Hovering flip cover device for semiconductor chamber

Abstract

This invention provides a hovering flip-top device for a semiconductor cavity, comprising: a support base; an arm extending along a first direction, the arm including a first end and a second end opposite to the first end, the first end being connected to the support base, and a mounting portion for connecting to a cavity cover being provided near the first end of the arm; a reduction gear having an input shaft and an output shaft, the input shaft extending along a second direction, the output shaft extending along a third direction, the second direction being perpendicular to the third direction, the input shaft being connected to a drive device, and the output shaft being connected to the first end of the arm; a telescopic device, the two ends of which are respectively connected to the support base and the second end of the arm; and a hovering assembly mounted on the input shaft of the reduction gear. This invention provides a flip-top device in which, when the drive device stops, the hovering assembly can lock the position of the cavity cover at any angle, preventing the cavity cover from falling off and affecting the machine's performance.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a hovering flip-top device for a semiconductor cavity. Background Technology

[0002] The condition of the semiconductor cavity is closely related to the chip yield, therefore, regular cavity opening maintenance is required. The cavity cover opening action is generally manual, and the cavity cover is relatively large and heavy. When the cavity cover opening angle is greater than 95°, existing cavity cover opening devices can ensure that the cavity cover will not fall automatically. Conversely, when the opening angle is less than 95°, the cavity cover itself will easily fall under the influence of gravity. This makes the cavity cover opening angle relatively fixed, and it is impossible to arbitrarily select the opening angle according to actual needs. Utility Model Content

[0003] The purpose of this invention is to provide a hovering flip cover device for semiconductor chambers, which can arbitrarily select the opening angle as needed, and the chamber cover hovers at this angle without falling back due to its own weight.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a hovering flip cover device for a semiconductor cavity, comprising: a support base; an arm extending along a first direction, the arm including a first end and a second end opposite to the first end, the first end being connected to the support base, and a mounting portion for connection to a cavity cover being provided near the first end of the arm; a reduction gear having an input shaft and an output shaft, the input shaft extending along a second direction, the output shaft extending along a third direction, the second direction being perpendicular to the third direction, the input shaft being connected to a drive device, and the output shaft being connected to the first end of the arm; a telescopic device, the two ends of which are respectively connected to the support base and the second end of the arm; and a hovering assembly including an overrunning clutch and a bearing seat located outside the overrunning clutch, the overrunning clutch being disposed on the input shaft of the reduction gear, and the bearing seat fixing the overrunning clutch to the end face of the input shaft of the reduction gear.

[0005] As a further improvement of this utility model, the driving device includes a driving end and a transmission shaft. One end of the transmission shaft is fixedly connected to the driving end, and the other end of the transmission shaft is fixed to the inner hole of the bearing seat through a connecting piece.

[0006] As a further improvement of this utility model, the overrunning clutch is a bidirectional overrunning clutch.

[0007] As a further improvement of this utility model, a damper is provided between the drive shaft and the bearing housing of the drive device.

[0008] As a further improvement of this utility model, the angle between the first direction and the second direction is 100° to 135°.

[0009] As a further improvement of this utility model, the mounting part of the arm is fixedly connected to the cavity cover by an arc-shaped plate, the arc-shaped plate is adapted to the outer diameter of the cavity cover, and the central angle of the arc-shaped plate is greater than 30°.

[0010] As a further improvement of this utility model, the telescopic device is a gas spring, which extends along a first direction and the projection of the gas spring coincides with the center line of symmetry of the arm.

[0011] As a further improvement of this utility model, the telescopic device consists of two gas springs, which extend along a first direction and are arranged in parallel. The two ends of each gas spring are connected to the support base and the second end of the arm, respectively.

[0012] As a further improvement of this utility model, the driving end of the driving device is any one of a handle, handwheel, rocker arm, crank, or knob.

