Tape and stack
By setting protrusions on the bar of a gallium nitride-based semiconductor laser to separate it from the cavity surface, the problem of easy tearing of the bar cavity film was solved, and the stability and reliability of the coating were achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU GANBRIGHT OPTOELECTRONIC TECHNOLOGY CO LTD
- Filing Date
- 2025-05-23
- Publication Date
- 2026-06-02
Smart Images
Figure CN224318910U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor technology, specifically to a strip and a stack. Background Technology
[0002] Gallium nitride (GaN) semiconductor lasers are characterized by good monochromaticity, high efficiency, high power density, good directionality, low cost, and small size. Their spectral range covers the entire spectrum of near-infrared, visible, and ultraviolet light, making them an indispensable new type of high-efficiency semiconductor light source for strategic emerging industries such as laser display, laser lighting, laser direct writing, laser processing, and visible light communication.
[0003] Gallium nitride (GaN) semiconductor lasers typically employ a side-emitting structure, using gallium nitride as the dielectric. An antireflection coating is deposited on one end face, and a high-reflection coating is deposited on the other end face to form a resonant cavity. Population inversion is achieved through electrical injection excitation, and stimulated emission is generated by the recombination of electrons and holes, which oscillates and amplifies within the cavity, thereby enabling light to be emitted from the end face with the antireflection coating. Utility Model Content
[0004] This application provides a strip and a stack, which reduces the risk that the cavity film of the bar strip is easily torn and detached by the strip.
[0005] This utility model provides a strip, comprising: a strip body including a first surface arranged along a first direction and a second surface arranged along a second direction, the first surface being used for coating, and the first surface being connected to the second surface; a first protrusion group including a plurality of first protrusions spaced apart along the first direction, the first protrusions being located on the second surface of the strip body on one side along the second direction and connected to the strip body, the distance from the first protrusion to the first surface along the first direction being greater than zero; and a second protrusion group including a plurality of second protrusions spaced apart along the first direction, the second protrusions being located on the second surface of the strip body on the other side along the second direction and connected to the strip body, the distance from the second protrusion to the first surface along the first direction being greater than zero; wherein, the second direction is perpendicular to the first direction.
[0006] Optionally, the number of first protrusions in the first protrusion group is two, and the number of second protrusions in the second protrusion group is two.
[0007] Optionally, the distance between the first protrusion group and the first surface along the first direction is 1µm to 10µm; the distance between the second protrusion group and the first surface along the first direction is 1µm to 10µm.
[0008] Optionally, the size of the first protrusion along the first direction is 5um to 500um; the size of the second protrusion along the first direction is 5um to 500um.
[0009] Optionally, the size of the first protrusion along the second direction is 1µm to 50µm, and the size of the second protrusion along the second direction is 1µm to 50µm.
[0010] Optionally, the central axis of the second protrusion along the second direction coincides with the central axis of the first protrusion along the second direction.
[0011] Optionally, the first protrusion extends along a third direction, and the dimension of the first protrusion along the third direction is greater than the dimension of the first protrusion along the first direction and greater than the dimension of the first protrusion along the second direction; the second protrusion extends along a third direction, and the dimension of the second protrusion along the third direction is greater than the dimension of the second protrusion along the first direction and greater than the dimension of the second protrusion along the second direction.
[0012] Optionally, the size of the first protrusion along the third direction is 300um to 3000um; the size of the second protrusion along the third direction is 300um to 3000um.
[0013] Optionally, the first protrusion is a first metal protrusion, and the second protrusion is a second metal protrusion.
[0014] Optionally, the material of the first metal protrusion includes one or more combinations of Ni, Ti, Pd, Pt, Au, Al and Cu; the material of the second metal protrusion includes one or more combinations of Ni, Ti, Pd, Pt, Au, Al and Cu.
[0015] Optionally, the main body of the sapphire strip can be a sapphire strip body, a ceramic strip body, a glass strip body, a quartz strip body, a silicon wafer strip body, or a GaAS strip body.
[0016] This application also provides a stack body, comprising: a plurality of auxiliary strips of this application, the plurality of auxiliary strips being arranged along a second direction; a bar strip, located between adjacent auxiliary strips, the front cavity surface and the rear cavity surface of the bar strip being arranged along the first direction; one side surface of the bar strip along the second direction contacting the first protrusion, and the other side surface of the bar strip along the second direction contacting the second protrusion.
