Tube and silicon wafer processing apparatus

Abstract

The utility model discloses a kind of pipe body and silicon wafer processing equipment, comprising: main pipeline, for connecting the vacuum chamber of furnace body;At least one branch pipeline, first end is connected with main pipeline, second end is used to connect evacuation assembly;Branch pipeline is provided with first switch component and second switch component from the direction of evacuation assembly to main pipeline, branch pipeline between second switch component and main pipeline is communicated with first switch component by auxiliary pipeline.The evacuation assembly of the utility model first carries out pre-evacuation to vacuum chamber by first switch component, the pre-evacuation can provide an initial working pressure for main evacuation, then evacuation assembly carries out main evacuation to vacuum chamber by first switch component and second switch component, so that main evacuation can improve the pumping efficiency of pipe body under the action of initial working pressure, shorten process time, avoid the processing efficiency of silicon wafer caused by too long vacuum time.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic device technology, and in particular to a tube body and silicon wafer processing equipment. Background Technology

[0002] With the continuous development of the photovoltaic industry, current photovoltaic processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD are produced using two types of furnaces: vertical furnaces and horizontal furnaces. Both types of furnaces require the cells (silicon wafers or crystals) to be loaded into a specific boat (carrier) and fed into the furnace's reaction chamber for processing. By heating the reaction chamber and introducing specific reaction gases, specific processes such as coating, diffusion, oxidation, and thin film deposition are achieved on the silicon wafers or crystals. As the photovoltaic industry continues to develop, the requirements for equipment are constantly increasing, and the process routes are continuously being updated.

[0003] The furnace body's evacuation port is connected to a pipe to evacuate the furnace's vacuum chamber, allowing specific processes to be performed under preset vacuum conditions. However, in existing technologies, the evacuation efficiency of the pipe connected to the furnace evacuation port is very low, leading to extended processing time and affecting the silicon wafer processing efficiency. Utility Model Content

[0004] This invention provides a tube and silicon wafer processing equipment to solve the problem in the prior art where the tube connecting to the furnace exhaust port has very low exhaust efficiency, which leads to extended process time and affects the processing efficiency of silicon wafers.

[0005] The technical solution of this utility model is a tube body, comprising:

[0006] The main pipe connects to the vacuum chamber of the furnace body;

[0007] At least one branch pipe, the first end of which is connected to the main pipe, and the second end of which is used to connect to the evacuation assembly;

[0008] The branch pipe self-evacuation assembly is equipped with a first switch assembly and a second switch assembly in the direction of the main pipe. The branch pipe located between the second switch assembly and the main pipe is connected to the first switch assembly through an auxiliary pipe.

[0009] Furthermore, a first filter assembly is vertically installed in the branch pipe between the main pipe and the evacuation assembly. The first filter assembly is used to filter the gas in the branch pipe once.

[0010] Furthermore, a second filter assembly is provided in the branch pipe between the evacuation assembly and the first filter assembly, and the second filter assembly is used to perform a second filtration on the gas in the branch pipe.

[0011] Furthermore, a second filter assembly is provided in the branch pipe between the main pipe and the first filter assembly, and the second filter assembly is used to perform a second filtration on the gas in the branch pipe.

[0012] Furthermore, the main pipeline is equipped with a regulating component, which is used to regulate the gas flow rate in the main pipeline.

[0013] Furthermore, a pressure measuring component is installed on the main pipeline to detect the gas pressure flowing into the main pipeline from the vacuum chamber.

[0014] Furthermore, the pipe body also includes a support assembly, which includes a pipe clamp and a support plate;

[0015] One end of the support plate is connected to the pipe clamp, which is set along the circumference of the corresponding branch pipe; the other end of the support plate is connected to the support plate of the adjacent branch pipe, so that the two adjacent branch pipes support each other.

[0016] Furthermore, the main pipeline is provided with at least one connecting component for connecting multiple main pipelines to form a whole, and / or the branch pipeline is provided with at least one connecting component for connecting multiple branch pipelines to form a whole.

