Integrated safety actuator shock plate detonator
By integrating a safety actuator into the impact detonator and employing SOI MEMS technology and silicon-glass or silicon-silicon bonding technology, micron-level precision manufacturing and safe and controllable ignition are achieved, solving the problems of the single function and accidental triggering risk of traditional impact detonators.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHINA ORDNANCE IND NO 213 RES INST
- Filing Date
- 2025-06-09
- Publication Date
- 2026-06-05
AI Technical Summary
Traditional impact detonators have a single function, pose a risk of accidental triggering, and have complex and large safety actuators that are difficult to integrate into a small space.
The design of MEMS using SOI wafers integrates a safety actuator. Controllable firing of the flying wafer is achieved through a displacement amplification mechanism and a cantilever structure. Micron-level precision manufacturing technology is used to combine silicon-glass bonding or silicon-silicon bonding to form an integrated device.
It achieves safe and controllable ignition of the impact detonator, avoids accidental triggering, and achieves micron-level precision manufacturing, solving the integration problem of the safety actuator in a small space.
Smart Images
Figure CN224327646U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of pyrotechnics technology, and in particular relates to an impact detonator with an integrated safety actuator. Background Technology
[0002] Impact detonators generally consist of a substrate, a bridge foil, a flyer, an acceleration chamber, a insertion pin, a shell, and an output charge. The basic principle of their operation is that when a metal bridge foil is subjected to a steep pulse of high current, the bridge region of the foil undergoes an electrical explosion and instantly transforms from a solid to a gaseous state. This process generates a large amount of high-temperature, high-pressure plasma. The high-pressure plasma generated by the electrical explosion shears the thin film material to form a flyer, which then propels the flyer to accelerate within the acceleration chamber before impacting and detonating the insensitive explosive.
[0003] Safety actuators are mainly used in fuses. Their function is to control the safety and disarming status of the ignition sequence based on external environmental signals. They have a complex structure and are made with precision. Currently, safety actuators are mainly made using traditional machining techniques. They are large in size and difficult to apply to the small space of pyrotechnics. New materials and processes must be used to manufacture them on a microscale.
[0004] As a single ignition device, the impact detonator lacks a safety actuator design in the ignition sequence and is always in a ready-to-fire state. Once the ignition current is applied, it will ignite, posing a risk of accidental triggering. Utility Model Content
[0005] The technical problem this invention aims to solve is that traditional impact detonators have a single function and pose a risk of accidental triggering.
[0006] To solve the above-mentioned technical problems, the specific technical solution of this utility model is as follows:
[0007] An impact detonator with an integrated safety actuator includes a substrate 1, a bridge foil 2, a flyer 3, an acceleration chamber 4, a safety actuator 5, an output charge 6, an upper shell 7, a lower shell 8, an electrode 1 9, an electrode 2 10, an electrode 3 11, and an electrode 4 12; the upper shell 7 and the lower shell 8 are interconnected to form a cavity; the substrate 1, bridge foil 2, flyer 3, acceleration chamber 4, safety actuator 5, and output charge 6 are all disposed within the cavity;
[0008] The bridge foil 2 is attached to the surface of the substrate 1, and its two ends are connected to the second electrode 10 and the third electrode 11 respectively; the flyer plate 3 is attached above the bridge foil 2; the acceleration chamber 4 has a central through hole in the middle, the lower end face of the acceleration chamber 4 presses against the surface of the flyer plate 3, and the safety actuator 5 is set on the upper end face of the acceleration chamber 4; the end face of the output charge 6 is in contact with the safety actuator 5.
[0009] The safety actuator 5 includes a substrate layer, an insulating layer, and a device layer; the insulating layer is attached to the surface of the substrate layer, and the device layer is disposed on the surface of the insulating layer.
[0010] The device layer includes two displacement amplification mechanisms, two cantilever arms, and two baffles. One end of each cantilever arm is connected to one of the two baffles, and the other end is connected to one of the two displacement amplification mechanisms. The two displacement amplification mechanisms are connected to electrode 9 and electrode 12, respectively. When electrode 9 and electrode 12 are not energized, the two baffles block the central through hole of the acceleration chamber 4. The two displacement amplification mechanisms are symmetrically arranged, and each displacement amplification mechanism consists of four "V"-shaped micro actuators arranged in parallel. When current passes through the "V"-shaped micro actuators, the "V"-shaped micro actuators will heat up and expand and extend, thereby reducing the angle of the "V" shape and moving the apex of the "V" shape outward, which in turn pulls the cantilever arm outward, causing the two baffles to separate.
