Magnetic force preloaded air float module

Abstract

This utility model discloses a magnetically preloaded air-bearing module, belonging to the technical field of air-bearing modules. It includes an air-bearing guide rail, with a voice coil motor installed at the bottom of the guide rail's interior. Air-bearing sliders are symmetrically arranged at the upper end of the guide rail. An encoder body is installed at the bottom of one side of each slider, and an encoder reading head is installed at the bottom of the slider's interior corresponding to the voice coil motor. This utility model uses an embedded permanent magnet as a negative pressure source, enabling continuous and stable output of negative pressure without the need for additional negative pressure equipment, saving costs. Furthermore, the air-bearing module / platform can be made very small, saving installation space. The stable negative pressure provides stable motion control. By using a voice coil motor as the drive source, the overall size of the equipment is reduced, ensuring high speed, high acceleration, and fast response during operation, improving the quality of the air-bearing platform, ensuring operational stability, and achieving exceptionally high air-bearing flatness.

Description

Technical Field

[0001] This utility model belongs to the technical field of air flotation modules, specifically relating to a magnetically preloaded air flotation module. Background Technology

[0002] Air-bearing modules are high-precision linear motion devices widely used in semiconductor manufacturing, precision machining, automated equipment, and scientific research. These gas-medium suspension systems utilize the buoyancy generated by gas flow to support and suspend objects, achieving a contactless suspension effect. The principle involves injecting compressed air or nitrogen into a planar interface. Gas flow and bubble formation generate buoyancy, supporting and suspending the object, forming a gas suspension layer. This allows for high-precision machining, photolithography, and inspection.

[0003] Currently, most air flotation products on the market use positive gas pressure as the load-bearing capacity output, only considering suspension and not negative pressure movement, resulting in unstable movement. Positive pressure air flotation can meet the needs of conventional use, but some high-precision industries require more stable movement, and the existing products are too large to meet the needs of compactness, with strict requirements on size and space. Utility Model Content

[0004] To address the problems mentioned in the background section, this invention provides a magnetically preloaded air buoyancy module, which features stable operation and high precision.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a magnetically preloaded air-bearing module, including an air-bearing guide rail, a voice coil motor is provided at the bottom of the air-bearing guide rail, air-bearing sliders are symmetrically arranged at the top of the air-bearing guide rail, an encoder body is provided at the bottom of one side of the air-bearing slider, and an encoder reading head is provided at the bottom of the air-bearing slider corresponding to the voice coil motor.

[0006] Preferably, the air-bearing slider is configured with an L-shaped structure, and a plurality of air inlets are provided on one side of the air-bearing slider.

[0007] Preferably, a permanent magnet is embedded and fixed inside the air-bearing slider, and the permanent magnet is made of a row of magnets connected to each other.

[0008] Preferably, the air-bearing guide rail is made of rigid material, and a positioning groove is provided inside the air-bearing guide rail corresponding to the voice coil motor.

[0009] Compared with the prior art, the beneficial effects of this utility model are:

[0010] 1. This utility model uses an embedded permanent magnet as a negative pressure source, which can continuously and stably output negative pressure without the need for additional negative pressure equipment, thus saving costs. Furthermore, the air flotation module / platform can be made very small, saving installation space. The stable negative pressure can provide stable motion control.

[0011] 2. This utility model uses a voice coil motor as the drive source, which reduces the overall size of the equipment, ensures high speed, high acceleration and fast response during operation, improves the quality of use of the air flotation platform, ensures the stability of operation, and improves the flatness of the air flotation. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model;

[0013] Figure 2 This is a bottom view of the structure of this utility model;

[0014] Figure 3 This is a top view of the structure of this utility model;

[0015] Figure 4 This is a side view of the structure of this utility model.

[0016] In the diagram: 1. Encoder body; 2. Air float slider; 3. Air float guide rail; 4. Voice coil motor; 5. Encoder reading head. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Please see Figure 1-4 The present invention provides the following technical solution: a magnetically preloaded air-bearing module, including an air-bearing guide rail 3, a voice coil motor 4 is provided at the bottom of the air-bearing guide rail 3, an air-bearing slider 2 is symmetrically provided at the top of the air-bearing guide rail 3, an encoder body 1 is provided at the bottom of one side of the air-bearing slider 2, and an encoder reading head 5 is provided at the bottom of the air-bearing slider 2 corresponding to the voice coil motor 4.

[0019] Specifically, the air-bearing slider 2 is designed with an L-shaped structure, and several air inlets are provided on one side of the air-bearing slider 2.

[0020] By adopting the above technical solution, the air-float slider 2 is installed stably and conveniently, and the air intake stability is improved.

[0021] Specifically, a permanent magnet is embedded and fixed inside the air-bearing slider 2. The permanent magnets are made of magnetic steel arranged in rows and connected to each other.

[0022] By adopting the above technical solution, using an embedded permanent magnet as a negative pressure source, a continuous and stable negative pressure can be output. No additional negative pressure equipment is required, saving costs. Furthermore, the air flotation module / platform can be made very small, saving installation space. The stable negative pressure can provide stable motion control.

[0023] Specifically, the air-bearing guide rail 3 is made of rigid material, and the air-bearing guide rail 3 has a positioning groove inside corresponding to the voice coil motor 4.

[0024] By adopting the above technical solution, the accuracy and stability of the positioning and installation of the voice coil motor 4 are guaranteed, and the encoder reading head 5 can detect changes in the movement of the voice coil motor 4 to measure its position and speed, thereby improving the quality of equipment use.

[0025] The working principle and usage process of this utility model: When this utility model is in use, the air source enters through the air inlet on the side of the air float slider 2, and positive pressure is generated on the air float guide rail 3 through the air float slider 2. Negative pressure is generated by the permanent magnet of the air float slider 2, so that the air film is kept in a balanced state and the stability requirements of air float are met.

[0026] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A magnetically preloaded air-bearing module, comprising an air-bearing guide rail (3), characterized in that: The air-bearing guide rail (3) is equipped with a voice coil motor (4) at its inner bottom end, and an air-bearing slider (2) is symmetrically arranged at the upper end of the air-bearing guide rail (3). An encoder body (1) is arranged at the bottom end of one side of the air-bearing slider (2), and an encoder reading head (5) is arranged at the bottom end of the air-bearing slider (2) corresponding to the voice coil motor (4).

2. The magnetically preloaded air buoyancy module according to claim 1, characterized in that: The air-floating slider (2) is configured with an L-shaped structure, and several air inlets are provided on one side of the air-floating slider (2).

3. The magnetically preloaded air buoyancy module according to claim 1, characterized in that: The air-floating slider (2) has a permanent magnet embedded and fixed inside. The permanent magnet is made of magnetic steel arranged in a row and connected to each other.

4. The magnetically preloaded air buoyancy module according to claim 1, characterized in that: The air-bearing guide rail (3) is made of rigid material, and the air-bearing guide rail (3) has a positioning groove inside corresponding to the voice coil motor (4).

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