A kind of ceramic orifice plate heater assembly leak detection tool

Abstract

This utility model relates to the field of leak detection technology for ceramic orifice plate heater assemblies, and discloses a tooling for leak detection of ceramic orifice plate heater assemblies, including a leak detection tooling base and a leak detection tooling cover. The upper end of the leak detection tooling base is provided with an annular sealing structure that seals with the bottom of the ceramic orifice plate heater assembly, and the lower end is provided with an interface adapted to a helium mass spectrometer leak detector. The leak detection tooling cover is provided with a conical sealing structure that matches the shape of the outer wall of the metal gas cone of the ceramic orifice plate heater assembly, and the top of the leak detection tooling cover is provided with a narrow-hole sealing structure. The annular sealing structure is a first annular groove, and the conical sealing structure is a second annular groove. The upper end of the leak detection tooling base is also provided with two symmetrically distributed positioning holes, the center distance of which is the same as the mounting hole distance of the metal rivets at the bottom of the ceramic orifice plate heater assembly. This utility model has a simple structure, good sealing performance, and can effectively detect the airtightness of ceramic orifice plate heater assemblies.

Description

Technical Field

[0001] This utility model belongs to the field of leak detection technology for ceramic orifice plate heater assemblies, and specifically relates to a tooling for leak detection of ceramic orifice plate heater assemblies. Background Technology

[0002] Ceramic orifice plate heater assemblies are used in mass spectrometers as a key structure connecting the ion source and the mass analyzer. They require effective isolation between the ion source (atmospheric environment) and the mass analyzer (high vacuum environment) to reduce energy loss during collisions of high-speed electrons and positive ions with gas molecules, thereby ensuring the stability and accuracy of mass spectrometry analysis. Because the mass analyzer has extremely high vacuum requirements, the ceramic orifice plate heater assembly must possess excellent gas tightness (helium mass spectrometry leak detection standard: leak rate ≤ 1 × 10⁻⁶). -9 Pa·m 3 ( / s) to effectively maintain an ultra-high vacuum environment, prevent atmospheric leakage from causing a decrease in detection sensitivity, and ensure long-term reliable operation of the mass spectrometer.

[0003] In mass spectrometers, ceramic orifice plate heater assemblies not only serve a sealing and isolation function but also welded to metal gas cones to create the narrow orifice channels required for ions to enter the mass analyzer. Given the stringent vacuum requirements of mass spectrometers, ensuring excellent overall airtightness of the ceramic orifice plate heater assembly necessitates guaranteeing reliable airtightness and leak-free operation at the welded interfaces. Summary of the Invention

[0004] The purpose of this invention is to overcome the above-mentioned problems and provide a tooling for leak detection of ceramic orifice plate heater assemblies, which can perform airtightness testing on ceramic orifice plate heater assemblies, quickly and accurately evaluate the overall sealing performance, and thus effectively verify product quality.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This utility model provides a tooling for leak detection of ceramic orifice plate heater assembly, including a leak detection tooling base and a leak detection tooling cover. The upper end of the leak detection tooling base is provided with an annular sealing structure that seals with the bottom of the ceramic orifice plate heater assembly, and the lower end is provided with an interface adapted to a helium mass spectrometer leak detector.

[0007] The leak detection fixture cover is provided with a conical sealing structure that matches the shape of the outer wall of the metal gas cone of the ceramic orifice plate heater assembly, and the top of the leak detection fixture cover is provided with a narrow hole sealing structure.

[0008] A further improvement of this utility model is that the annular sealing structure is a first annular groove, and a first O-ring is provided in the first annular groove.

[0009] A further improvement of this invention is that the width of the first annular groove is 3-5 mm.

[0010] A further improvement of this utility model is that the conical sealing structure is a second annular groove, and a second O-ring is provided in the second annular groove.

[0011] A further improvement of this invention is that the width of the second annular groove is 2-4 mm.

[0012] A further improvement of this utility model is that the inner diameter of the upper end of the leak detection fixture base is D+2mm and the outer diameter is E-2mm, where D is the reference inner diameter of the bottom of the ceramic orifice plate heater assembly and E is the reference outer diameter of the bottom of the ceramic orifice plate heater assembly.

[0013] A further improvement of this utility model is that the upper end of the leak detection fixture base is provided with two symmetrically distributed positioning holes, and the center distance of the positioning holes is the same as the mounting hole distance of the metal rivets at the bottom of the ceramic orifice plate heater assembly.

[0014] A further improvement of this utility model is that the inner diameter of the positioning hole is F+0.5mm, where F is the reference diameter of the metal rivet.

[0015] A further improvement of this utility model is that the inner cavity of the leak detection fixture cover is a conical structure, and its cone angle is consistent with the cone angle of the metal gas cone at the top of the ceramic orifice plate heater assembly.