[0011] Furthermore, the substrate layer of the acceleration chamber 4 and the safety actuator 5 is an integrated structure.
[0012] Furthermore, the acceleration chamber 4 is fabricated on the substrate of the safety actuator through a process of spin coating, drying, exposure, and development, with a fabrication thickness of 350μm to 500μm.
[0013] Furthermore, the safety actuator is an integrated structure, with the device layer consisting of a 3μm to 5μm copper layer magnetron sputtered onto the surface of an SOI wafer. Two displacement amplification mechanisms, two cantilever arms, and two baffles are formed through etching, stripping, and dicing processes.
[0014] Furthermore, the substrate 1, bridge foil 2, fly plate 3, and acceleration chamber 4 are combined to form a transducer.
[0015] Furthermore, the safety actuator and the transducer are integrated into a single device through silicon-glass bonding or silicon-silicon bonding.
[0016] Furthermore, when electrodes 9 and 12 are energized and the voltage reaches 20V, the distance between the two baffles can reach 500μm. At this time, the central through hole of the acceleration chamber 4 is fully visible, the flight channel of the flying plate is opened, that is, the safety actuator is in the unlocked state.
[0017] Furthermore, electrode 9, electrode 10, electrode 31 and electrode 412 are encapsulated in the lower housing.
[0018] Furthermore, the bridge foil 2 is provided with internal electrodes at both ends, which are connected to electrode 2 10 and electrode 3 11.
[0019] Furthermore, the device layer of the safety actuator 5 is provided with internal electrodes that are connected to electrode 9 and electrode 12.
[0020] This utility model has the following advantages:
[0021] (I) The design of the safety actuator abandons the traditional machining process and adopts the design and fabrication of MEMS process using SOI wafers, which can achieve precision manufacturing at the micron level and solve the problem that the safety actuator has a complex structure and large size and cannot be integrated into the impact detonator.
[0022] (ii) The transducer of the impact detonator adopts new materials and uses MEMS technology to replace the traditional machining process, realizing the integrated design of substrate, bridge foil, flyer and acceleration chamber. All processes are controlled by equipment, with high precision and good consistency.
[0023] (iii) Since the safety actuator is located on the end face of the acceleration chamber, when it is closed, the flying piece cannot pass through the acceleration chamber and the detonator cannot ignite. When it is opened, the flying piece can pass through the acceleration chamber to impact the charge and ignite the detonator. Therefore, the ignition of the impact detonator can be safely and controllably achieved. Attached Figure Description
[0024] Figure 1 This is a schematic diagram of the impact detonator of the integrated safety actuator in the unreleased state.
[0025] Figure 2 This is a structural diagram of the impact detonator in the disengaged state of the integrated safety actuator.
[0026] Figure 3 This is a schematic diagram of the transducer element in an impact detonator.
[0027] Figure 4 This is a schematic diagram of the bridge foil shape of the transducer element in an impact detonator.
[0028] Figure 5 This is a schematic diagram of the overall structure of the safety actuator after it has been manufactured and is not currently powered.
[0029] Figure 6 This is a schematic diagram of the overall structure of the safety actuator after it has been manufactured and is in the current-carrying state.
[0030] Figure 7 This is a schematic diagram of the second integrated scheme of the safety actuator and the impact detonator. Detailed Implementation
[0031] To better understand the purpose, structure, and function of this utility model, a more detailed description of this utility model is provided below with reference to the accompanying drawings.
[0032] like Figure 1As shown, the impact detonator of this utility model with integrated safety actuator mainly consists of a substrate 1, a bridge foil 2, a flyer 3, an acceleration chamber 4, a safety actuator 5, an output charge 6, an upper shell 7, a lower shell 8, electrodes 9, 10, 11, and 12. Its working principle: An external pulsed high-voltage current is input through electrodes 10 and 11, causing the bridge foil 2 to instantly vaporize and explode, forming a high-temperature, high-pressure plasma. This plasma is then cut off by the flyer 3 within the acceleration chamber 4, completing its acceleration process. When the external environmental signal does not meet the ignition conditions, there will be no current input to electrodes 9 and 12 of the safety actuator, the safety actuator will not deactivate, and the flyer 3 will be blocked by the safety actuator, unable to effectively impact the output charge 6, thus the impact detonator will not ignite. When the external environmental signal meets the ignition conditions, current will flow through electrodes 9 and 12 of the safety actuator, the safety actuator will deactivate, and so on. Figure 2 As shown, the flying piece 3 will pass smoothly through the acceleration chamber 4 and effectively impact the output charge 6, causing the impact detonator to ignite.