[0017] Furthermore, the main pipeline has at least one air port for connecting to the vacuum chamber. The air port is equipped with a telescopic component, which is used to adjust its extension length to compensate for the assembly error between the air port and the vacuum chamber.

[0018] Furthermore, the first switching assembly and the second switching assembly are any one of a baffle valve, a gate valve, a stop valve, or a plug valve.

[0019] This utility model also proposes a silicon wafer processing equipment, including a furnace body, which includes the aforementioned tube body.

[0020] Compared with the prior art, the present invention has at least the following beneficial effects:

[0021] The evacuation assembly of this invention first controls the connection of the auxiliary pipe through a first switching assembly, enabling pre-evacuation of the vacuum chamber. This pre-evacuation provides an initial working pressure for the main evacuation. Then, the evacuation assembly controls the connection of the corresponding branch pipe through a second switching assembly, enabling main evacuation of the vacuum chamber. This main evacuation, under the initial working pressure, improves the pumping efficiency of the tube, shortens the process time, and avoids excessively long evacuation times that could affect silicon wafer processing efficiency. Furthermore, the main evacuation controlled by the second switching assembly can quickly cut off and connect the airflow between the corresponding branch pipe and the evacuation assembly, thus providing sufficient protection for the evacuation assembly and preventing damage caused by untimely airflow switching in the branch pipe. Attached Figure Description

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this invention are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this invention are used to distinguish different objects and not to describe a particular order.

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the connection structure between the first type of tube and the furnace body proposed in this utility model;

[0025] Figure 2 This is a schematic diagram of the structure of the first type of tube proposed in this utility model;

[0026] Figure 3 for Figure 2 An enlarged view of reference numeral A in the attached diagram;

[0027] Figure 4 for Figure 2 An enlarged view of reference numeral B in the attached diagram;

[0028] Figure 5 This is a schematic diagram of the structure of the second type of tube proposed in this utility model;

[0029] Figure 6 This is a schematic diagram of the third type of tube body proposed in this utility model;

[0030] Figure 7 This is a schematic diagram of the fourth type of tube body proposed in this utility model;

[0031] Figure 8 This is a schematic diagram of the fifth type of tube proposed in this utility model.

[0032] Figure label:

[0033] 10. Main pipeline;

[0034] 20. Branch pipe; 201. First flange; 202. Bend pipe;

[0035] 30. Vacuuming component;

[0036] 40. First switch assembly;

[0037] 50. Second switch assembly;

[0038] 60. First filter component;

[0039] 70. Second filter component;

[0040] 80. Adjustment components;

[0041] 90. Pressure testing components;

[0042] 100. Support assembly; 1001. Pipe clamp; 1002. Support plate;

[0043] 110. Connecting component; 1101. First limiting block; 1102. Second limiting block;

[0044] 120. Expansion joint; 1201. Bellows body; 1202. Second flange; 1203. Third flange;

[0045] 130. Furnace body; 1301. Exhaust port. Detailed Implementation

[0046] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model. Therefore, a feature pointed out in this specification is used to describe one feature of one embodiment of the present utility model, and does not imply that every embodiment of the present utility model must have the described feature. Furthermore, it should be noted that this specification describes many features. Although certain features may be combined to illustrate possible system designs, these features may also be used in other combinations not explicitly stated. Therefore, unless otherwise stated, the described combinations are not intended to be limiting.

[0047] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0048] In some embodiments, such as Figures 1-2 As shown, this utility model proposes a tube body, comprising:

[0049] Main pipe 10, which is used to connect to the vacuum chamber of furnace body 130;

[0050] At least one branch pipe 20, the first end of which is connected to the main pipe 10, and the second end of which is used to connect to the evacuation assembly 30;

[0051] The branch pipe 20 is provided with a first switch assembly 40 and a second switch assembly 50 in sequence from the self-evacuation assembly 30 to the main pipe 10. The branch pipe 20 located between the second switch assembly 50 and the main pipe 10 is connected to the first switch assembly 40 through an auxiliary pipe.