[0017] The technical solution of this utility model has the following advantages:
[0018] The auxiliary strip provided by this utility model has a first protrusion on one side surface of the auxiliary strip body along a second direction, and a second protrusion on the other side surface of the auxiliary strip body along the second direction. The first and second protrusions are used to support the bar strip. There is a gap between adjacent first protrusions, and a certain distance between the first protrusion and the first surface along the first direction, which makes it easy to separate the first protrusion and the bar strip after the cavity surface is coated. Similarly, there is a gap between adjacent second protrusions, and a certain distance between the second protrusion and the first surface along the first direction, which also makes it easy to separate the second protrusion and the bar strip after the cavity surface is coated. Because both the first and second protrusions are easily separated from the bar strip after the cavity surface is coated, the risk of the cavity surface coating of the bar strip being easily torn or detached is reduced. Attached Figure Description
[0019] To more clearly illustrate the specific embodiments of this utility model or the drawings used in the description of the prior art, it is obvious that the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0020] Figure 1 A structural diagram of a strip provided in an embodiment of this utility model;
[0021] Figure 2 for Figure 1 Structural diagram of the main body of the middle strip;
[0022] Figure 3 for Figure 1 Top view of the central bar;
[0023] Figure 4 This is a structural diagram of a stacked body provided in another embodiment of the present invention. Detailed Implementation
[0024] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0025] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0027] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.
[0028] One embodiment of this utility model provides a strip 100, in conjunction with reference to the reference. Figures 1 to 3 ,include:
[0029] The main body 103 of the strip includes a first surface 1031 arranged along a first direction X and a second surface 1032 arranged along a second direction Z. The first surface 1031 is used for coating, and the first surface 1031 is connected to the second surface 1032.
[0030] The first protrusion group A includes a plurality of first protrusions 101 spaced apart along the first direction X. Each first protrusion 101 is located on the second surface 1032 of the supporting strip body 103 along the second direction Z and is connected to the supporting strip body 103. The distance from the first protrusion 101 to the first surface 1031 along the first direction X is greater than zero.
[0031] The second protrusion group B includes a plurality of second protrusions 102 arranged at intervals along the first direction X. The second protrusions 10 are located on the second surface 1032 on the other side of the supporting strip body 103 along the second direction Z and are connected to the supporting strip body 103. The distance from the second protrusion 102 to the first surface 1031 along the first direction X is greater than zero.
[0032] Wherein, the second direction Z is perpendicular to the first direction X.
[0033] In this embodiment, the supporting strip has a first protrusion 101 on one side surface of the supporting strip body 103 along the second direction Z, and a second protrusion 102 on the other side surface of the supporting strip body 103 along the second direction Z. The first protrusion 101 and the second protrusion 102 are used to support the bar strip. There is a gap between adjacent first protrusions 101, and there is a certain distance between the first protrusion 101 and the first surface 1031 along the first direction X. This makes it easy to separate the first protrusion 101 and the bar strip after the cavity surface of the bar strip is coated. There is also a gap between adjacent second protrusions 102, and there is a certain distance between the second protrusion 102 and the first surface 1031 along the first direction X. This makes it easy to separate the second protrusion 102 and the bar strip after the cavity surface of the bar strip is coated. Since both the first protrusion 101 and the second protrusion 102 can be easily separated from the bar strip after the cavity surface of the bar strip is coated, the risk of the cavity surface coating of the bar strip being easily torn and detached is reduced.
[0034] The distance from the first protrusion 101 to the first surface 1031 along the first direction X is greater than zero, meaning that the distance from any point in the first protrusion 101 to the first surface 1031 along the first direction X is greater than zero. The distance from the second protrusion 102 to the first surface 1031 along the first direction X is greater than zero, meaning that the distance from any point in the second protrusion 102 to the first surface 1031 along the first direction X is greater than zero.
[0035] The first surface 1031 is connected to the second surface 1032. For example, the first surface 1031 is perpendicular to the second surface 1032.
[0036] The dimension of the main body 103 along the first direction X is greater than the dimension of the main body 103 along the second direction Z.
[0037] In one embodiment, reference Figure 1 The number of first protrusions 101 in the first protrusion group A is two, and the number of second protrusions 102 in the second protrusion group B is two.
[0038] In other embodiments, the number of first protrusions in the first protrusion group may be greater than two, and the number of second protrusions in the second protrusion group may be greater than two.
[0039] In one embodiment, the distance d3 between the first protrusion group A and the first surface 1031 along the first direction X is 1um to 10um, for example, 1um, 3um, 5um, 7um, 9um or 10um; the distance d4 between the second protrusion group B and the first surface 1031 along the first direction X is 1um to 10um, for example, 1um, 3um, 5um, 7um, 9um or 10um.
