Furnace body and edge coating apparatus

Abstract

This utility model discloses a furnace body and an edge-type coating device. The reaction chamber has multiple furnace openings, each equipped with a furnace door structure. The furnace door structure includes: a base located at one end of the furnace opening along a first direction; a furnace door support frame slidably connected to the base; and a furnace door assembly connected to the furnace door support frame; a first drive assembly whose output end is connected to the base, used to drive the base to move along a second direction; a second drive assembly located on the base, used to drive the furnace door support frame to slide along the first direction on the base; and a detection assembly located on the furnace door support frame, used to detect whether the furnace door assembly has moved to a preset positioning area. This utility model uses the detection assembly to determine whether the furnace door assembly is aligned with the furnace opening, improving accuracy, and then uses the first and second drive assemblies to move the furnace door assembly towards the furnace opening and ensure a tight fit.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic device technology, and in particular to a furnace body and edge coating equipment. Background Technology

[0002] With the continuous development of the photovoltaic industry and the increasing demand for production capacity, the half-wafer encapsulation of solar cells on the market can greatly increase production capacity. This requires passivation coating treatment on the cross-section of the slicing half-wafer. However, since the reaction chamber of the edge passivation equipment needs to achieve a certain vacuum level during the process, the furnace door structure at the material inlet and outlet needs to have good sealing performance.

[0003] In the existing technology, due to the relatively heavy structure of the furnace door, the accuracy of the furnace door structure is too low when opening or closing the furnace opening of the furnace tube, making it difficult to align with the furnace opening of the furnace tube. Utility Model Content

[0004] This utility model provides a furnace body and an edge-type coating equipment to solve the problem in the prior art where the furnace door structure has low precision and is difficult to align with the furnace opening of the furnace tube during the opening or closing of the furnace tube.

[0005] The technical solution of this utility model is a furnace body, in which a reaction chamber is provided with multiple furnace openings, each furnace opening being matched with a furnace door structure, the furnace door structure including:

[0006] A base is located at one end of the furnace opening along the first direction, and a furnace door support frame is slidably connected to the base, and a furnace door assembly is connected to the furnace door support frame.

[0007] The first drive component has its output end connected to the base, and the first drive component is used to drive the base to move in the second direction;

[0008] The second drive assembly is mounted on the base, and its output end is connected to the furnace door support frame. The second drive assembly is used to drive the furnace door support frame to slide along the first direction on the base.

[0009] The detection component is located on the furnace door support frame; the detection component is used to detect whether the furnace door assembly has moved to the preset positioning area.

[0010] Furthermore, the furnace door structure also includes a connecting component, which is located inside the furnace door support frame and is connected to the output end of the second drive component.

[0011] Furthermore, a first limiting block is provided on the side of the furnace door support frame near the furnace door assembly and corresponding to the connecting assembly. The first limiting block is used to restrict the movement of the furnace door support frame as it drives the furnace door assembly to approach the furnace opening in the first direction.

[0012] Furthermore, a second limiting block is provided on the other side of the furnace door support frame away from the furnace door assembly and corresponding to the connecting assembly. The second limiting block is used to restrict the movement of the furnace door support frame and the furnace door assembly away from the furnace opening in the first direction.

[0013] Furthermore, the base is provided with multiple first slide rails along the first direction, and the furnace door support frame is provided with a first slide groove corresponding to the first slide rail, and the first slide groove is slidably connected to the corresponding first slide rail.

[0014] Furthermore, the detection components include microswitches or slotted photoelectric switches.

[0015] Furthermore, the furnace door support frame is connected to the furnace door assembly via a connecting block. An adjustment component is provided on the connecting block. The adjustment component is used to adjust the position of the furnace door assembly in a third direction so that the furnace door assembly matches and aligns with the corresponding furnace opening.

[0016] Furthermore, the adjustment assembly includes a limit seat and an adjustment bolt;

[0017] The furnace door assembly has a limiting seat at at least one end along the first direction corresponding to the bottom of the connecting block, and at least one adjusting bolt passes through the limiting seat along the third direction and forms an adjustable connection with the bottom of the connecting block.

[0018] Furthermore, multiple furnace openings are provided at one end of the reaction chamber along a third direction, and each furnace opening is provided with a furnace tube along a second direction.

[0019] This utility model also proposes an edge coating equipment, which includes the furnace body described above.

