A kind of evaporation source for evaporation

Abstract

The utility model discloses a kind of evaporation sources of evaporation, including evaporation boat, heating body and evaporation electrode;The evaporation boat is clamped by the heating body;The evaporation electrode is connected on heating body, for the power heating of the heating body;The heating body includes the bottom layer heating body of clamping evaporation boat lower part, the middle heating body of being located on the bottom layer heating body and encircling evaporation boat and the surface heating body of being located on the middle heating body and encircling evaporation boat.The utility model is improved through the structure of evaporation boat heating device, optimizes resistance distribution and current path, based on layered power fine adjustment ability, high-precision temperature control can be realized, and multilayer design is dispersed through the stereoscopic dispersion of current and heat, effectively avoid local overload phenomenon, and thermal stress distribution is more balanced.The utility model can realize better evaporation quality and improve evaporation efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition technology, specifically to a vapor deposition evaporation source. Background Technology

[0002] The evaporation aluminizing process for functional aluminum current collectors creates a high-temperature field by heating an evaporation boat. An aluminum wire is stably fed to a designated area on the surface of the evaporation boat via a wire feeding mechanism. Under continuous heat conduction, the aluminum wire melts and transforms into liquid metal, which then vaporizes into aluminum atom vapor. This vapor diffuses in a specific direction in a vacuum environment, ultimately depositing uniformly on the surface of a flexible polymer substrate to form a dense metallic coating. This technology achieves a dynamic balance between aluminum vapor generation and substrate coating by precisely controlling the wire feeding rate and heat field distribution, ensuring the stability of continuous production.

[0003] The existing evaporative aluminum plating process, with its single-layer heating element and copper electrode clamping design, has several shortcomings. Uneven current distribution within the single-layer heating element results in a gradient phenomenon in the evaporation boat—high heat in the middle and low temperature at both ends—leading to fluctuations in the material evaporation rate, reduced coating thickness consistency, and impacting product conductivity and corrosion resistance. Limited by the heat capacity and heat dissipation characteristics of the single-layer structure, the heating element heats up slowly, making it difficult to match the rapid start-up and shutdown cycles of mass production, thus lengthening the process cycle. The simple heating structure has weak thermal field control capabilities; fine-tuning the temperature easily leads to lag or overshoot, causing molten aluminum to overflow from the high-temperature zone to the electrode contact area, resulting in electrode short circuits, copper base corrosion, and molten aluminum splashing, increasing equipment maintenance costs. During long-term operation, uneven current distribution and oxidation loosening of the electrode contact surface can lead to localized overheating, accelerating the aging of the heating element material and even causing it to melt. Simultaneously, the risk of electrode connection failure increases, and frequent downtime for maintenance threatens continuous production line operation. These problems collectively restrict coating yield, production efficiency, and equipment lifespan, necessitating structural optimization. Utility Model Content

[0004] The purpose of this invention is to provide a vapor deposition evaporation source that optimizes the heating of the evaporation source to achieve better vapor deposition quality and improve vapor deposition efficiency.

[0005] An evaporation source for vapor deposition includes an evaporation boat, a heating element, and an evaporation electrode; the evaporation boat is held by the heating element; the evaporation electrode is connected to the heating element for electrically heating the heating element.

[0006] The heating element includes a bottom heating element that holds the lower part of the evaporation boat, an intermediate heating element disposed on the bottom heating element and surrounding the evaporation boat, and a surface heating element disposed on the intermediate heating element and surrounding the evaporation boat.

[0007] To optimize the above technical solution, the specific measures also include:

[0008] The middle part of the bottom heating body is provided with an evaporation boat mounting groove, and the shape of the evaporation boat mounting groove matches the shape of the lower part of the evaporation boat.

[0009] Further, the side cross-section of the evaporation boat is a trapezoid with a wider upper part and a narrower lower part.

[0010] Further, the top surface and the bottom surface of the evaporation boat are both rectangular, and the projection of the top surface of the evaporation boat on the bottom surface of the evaporation boat covers the bottom surface of the evaporation boat.

[0011] Insulating gaskets are respectively provided between the bottom heating body and the middle heating body, and between the middle heating body and the surface heating body.