[0052] It should be noted that this embodiment uses two branch pipes 20 as an example, and each branch pipe 20 is connected to a vacuum assembly 30 at its second end. The main pipe 10 has two air ports for connecting to the vacuum chamber's air extraction port 1301, and both air ports are respectively sealed and connected to the vacuum chamber's air extraction port 1301.

[0053] The first switching assembly 40 and the second switching assembly 50 proposed in this embodiment can be any one of a baffle valve, a gate valve, a stop valve, or a plug valve, and are not limited thereto; of course, the valve types of the first switching assembly 40 and the second switching assembly 50 proposed in this embodiment are different. The evacuation assembly 30 proposed in this embodiment is preferably a vacuum pump. Furthermore, the pipe body proposed in this embodiment also includes a main control unit (not shown, the same throughout), which is electrically connected to the evacuation assembly 30, the first switching assembly 40, and the second switching assembly 50 respectively.

[0054] Furthermore, a through hole is provided on the branch pipe 20 between the second switch assembly 50 and the main pipe 10. The first flange 201 is installed in the through hole. Then, the first switch assembly 40 is connected to the first flange 201 through the auxiliary pipe. That is, the branch pipe 20 between the second switch assembly 50 and the main pipe 10 is connected to the first switch assembly 40 through the auxiliary pipe.

[0055] Thus, when the vacuum chamber of the furnace body 130 needs to be evacuated to allow specific processes to be carried out under preset vacuum conditions, the main control unit controls the first switch assembly 40 to open, the second switch assembly 50 to close, and the evacuation assembly 30 to start. At this time, the gas flow direction in the pipe is: vacuum chamber of the furnace body 130 → evacuation port 1301 → main pipe 10 → corresponding branch pipe 20 → auxiliary pipe → first switch assembly 40 → evacuation assembly 30. In this way, the evacuation assembly 30 passes through the first switch assembly... 40. The vacuum chamber is pre-evacuated. When the pressure in the vacuum chamber drops to a preset threshold, the main control unit controls the second switch assembly 50 to open. At this time, the gas flow direction in the pipe is: vacuum chamber of furnace body 130 → evacuation port 1301 → main pipe 10 → corresponding branch pipe 20 → second switch assembly 50 → evacuation assembly 30. That is, the evacuation assembly 30 performs main evacuation of the vacuum chamber through the second switch assembly 50, thereby bringing the vacuum chamber of furnace body 130 to the preset vacuum condition.

[0056] Therefore, the evacuation assembly 30 of this invention first controls the connection of the auxiliary pipe through the first switch assembly 40, enabling pre-evacuation of the vacuum chamber. This pre-evacuation provides an initial working pressure for the main evacuation. Then, the evacuation assembly 30 controls the connection of the corresponding branch pipe 20 through the second switch assembly 50, enabling main evacuation of the vacuum chamber. This main evacuation, under the initial working pressure, improves the pumping efficiency of the pipe, shortens the process time, and avoids excessively long evacuation time affecting the processing efficiency of the silicon wafer. Furthermore, the main evacuation controlled by the second switch assembly 50 can quickly cut off and connect the airflow between the corresponding branch pipe 20 and the evacuation assembly 30, thus providing sufficient protection for the evacuation assembly 30 and preventing damage to the evacuation assembly 30 due to untimely airflow switching in the branch pipe 20.

[0057] In other embodiments, the positions of the first flange 201 and the first switch assembly 40 can be interchanged, that is, the first switch assembly 40 is closer to the main pipe 10 than the second switch assembly 50. Then the first switch assembly 40 is connected to the first flange 201 through an auxiliary pipe, that is, the evacuation assembly 30 is connected to the first switch assembly 40 through an auxiliary pipe.