[0040] In one embodiment, d3 = d4.
[0041] In one embodiment, the size of the first protrusion 101 along the first direction X is 5um to 500um, for example, 5um, 20um, 50um, 100um, 150um or 500um; the size of the second protrusion 102 along the first direction X is 5um to 500um, for example, 5um, 20um, 50um, 100um, 150um or 500um.
[0042] In one embodiment, the dimension of the first protrusion 101 along the first direction X is equal to the dimension of the second protrusion 102 along the first direction X.
[0043] In one embodiment, the first protrusion 101 has a size of 1um to 50um along the second direction Z, for example, 1um, 5um, 10um, 20um or 50um; the second protrusion 102 has a size of 1um to 50um along the second direction Z, for example, 1um, 5um, 10um, 20um or 50um.
[0044] In one embodiment, the dimension of the first protrusion 101 along the second direction Z is equal to the dimension of the second protrusion 102 along the second direction Z.
[0045] In one embodiment, the central axis of the second protrusion 102 along the second direction Z coincides with the central axis of the first protrusion 101 along the second direction Z.
[0046] In one embodiment, reference Figure 3 The first protrusion 101 extends along a third direction Y, and the size of the first protrusion 101 along the third direction Y is greater than the size of the first protrusion 101 along the first direction X and greater than the size of the first protrusion 101 along the second direction Z; the second protrusion 102 extends along a third direction Y, and the size of the second protrusion 102 along the third direction Y is greater than the size of the second protrusion 102 along the first direction X and greater than the size of the second protrusion 102 along the second direction Z.
[0047] In one embodiment, the first protrusion 101 has a dimension of 300um to 3000um along the third direction Y, for example, 300um, 600um, 1000um, 2000um or 3000um; the second protrusion 102 has a dimension of 300um to 3000um along the third direction Y, for example, 300um, 600um, 1000um, 2000um or 3000um.
[0048] In one embodiment, the first protrusion 101 is a first metal protrusion, and the second protrusion 102 is a second metal protrusion. The support performance of the first protrusion 101 and the second protrusion 102 is improved.
[0049] In other embodiments, the first protrusion 101 may also be made of other materials. In other embodiments, the second protrusion 102 may also be made of other materials.
[0050] In one embodiment, the material of the first metal protrusion includes one or more combinations of Ni, Ti, Pd, Pt, Au, Al, and Cu; the material of the second metal protrusion includes one or more combinations of Ni, Ti, Pd, Pt, Au, Al, and Cu.
[0051] In one embodiment, the supporting strip body 103 is a sapphire supporting strip body, a ceramic supporting strip body, a glass supporting strip body, a quartz supporting strip body, a silicon wafer supporting strip body, or a GaAS supporting strip body. In other embodiments, the supporting strip body 103 may also be made of other materials.
[0052] This application also provides a method for preparing a strip, comprising: providing a strip body 103; forming a first protrusion group A on the surface of the strip body 103 along the second direction Z, the first protrusion group A including a plurality of first protrusions 101 spaced apart along the first direction X, the distance from the first protrusion 101 to the first surface 1031 along the first direction X being greater than zero; forming a second protrusion group B on the surface of the strip body 103 along the second direction Z, the second protrusion group B including a plurality of second protrusions 102 spaced apart along the first direction X, the distance from the second protrusion 102 to the first surface 1031 along the first direction X being greater than zero.
[0053] The step of forming the first protrusion group A on the surface of the strip body 103 along the second direction Z includes: forming a first photoresist layer on the surface of the strip body 103 along the second direction Z, the first photoresist layer having a first opening; forming a first film in the first opening and on the side surface of the first photoresist layer opposite to the strip body 103; peeling off the first photoresist layer and the first film on the side surface of the first photoresist layer opposite to the strip body 103, the remaining first film forming the first protrusion 101.
[0054] The step of forming the second protrusion group B on the surface of the strip body 103 on the other side of the second direction Z includes: forming a second photoresist layer on the surface of the strip body 103 on the other side of the second direction Z, the second photoresist layer having a second opening; forming a second film in the second opening and on the side surface of the second photoresist layer opposite to the strip body 103; peeling off the second photoresist layer and the second film on the side surface of the second photoresist layer opposite to the strip body 103, the remaining second film forming the second protrusion 102.