[0012] Further, the bottom heating body is connected to the first evaporation electrode, the middle heating body is connected to the second evaporation electrode, and the surface heating body is connected to the third evaporation electrode.

[0013] The projections of the middle heating body and the surface heating body on the bottom heating body are both in the shape of a Chinese character 'hui'.

[0014] There are gaps between the middle heating body and the surface heating body and the evaporation boat.

[0015] Further, the top surface of the surface heating body is higher than the top surface of the evaporation boat.

[0016] As a preferred solution, the bottom heating body is made of molybdenum metal material, the middle heating body is made of nickel-chromium alloy material, and the surface heating body is made of tantalum metal material.

[0017] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0018] Through the structural improvement of the evaporation boat heating device, the present utility model optimizes the resistance distribution and current path, can effectively improve the temperature uniformity; based on the ability of hierarchical power fine adjustment, it can achieve high-precision temperature control and meet the temperature sensitivity requirements of complex processes; the multi-layer design effectively avoids local overload phenomena through the three-dimensional dispersion of current and heat; the thermal stress distribution is more balanced, improving the connection reliability and antioxidant ability; the present utility model can improve the evaporation uniformity and coating quality, and achieve high-quality and high production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 : Schematic structural diagram of the evaporation source for evaporation coating of the present utility model.

[0020] Figure 2 : Schematic cross-sectional structural diagram of the evaporation boat in the heating body.

[0021] Figure 3 : Schematic top view structural diagram of the bottom heating body.

[0022] Figure 4 : Top view of the evaporation boat and heating element.

[0023] In the figure: 1-Evaporation boat, 2-Bottom heating element, 3-Intermediate heating element, 4-Surface heating element, 5-First evaporation electrode, 6-Second evaporation electrode, 7-Third evaporation electrode, 8-Insulating gasket, 9-Gap, 10-Evaporation boat mounting groove, 11-Metal vapor. Detailed Implementation

[0024] The present invention will be further described in detail below through embodiments, but it should not be construed as the scope of the present invention being limited to the following embodiments. All technologies implemented based on the present invention fall within the scope of the present invention.

[0025] In the description of this utility model, it should also be noted that:

[0026] The orientations or positional relationships described herein are based on the relationships shown in the accompanying drawings and are only for the purpose of facilitating the description of this utility model and simplifying the description. They are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0027] Furthermore, terms such as "first," "second," or "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Unless otherwise expressly specified and limited, the specific meanings of the above terms in this utility model can be understood by those skilled in the art based on the specific circumstances.

[0028] This invention provides a vapor deposition evaporation source, such as... Figure 1 As shown, it includes an evaporation boat 1, a heating element, and an evaporation electrode; the evaporation boat 1 is held by the heating element; the evaporation electrode is connected to the heating element and is used to electrically heat the heating element.

[0029] The heating element includes a bottom heating element 2 that holds the lower part of the evaporation boat 1, an intermediate heating element 3 that is disposed above the bottom heating element 2 and surrounds the evaporation boat 1, and a surface heating element 4 that is disposed above the intermediate heating element 3 and surrounds the evaporation boat 1.

[0030] The bottom heating element 2 has an evaporation boat mounting groove 10 in the middle, and the shape of the evaporation boat mounting groove 10 matches the lower shape of the evaporation boat 1.

[0031] During assembly, the evaporator boat 1 is vertically lowered into the evaporator boat mounting groove 10 installed on the bottom heating element 2. The tight fit between the two shapes ensures stable installation of the evaporator boat. The evaporator boat 1 is in close contact with the side wall of the evaporator boat mounting groove 10. Figure 2 As shown.

[0032] In some embodiments, the side profile of the evaporation boat 1 is a trapezoid that is wider at the top and narrower at the bottom.

[0033] The top and bottom surfaces of the evaporation boat 1 are both rectangular, and the projection of the top surface of the evaporation boat onto the bottom surface of the evaporation boat covers the bottom surface of the evaporation boat.

[0034] In some embodiments, insulating pads 8 are provided between the bottom heating element 2 and the middle heating element 3, and between the middle heating element 3 and the surface heating element 4.