[0016] A further improvement of this utility model is that the inner diameter of the narrow hole sealing structure is a+1mm, and the bottom outer diameter of the leak detection fixture cover is b-3mm, where a is the reference value of the outer diameter of the narrow hole at the head of the metal air cone, and b is the reference value of the outer diameter of the tail of the metal air cone.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] This invention provides a leak detection fixture for ceramic orifice plate heater assemblies. Through a specially designed base and top cover, precise docking and sealing with the ceramic orifice plate heater assembly are achieved. The upper end of the base has an annular sealing structure for sealing with the bottom of the ceramic orifice plate heater assembly, and the top cover has a conical sealing structure that matches the shape of the outer wall of the metal gas cone of the ceramic orifice plate heater assembly. This ensures precise docking and effective sealing between the fixture and the ceramic orifice plate heater assembly, guaranteeing airtightness. The lower end of the base has an interface for a helium mass spectrometer leak detector, facilitating connection to a professional helium mass spectrometer and enabling smooth testing. The leak detection fixture provided by this invention has a simple structure and is easy to operate. It can quickly and accurately test the airtightness of ceramic orifice plate heater assemblies, effectively evaluate overall sealing performance, verify product quality, improve testing efficiency and accuracy, and provide reliable assurance for the quality control of ceramic orifice plate heater assemblies in mass spectrometers. Attached Figure Description

[0019] The accompanying drawings described herein are for illustrative purposes only and are not intended to limit the scope of the present invention in any way. Furthermore, the shapes and proportions of the components in the drawings are merely illustrative to aid in understanding the present invention and do not specifically limit the shapes and proportions of the components of the present invention.

[0020] Figure 1 This is a schematic diagram of the tooling base structure for leak detection of the ceramic orifice plate heater assembly of this utility model;

[0021] Figure 2 This is a schematic diagram of the upper cover structure of the tooling for leak detection of the ceramic orifice plate heater assembly of this utility model;

[0022] Figure 3 This is a schematic diagram of the ceramic perforated plate heater assembly.

[0023] Figure 4 This is a schematic diagram of the metal gas cone structure of a ceramic orifice plate heater assembly.

[0024] The components include: 1. Leak detection fixture base; 101. First annular groove; 102. Positioning hole; 103. Interface; 104. First O-ring seal; 2. Leak detection fixture top cover; 201. Narrow hole sealing structure; 202. Second annular groove; 203. Second O-ring seal; 3. Ceramic orifice plate heater assembly; 4. Metal rivet; 5. Metal air cone; 501. Narrow hole. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0027] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0028] In the description of the embodiments of this utility model, it should be noted that if terms such as "upper," "lower," "horizontal," or "inner" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use, they are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the utility model. Furthermore, terms such as "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0029] Furthermore, the use of the term "horizontal" does not imply that the component must be absolutely horizontal, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of the embodiments of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0031] The present invention will now be described in further detail with reference to the accompanying drawings:

[0032] like Figures 1 to 4 As shown, this utility model provides a leak detection fixture for a ceramic orifice plate heater assembly, including a leak detection fixture base 1 and a leak detection fixture cover 2. The upper end of the leak detection fixture base 1 is provided with an annular sealing structure that seals with the bottom of the ceramic orifice plate heater assembly 3, and the lower end is provided with an interface 103 adapted to a helium mass spectrometer leak detector. The leak detection fixture cover 2 is provided with a conical sealing structure that matches the shape of the outer wall of the metal gas cone 5 of the ceramic orifice plate heater assembly 3, and the top of the leak detection fixture cover 2 is provided with a narrow hole sealing structure 201.

[0033] The annular sealing structure is a first annular groove 101, in which a first O-ring 104 is provided. The width of the first annular groove 101 is 3-5mm. This width design ensures that the first O-ring 104 can be securely installed in the groove and provides a good sealing effect during leak detection.

[0034] The conical sealing structure is a second annular groove 202, within which a second O-ring seal 203 is provided. The width of the second annular groove 202 is 2-4 mm. This width design allows the second O-ring seal 203 to fit tightly against the outer wall of the metal air cone 5 of the ceramic orifice plate heater assembly 3, forming an effective seal.

[0035] The inner diameter of the upper end of the leak detection fixture base 1 is D+2mm, and the outer diameter is E-2mm, where D is the reference inner diameter of the bottom of the ceramic orifice plate heater assembly 3, and E is the reference outer diameter of the bottom of the ceramic orifice plate heater assembly 3. This size design ensures that the leak detection fixture base 1 can accurately align with the bottom of the ceramic orifice plate heater assembly 3, avoiding both installation failure due to insufficient size and poor sealing due to excessive size.

