of the first pipe 100 to a position far from the outer wall of the first pipe 100. The distance from the abutment surface 600 to the sealing surface 500 on the second protrusion 210 gradually decreases from a position near the outer wall of the second pipe 200 to a position far from the outer wall of the second pipe 200. The surface of the locking member 400 that contacts the abutment surface 600 is constructed as an inclined surface, and the inclination angle of the inclined surface is consistent with that of the abutment surface 600 it contacts.

[0048] Specifically, during the locking process of the locking member 400, the surface of the locking member 400 that contacts the abutment surface 600 will press against the abutment surface 600, thereby causing the first protrusion 110 and the second protrusion 210 to move towards each other. As a result, the first sealing member 120 and the second sealing member 220 simultaneously press against the gasket 300. Finally, the gasket 300 deforms under the action of the first sealing member 120 and the second sealing member 220, so that the first pipe 100 and the second pipe 200 are fully sealed.

[0049] The present invention and its embodiments have been described above illustratively. This description is not restrictive, and the figures shown are only one embodiment of the present invention; the actual structure is not limited thereto. Therefore, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A sealing device for the production of high-purity chemicals, used to seal a first pipe (100) and a second pipe (200), characterized in that: The first pipe (100) has a first protrusion (110) on one side, and the second pipe (200) has a second protrusion (210) on the side of the second pipe (200) that is close to the first pipe (100); The sealing device for the production of high-purity chemicals includes: A gasket (300) is placed between the first pipe (100) and the second pipe (200); A locking element (400) is sleeved on the first pipe (100) and the second pipe (200); The locking member (400) includes a first locking part (410), a second locking part (420), and a fastening part (430). The first protrusion (110), the second protrusion (210), and the gasket (300) are all located within the locking space formed by the first locking part (410) and the second locking part (420). The first protrusion (110) and the second protrusion (210) abut against the inner wall of the locking space so that when the fastening part (430) locks the first locking part (410) and the second locking part (420), the first protrusion (110), the second protrusion (210), and the gasket (300) fit tightly together. The length direction of the fastening part (430) is perpendicular to the length direction of the first pipe (100) and the second pipe (200).

2. The sealing device for high-purity chemical production according to claim 1, characterized in that: The side of the first protrusion (110) and the second protrusion (210) that are close to each other is defined as the sealing surface (500), and a first sealing element (120) is provided on the sealing surface (500) of the first protrusion (110).

3. The sealing device for high-purity chemical production according to claim 2, characterized in that: A second seal (220) is provided on the sealing surface (500) of the second protrusion (210).

4. The sealing device for high-purity chemical production according to claim 3, characterized in that: The distance from the first seal (120) to the axis of the first pipe (100) is equal to the distance from the second seal (220) to the axis of the second pipe (200).

5. The sealing device for high-purity chemical production according to claim 4, characterized in that: The first seal (120) is configured as two sealing rings of equal height, and the ratio between the distance between the two sealing rings and the width of the first protrusion (110) is in the range of 0.5 to 0.

8.

6. The sealing device for high-purity chemical production according to claim 4, characterized in that: The second seal (220) is configured as two sealing rings of equal height, and the ratio between the distance between the two sealing rings and the width of the second protrusion (210) is in the range of 0.5 to 0.

8.

7. The sealing device for high-purity chemical production according to claim 5 or 6, characterized in that: The cross-section of the sealing ring is trapezoidal or semi-circular.

8. The sealing device for high-purity chemical production according to claim 2, characterized in that: The side of the first protrusion (110) and the second protrusion (210) that is far apart is defined as the abutting surface (600). The distance from the abutting surface (600) to the sealing surface (500) on the first protrusion (110) gradually decreases from the position close to the outer wall of the first pipe (100) to the position far away from the outer wall of the first pipe (100).

9. The sealing device for high-purity chemical production according to claim 8, characterized in that: The distance between the abutting surface (600) and the sealing surface (500) on the second protrusion (210) gradually decreases from a position close to the outer wall of the second pipe (200) to a position far away from the outer wall of the second pipe (200).

10. The sealing device for high-purity chemical production according to claim 9, characterized in that: The surface of the locking member (400) that contacts the abutment surface (600) is constructed as an inclined surface, and the inclination angle of the inclined surface is consistent with that of the abutment surface (600) it contacts.

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