A shower plate device for an ALD apparatus

Abstract

The utility model relates to ALD equipment technical field especially relates to a kind of spray plate device for ALD equipment, including the main body mechanism as the device main body, the main body mechanism includes the first connecting shell and the second connecting shell for constituting spray plate, the main body mechanism is provided with the spray mechanism for the uniform spraying of precursor gas, the first connecting shell and the second connecting shell are provided with the connecting mechanism for the simple and convenient dismounting of spray mechanism.The utility model is connected by setting spray mechanism so that device can be evenly sprayed to precursor gas, by connecting gas supply system with ALD equipment by gas guide port, by gas guide duct and diffusion cavity intercommunication, so that precursor gas can be fully diffused and mixed before entering spray orifice, reduce the speed difference after gas from gas guide duct enters, further improve the uniformity of gas distribution, by filter screen, larger particles can be effectively intercepted, prevent it from entering substrate area.

Description

Technical Field

[0001] This utility model relates to the field of ALD equipment technology, specifically to a spray plate device for ALD equipment. Background Technology

[0002] In the thin film fabrication processes of semiconductors, microelectronics, and other fields, ALD (Alternating Discharge) devices are widely used due to their ability to precisely control film thickness and composition at the nanoscale. The spray plate, a key component of the ALD device, functions to uniformly spray precursor gas onto the substrate surface to achieve high-quality thin film deposition. However, the nozzle layout and structural design of traditional spray plates lead to variations in the distribution of precursor gas on the substrate surface, making it difficult to guarantee the uniformity of the deposited film thickness and affecting the consistency of device performance. Utility Model Content

[0003] To address the shortcomings of existing technologies, this invention provides a spray plate device for ALD equipment, which has the advantage of making the precursor gas more uniformly distributed on the substrate surface. This solves the problem that the distribution of the precursor gas on the substrate surface is inconsistent due to traditional spray plates, making it difficult to guarantee the uniformity of the deposited film thickness and affecting the consistency of device performance.

[0004] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0005] A spray plate device for an ALD (Alternating Current Discharge) equipment includes a main body structure as the main body of the device. The main body structure includes a first connecting shell and a second connecting shell for forming the spray plate. The main body structure is provided with a spray mechanism for uniformly spraying a precursor gas. The first and second connecting shells are provided with a connecting mechanism for easy assembly and disassembly of the spray mechanism. The spray mechanism includes a plurality of first mounting slots formed on the first connecting shell. A plurality of air inlets connected to the gas supply system of the ALD equipment are threadedly connected to the plurality of first mounting slots. The plurality of air inlets are inserted into one end of an air inlet pipe. A diffusion chamber is installed at the other end of the air inlet pipe. An outlet pipe is installed on one side of the plurality of diffusion chambers. A plurality of second mounting slots are formed on one side of the second connecting shell. A plurality of spray holes are threadedly connected to the plurality of second mounting slots. One end of the plurality of outlet pipes is inserted into the plurality of spray holes respectively. A filter screen is detachably installed inside the plurality of spray holes.

[0006] Preferably, the connecting mechanism includes threaded grooves at the four top corners of the first connecting shell and the second connecting shell, and bolts are threaded into each of the multiple threaded grooves. The top of the second connecting shell has two vertical grooves and two horizontal grooves, and the top and bottom of the diffusion cavity are provided with slots.

[0007] Preferably, the bottom wall of the first connecting shell and the top wall of the second connecting shell are both fixedly connected with a locking block that engages with the locking slot, and two vertical rods and horizontal rods that engage with the vertical slot and the horizontal slot are respectively installed at the bottom of the first connecting shell.

[0008] Preferably, sealing rings are installed at the joints between the plurality of air inlets and the plurality of air pipes, as well as at the joints between the plurality of air outlet pipes and the plurality of nozzles.

[0009] Preferably, sealing gaskets are installed at the joints between the two vertical slots, the two horizontal slots and the two vertical rods, and the two horizontal rods.

[0010] Preferably, the plurality of nozzles are funnel-shaped.

[0011] By means of the above technical solution, this utility model provides a spray plate device for ALD equipment, which has at least the following beneficial effects:

[0012] 1. This utility model enables the device to uniformly spray the precursor gas by setting a spraying mechanism. By connecting the gas inlet to the gas supply system of the ALD device and connecting it to the diffusion chamber through the gas guide pipe, the precursor gas can be fully diffused and mixed before entering the spray hole, reducing the velocity difference of the gas after entering from the gas guide pipe and further improving the uniformity of gas distribution. The filter screen can effectively intercept larger particles and prevent them from entering the base area.