[0036] The upper end of the leak detection fixture base 1 has two symmetrically distributed positioning holes 102. The center distance of the positioning holes 102 is the same as the mounting hole distance of the metal rivets 4 at the bottom of the ceramic orifice plate heater assembly 3. The inner diameter of the positioning holes 102 is F + 0.5 mm, where F is the reference diameter of the metal rivets 4. This design allows the ceramic orifice plate heater assembly 3 to be accurately positioned during installation by engaging the metal rivets 4 with the positioning holes 102, preventing displacement during leak detection.

[0037] The inner cavity of the leak detection fixture cover 2 is conical, with its cone angle matching that of the metal air cone 5 at the top of the ceramic orifice heater assembly 3. The inner diameter of the narrow hole sealing structure 201 at the top of the leak detection fixture cover 2 is a+1mm, and the outer diameter of the bottom of the leak detection fixture cover 2 is b-3mm, where a is the reference value for the outer diameter of the narrow hole 501 at the head of the metal air cone 5, and b is the reference value for the outer diameter of the tail of the metal air cone 5. This design allows the leak detection fixture cover 2 to form a good fit with the metal air cone 5 of the ceramic orifice heater assembly 3, ensuring a sealing effect during the leak detection process.

[0038] In practical applications, the leak detection fixture is used as follows: First, place the ceramic orifice plate heater assembly 3 on the leak detection fixture base 1, ensuring that its bottom is in close contact with the first O-ring seal 104, while aligning the metal rivet 4 with the positioning hole 102; then, slip the leak detection fixture cover 2 onto the top of the ceramic orifice plate heater assembly 3, so that the metal gas cone 5 forms a seal with the second O-ring seal 203; finally, connect the interface 103 of the leak detection fixture base 1 to the helium mass spectrometer leak detector for leak detection testing.

[0039] The structural design of this leak detection fixture allows it to adapt to ceramic orifice plate heater assemblies 3 of different specifications. By adjusting relevant parameters, leak detection tests can be performed on different models of products. Simultaneously, the sealing structure design of the leak detection fixture ensures the accuracy and reliability of the leak detection process, effectively improving leak detection efficiency.

[0040] Example 1

[0041] A leak detection fixture for a ceramic orifice plate heater assembly includes a leak detection fixture base 1 and a leak detection fixture cover 2. The upper end of the leak detection fixture base 1 is provided with a first annular groove 101 that seals against the bottom of the ceramic orifice plate heater assembly 3. A first O-ring seal 104 is provided in the first annular groove 101. The width of the first annular groove 101 is 4mm, which can meet the sealing requirements of different models of products.

[0042] The lower end of the leak detection fixture base 1 is provided with an interface 103 adapted to a helium mass spectrometer leak detector; the upper cover 2 of the leak detection fixture is provided with a second annular groove 202 that matches the shape of the outer wall of the metal gas cone 5 of the ceramic orifice plate heater assembly 3, and a second O-ring seal 203 is provided in the second annular groove 202. The width of the second annular groove 202 is 3mm, which is suitable for sealing and leak detection scenarios of different models of products. The top of the upper cover 2 of the leak detection fixture is provided with a narrow hole sealing structure 201.

[0043] The inner diameter of the upper end of the leak detection fixture base 1 is D+2mm, and the outer diameter is E-2mm, where D is the reference inner diameter of the bottom of the ceramic orifice plate heater assembly 3, and E is the reference outer diameter of the bottom of the ceramic orifice plate heater assembly 3. This dimensional design ensures that the leak detection fixture base 1 can be precisely aligned with the bottom of the ceramic orifice plate heater assembly 3.

[0044] The upper end of the leak detection fixture base 1 has two symmetrically distributed positioning holes 102. The center distance of the positioning holes 102 is the same as the mounting hole distance of the metal rivets 4 at the bottom of the ceramic orifice plate heater assembly 3. The inner diameter of the positioning holes 102 is F + 0.5 mm, where F is the reference diameter of the metal rivets 4. This design allows the ceramic orifice plate heater assembly 3 to be precisely positioned during installation by engaging the metal rivets 4 with the positioning holes 102.

[0045] The inner cavity of the leak detection fixture cover 2 is conical, with its cone angle matching that of the metal air cone 5 at the top of the ceramic orifice heater assembly 3. The inner diameter of the narrow hole sealing structure 201 at the top of the leak detection fixture cover 2 is a+1mm, and the outer diameter of the bottom of the leak detection fixture cover 2 is b-3mm, where a is the reference value for the outer diameter of the narrow hole 501 at the head of the metal air cone 5, and b is the reference value for the outer diameter of the tail of the metal air cone 5. This design allows the leak detection fixture cover 2 to form a good fit with the metal air cone 5 of the ceramic orifice heater assembly 3.