[0020] Compared with the prior art, the present invention has at least the following beneficial effects:

[0021] This invention mounts the furnace door assembly on a furnace door support frame, resulting in smoother movement of the furnace door assembly and easier alignment with the furnace opening. A second drive assembly then adjusts the horizontal position of the furnace door assembly relative to the furnace opening. A detection assembly further determines whether the furnace door assembly is aligned with the furnace opening, improving accuracy. Finally, a first drive assembly moves the furnace door assembly towards the furnace opening and ensures a tight fit, thereby achieving the desired vacuum level in the furnace tubes within the reaction chamber and improving the passivation coating effect. Furthermore, each furnace opening is controlled by a separately matched furnace door structure moving in both the first and second directions, preventing interference between different furnace door structures during opening and closing. Attached Figure Description

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this invention are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this invention are used to distinguish different objects and not to describe a particular order.

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a front view of the reaction chamber with a furnace door structure proposed in this utility model;

[0025] Figure 2 for Figure 1 An enlarged view of reference numeral A in the attached diagram;

[0026] Figure 3 for Figure 1 An enlarged view of reference numeral B in the attached diagram;

[0027] Figure 4 This is a schematic diagram of the furnace door structure proposed in this utility model.

[0028] Figure label:

[0029] 10. Furnace opening;

[0030] 20. Base; 201. First slide rail; 202. Second slide groove;

[0031] 30. Furnace door support frame; 301. First slide groove; 302. First limiting block; 303. Second limiting block; 304. Connecting block;

[0032] 40. Furnace door assembly;

[0033] 50. First drive component;

[0034] 60. Second drive component;

[0035] 70. Detection components;

[0036] 80. Connecting components;

[0037] 90. Adjustment assembly; 901. Limit seat; 902. Adjustment bolt;

[0038] 100. Rack;

[0039] 110. Support base; 1101. Second slide rail. Detailed Implementation

[0040] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model. Therefore, a feature pointed out in this specification is used to describe one feature of one embodiment of the present utility model, and does not imply that every embodiment of the present utility model must have the described feature. Furthermore, it should be noted that this specification describes many features. Although certain features may be combined to illustrate possible system designs, these features may also be used in other combinations not explicitly stated. Therefore, unless otherwise stated, the described combinations are not intended to be limiting.

[0041] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0042] In some embodiments, such as Figure 1 and Figure 4 As shown, this utility model proposes a furnace body, in which a plurality of furnace openings 10 are provided in the reaction chamber, and each furnace opening 10 is matched with a furnace door structure, the furnace door structure including:

[0043] A base 20 is located at one end of the furnace opening 10 along the first direction. A furnace door support frame 30 is slidably connected to the base 20, and a furnace door assembly 40 is connected to the furnace door support frame 30.

[0044] The first drive component 50 has its output end connected to the base 20. The first drive component 50 is used to drive the base 20 to move along the second direction.

[0045] The second drive assembly 60 is disposed on the base 20, and the output end of the second drive assembly 60 is connected to the furnace door support frame 30; the second drive assembly 60 is used to drive the furnace door support frame 30 to slide along the first direction on the base 20.

[0046] The detection component 70 is located on the furnace door support frame 30; the detection component 70 is used to detect whether the furnace door assembly 40 has moved to the preset positioning area.

[0047] It should be noted that the first direction proposed in this embodiment is preferably the X-axis direction, the horizontal direction, or the left-right direction; the second direction proposed in this embodiment is preferably the Y-axis direction or the front-back direction; and the third direction proposed in this embodiment is preferably the Z-axis direction, the vertical direction, or the up-down direction. Furthermore, the preset positioning area proposed in this embodiment is located directly in front of the furnace opening 10.

[0048] The first drive component 50 and the second drive component 60 proposed in this embodiment are both preferably drive motors; and the furnace body proposed in this embodiment is applied to an edge coating equipment.

[0049] When the furnace door structure needs to be moved away from the furnace opening 10, i.e., when the furnace opening 10 changes from a closed state to an open state, the control unit of the edge coating equipment will first activate the first drive component 50. The first drive component 50 will then drive the base 20 and the furnace door support frame 30 and furnace door assembly 40 located on the base 20 away from the furnace opening 10 in the second direction. Then the control unit will deactivate the first drive component 50 and activate the second drive component 60, so that the second drive component 60 will drive the furnace door support frame 30 and furnace door assembly 40 to move to the side of the furnace opening 10 in the first direction. This ensures that the furnace door structure will not affect the opening or closing process of other furnace door structures.

