Rotatable washing machine for flower basket gripping device

Abstract

This utility model discloses a cleaning machine with a rotatable basket-grabbing device, belonging to the field of semiconductor wafer cleaning equipment. It includes a housing, a frame, a gripping mechanism, and two cleaning tank groups. The housing has a horizontal partition dividing it into an upper and lower cavity. Each cleaning tank group includes several cleaning tanks arranged laterally on the bottom surface of the lower cavity. The frame includes two transverse guide rails installed in the upper cavity, a horizontal slide plate, and a transverse drive device mounted on the horizontal slide plate. A vertical through-hole for a rotating shaft is provided on the horizontal slide plate. The gripping mechanism includes a vertical lifting device mounted on the horizontal slide plate, with a rotating shaft on the vertical lifting device. One end of the turntable's bottom surface is connected to the basket-grabbing device. A corrugated pipe that can laterally seal the top surface of the long through-hole is installed above the top surface of the horizontal partition on the frame. The rotating shaft passes through the corrugated pipe and is connected to it via a sealing ring. This utility model cleaning machine features fast gripping speed and small size.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer cleaning equipment, and in particular to a cleaning machine with a rotatable basket gripping device. Background Technology

[0002] In semiconductor device manufacturing, approximately 20% of the processes involve wafer cleaning. After wafers undergo various processing steps such as slicing, chamfering, grinding, surface treatment, polishing, and epitaxy, their surfaces become severely contaminated. The purpose of cleaning is to remove contaminants such as particles, metal ions, and organic matter from the wafer surface.

[0003] Currently, wafer cleaning primarily relies on chemical cleaning. Chemical cleaning involves using various chemical reagents and organic solvents to react with or dissolve impurities and oil adsorbed on the surface of the object being cleaned. This process may also incorporate physical measures such as ultrasound, heating, or vacuuming, causing the impurities to detach from the surface. The surface is then rinsed with a large amount of high-purity hot and cold deionized water to achieve a clean surface. Chemical cleaning can be divided into wet chemical cleaning and dry chemical cleaning, with wet chemical cleaning technology still dominating in wafer surface cleaning. In wet chemical cleaning, a cleaning basket is used to hold the wafer, which is then placed in the cleaning solution. Existing cleaning machines typically have a horizontal row of cleaning tanks with horizontal guide rails above them. A horizontal motion drive device moves the cleaning basket hooks along the guide rails. The main drawbacks are: when there are many cleaning tanks, the horizontal guide rails become quite long, resulting in a larger cleaning machine and a larger footprint; additionally, the horizontal motion drive device is time-consuming and inefficient when running along the guide rails. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by providing a rotatable flower basket gripping machine, which features fast gripping speed and small size.

[0005] The technical solution adopted in this utility model is as follows.

[0006] A rotatable flower basket gripping cleaning machine is characterized by comprising a housing, a frame, a gripping mechanism, and two cleaning tanks.

[0007] The inner cavity of the box is equipped with a horizontal partition, which divides the inner cavity of the box into an upper cavity and a lower cavity.

[0008] Each cleaning tank group includes several cleaning tanks arranged horizontally on the bottom surface of the lower cavity.

[0009] The frame includes two transverse guide rails installed in the upper cavity, a transverse slide plate that can move laterally installed on the two transverse guide rails, and a transverse drive device installed on the transverse slide plate; the transverse slide plate is provided with a vertical through hole for a rotating shaft.

[0010] The gripping mechanism includes a vertical lifting device mounted on a horizontal sliding plate, a rotating shaft mounted vertically on the vertical lifting device, and a rotating shaft drive device connected to the rotating shaft. The bottom end of the rotating shaft is connected to the centroid of the top surface of the turntable, which has a horizontal top surface. A horizontal through hole is provided on the horizontal partition. The rotating shaft passes through the rotating shaft through hole and the long through hole. A basket gripping device is connected to one end of the bottom surface of the turntable. The longitudinal distance between the centroid of each cleaning tank and the centroid of the turntable is equal and smaller than the radius of the turntable.

[0011] A corrugated sealing plate that can seal the top surface of the long through hole is installed above the top surface of the horizontal partition on the frame. The rotating shaft passes through the corrugated sealing plate and is connected to the corrugated sealing plate through a sealing ring.

[0012] The beneficial effects of this utility model are as follows: the horizontal sliding plate moves laterally on two horizontal guide rails, the vertical lifting device drives the rotating shaft to rotate and rise, and a basket-grabbing device is connected to one end of the turntable bottom surface. Driven by the turntable drive device, the turntable rotates along its central axis. Thus, under the action of the horizontal drive device and the vertical lifting device, the basket-grabbing device can move laterally and vertically. Since the rotating shaft can rise and fall and rotate along its central axis, the basket-grabbing device's longitudinal grabbing range is the lateral width of the turntable bottom surface. The longitudinal distance from the centroid of each cleaning tank to the centroid of the turntable is equal. Thus, each row of cleaning tanks and the turnover table are all within the grabbing range of the basket-grabbing device. With the same number of cleaning tanks, compared with the existing technology that sets up a grabbing mechanism with one row of cleaning tanks, the size is smaller, the running time of the horizontal sliding plate on the two horizontal guide rails is shorter, and the cleaning efficiency is higher. A corrugated sealing plate is installed above the top surface of the horizontal partition on the frame, which can seal the top surface of the long through hole laterally. The rotating shaft passes through the corrugated sealing plate and is connected to the corrugated sealing plate through a sealing ring, which can prevent the volatile substances of the cleaning fluid from corroding the power mechanism such as the horizontal drive device and vertical lifting device in the upper cavity.