[0046] In this embodiment, the leak detection tooling is made of high-strength aluminum alloy, which is lightweight, high-strength, and corrosion-resistant, making it suitable for long-term use in leak detection environments. Meanwhile, the O-ring is made of fluororubber, which has excellent high-temperature resistance and chemical corrosion resistance, maintaining a good sealing effect in various leak detection environments.

[0047] The design of this leak detection fixture also takes into account ease of operation. Both the base 1 and the top cover 2 of the leak detection fixture are designed with anti-slip textures, making it easy for operators to grip firmly during installation and disassembly. At the same time, the bottom of the base 1 of the leak detection fixture is designed with a flat structure, which can be placed stably on the workbench to prevent tilting or movement during the leak detection process.

[0048] In practical applications, this leak detection fixture can be adapted to ceramic orifice plate heater assemblies 3 of different specifications. By replacing the O-rings of different specifications, it can meet the leak detection requirements of different product models. Furthermore, the structural design of the leak detection fixture allows for quick installation and disassembly, greatly improving leak detection efficiency.

[0049] Many embodiments and applications beyond the examples provided will be apparent to those skilled in the art upon reading the foregoing description. Therefore, the scope of this teaching should not be determined by reference to the foregoing description, but rather by reference to the foregoing claims and the full scope of their equivalents. For purposes of completeness, all articles and references, including patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein in the foregoing claims is not intended as a waiver of that subject matter, nor should it be construed as an indication that the applicant has not considered that subject matter as part of the disclosed utility model subject matter.

[0050] The above content provides a further detailed description of this utility model. It should not be considered that the specific embodiments of this utility model are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the concept of this utility model, and all such deductions or substitutions should be considered to fall within the scope of protection of this utility model as defined by the submitted claims.

Claims

1. A tooling for leak detection of a ceramic orifice plate heater assembly, characterized in that, It includes a leak detection fixture base (1) and a leak detection fixture cover (2). The upper end of the leak detection fixture base (1) is provided with an annular sealing structure that seals with the bottom of the ceramic orifice plate heater assembly (3), and the lower end is provided with an interface (103) adapted to a helium mass spectrometer leak detector. The leak detection fixture cover (2) is provided with a conical sealing structure that matches the shape of the outer wall of the metal gas cone (5) of the ceramic orifice plate heater assembly (3), and the top of the leak detection fixture cover (2) is provided with a narrow hole sealing structure (201).

2. The tooling for leak detection of a ceramic orifice plate heater assembly according to claim 1, characterized in that, The annular sealing structure is a first annular groove (101), and a first O-ring (104) is provided in the first annular groove (101).

3. The tooling for leak detection of a ceramic orifice plate heater assembly according to claim 2, characterized in that, The width of the first annular groove (101) is 3-5 mm.

4. The tooling for leak detection of a ceramic orifice plate heater assembly according to claim 1, characterized in that, The conical sealing structure is a second annular groove (202), and a second O-ring (203) is provided in the second annular groove (202).

5. The tooling for leak detection of a ceramic orifice plate heater assembly according to claim 4, characterized in that, The width of the second annular groove (202) is 2-4 mm.

6. The tooling for leak detection of a ceramic orifice plate heater assembly according to claim 1, characterized in that, The inner diameter of the upper end of the leak detection fixture base (1) is D+2mm and the outer diameter is E-2mm, where D is the reference inner diameter of the bottom of the ceramic orifice plate heater assembly (3) and E is the reference outer diameter of the bottom of the ceramic orifice plate heater assembly (3).

7. The tooling for leak detection of a ceramic orifice plate heater assembly according to claim 1, characterized in that, The upper end of the leak detection fixture base (1) is provided with two symmetrically distributed positioning holes (102), and the center distance of the positioning holes (102) is the same as the mounting hole distance of the metal rivets (4) at the bottom of the ceramic orifice plate heater assembly (3).

8. The tooling for leak detection of a ceramic orifice plate heater assembly according to claim 7, characterized in that, The inner diameter of the positioning hole (102) is F+0.5mm, where F is the reference diameter of the metal rivet (4).

9. The tooling for leak detection of a ceramic orifice plate heater assembly according to claim 1, characterized in that, The inner cavity of the leak detection fixture cover (2) is a conical structure, and its cone angle is consistent with the cone angle of the metal gas cone (5) at the top of the ceramic orifice plate heater assembly (3).

10. The tooling for leak detection of a ceramic orifice plate heater assembly according to claim 1, characterized in that, The inner diameter of the narrow hole sealing structure (201) is a+1mm, and the bottom outer diameter of the leak detection fixture cover (2) is b-3mm, where a is the reference value of the outer diameter of the narrow hole (501) at the head of the metal air cone (5), and b is the reference value of the outer diameter of the tail of the metal air cone (5).

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