[0050] When it is necessary to change the furnace opening 10 from the open state to the closed state, the control unit first activates the second drive assembly 60, so that the second drive assembly 60 drives the furnace door support frame 30 and the furnace door assembly 40 to move in the first direction to the front of the furnace opening 10. Then, the control unit detects whether the furnace door assembly 40 has moved to the preset positioning area according to the detection assembly 70, that is, to determine whether the furnace door assembly 40 is aligned with the furnace opening 10, thereby improving accuracy and avoiding the problem of misalignment between the furnace door assembly 40 and the furnace opening 10. If the control unit determines according to the detection assembly 70 that the furnace door assembly 40 is aligned with the furnace opening 10, then the second drive assembly 60 is turned off and the first drive assembly 50 is activated, so that the first drive assembly 50 drives the furnace door assembly 40 to move in the second direction towards the furnace opening 10 through the base 20, until the furnace door assembly 40 matches and covers the furnace opening 10, thereby completing the closure of the furnace opening 10.

[0051] This invention mounts the furnace door assembly 40 onto the furnace door support frame 30, making the movement of the furnace door assembly 40 smoother and facilitating alignment between the furnace door assembly 40 and the furnace opening 10. Then, the second drive assembly 60 adjusts the position of the furnace door assembly 40 relative to the furnace opening 10 in the horizontal direction. A detection assembly 70 then determines whether the furnace door assembly 40 is aligned with the furnace opening 10, improving accuracy. Finally, the first drive assembly 50 moves the furnace door assembly 40 towards the furnace opening 10 and ensures a tight fit, thereby achieving an ideal vacuum level in the furnace tubes within the reaction chamber and improving the passivation coating effect of the reaction chamber. Furthermore, each furnace opening 10 is controlled by a separately matched furnace door structure moving in the first and second directions, thus avoiding mutual interference between the movements of different furnace door structures when opening or closing the furnace opening 10.

[0052] It is understandable that improving the passivation coating effect of the reaction chamber includes at least one of the following:

[0053] 1. Improved coating quality: The uniformity and purity of the coating are significantly improved, reducing the phenomenon of local over-thickness or under-thinness.

[0054] 2. Improve reaction efficiency: The reaction rate is accelerated, energy consumption is reduced, and production efficiency is improved.

[0055] 3. Improved product yield: The smoother film surface reduces defects and flaws, thus improving product yield and consistency.

[0056] 4. Improved film adhesion: The adhesion between the film and the substrate is significantly enhanced, improving the durability and reliability of the film.

[0057] 5. Improved process stability: The stable vacuum level of the furnace tube makes the entire passivation coating process more stable and controllable, reducing the impact of process fluctuations.

[0058] In some embodiments, the detection component 70 includes a micro switch or a slotted photoelectric switch.

[0059] In this embodiment, the detection component 70 is illustrated by a micro switch. The detection component 70 proposed in this embodiment triggers an electrical signal through mechanical contact and uploads it to the control unit to accurately detect the physical displacement endpoint of the furnace door component 40, that is, the furnace door component 40 is closed relative to the furnace opening 10.

[0060] Of course, the detection component 70 can also be a fiber optic photoelectric switch, a reflective photoelectric switch, or other device that can determine whether the furnace door component 40 is aligned with the furnace opening 10, and is not limited here.

[0061] In some embodiments, such as Figure 4As shown, the furnace door structure also includes a connecting component 80, which is located inside the furnace door support frame 30 and is connected to the output end of the second drive component 60.

[0062] In this way, the second drive assembly 60 and the furnace door support frame 30 can be fixedly connected by the connecting assembly 80 so that the power of the second drive assembly 60 can be transmitted to the furnace door support frame 30 through the connecting assembly 80, thereby achieving the purpose of the furnace door support frame 30 sliding on the base 20 along the first direction.

[0063] In some embodiments, to ensure that the furnace door support bracket 30 does not detach from the base 20 when the furnace door assembly 40 is closed relative to the furnace opening 10, and to avoid excessive movement of the furnace door support bracket 30, such as... Figure 4 As shown, the furnace door support frame 30 is provided with a first limiting block 302 on the side near the furnace door assembly 40 and corresponding to the connecting assembly 80. The first limiting block 302 is used to limit the movement of the furnace door support frame 30 when it drives the furnace door assembly 40 to approach the furnace opening 10 in the first direction.