[0055] Another embodiment of this application also provides a stack body, see reference. Figure 4 It includes: a plurality of auxiliary strips 100 as described in the above embodiment, the plurality of auxiliary strips 100 being arranged along the second direction Z; a bar strip 200 located between adjacent auxiliary strips 100, the front cavity surface and the rear cavity surface of the bar strip 200 being arranged along the first direction X; one side surface of the bar strip 200 along the second direction Z is in contact with the first protrusion, and the other side surface of the bar strip 200 along the second direction Z is in contact with the second protrusion.
[0056] The front and rear surfaces of the Bar 200 have surface coatings.
[0057] In one embodiment, the dimension of the auxiliary strip body 103 along the first direction X is equal to the dimension of the bar strip 200 along the first direction X. This reduces the restrictions on the placement of the auxiliary strip body 103 along the first direction X. The distance by which the bar strip 200 protrudes relative to the first protrusion group A and the second protrusion group B along the first direction X is easier to control, improving the problems of large "around-plating" areas and uneven coating. Simultaneously, the bar strip 200 is easier to separate from the auxiliary strip, reducing the risk of the bar strip's cavity film being easily torn and detached.
[0058] In other embodiments, the dimensions of the main body 103 along the first direction X are not equal to the dimensions of the bar 200 along the first direction X.
[0059] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.
Claims
1. A strip, characterized in that, include: The strip body includes a first surface arranged along a first direction and a second surface arranged along a second direction, the first surface being used for coating, and the first surface being connected to the second surface; The first protrusion group includes a plurality of first protrusions spaced apart along the first direction. Each first protrusion is located on a second surface of the main body of the auxiliary strip along the second direction and is connected to the auxiliary strip body. The distance from each first protrusion to the first surface along the first direction is greater than zero. The second protrusion group includes a plurality of second protrusions spaced apart along the first direction. The second protrusions are located on the second surface of the auxiliary strip body on the other side of the second direction and are connected to the auxiliary strip body. The distance from the second protrusion to the first surface along the first direction is greater than zero. The second direction is perpendicular to the first direction.
2. The accompanying strip according to claim 1, characterized in that, The first protrusion in the first protrusion group has two first protrusions, and the second protrusion in the second protrusion group has two second protrusions.
3. The accompanying strip according to claim 1, characterized in that, The distance between the first protrusion group and the first surface along the first direction is 1µm to 10µm; the distance between the second protrusion group and the first surface along the first direction is 1µm to 10µm.
4. The accompanying strip according to claim 1, characterized in that, The first protrusion has a dimension of 5µm to 500µm along the first direction; the second protrusion has a dimension of 5µm to 500µm along the first direction.
5. The accompanying strip according to claim 1, characterized in that, The first protrusion has a dimension of 1µm to 50µm along the second direction, and the second protrusion has a dimension of 1µm to 50µm along the second direction.
6. The accompanying strip according to claim 1, characterized in that, The central axis of the second protrusion along the second direction coincides with the central axis of the first protrusion along the second direction.
7. The accompanying strip according to claim 1, characterized in that, The first protrusion extends along a third direction, and the dimension of the first protrusion along the third direction is greater than the dimension of the first protrusion along the first direction and greater than the dimension of the first protrusion along the second direction. The second protrusion extends along a third direction, and the dimension of the second protrusion along the third direction is greater than the dimension of the second protrusion along the first direction and greater than the dimension of the second protrusion along the second direction.
8. The accompanying strip according to claim 7, characterized in that, The first protrusion has a dimension of 300um to 3000um along the third direction; the second protrusion has a dimension of 300um to 3000um along the third direction.
9. The accompanying strip according to claim 1, characterized in that, The first protrusion is a first metal protrusion, and the second protrusion is a second metal protrusion.
10. The accompanying strip according to claim 9, characterized in that, The material of the first metal protrusion includes one or more combinations of Ni, Ti, Pd, Pt, Au, Al and Cu; the material of the second metal protrusion includes one or more combinations of Ni, Ti, Pd, Pt, Au, Al and Cu.
11. The accompanying strip according to claim 1, characterized in that, The main body of the sapphire strip can be a sapphire strip body, a ceramic strip body, a glass strip body, a quartz strip body, a silicon wafer strip body, or a GaAS strip body.
12. A stacked body, characterized in that, include: A plurality of auxiliary strips as described in any one of claims 1 to 11, wherein the plurality of auxiliary strips are arranged along the second direction; A bar strip is located between adjacent bar strips, with its front and rear cavity surfaces arranged along the first direction; one side surface of the bar strip along the second direction contacts the first protrusion, and the other side surface of the bar strip along the second direction contacts the second protrusion.