[0013] Compared with the prior art, the present invention has the following advantages:

[0014] 1. This utility model provides a hovering flip cover device for a semiconductor cavity. The flip cover device includes a driving device, a hovering component, and a reduction gear. The hovering component is installed on the input shaft of the reduction gear. One end of the hovering component is connected to the driving device, and the other end is connected to the input shaft of the reduction gear. When the driving device rotates clockwise or counterclockwise, the input shaft of the reduction gear also rotates synchronously. However, when the input shaft of the reduction gear is subjected to an external torque, it will not cause the driving device to rotate. The hovering component, as an anti-reverse mechanism, can cut off the transmission of torque.

[0015] 2. In this utility model, a damper is connected in series between the drive device of the deceleration device and the suspension component. When the suspension component fails due to overload or other factors, the damper can realize the slow descent of the cavity cover, which plays a role in protecting the machine.

[0016] 3. This utility model uses two gas springs as a telescopic device to ensure that the cavity cover is evenly stressed during the opening process. Attached Figure Description

[0017] To more clearly illustrate the technical solution of this utility model, the drawings used in the description will be briefly introduced below. Obviously, the drawings in the following description are one embodiment of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort:

[0018] Figure 1This is a schematic diagram of the structure of the hovering flip cover device of this utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the hovering flip cover device of this utility model when it is opened;

[0020] Figure 3 This is a partial exploded view of the hovering component of this utility model.

[0021] Figure 4 This is a schematic diagram of the structure at point A of this utility model; Detailed Implementation

[0022] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, further illustrates the proposed solution of this utility model. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, intended only to facilitate and clearly illustrate the embodiments of this utility model. Please refer to the drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0023] The semiconductor chamber includes a chamber wall, a chamber cover, and a flip-top device; the chamber wall forms a cavity 110; the chamber cover is connected to the upper part of the chamber wall and is used to seal the cavity, forming a sealed cavity; the flip-top device is fixed to the chamber wall and connected to the chamber cover, facilitating the opening or closing of the chamber cover. Optionally, the semiconductor vacuum chamber can be a CVD chamber, etching chamber, epitaxial chamber, heat treatment chamber, pretreatment chamber, or transfer chamber, etc.

[0024] Figure 1 and Figure 3This invention illustrates a hovering flip-top device for a semiconductor cavity, comprising: a support base 105 fixed to a cavity 110; a speed reduction device 103 disposed on the side of the support base; an arm 107 extending along a first direction passing through the center of a cavity cover 108, i.e., the surface formed by the rotation of the arm passing through the center of the cavity cover 108; the arm 107 including a first end and a second end opposite to the first end, the first end being connected to the support base 105, and a mounting portion 109 connected to the cavity cover 108 near the first end of the arm; a speed reduction device 103 having an input shaft 1032 and an output shaft, the input shaft 1032 extending along a second direction, the output shaft extending along a third direction perpendicular to the second direction, the input shaft 1032 being connected to a drive device, and the output shaft being connected to the first end of the arm; a telescopic device 106, the two ends of which are respectively connected to the support base 105 and the second end of the arm 107; and a hovering assembly 11 mounted on the input shaft 1032 of the speed reduction device.

[0025] like Figure 4 As shown, the hovering assembly includes an overrunning clutch 112 and a bearing housing 113 located outside the overrunning clutch. The overrunning clutch is disposed on the input shaft 1031 of the reduction gear. The bearing housing 113 fixes the overrunning clutch 112 to the end face 1032 of the input shaft of the reduction gear. That is, the bearing housing has a space inside to accommodate the overrunning clutch 112. The overrunning clutch 112 is fixed to the end face of the input shaft of the reduction gear through the bearing housing located outside it.

[0026] The driving device includes a driving end 101 and a transmission shaft 111. One end of the transmission shaft 111 is fixedly connected to the driving end 101, and the other end of the transmission shaft 111 is fixed to the inner hole of the bearing seat 113 by a connecting member. The connecting member is a bearing, but is not limited to it.