[0064] In some embodiments, to ensure that the furnace door support bracket 30 does not detach from the base 20 when the furnace door assembly 40 is opened relative to the furnace opening 10, and to avoid excessive movement of the furnace door support bracket 30, such as... Figure 4 As shown, the furnace door support frame 30 is provided with a second limiting block 303 on the other side away from the furnace door assembly 40 and corresponding to the connecting assembly 80. The second limiting block 303 is used to limit the movement of the furnace door support frame 30 when it drives the furnace door assembly 40 away from the furnace opening 10 in the first direction.

[0065] In some embodiments, to enable the furnace door support bracket 30 to slide more stably on the base 20 along a first direction, such as... Figure 4 As shown, the base 20 is provided with a plurality of first slide rails 201 along the first direction, and the furnace door support frame 30 is provided with a first slide groove 301 corresponding to the first slide rail 201. The first slide groove 301 is slidably connected to the corresponding first slide rail 201.

[0066] In this way, when the second drive component 60 is activated, the second drive component 60 can drive the furnace door support frame 30 to slide along the first slide rail 201, thereby improving the sliding stability of the furnace door support frame 30.

[0067] In some embodiments, to ensure that both ends of the furnace door assembly 40 can move vertically, thereby adjusting the parallelism between the furnace door assembly 40 and the corresponding furnace opening 10, and thus achieving a more precise alignment between the furnace door assembly 40 and the corresponding furnace opening 10, such as... Figure 1As shown, the furnace door support frame 30 is connected to both ends of the furnace door assembly 40 along the first direction via connecting blocks 304. An adjustment component 90 is provided between the bottom end of the connecting block 304 along the third direction and the furnace door assembly 40. The adjustment component 90 is used to adjust the position of the furnace door assembly 40 along the third direction so that the furnace door assembly 40 matches and aligns with the corresponding furnace opening 10.

[0068] Specifically, such as Figure 2 As shown, the adjustment assembly 90 includes a limit seat 901 and an adjustment bolt 902;

[0069] The furnace door assembly 40 has a limiting seat 901 at at least one end along the first direction corresponding to the bottom of the connecting block 304, and at least one adjusting bolt 902 passes through the limiting seat 901 along the third direction and forms an adjustable connection with the bottom of the connecting block 304.

[0070] Thus, when it is necessary to adjust the vertical position of the furnace door assembly 40 relative to the furnace opening 10, tools can be used to adjust the distance between all adjusting bolts 902 and the corresponding limiting seat 901. At this time, the adjusting bolts 902 will drive the furnace door assembly 40 to move vertically through the limiting seat 901, thereby adjusting the parallelism between the furnace door assembly 40 and the corresponding furnace opening 10, so that the furnace door assembly 40 and the corresponding furnace opening 10 can achieve more precise alignment. As a result, the furnace door assembly 40 and the corresponding furnace opening 10 can achieve a better sealing effect, avoiding the problem of heat loss in the furnace tube caused by the furnace door assembly 40 and the corresponding furnace opening 10 not being fully aligned.

[0071] In some embodiments, such as Figure 1 As shown, a plurality of furnace openings 10 are vertically arranged at one end of the reaction chamber along the third direction, and each furnace opening 10 is provided with a furnace tube along the second direction.

[0072] In this way, by setting the furnace door structure on one side of the furnace opening 10 along the first direction, a single furnace tube can control the opening or closing of the corresponding furnace opening 10 through a single furnace door structure. This allows multiple vertically arranged furnace tubes to enter and exit the vessel more conveniently, avoiding the problem of the furnace door structure affecting the operation of other furnace tubes when opening or closing the furnace opening 10 of a furnace tube. Furthermore, when both the furnace tube and the furnace door structure need maintenance, the furnace door structure can be opened along the first direction corresponding to the furnace opening 10, avoiding the overlap between the maintenance space of the furnace tube and the maintenance space of the furnace door structure. This ensures sufficient maintenance space and reduces the difficulty of maintenance.

[0073] In some embodiments, the present invention also provides an edge coating apparatus, which includes the furnace body described above.

