Ventilation pipeline system of CVD coating machine
CN224337712UActive Publication Date: 2026-06-09SUZHOU YONGZHEN PHOTOELECTRIC TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU YONGZHEN PHOTOELECTRIC TECH CO LTD
- Filing Date
- 2025-05-16
- Publication Date
- 2026-06-09
AI Technical Summary
Technical Problem
Traditional CVD coating equipment suffers from uneven gas flow and is prone to gas path blockage, which affects the equipment's operating efficiency.
Method used
It adopts a three-stage air intake design, which introduces nitrogen, argon and hydrogen respectively, and uses a flow meter to detect the gas flow in real time. Nitrogen can clean the gas path system and prevent blockage.
Benefits of technology
It achieves uniform gas distribution and real-time flow control, prevents gas path blockage, and improves the stability and efficiency of equipment operation.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN224337712U_ABST
Abstract
The utility model discloses a kind of ventilation pipeline systems of CVD coating machine, including CVD coating machine ontology, it is characterized by: still including ventilation pipeline system being installed on the CVD coating machine ontology;The ventilation pipeline system includes pipeline control part and the two groups of branch pipes connected with the pipeline control part, one group of branch pipes is connected with first pipe group and second pipe group respectively, another group of branch pipes is connected with third pipe group and fourth pipe group respectively, and each group of pipe group is connected with several groups of air pipe;The pipeline control part includes first air inlet pipe, second air inlet pipe, third air inlet pipe, and three groups of air inlet pipe gas outlet end are equipped with the connection three passageways. The utility model can open nitrogen channel, nitrogen can clean entire air path system, carry out dehumidification, can quickly clear dirty thing in air path system, avoid air path blockage and affect efficiency.
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