[0027] The overrunning clutch 112 is a bidirectional overrunning clutch. One end of the bidirectional overrunning clutch 112 is connected to the drive shaft, i.e., the transmission shaft of the drive device, and the other end is connected to the driven shaft, i.e., the input shaft of the reduction device. When the drive shaft rotates clockwise or counterclockwise, the driven shaft also rotates synchronously. However, when the driven shaft is subjected to an external torque, it cannot rotate clockwise or counterclockwise. The bidirectional overrunning clutch serves as a mechanism to prevent the reverse transmission of power or to cut off the transmission of torque.

[0028] The drive end of the drive device can be any one of a handle, handwheel, crank, crank, or knob. Taking a handwheel as the drive end, when the handwheel 101 rotates, the drive shaft 111 of the handwheel rotates, and the drive shaft 111 drives the input end of the bidirectional overrunning clutch 112 to rotate, thereby driving the output end of the bidirectional overrunning clutch 112 to rotate. The rotational torque of the handwheel 101 is transmitted to the input shaft of the reduction device 103 through the bidirectional overrunning clutch 112. Furthermore, the reduction device 103 is a planetary reducer. After the reduction ratio is amplified inside the planetary reducer 103, the output shaft of the planetary reducer 103 outputs a large torque to rotate, thereby driving the arm 107, the mounting part 104, and the cavity cover 108 to rotate along the output axis of the planetary reducer 103. This realizes the opening and closing action of the cavity cover 108. The rotational torque generated by the two nitrogen springs 106 is opposite to the rotational torque generated by the gravity of the cavity cover 108, which makes it easier to open the cavity cover 108.

[0029] When the handwheel 101 rotates as the driving end, the planetary reducer 103 drives the cavity cover 108 to rotate and open it to a certain acute angle. After releasing the handwheel 101, the gravity of the cavity cover 108 will generate a rotational torque. Due to the presence of the bidirectional overrunning clutch 112, the rotational torque generated by gravity in the cavity cover 108 cannot be transmitted from the driven end to the driving end of the bidirectional overrunning clutch 112. That is, the handwheel 101 cannot be driven to rotate. Therefore, the cavity cover 108 can be suspended and stationary at any angle without rotating freely due to gravity, greatly improving the convenience and safety of operation.

[0030] Furthermore, the drive shaft of the drive device is any one of a circular shaft, a rhomboid shaft, a triangular shaft, a square shaft, or a pentagonal shaft. The drive end has a mounting surface facing the bearing seat, and the mounting surface has a damper. The damper has a connecting hole at its center, and the connecting hole is adapted to the shape of the drive shaft. The drive shaft of the drive device first passes through the damper and then is fixed to the inner hole of the bearing seat through the bearing 114.

[0031] Furthermore, the damper is any one of a rotary damper, a hydraulic damper, or a pneumatic damper.

[0032] Furthermore, such as Figure 2 As shown, the angle between the first direction and the second direction is 100° to 135°. Since the deceleration device and the drive device have a certain volume, to avoid interference between the flip-top device and the cavity cover during the opening process, the drive device is positioned at a certain angle to the plane of the cavity cover. If the flip-top device is small, the drive device can also be positioned perpendicular to the plane of the cavity cover.

[0033] Furthermore, the support base 105 includes a bracket and a connecting frame. The bracket includes a first support plate and a second support plate, which extend along a third direction and are arranged opposite to each other. The arm 107 is located within the space formed by the first support plate, the second support plate, and the connecting frame. The output shaft of the reduction gear passes through the first support plate and is connected to the arm 107. The output shaft of the reduction gear is used to output the force provided by the drive device to the arm 107 and drive the arm to flip the cavity cover 108. The connecting frame is fixed to the bracket and has a protrusion for connecting with the telescopic device 106.

[0034] The speed reduction device 103 is a planetary speed reducer or a harmonic speed reducer.

[0035] The mounting portion 109 of the arm 107 is fixedly connected to the cavity cover 108 via an arc-shaped plate 104. While the mounting portion of the arm 107 could be directly fixed to the cavity cover, the contact area between the mounting portion and the cavity cover is relatively small due to the arm's elongated shape. Given the large mass of the cavity cover, connecting it via the arc-shaped plate improves the connection strength. To ensure force balance during the opening and closing of the cavity cover, the center line of symmetry of the arc-shaped plate coincides with the center line of symmetry of the arm. To ensure sufficient connection strength between the arm and the cavity cover, the arc-shaped plate is adapted to the outer diameter of the cavity cover, and the central angle of the arc-shaped plate is greater than 30°.