[0058] In some embodiments, dust in the airflow flowing out of the vacuum chamber is filtered once to prevent dust impurities in the airflow from affecting the evacuation process of the evacuation assembly 30, such as... Figure 2 As shown, a first filter assembly 60 is vertically installed in the branch pipe 20 between the main pipe 10 and the evacuation assembly 30. The first filter assembly 60 is used to filter the gas in the branch pipe 20 once.

[0059] In this way, before the airflow from the vacuum chamber passes through the first switch assembly 40, it will first pass through the vertically set first filter assembly 60. Under the influence of airflow and gravity, dust in the airflow will accumulate in the first filter assembly 60, thereby filtering the dust in the airflow and preventing dust impurities in the airflow from affecting the evacuation process of the evacuation assembly 30 and avoiding environmental pollution.

[0060] In some embodiments, a second filter assembly 70 is provided in the branch pipe 20 between the main pipe 10 and the first filter assembly 60 to perform a second filtration on the gas in the branch pipe 20 for secondary filtration of liquid or solid impurities in the gas flow out of the vacuum chamber and to prevent liquid or solid impurities in the gas flow from affecting the evacuation process of the evacuation assembly 30. The second filter assembly 70 is used to perform a second filtration on the gas in the branch pipe 20.

[0061] It is understood that the first filter assembly 60 and the second filter assembly 70 can be located on the branch pipe 20 closer to the main pipe 10 than the first switch assembly 40 and the second switch assembly 50; or the branch pipe 20 can be provided with the second filter assembly 70, the first switch assembly 40, the first filter assembly 60 and the second switch assembly 50 in sequence along the direction from the evacuation assembly 30 toward the main pipe 10. Of course, the positions of the first switch assembly 40 and the second switch assembly 50 can be interchanged, and / or the positions of the first filter assembly 60 and the second filter assembly 70 can also be interchanged, which is not limited here.

[0062] In this embodiment, if we take the branch pipe 20 as an example, with the second filter assembly 70, the first switch assembly 40, the first filter assembly 60, and the second switch assembly 50 sequentially arranged along the direction from the evacuation assembly 30 towards the main pipe 10, then when the airflow flowing out of the vacuum chamber passes through the first switch assembly 40, it will first be filtered by the first filter assembly 60. After passing through the first switch assembly 40, the airflow will be filtered a second time by the second filter assembly 70 before entering the evacuation assembly 30, thereby further improving the filtration effect. Thus, through the combined filtration of the evacuation airflow by the first filter assembly 60 and the second filter assembly 70, the amount of solid and liquid impurities in the evacuation airflow is reduced, preventing liquid or solid impurities in the airflow from affecting the evacuation process of the evacuation assembly 30 and avoiding environmental pollution. Furthermore, since the first filter assembly 60 is placed vertically and the second filter assembly 70 is placed horizontally, any damaged filter element of the horizontally placed second filter assembly 70 after long-term use can fall into the corresponding branch pipe 20 instead of directly falling into the evacuation assembly 30 and causing damage to the evacuation assembly 30.

[0063] In other embodiments, liquid or solid impurities in the gas flow exiting the vacuum chamber are filtered a second time to prevent these impurities from affecting the evacuation process of the evacuation assembly 30. Figure 8 As shown, a second filter assembly 70 is provided in the branch pipe 20 between the evacuation assembly 30 and the first filter assembly 60. The second filter assembly 70 is used to perform secondary filtration on the gas in the branch pipe 20.

[0064] It is understood that the first filter assembly 60 and the second filter assembly 70 are connected. Furthermore, the first filter assembly 60 and the second filter assembly 70 can be positioned on the branch pipe 20 closer to the evacuation assembly 30 than the first switch assembly 40 and the second switch assembly 50, with the first filter assembly 60 being closer to the evacuation assembly 30 than the second filter assembly 70. Both the first filter assembly 60 and the second filter assembly 70 are vertically arranged, and a curved pipe 202 is provided between the first filter assembly 60 and the evacuation assembly 30. Of course, the positions of the first filter assembly 60 and the second filter assembly 70 can be interchanged, and this is not limited here.