[0035] Mica gaskets are preferably used for insulating gaskets 8. Mica gaskets have excellent high-temperature resistance, good electrical insulation properties and chemical stability, high mechanical strength, and can withstand certain pressure and vibration. They are not easily deformed or damaged in high-temperature environments and can maintain their insulation performance stably for a long time.

[0036] The bottom heating element 2 is connected to the first evaporation electrode 5, the middle heating element 3 is connected to the second evaporation electrode 6, and the surface heating element 4 is connected to the third evaporation electrode 7. Each evaporation electrode is independent. After being powered on, the bottom heating element 2, the middle heating element 3, and the surface heating element 4 form an induction heating module, which can precisely control the current input of each layer to form the required heating intensity.

[0037] The projections of the intermediate heating element 3 and the surface heating element 4 onto the bottom heating element 2 are both in a U-shape, such as... Figure 4 As shown.

[0038] The heating effect of this utility model is composed of multiple heating elements working together. The bottom heating element 2 is the foundation of the entire heating structure. It is in direct contact with the evaporation boat containing the material to be evaporated and provides the main heating power to initially raise the temperature of the material to be evaporated. The middle heating element 3 is located between the bottom heating element 2 and the surface heating element 4. It is used to optimize the temperature distribution and improve the uniformity of heat transfer. The surface heating element 4 precisely heats the evaporation material on the surface of the evaporation boat and controls the evaporation rate of the evaporation material.

[0039] Evaporation boat 1 can be made of conventional boron nitride material.

[0040] The entire heating structure can be configured with different power outputs for different heating layers, depending on the shape and size of the evaporation boat and the characteristics of the material to be evaporated.

[0041] In some embodiments, the intermediate heating element 3 and the surface heating element 4 are both separated from the evaporation boat 1 by a gap 9.

[0042] In some embodiments, the top surface of the surface heating element 4 is higher than the top surface of the evaporation boat, preferably by 5 to 10 mm. This design, which extends beyond the top surface of the evaporation boat 1, allows the heating temperature to radiate to the surface of the evaporation boat and the evaporating aluminum liquid.

[0043] In some embodiments, the bottom heating element 2 is made of molybdenum metal, the middle heating element 3 is made of nickel-chromium alloy, and the surface heating element 4 is made of tantalum metal.

[0044] Specifically, the bottom heating element 2 is in direct contact with the evaporation boat 1, primarily transferring heat to the evaporation boat through thermal conduction. Due to their close contact, heat can be efficiently conducted from the heating layer to the evaporation boat, causing the bottom of the evaporation boat to heat up rapidly, providing the basic heat for the entire evaporation process. As heat accumulates at the bottom of the evaporation boat, it is gradually transferred to other parts of the evaporation boat through thermal diffusion, achieving an initial increase in overall temperature. Therefore, the bottom heating element 2 is made of a material with a high melting point, high thermal conductivity, and good chemical stability to withstand high temperatures and long heating periods. Molybdenum (Mo) metal is a common high-melting-point material that can maintain a stable structure at high temperatures and has good thermal conductivity, enabling it to quickly transfer heat to the material to be evaporated.

[0045] The intermediate heating element 3 primarily heats the vessel 1 through thermal radiation. While not in direct contact with the evaporation boat, it heats the boat through both thermal radiation and indirect heat conduction. After being energized, the intermediate heating element 3 heats up, and this thermal radiation is absorbed by the surface of the evaporation boat. The surface of the evaporation boat absorbs the radiant energy and converts it into heat, thus increasing its own temperature and contributing to a more uniform thermal field within the multi-layer heating structure. The material of the intermediate heating element 3 needs to possess a certain resistance adjustment capability and good thermal stability. Preferred alloy materials include nickel-chromium alloys (NiCr), which have a high resistivity, generating sufficient heat for heating when current flows through them. Furthermore, NiCr alloys exhibit good oxidation resistance and thermal stability, allowing for stable operation for extended periods at high temperatures without easily oxidizing or deforming. Their resistance value can be precisely controlled by adjusting the alloy composition, facilitating fine-tuning of the heating power.