[0074] Among them, such as Figure 1 and Figure 3As shown, the edge coating equipment includes a frame 100, on which a furnace body containing a reaction chamber is provided. At one end of the reaction chamber, a plurality of furnace openings 10 are vertically arranged along a third direction. Each furnace opening 10 has a furnace tube extending from it along a second direction. At one end of the furnace opening 10 along a first direction, a support base 110 is provided, and the support base 110 is arranged on the frame 100 or on the outer wall of the furnace body. The support base 110 is provided with three parallel second slide rails 1101 along the second direction, and the base 20 is provided with matching second slide grooves 202 corresponding to the second slide rails 1101; the support base 110 is also provided with a first drive component 50, and the first drive component 50 and its output end are connected to the base 20 to drive the base 20 to slide along the second slide rails 1101 on the support base 110; then the base 20 is provided with a second drive component 60, and the output end of the second drive component 60 is connected to the furnace door support frame 30 to drive the furnace door support frame 30 to slide along the first slide rails 201 on the base 20; then the furnace door support frame 30 is connected to the furnace door component 40, so that the opening or closing of the furnace door component 40 is completed by the first drive component 50 and the second drive component 60.

[0075] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A furnace body, characterized in that, The reaction chamber of the furnace body is provided with multiple furnace openings (10), and each furnace opening (10) is matched with a furnace door structure, the furnace door structure including: A base (20) is located at one end of the furnace opening (10) along a first direction, and a furnace door support frame (30) is slidably connected to the base (20), and a furnace door assembly (40) is connected to the furnace door support frame (30). A first drive assembly (50) has its output end connected to the base (20), and the first drive assembly (50) is used to drive the base (20) to move along a second direction; A second drive assembly (60) is disposed on the base (20), and the output end of the second drive assembly (60) is connected to the furnace door support frame (30); the second drive assembly (60) is used to drive the furnace door support frame (30) to slide along a first direction on the base (20); A detection component (70) is located on the furnace door support frame (30); the detection component (70) is used to detect whether the furnace door assembly (40) has moved to a preset positioning area.

2. The furnace body according to claim 1, characterized in that, The furnace door structure also includes a connecting component (80), which is located inside the furnace door support frame (30) and is connected to the output end of the second drive component (60).

3. The furnace body according to claim 2, characterized in that, The furnace door support frame (30) is provided with a first limiting block (302) on the side near the furnace door assembly (40) and corresponding to the connecting assembly (80). The first limiting block (302) is used to limit the movement of the furnace door support frame (30) when it drives the furnace door assembly (40) to approach the furnace opening (10) in the first direction.

4. The furnace body according to claim 2, characterized in that, The furnace door support frame (30) is provided on the other side away from the furnace door assembly (40) and corresponding to the connecting assembly (80) with a second limiting block (303). The second limiting block (303) is used to limit the movement of the furnace door support frame (30) when it drives the furnace door assembly (40) away from the furnace opening (10) in the first direction.

5. The furnace body according to claim 1, characterized in that, The base (20) is provided with a plurality of first slide rails (201) along the first direction, and the furnace door support frame (30) is provided with a first slide groove (301) corresponding to the first slide rails (201), and the first slide groove (301) is slidably connected to the corresponding first slide rail (201).

6. The furnace body according to any one of claims 1 to 5, characterized in that, The detection component (70) includes a micro switch or a slotted photoelectric switch.

7. The furnace body according to claim 1, characterized in that, The furnace door support frame (30) is connected to the furnace door assembly (40) via a connecting block (304). An adjustment component (90) is provided on the connecting block (304). The adjustment component (90) is used to adjust the position of the furnace door assembly (40) along a third direction so that the furnace door assembly (40) matches and aligns with the corresponding furnace opening (10).

8. The furnace body according to claim 7, characterized in that, The adjustment assembly (90) includes a limiting seat (901) and an adjustment bolt (902); The furnace door assembly (40) has a limiting seat (901) at least one end along the first direction corresponding to the bottom of the connecting block (304), and at least one adjusting bolt (902) passes through the limiting seat (901) along the third direction and forms an adjustable connection with the bottom of the connecting block (304).

9. The furnace body according to claim 1, characterized in that, The reaction chamber has multiple furnace openings (10) at one end along a third direction, and each furnace opening (10) is provided with a furnace tube along a second direction.

10. An edge-type coating device, characterized in that, The edge-type coating equipment includes the furnace body as described in any one of claims 1 to 9.

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