[0065] In this way, the first filter assembly 60 is closer to the vacuum assembly 30 than the second filter assembly 70, so that the filter element of the second filter assembly 70 that is damaged after long-term use can fall into the first filter assembly 60. In addition, a curved pipe 202 is provided between the first filter assembly 60 and the vacuum assembly 30, so that the filter element of the first filter assembly 60 that is damaged after long-term use can fall onto the curved pipe 202, avoiding the damaged filter element from falling directly into the vacuum assembly 30 and causing damage to the vacuum assembly 30.

[0066] In some embodiments, such as Figure 2 As shown, the main pipeline 10 is equipped with an adjustment component 80, which is used to adjust the gas flow rate in the main pipeline 10.

[0067] It should be noted that the regulating component 80 proposed in this embodiment is preferably a butterfly valve, and the regulating component 80 is electrically connected to the main control unit.

[0068] In this way, the PID control algorithm in the main control unit can dynamically adjust the opening and closing angle of the regulating component 80 according to different process requirements, thereby regulating the airflow in the main pipeline 10.

[0069] In some embodiments, such as Figure 2 As shown, a pressure measuring component 90 is provided on the main pipe 10. The pressure measuring component 90 is used to detect the gas pressure flowing into the main pipe 10 from the vacuum chamber of the furnace body 130.

[0070] It should be noted that the pressure measuring component 90 proposed in this embodiment is electrically connected to the main control unit. The pressure measuring component 90 may include a first pressure measuring element and a second pressure measuring element. The first pressure measuring element can be located at the front end of the main pipeline 10 near the vacuum chamber and can be used to detect a larger range of pressure values ​​in the main pipeline 10. The second pressure measuring element can be located at the rear end of the main pipeline 10 and can be used to detect a smaller range of pressure values ​​in the main pipeline 10. Therefore, the pressure measuring component 90 can measure the pressure value in the main pipeline 10 according to different detection requirements, making the application range of the pressure measuring component 90 wider and the measurement more accurate for application scenarios with different detection requirements.

[0071] Since the pressure flowing into the main pipe 10 from the vacuum chamber is not much different from the pressure inside the vacuum chamber, the pressure measuring component 90 detects the pressure flowing into the main pipe 10 from the vacuum chamber of the furnace body 130. This is equivalent to the pressure inside the vacuum chamber of the furnace body 130 being detected by the pressure measuring component 90. The main control unit will adjust the pressure in the vacuum chamber in a timely manner according to the pressure value detected by the pressure measuring component 90 to avoid excessive or insufficient pressure affecting the processing quality of the silicon wafers in the vacuum chamber.

[0072] In some embodiments, such as Figure 2 As shown, the pipe body also includes a support assembly 100, which includes a pipe clamp 1001 and a support plate 1002;

[0073] One end of the support plate 1002 is connected to the pipe clamp 1001, which is arranged along the circumference of the corresponding branch pipe 20; the other end of the support plate 1002 is connected to the support plate 1002 of the adjacent branch pipe 20, so that the two adjacent branch pipes 20 support each other.

[0074] In this way, each adjacent branch pipe 20 is fitted with a pipe clamp 1001, and each pipe clamp 1001 is correspondingly fixed with a support plate 1002. The ends of the support plates 1002 away from the pipe clamps 1001 are connected to each other, so that the adjacent branch pipes 20 form a mutually supportive relationship, avoiding sagging damage caused by long-term use of the branch pipes 20.

[0075] Of course, multiple support components 100 can be set as needed, and no limit is set here.

[0076] In some embodiments, such as Figure 2 As shown, the main pipe 10 is provided with at least one connecting component 110, which is used to connect multiple main pipes 10 to form a whole, and / or the branch pipe 20 is provided with at least one connecting component 110, which is used to connect multiple branch pipes 20 to form a whole.