[0013] 2. This utility model enables easy disassembly and assembly of the spraying mechanism by setting a connecting mechanism. The sealing gaskets between the horizontal and vertical rods and the horizontal and vertical grooves ensure the connection effect between the first and second connecting shells. The sealing rings at the insertion points of the air inlet and the air pipe, as well as the insertion points of the air outlet pipe and the spray hole, ensure the sealing effect of gas flow. Multiple threaded grooves and bolts enable easy installation and connection between the first and second connecting shells, making it easy to clean and replace the internal parts of the device. Attached Figure Description

[0014] The accompanying drawings, which are included to provide a further understanding of the present invention, form part of this application:

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0016] Figure 2 This is a schematic diagram of the spraying mechanism of this utility model;

[0017] Figure 3 This is a schematic diagram of the main structure of the present utility model;

[0018] Figure 4 This is an exploded view of the connecting mechanism of this utility model.

[0019] Figure label:

[0020] 1. Main body; 101. First connecting shell; 102. Second connecting shell; 2. Spraying mechanism; 201. Air inlet; 202. Air duct; 203. Diffusion chamber; 204. Air outlet duct; 205. Spray hole; 206. Filter screen; 3. Connecting mechanism; 301. Bolt; 302. Threaded groove; 303. Vertical groove; 304. Horizontal groove; 305. Slot. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] As a key component in ALD (Alternating Current Deposition) equipment, the spray plate's function is to uniformly spray the precursor gas onto the substrate surface to achieve high-quality thin film deposition. However, the nozzle layout and structural design of traditional spray plates result in variations in the distribution of the precursor gas on the substrate surface, making it difficult to guarantee the uniformity of the deposited film thickness and affecting the consistency of device performance. The following describes, with reference to the accompanying drawings, some embodiments of a spray plate device for an ALD equipment.

[0023] Example 1:

[0024] Combination Figure 1 , Figure 2 and Figure 3 As shown, a spray plate device for ALD equipment is proposed. The main body 1 is set as the main body of the device, and a spray mechanism 2 is set on the main body 1. The spray mechanism 2 is used to spray the precursor gas evenly. A connecting mechanism 3 is set on the first connecting shell 101 and the second connecting shell 102. The connecting mechanism 3 is used to easily disassemble and assemble the spray mechanism 2.

[0025] To achieve a more uniform distribution of the precursor gas on the substrate surface, a spray mechanism 2 is proposed. This mechanism comprises multiple first mounting slots on a first connecting shell 101, each threaded with a gas inlet 201 connected to the gas supply system of an ALD device. Each gas inlet 201 is inserted into one end of a gas pipe 202, the other end of which is fitted with a diffusion chamber 203. An outlet pipe 204 is installed on one side of each diffusion chamber 203. A second mounting slot is provided on one side of the second connecting shell 102, each threaded with a spray hole 205. One end of each outlet pipe 204 is inserted into one of the spray holes 205. Filters 206 are detachably installed inside each spray hole 205. Sealing rings are installed at the connections between the gas inlets 201 and the gas pipes 202, and at the connections between the outlet pipes 204 and the spray holes 205. By connecting the gas inlets 201 and the ALD... The equipment is connected to a gas supply system. The nozzle 205 has a special shape, such as a trumpet or trapezoid, to improve the uniformity and stability of the gas flow. It is connected to the diffusion chamber 203 through the gas guide pipe 202, so that the precursor gas can be fully diffused and mixed in the diffusion chamber 203 before entering the nozzle 205, reducing the velocity difference of the gas after entering from the gas guide pipe 202, and further improving the uniformity of gas distribution. The filter screen 206 can effectively intercept larger particles and prevent them from entering the base area, which can both ensure smooth gas flow and effectively filter impurities.

[0026] Example 2:

[0027] Based on Example 1, the technical solution proposed in Example 1 is used to solve the problem that the distribution of precursor gas on the substrate surface is different due to the nozzle layout and structural design of the traditional spray plate in the prior art, which makes it difficult to guarantee the thickness uniformity of the deposited film and affects the consistency of device performance. However, the complex internal structure of the prior art makes the disassembly and cleaning process of the spray plate cumbersome, increases the time and cost of equipment maintenance, and is not convenient for maintenance and cleaning.