[0046] The surface heater 4 heats and controls the temperature of the evaporation boat 1 through thermal radiation. Upon energization, the surface heater 4 heats up, radiating a large amount of thermal radiation into the surrounding space. This radiation directly irradiates the surface of the evaporation boat, where it is absorbed and converted into heat energy, achieving precise temperature control of the evaporation boat 1's surface. Furthermore, the surface heater 4 also reduces heat loss from the evaporation boat to the surrounding environment, maintaining a high-temperature environment inside the evaporation boat. By compensating for heat loss through its own temperature regulation, it reduces interference from external factors in the heating process, making the temperature of the evaporation boat 1 more stable. The surface heater 4 is made of tantalum, a metal with excellent high-temperature resistance and precise temperature control capabilities. Tantalum possesses outstanding high-temperature resistance, maintaining good physical and chemical stability at high temperatures. Its high surface emissivity allows for effective heat radiation, enabling efficient heating of the evaporation boat 1's surface. Simultaneously, tantalum exhibits strong corrosion resistance and is not prone to reacting with substances in the surrounding environment, making it suitable for use in various complex evaporation process environments.

[0047] The size and thickness of each heating element can be designed according to application requirements: When energized for heating, the bottom heating element 2, which needs to provide the main heating power, is usually designed with a low resistance value to ensure that a large current can pass through and generate sufficient heat. The resistance value of the bottom heating layer can be designed between 0.1 and 1 ohm, with the specific value determined according to the size of the heating element and the required heating power. The resistance value of the middle heating element 3 is relatively high, generally between 1 and 10 ohms. By adjusting the current of this layer, the overall temperature distribution can be fine-tuned to compensate for any temperature unevenness that may exist in the bottom heating layer. The resistance value of the surface heating element 4 is designed according to the specific evaporation process requirements, typically between 5 and 20 ohms, to achieve precise control of the material surface temperature.

[0048] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Any simple modifications, equivalent substitutions, and improvements made by those skilled in the art to the above embodiments without departing from the scope of the present utility model's technical solution and based on the technical essence of the present utility model shall still fall within the protection scope of the present utility model's technical solution.

Claims

1. A vapor deposition evaporation source, characterized in that: It includes an evaporation boat, a heating body and an evaporation electrode; the evaporation boat is clamped by the heating body; the evaporation electrode is connected to the heating body and is used to supply power to heat the heating body. The heating body includes a bottom heating body that clamps the lower part of the evaporation boat, an intermediate heating body disposed above the bottom heating body and surrounding the evaporation boat, and a surface heating body disposed above the intermediate heating body and surrounding the evaporation boat.

2. The vapor deposition evaporation source according to claim 1, characterized in that: An evaporation boat installation groove is provided in the middle of the bottom heating body, and the shape of the evaporation boat installation groove matches the shape of the lower part of the evaporation boat.

3. The vapor deposition evaporation source according to claim 1, characterized in that: The side profile of the evaporation boat is a trapezoid with a wider upper part and a narrower lower part.

4. The vapor deposition evaporation source according to claim 3, characterized in that: The top and bottom surfaces of the evaporation boat are both rectangular, and the projection of the top surface of the evaporation boat on the bottom surface of the evaporation boat covers the bottom surface of the evaporation boat.

5. The vapor deposition evaporation source according to claim 1, characterized in that: Insulating gaskets are respectively provided between the bottom heating body and the intermediate heating body, and between the intermediate heating body and the surface heating body.

6. The vapor deposition evaporation source according to claim 5, characterized in that: The bottom heating body is connected to the first evaporation electrode, the intermediate heating body is connected to the second evaporation electrode, and the surface heating body is connected to the third evaporation electrode.

7. The vapor deposition evaporation source according to claim 1, characterized in that: The projections of the intermediate heating body and the surface heating body on the bottom heating body are both in the shape of a Chinese character 'hui'.

8. The vapor deposition evaporation source according to claim 1, characterized in that: There are gaps between the intermediate heating body and the surface heating body and the evaporation boat.

9. The vapor deposition evaporation source according to claim 1, characterized in that: The top surface of the surface heating body is higher than the top surface of the evaporation boat.

10. The vapor deposition evaporation source according to claim 1, characterized in that: The bottom heating body is made of molybdenum metal material, the intermediate heating body is made of nickel-chromium alloy material, and the surface heating body is made of tantalum metal material.

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