[0077] It should be noted that this embodiment is illustrated by an example of a connecting component 110 on the main pipe 10.

[0078] In this way, when multiple pipes are combined into a complete main pipe 10, the multiple pipes can be connected and sealed through the connecting component 110, making the pipe body of this embodiment easy to install, disassemble and maintain.

[0079] Specifically, such as Figure 3 As shown, the connecting assembly 110 includes a first limiting block 1101 and a second limiting block 1102. Multiple first limiting blocks 1101 and second limiting blocks 1102 are circumferentially arranged at the connection ends of any two pipes to be connected. The first limiting block 1101 is matched and connected with the corresponding second limiting block 1102. Then, the anti-vibration bolt passes through the first limiting block 1101 and the corresponding second limiting block 1102 in sequence and is tightened with a nut, thereby securing the first limiting block 1101 and the corresponding second limiting block 1102 together. This completes the connection of any two pipes to be connected. A sealing ring is also installed between the connection ends of any two pipes to be connected to achieve a seal.

[0080] Of course, in other embodiments, both the main pipe 10 and the branch pipe 20 can be configured as an integrally formed structure, making the main pipe 10 and the branch pipe 20 more stable and able to withstand a larger gas flow rate. Furthermore, the gas port and the exhaust port 1301 can also be connected and sealed via the connecting component 110, which is not limited here.

[0081] In some embodiments, such as Figure 1 As shown, the main pipe 10 has at least one air port (not shown, same throughout) for connecting the air extraction port 1301 of the vacuum chamber. The air port is provided with a telescopic component 120, which is used to adjust its own extension length to compensate for the assembly error between the air port and the air extraction port 1301 of the vacuum chamber.

[0082] Thus, the telescopic component 120 proposed in this embodiment is used to compensate for the assembly error between the air port of the main pipe 10 and the air extraction port 1301 of the vacuum chamber, reducing the installation centering requirements; and the telescopic component 120 can also absorb the axial displacement caused by the vibration or thermal expansion of the furnace body 130.

[0083] In other embodiments, such as Figure 4 As shown, this embodiment proposes a structure for a telescopic component 120:

[0084] The telescopic assembly 120 includes a bellows body 1201, which is composed of multiple layers of concentrically arranged thin-walled metal bellows. The second flange 1202 and the third flange 1203 are welded and fixed at both ends of the bellows body 1201 respectively. The second flange 1202 is matched and sealed with the air extraction port 1301 of the vacuum chamber of the furnace body 130, and the third flange 1203 is matched and sealed with the air port of the main pipeline 10.

[0085] An inner guide tube (not shown, same throughout) is coaxially disposed inside the bellows body 1201. The first end of the inner guide tube is welded to the second flange 1202, and the second end of the inner guide tube extends to the inner wall of the bellows body 1201 and maintains a preset distance. This distance is 1.2-1.5 times the maximum axial expansion and contraction of the bellows body 1201 to prevent friction between the bellows body 1201 and the inner guide tube during expansion and contraction.

[0086] The expansion and contraction of the bellows body 1201 is achieved in the following way:

[0087] When the pipe body undergoes axial displacement, the second flange 1202 and the third flange 1203 move relative to each other, forcing the crests and troughs of the bellows body 1201 to fold or unfold along the axial direction.

[0088] In other embodiments, the tube proposed in this embodiment can be used not only for vacuuming the vacuum chamber of the furnace body 130, but also for waste discharge treatment of the furnace body 130, which is not limited here.

[0089] In other embodiments, such as Figure 5 As shown, the pipe body proposed in this embodiment can be configured as a single-inlet, multi-outlet structure:

[0090] That is, the main pipe 10 has one air port for connecting the vacuum chamber to the air extraction port 1301, and the branch pipes 20 have two, and the second end of each of the two branch pipes 20 is connected to an air extraction component 30.

