A fine adjustment probe card

Abstract

The utility model relates to electrician technical field discloses a kind of fine adjustment probe bases, including second probe card holder, probe card is fixedly arranged in the lower end inside second probe card holder, the upper end surface four corners of second probe card holder are provided with pitch angle adjusting screw pair and second tension spring;Third probe card holder is movably sleeved outside second probe card holder, first probe card holder is rotatably arranged in third probe card holder outside by pivot positioning pin, and rotating direction fine adjustment screw pair is fixedly connected between the upper end of third probe card holder and first probe card holder.In the utility model, the fine adjustment probe base of the utility model has the advantages of accurate adjustment, easy operation, stable structure, wide application range and easy maintenance, effectively solves the problems existing in the prior art, improves the accuracy and efficiency of testing, and has high practical value.

Description

Technical Field

[0001] This utility model relates to the field of electrical engineering technology, and in particular to a fine-tuning probe holder. Background Technology

[0002] A probe card is a test interface primarily used in the wafer testing stage and is a key component of semiconductor testing. Its main function is to accurately transmit test signals from the tester to the corresponding pads (or bumps) of each chip on the wafer, thereby testing various parameters such as chip performance and functionality. This allows for the screening of defective chips, ensuring the quality of chips entering the subsequent packaging stage. A probe card typically consists of a substrate, probe cards, and electronic components. The substrate connects the tester and the probe cards, providing a pathway for signal transmission. The probes on the probe cards are the key components that directly contact the chip pads; their material, shape, and arrangement are designed according to the specific requirements of the chip to ensure good electrical contact and testing accuracy. The electronic components process and adjust the signals. Common types of probe cards include cantilever probe cards, vertical probe cards, and microelectromechanical systems (MEMS) probe cards. Different types of probe cards are suitable for chips of different sizes, pin pitches, and testing requirements. For example, cantilever probe cards are suitable for testing chips with larger pin pitches, while vertical probe cards are more suitable for testing high-density, small-pitch chips.

[0003] In fields such as laser trimming and testing of resistors and microcircuits, during laser trimming or resistance measurement, a probe card is typically used to make close contact with the contact points (measuring points) on the resistor product to measure its resistance. This requires precise control of the relative position between the probe card and the resistor product, including their relative positions in the X, Y, and Z directions of a three-dimensional coordinate system, as well as their tilt angles (parallelism) relative to these three directions. After the position is adjusted, the probe card must be securely fastened. However, probe cards are consumables and are prone to wear, requiring periodic replacement. Each time a probe card is replaced, the tilt angles in all directions must be readjusted. Without suitable probe holder fixtures, this process is extremely time-consuming, labor-intensive, and difficult to achieve with precision.

[0004] Therefore, those skilled in the art have provided a fine-tuning probe holder to address the problems mentioned in the background section. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a fine-tuning probe holder that is simple to operate and can achieve precise adjustment.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A fine-tuning probe holder includes a second probe holder, wherein a probe card is fixedly disposed inside the lower end of the second probe holder, and a pitch angle adjustment thread pair and a second tension spring are disposed at the four corners of the upper end face of the second probe holder.

[0008] The No. 2 probe holder is movably sleeved with the No. 3 probe holder. The No. 1 probe holder is rotatably mounted on the outside of the No. 3 probe holder through a rotating shaft positioning pin. The upper ends of the No. 3 probe holder and the No. 1 probe holder are fixedly connected by a rotation direction fine-tuning thread pair.

[0009] Furthermore, probe pressure strips are fixedly installed on both the front and rear inner sides of the second probe holder by multiple bolt threads.

[0010] Furthermore, multiple probe holder pressure blocks are fixedly provided on the upper surface of the first probe holder.

[0011] Furthermore, the rotation direction fine-tuning threaded pair is divided into two connecting blocks, which are fixedly connected to the No. 3 probe holder and the No. 1 probe holder, respectively.

[0012] Furthermore, a tension spring and a small electric telescopic rod are fixedly installed between the two connecting blocks.

[0013] This utility model has the following beneficial effects:

[0014] This invention proposes a fine-tuning probe holder. Through a combination of a pitch angle adjustment threaded pair and a second tension spring, the tilt angle of the probe holder can be precisely controlled, ensuring optimal contact angle between the probe and the chip pad, thereby improving testing accuracy. The coordinated use of the rotation direction fine-tuning threaded pair and the first tension spring allows the probe holder to quickly return to its optimal position after replacement, reducing readjustment time and difficulty. The probe clamp is fixed to the second probe holder with multiple bolts, ensuring the stability of the probe holder during testing and preventing probe displacement or loosening. The design of the pivot positioning pin ensures proper rotation between the third probe holder and the first probe holder. The rotation and movement are more stable, ensuring accuracy and stability during the adjustment process. This invention is applicable to various types of probe cards, such as cantilever probe cards, vertical probe cards, and MEMS probe cards, and has high versatility. Since probe cards are consumables and need to be replaced periodically, the fine-tuning probe holder design of this invention allows for quick and accurate readjustment of the probe card position after replacement, reducing maintenance time and costs. In summary, this invention effectively solves the problems existing in the prior art through its advantages of precise adjustment, simple operation, stable structure, wide applicability, and convenient maintenance, improving the accuracy and efficiency of testing, and has high practical value. Attached Figure Description

[0015] Figure 1This is a frontal axonometric schematic diagram of the present invention;

[0016] Figure 2 This is an isometric view of the bottom surface of this utility model;

[0017] Figure 3 This is a schematic diagram of the bottom surface of the present invention;

[0018] Figure 4 This is a front view schematic diagram of the present invention.