[0033] The first integration scheme of safety actuator and impact detonator:
[0034] Figure 3 This is a schematic diagram of the transducer structure of an impact detonator. The substrate 1 is a 4-inch or 6-inch circular hard, smooth glass sheet with a thickness of 0.5 μm; alternatively, a double-sided polished silicon wafer can be used. The bridge foil 2 is attached to the substrate 1 by electroplating or magnetron sputtering. Copper is the preferred material, with an adhesion thickness of 3 μm to 4 μm; gold, silver, or aluminum can also be used. The fabrication process involves spin coating, masking, and etching, resulting in a bridge-shaped structure. Figure 4 Electrodes 13 and 14 are made of the same material as bridge foil 2, and their fabrication is completed simultaneously with that of bridge foil 2. During encapsulation, they are connected to electrodes 10 and 11, respectively. The flyer plate 3 is fabricated using a spin-coating etching method, employing SU-8 adhesive solution, or alternatively, PI adhesive solution. The fabrication process involves spin-coating, drying, exposure, development, and cleaning, resulting in a thickness of 15μm–40μm and a circular shape. The accelerator chamber 4 is fabricated using a spin-coating etching method, employing SU-8 adhesive solution. The fabrication process involves spin-coating, drying, exposure, development, and cleaning, resulting in a thickness of 350μm–500μm and a shape as shown in the image. Figure 1 As shown.
[0035] Figure 5 A schematic diagram of the overall structure of the safety actuator in its un-energized state after completion. Figure 6This is a schematic diagram of the overall structure of the safety actuator after it has been fabricated and is in the current-carrying state. The safety actuator is fabricated using a 4-inch or 6-inch circular SOI (Silicon-On-Insulator) wafer, polished on both sides. The substrate material of the SOI wafer is single-crystal silicon, with a thickness the same as that of the acceleration chamber 4, providing structural support for the entire safety actuator. The insulating layer material is SiO2, with a thickness of 1μm to 3μm, serving as insulation and isolation. The device layer material is single-crystal silicon, used to fabricate the main structure of the safety actuator, with a thickness of 30μm to 50μm. The safety actuator is fabricated using MEMS processes such as masking, magnetron sputtering, etching, stripping, and dicing. The substrate 23 is fabricated from the SOI wafer substrate layer. The device layer is covered with a 3μm to 5μm layer of copper by magnetron sputtering, and electrodes 15, 16, displacement amplification mechanism 17, 18, cantilever 19, cantilever 20, baffle 21, and baffle 22 are obtained through gradual etching. Its motion principle is as follows: Figure 5 When no voltage is applied to the ends of electrodes 15 and 16, the displacement amplification mechanism does not move, and baffles 21 and 22 are in a closed state, completely blocking the central hole 24 of the acceleration chamber 4, i.e., the safety actuator is in an unlocked state. Figure 6 When voltage is applied to both ends of electrodes 15 and 16, electrodes 15, 16, and displacement amplification mechanism 17 and 18 respectively form two parallel current loops. Displacement amplification mechanisms 17 and 18 are each composed of four "V"-shaped micro actuators. When current passes through the "V"-shaped micro actuators, the "V"-shaped micro actuators will heat up and expand, thus reducing the "V" angle (α2 < α1), and the apex of the "V" shape will move outward, thereby pulling the cantilever 1. 9. As the cantilever 20 moves outward, the baffles 21 and 22 separate. The higher the voltage applied to both ends of the electrode, the smaller the "V" angle, and the greater the outward displacement of the cantilever 19 and cantilever 20. The greater the separation distance between the baffles 21 and 22, the greater the separation distance will be. The separation distance will increase rapidly with the increase of voltage. When the voltage reaches about 20V, the separation distance between the baffles 21 and 22 can reach 500μm. At this time, the center hole 24 of the acceleration chamber 4 is fully exposed, the flight channel of the flying plate is opened, that is, the safety actuator is in the unlocked state.
[0036] like Figure 1 As shown, the completed safety actuator and impact detonator transducer are formed into a device through silicon-glass bonding or silicon-silicon bonding. Then, it is encapsulated with electrodes 9, 10, 11, and 12 into the lower housing 8. Finally, the output charge 6 and the upper housing 7 are encapsulated to form the final sample.