[0091] In other embodiments, such as Figure 6 As shown, the pipe body proposed in this embodiment can be configured as a multi-inlet, single-outlet structure:

[0092] That is, the main pipe 10 has two air ports for connecting the vacuum chamber to the air extraction port 1301, and the branch pipe 20 has one air port. The second end of the branch pipe 20 is connected to only one vacuum assembly 30.

[0093] In other embodiments, such as Figure 7 As shown, the pipe body proposed in this embodiment can be configured as a single inlet and single outlet structure:

[0094] That is, the main pipe 10 is provided with one air port for connecting the vacuum chamber to the air extraction port 1301, and the branch pipe 20 is provided with one air extraction port. The second end of the branch pipe 20 is only connected to one air extraction component 30.

[0095] In some embodiments, the present invention also provides a silicon wafer processing apparatus, including a furnace body 130, the furnace body 130 including the aforementioned tube body.

[0096] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A tube body, characterized in that, include: The main pipe (10) is used to connect the vacuum chamber of the furnace body (130); At least one branch pipe (20) has its first end connected to the main pipe (10) and its second end connected to the evacuation assembly (30); The branch pipe (20) is provided with a first switch assembly (40) and a second switch assembly (50) in the direction from the evacuation assembly (30) to the main pipe (10). The branch pipe (20) located between the second switch assembly (50) and the main pipe (10) is connected to the first switch assembly (40) through an auxiliary pipe.

2. The tube body according to claim 1, characterized in that, A first filter assembly (60) is vertically installed in the branch pipe (20) between the main pipe (10) and the evacuation assembly (30). The first filter assembly (60) is used to perform a first filtration on the gas in the branch pipe (20).

3. The pipe body according to claim 2, characterized in that, A second filter assembly (70) is provided in the branch pipe (20) between the evacuation assembly (30) and the first filter assembly (60), and the second filter assembly (70) is used to perform a second filtration on the gas in the branch pipe (20).

4. The tube body according to claim 2, characterized in that, A second filter assembly (70) is provided in the branch pipe (20) between the main pipe (10) and the first filter assembly (60), and the second filter assembly (70) is used to perform a second filtration on the gas in the branch pipe (20).

5. The pipe body according to claim 1, characterized in that, The main pipeline (10) is provided with an adjustment component (80), which is used to adjust the gas flow rate in the main pipeline (10).

6. The pipe body according to claim 1, characterized in that, The main pipe (10) is equipped with a pressure measuring component (90), which is used to detect the gas pressure flowing into the main pipe (10) from the vacuum chamber.

7. The pipe body according to claim 1, characterized in that, The pipe body also includes a support assembly (100), which includes a pipe clamp (1001) and a support plate (1002); One end of the support plate (1002) is connected to the pipe clamp (1001), and the pipe clamp (1001) is arranged along the circumference of the corresponding branch pipe (20); the other end of the support plate (1002) is connected to the support plate (1002) of the adjacent branch pipe (20), so that the two adjacent branch pipes (20) form mutual support.

8. The pipe body according to claim 1, characterized in that, The main pipe (10) is provided with at least one connecting component (110) for connecting multiple main pipes (10) to form a whole, and / or the branch pipe (20) is provided with at least one connecting component (110) for connecting multiple branch pipes (20) to form a whole.

9. The tube body according to claim 1, characterized in that, The main pipe (10) has at least one air port for connecting the vacuum chamber. The air port is provided with a telescopic component (120). The telescopic component (120) is used to adjust its extension length to compensate for the assembly error between the air port and the vacuum chamber.

10. The tube body according to any one of claims 1 to 9, characterized in that, The first switching assembly (40) and the second switching assembly (50) are any one of a baffle valve, a stop valve, a gate valve or a plug valve.

11. A silicon wafer processing apparatus, comprising a furnace body (130), characterized in that, The furnace body (130) includes the tube body as described in any one of claims 1 to 9.

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