[0019] Legend:

[0020] 1. Probe holder No. 1; 2. Tension spring No. 1; 3. Rotation direction fine-tuning threaded pair; 4. Probe pressure bar; 5. Probe holder; 6. Pitch angle adjustment threaded pair; 7. Probe holder No. 2; 8. Probe holder No. 3; 9. Probe holder pressure block; 10. Tension spring No. 2. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Reference Figures 1-4 This utility model provides an embodiment of a fine-tuning probe holder, including a second probe holder 7. A probe card 5 is fixedly installed inside the lower end of the second probe holder 7. Probe pressure strips 4 are fixedly installed on the front and rear inner sides of the second probe holder 7 by multiple bolt threads. Pitch angle adjustment threaded pairs 6 and second tension springs 10 are provided at the four corners of the upper end face of the second probe holder 7. A third probe holder 8 is movably sleeved on the outside of the second probe holder 7. A first probe holder 1 is rotatably installed on the outside of the third probe holder 8 by a rotating shaft positioning pin. A rotation direction fine-tuning threaded pair 3 is fixedly connected between the upper ends of the third probe holder 8 and the first probe holder 1. Multiple probe holder pressure blocks 9 are fixedly installed on the upper end face of the first probe holder 1. The rotation direction fine-tuning threaded pair 3 is divided into two connecting blocks, which are fixedly connected to the third probe holder 8 and the first probe holder 1 respectively. A first tension spring 2 and a small electric telescopic rod are fixedly installed between the two connecting blocks.

[0023] Specifically, the combination of the pitch angle adjustment threaded pair 6 and the second tension spring 10 allows the second probe holder 7 to be finely adjusted in four different positions, thereby achieving precise control over the tilt angle of the probe holder 5. This design ensures that the contact angle between the probe and the chip pad can be precisely adjusted, improving testing accuracy. The cooperation of the rotation direction fine-tuning threaded pair 3 and the first tension spring 2 allows for precise adjustment of the relative rotational displacement between the third probe holder 8 and the first probe holder 1. This design enables the probe holder to quickly return to its optimal position after replacement, reducing the time and difficulty of readjustment.

[0024] The tilt angle and rotation direction of the probe holder 5 can be adjusted simply by rotating the pitch angle adjustment thread pair 6 and the rotation direction fine-tuning thread pair 3. This design greatly simplifies the operation process, reduces operator training time and operational difficulty. The design of the probe holder clamping block 9 ensures that the third probe holder 8 is firmly fixed to the first probe holder 1 after adjustment, ensuring stability after adjustment and avoiding test errors caused by loosening. The probe clamping strip 4 is fixed to the second probe holder 7 by multiple bolts, ensuring the stability of the probe holder 5 during testing and preventing probe displacement or loosening during testing. The design of the pivot positioning pin makes the rotational movement between the third probe holder 8 and the first probe holder 1 more stable, ensuring accuracy and stability during adjustment. The fine-tuning probe holder of this invention is suitable for various types of probe holders, such as cantilever probe holders, vertical probe holders, and MEMS probe holders. This design allows this invention to be widely used in chip testing with different sizes, spacings, and testing requirements, exhibiting high versatility.

[0025] Working principle: The probe holder 5 is mounted on the second probe holder 7 and pressed against it by the probe clamping strip 4. The second probe holder 7 is equipped with four sets of pitch angle adjustment threaded pairs 6 and a second tension spring 10. The pitch angle adjustment threaded pairs 6 and the second tension spring 10 fix the probe holder 5 to the third probe holder 8. By adjusting the pitch angle adjustment threaded pairs 6 at four different positions, the second probe holder 7 can be driven to achieve fine-tuning of the tilt angle. The bottom of the third probe holder 8 has a pin hole, and it is positioned by a rotating shaft positioning pin. This allows the probe holder 1 to rotate around the pivot pin. Simultaneously, the two ends of the rotation direction fine-tuning threaded pair 3 are respectively installed on the probe holder 8 and the probe holder 1. The rotation direction fine-tuning threaded pair 3 is fitted with a tension spring 2. By adjusting the rotation direction fine-tuning threaded pair 3, the probe holder 8 and the probe holder 1 rotate relative to each other. After adjustment, the probe holder pressure block 9 is pressed down to firmly fix the probe holder 8 onto the probe holder 1.

[0026] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A fine-tuning probe holder, comprising a second probe holder (7), characterized in that: The probe holder (7) is fixedly provided with a probe card (5) at the lower end inside. The upper end face of the probe holder (7) is provided with a pitch angle adjustment thread pair (6) and a tension spring (10) at the four corners. The No. 2 probe holder (7) is externally fitted with the No. 3 probe holder (8), and the No. 3 probe holder (8) is externally rotatably mounted with the No. 1 probe holder (1) via a rotating shaft positioning pin. The No. 3 probe holder (8) and the No. 1 probe holder (1) are fixedly connected by a rotation direction fine-tuning thread pair (3).

2. The fine-tuning probe holder according to claim 1, characterized in that: The probe holder (7) has probe pressure strips (4) fixed on both the front and rear inner sides by multiple bolt threads.

3. A fine-tuning probe holder according to claim 1, characterized in that: Multiple probe holder pressure blocks (9) are fixedly installed on the upper end face of the first probe holder (1).

4. A fine-tuning probe holder according to claim 1, characterized in that: The rotation direction fine-tuning threaded pair (3) is divided into two connecting blocks, which are fixedly connected to the third probe holder (8) and the first probe holder (1) respectively.

5. A fine-tuning probe holder according to claim 4, characterized in that: A tension spring (2) and a small electric telescopic rod are fixedly installed between the two connecting blocks.

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