[0028] To facilitate easy maintenance and cleaning of the device, combined with Figure 1 and Figure 3 as well as Figure 4As shown, a connecting mechanism 3 is proposed. Threaded grooves 302 are formed at the four corners of the top of the first connecting shell 101 and the second connecting shell 102. Bolts 301 are threaded into each of the multiple threaded grooves 302. Two vertical grooves 303 and two horizontal grooves 304 are formed at the top of the second connecting shell 102. Slots 305 are formed at the top and bottom of the diffusion cavity 203. A locking block that engages with the slots 305 is fixedly connected to the bottom wall of the first connecting shell 101 and the top wall of the second connecting shell 102. Two vertical rods and two horizontal rods that engage with the vertical grooves 303 and the horizontal grooves 304 are respectively installed at the bottom of the first connecting shell 101. The two vertical grooves 303... Sealing gaskets are installed at the joints between the two horizontal grooves 304 and the two vertical rods and the two horizontal rods. The sealing gaskets between the horizontal rods and vertical rods and the horizontal grooves 304 and vertical grooves 303 ensure the connection between the first connecting shell 101 and the second connecting shell 102. The sealing rings at the joints between the air inlet 201 and the air pipe 202 and the joints between the air outlet pipe 204 and the nozzle 205 ensure the sealing effect of gas flow. Multiple threaded grooves 302 and bolts 301 make it easy to install and connect the first connecting shell 101 and the second connecting shell 102, making it easy to clean and replace the inside of the device, reducing the difficulty and cost of equipment maintenance.

[0029] In order to form the main body of the device, a main body structure 1 is proposed, which mainly includes a first connecting shell 101 and a second connecting shell 102 for forming the spray plate. The first connecting shell 101 and the second connecting shell 102 effectively protect the internal spray mechanism 2, ensuring the spraying effect of the precursor gas.

[0030] It should be noted that the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A spray plate device for an ALD (Alternating Current Discharge) equipment, comprising a main body mechanism (1) as the main body of the device, said main body mechanism (1) comprising a first connecting shell (101) and a second connecting shell (102) for constituting the spray plate, characterized in that: The main body (1) is provided with a spraying mechanism (2) for uniformly spraying the precursor gas, and the first connecting shell (101) and the second connecting shell (102) are provided with a connecting mechanism (3) for easy disassembly and assembly of the spraying mechanism (2). The spraying mechanism (2) includes a plurality of first mounting slots opened on the first connecting shell (101). A plurality of air inlets (201) connected to the gas supply system of the ALD device are threadedly connected to the plurality of first mounting slots. A plurality of air inlets (201) are inserted into one end of an air inlet pipe (202). A diffusion chamber (203) is installed at the other end of the plurality of air inlet pipes (202). An air outlet pipe (204) is installed on one side of the plurality of diffusion chambers (203). A plurality of second mounting slots are opened on one side of the second connecting shell (102). A plurality of spray holes (205) are threadedly connected to the plurality of second mounting slots. A plurality of air outlet pipes (204) are respectively inserted into the plurality of spray holes (205). A filter screen (206) is detachably installed inside the plurality of spray holes (205).

2. The spray plate device for an ALD equipment according to claim 1, characterized in that: The connecting mechanism (3) includes threaded grooves (302) at the four corners of the top of the first connecting shell (101) and the second connecting shell (102). Bolts (301) are threaded into each of the multiple threaded grooves (302). The top of the second connecting shell (102) has two vertical grooves (303) and two horizontal grooves (304). The top and bottom of the diffusion cavity (203) are provided with slots (305).

3. The spray plate device for an ALD equipment according to claim 2, characterized in that: The bottom wall of the first connecting shell (101) and the top wall of the second connecting shell (102) are both fixedly connected with a locking block that engages with the locking slot (305). The bottom of the first connecting shell (101) is respectively equipped with two vertical rods and horizontal rods that engage with the vertical slot (303) and the horizontal slot (304).

4. The spray plate device for an ALD equipment according to claim 3, characterized in that: Sealing rings are installed at the joints between the multiple air inlets (201) and the multiple air pipes (202), as well as at the joints between the multiple air outlet pipes (204) and the multiple nozzles (205).

5. A spray plate device for an ALD equipment according to claim 2, characterized in that: Sealing gaskets are installed at the joints between the two vertical grooves (303), the two horizontal grooves (304) and the two vertical rods and the two horizontal rods.

6. The spray plate device for an ALD equipment according to claim 1, characterized in that: The multiple nozzles (205) are horn-shaped.

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