[0036] The telescopic device 106 is a gas spring, which extends along a first direction and whose projection coincides with the center line of symmetry of the arm. The gas spring can be an air spring or a nitrogen spring, but is not limited thereto.

[0037] Furthermore, the telescopic device 106 consists of two gas springs, each extending along a first direction and arranged in parallel. The two ends of each gas spring are connected to the support base and the second end of the arm, respectively. The width of the arm is equal to the width of the connecting frame. Therefore, the two gas springs can maintain a parallel state, avoiding the generation of forces in directions other than the first direction during the opening and closing process, thus improving the opening and closing efficiency.

[0038] The support base is also provided with a positioning hole, which is located on the first support plate and / or the second support plate. The arm is provided with a corresponding limiting hole. When the cavity cover is opened to a certain angle, the positioning pin passes through the positioning hole and the limiting hole to fix the arm in a specific position, thereby fixing the cavity cover in a specific position and preventing the cavity cover from flipping undesirably.

[0039] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. Additionally, the term "connection" in this document indicates a direct connection between A and B, or an indirect connection between A and B, such as an indirect connection between A and B via C, or even via C and D, or more components. The connection between A and B can be integral or separate, detachable or fixed. The term "optional" in this document indicates that the technical feature can be combined with or not combined with any feature in the document.

[0040] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A hovering flip-top device for a semiconductor cavity, characterized in that, include: Support base; An arm extending along a first direction, the arm including a first end and a second end opposite to the first end, the first end being connected to a support base, and a mounting portion for connection to a cavity cover being provided near the first end of the arm; A speed reduction device is provided with an input shaft and an output shaft. The input shaft extends along a second direction, and the output shaft extends along a third direction. The second direction is perpendicular to the third direction. The input shaft is connected to a drive device, and the output shaft is connected to a first end of an arm. A telescopic device, wherein both ends of the telescopic device are respectively connected to a support base and the second end of an arm; A hovering assembly, comprising an overrunning clutch and a bearing housing located outside the overrunning clutch, the overrunning clutch being disposed on the input shaft of the reduction gear, and the bearing housing being used to fix the overrunning clutch to the end face of the input shaft of the reduction gear.

2. The hovering flip cover device for a semiconductor cavity according to claim 1, characterized in that, The driving device includes a driving end and a transmission shaft. One end of the transmission shaft is fixedly connected to the driving end, and the other end of the transmission shaft is fixed to the inner hole of the bearing seat through a connector.

3. A hovering flip-top device for a semiconductor cavity according to claim 2, characterized in that, The overrunning clutch is a bidirectional overrunning clutch.

4. A hovering flip-top device for a semiconductor cavity according to claim 3, characterized in that, A damper is provided between the drive shaft and the bearing housing of the drive device.

5. A hovering flip-top device for a semiconductor cavity according to claim 1, characterized in that, The angle between the first direction and the second direction is 100°~135°.

6. A hovering flip-top device for a semiconductor cavity according to claim 1, characterized in that, The mounting part of the arm is fixedly connected to the cavity cover by an arc-shaped plate. The arc-shaped plate is adapted to the outer diameter of the cavity cover, and the central angle of the arc-shaped plate is greater than 30°.

7. A hovering flip-top device for a semiconductor cavity according to claim 1, characterized in that, The telescopic device is a gas spring that extends along a first direction and whose projection coincides with the center line of symmetry of the arm.

8. A hovering flip-top device for a semiconductor cavity according to claim 1, characterized in that, The telescopic device consists of two gas springs, which extend along a first direction and are arranged in parallel. The two ends of each gas spring are connected to the support base and the second end of the arm, respectively.

9. A hovering flip-top device for a semiconductor cavity according to claim 1, characterized in that, The driving end of the driving device is any one of a handle, handwheel, rocker arm, crank, or knob.

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