[0037] The second integration scheme of the safety actuator and the impact detonator:
[0038] like Figure 7 The safety actuator is an integrated acceleration chamber safety actuator, that is, the acceleration chamber 4 of the impact detonator is manufactured on the substrate 23 of the safety actuator through processes such as homogenization, drying, exposure, and development, with a thickness of 350μm to 500μm, and its shape is as follows. Figure 7 As shown. After the fabrication process of the flying piece 3 is completed, the transducer of the impact detonator is diced. Then, the fabricated safety actuator and the impact detonator transducer are formed into a device through silicon-glass bonding or silicon-silicon bonding. The subsequent packaging is the same as that of integration scheme one.
[0039] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and improvements without departing from the principles of the present invention, and these modifications and improvements should also be considered to fall within the protection scope of the present invention.
Claims
1. An impact detonator with an integrated safety actuator, characterized in that, It includes a substrate (1), a bridge foil (2), a flyer (3), an acceleration chamber (4), a safety actuator (5), an output charge (6), an upper housing (7), a lower housing (8), an electrode one (9), an electrode two (10), an electrode three (11), and an electrode four (12). The upper shell (7) and the lower shell (8) are connected to each other to form a cavity; the substrate (1), bridge foil (2), flying plate (3), acceleration chamber (4), safety actuator (5), and output charge (6) are all arranged in the cavity; The bridge foil (2) is attached to the surface of the substrate (1), and its two ends are connected to the second electrode (10) and the third electrode (11) respectively; the flyer (3) is attached above the bridge foil (2); the acceleration chamber (4) has a central through hole in the middle, the lower end face of the acceleration chamber (4) is pressed against the surface of the flyer (3), and the safety actuator (5) is set on the upper end face of the acceleration chamber (4); the end face of the output charge (6) is in contact with the safety actuator (5); The safety actuator (5) includes a substrate layer, an insulating layer, and a device layer; the insulating layer is attached to the surface of the substrate layer, and the device layer is disposed on the surface of the insulating layer; the device layer includes two displacement amplification mechanisms, two cantilever arms, and two baffles; one end of each of the two cantilever arms is connected to the two baffles respectively, and the other end is connected to the two displacement amplification mechanisms respectively; the two displacement amplification mechanisms are connected to electrode one (9) and electrode four (12) respectively; when electrode one (9) and electrode four (12) are not energized, the two baffles block the central through hole of the acceleration chamber (4); the two displacement amplification mechanisms are symmetrically arranged, and each displacement amplification mechanism is composed of four "V"-shaped micro actuators arranged in parallel. When current passes through the "V"-shaped micro actuators, the "V"-shaped micro actuators will heat up and expand and extend, thereby reducing the angle of the "V" shape, moving the apex of the "V" shape outward, and then pulling the cantilever arm outward, and separating the two baffles.
2. The impact detonator with an integrated safety actuator according to claim 1, characterized in that, The acceleration chamber (4) and the substrate of the safety actuator (5) are an integrated structure.
3. The impact detonator with an integrated safety actuator according to claim 2, characterized in that, The acceleration chamber (4) is fabricated on the substrate of the safety actuator through a process of homogenization, drying, exposure and development, with a thickness of 350μm to 500μm.
4. The impact detonator with an integrated safety actuator according to claim 1, characterized in that, The safety actuator is an integrated structure. The device layer is a 3μm to 5μm copper layer magnetron sputtered on the surface of an SOI wafer. It is formed by etching, stripping and dicing processes to obtain two displacement amplification mechanisms, two cantilever arms and two baffles.
5. The impact detonator with an integrated safety actuator according to claim 1, characterized in that, The substrate (1), bridge foil (2), fly plate (3), and acceleration chamber (4) are combined to form a transducer.
6. The impact detonator with an integrated safety actuator according to claim 5, characterized in that, The safety actuator and the transducer are integrated into a single device through silicon-glass bonding or silicon-silicon bonding.
7. The impact detonator with an integrated safety actuator according to claim 1, characterized in that, When electrodes 1 (9) and 4 (12) are energized and the voltage reaches 20V, the distance between the two baffles can reach 500μm. At this time, the central through hole of the acceleration chamber (4) is fully visible, the flight channel of the flying plate is opened, that is, the safety actuator is in the unlocked state.
8. The impact detonator with an integrated safety actuator according to claim 1, characterized in that, Electrode 1 (9), electrode 2 (10), electrode 3 (11) and electrode 4 (12) are encapsulated in the lower housing.
9. The impact detonator with an integrated safety actuator according to claim 1, characterized in that, The bridge foil (2) is provided with internal electrodes at both ends, which are connected to electrode two (10) and electrode three (11).
10. The impact detonator with an integrated safety actuator according to claim 1, characterized in that, The device layer of the safety actuator (5) is provided with internal electrodes that are connected to electrode one (9) and electrode four (12).