[0013] As a preferred technical solution, a turntable is provided on the left side of the leftmost cleaning tank or the right side of the rightmost cleaning tank of each cleaning tank group on the lower cavity. The longitudinal distance between the centroid of each turntable and the centroid of the turntable is less than the radius of the turntable. A wafer basket inlet / outlet is provided on the side of the box near the turntable.

[0014] This technical solution allows for easy entry and exit of the wafer baskets into and out of the cleaning tank of the cleaning machine via a turnover table and wafer basket entrance / exit.

[0015] As a preferred technical solution, the housing is provided with several inlet pipe holes that communicate with the lower cavity, each cleaning tank is connected to an inlet pipe, the inlet pipe passes through an inlet pipe hole and is connected to an external cleaning fluid supply device; the housing is provided with several drain pipe holes that communicate with the lower cavity, each cleaning tank is connected to a drain pipe, the drain pipe passes through a drain pipe hole and is connected to an external cleaning fluid collection device.

[0016] As a preferred technical solution, the housing is equipped with an exhaust vent that communicates with the lower cavity. This technical solution can remove volatile substances from the cleaning fluid.

[0017] As a preferred technical solution, a vertical plate is installed on the horizontal sliding plate, and a vertical lifting device is provided on the side of the vertical plate near the through hole of the rotating shaft. A lead screw and slider are connected to the vertical lifting device, and a rotating shaft is installed vertically on the lead screw and slider.

[0018] As a preferred technical solution, the vertical lifting device includes a vertical lead screw, a lead screw slider connected to the vertical lead screw, and a lead screw rotation drive motor at the top of the vertical lead screw.

[0019] As a preferred technical solution, the rotating shaft drive device includes a rotating shaft drive motor vertically mounted on the lead screw slider, a second drive gear on the output shaft of the rotating shaft drive motor, and a third drive gear meshing with the second drive gear on the rotating shaft.

[0020] As a preferred technical solution, the lateral drive device includes a lateral motion drive motor vertically mounted on the lateral slide plate, a lateral rack disposed on a lateral guide rail, and a first drive gear meshing with the lateral rack on the output shaft of the lateral motion drive motor.

[0021] As a preferred technical solution, the two ends of the corrugated sealing plate are connected to the two ends of the long through hole, respectively.

[0022] As a preferred technical solution, the flower basket gripping device includes two grippers, each gripper having a hook at its bottom end. The two grippers are connected to a gripper horizontal movement drive device mounted on a turntable. Under the action of the gripper horizontal movement drive device, the two grippers move closer to or further away from each other. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of a preferred embodiment of the cleaning machine of this utility model.

[0024] Figure 2 yes Figure 1 The cleaning machine shown is a cross-sectional view along A-A'.

[0025] Figure 3 yes Figure 2 A magnified view of part E.

[0026] Figure 4 yes Figure 2 A magnified view of part F.

[0027] Figure 5 yes Figure 2 A magnified view of part G.

[0028] Figure 6yes Figure 1 The cleaning machine shown is a cross-sectional view along B-B'.

[0029] Figure 7 yes Figure 6 A magnified view of part H.

[0030] Figure 8 yes Figure 6 A magnified view of part I.

[0031] Figure 9 yes Figure 1 The cleaning machine shown is a cross-sectional view along C-C'.

[0032] Figure 10 yes Figure 1 The cleaning machine shown is a cross-sectional view along D-D'.

[0033] Figure 11 yes Figure 1 The diagram shows the cleaning machine with its casing concealed.

[0034] Figure 12 yes Figure 11 A magnified view of part J.

[0035] Figure 13 yes Figure 11 A magnified view of part K.

[0036] Figure 14 yes Figure 1 The diagram shows the cleaning machine with its hidden housing and horizontal partition.

[0037] Figure 15 yes Figure 14 A magnified view of part L.

[0038] Figure 16 yes Figure 15 The diagram shows a motion state of the cleaning machine.

[0039] Figure 17 yes Figure 16 A magnified view of part M.

[0040] Figure 18 yes Figure 16 A magnified view of part N.

[0041] Figure 19 This is a schematic diagram of the flower basket grasping device.

[0042] Figure 20 yes Figure 19 A magnified view of part P.

[0043] Figure 21 yes Figure 19The shown is a cross-sectional view of the basket-grabbing device along O-O'.

[0044] Figure 22 yes Figure 21 A magnified view of part Q.

[0045] Figure 23 This is a schematic diagram of a preferred embodiment of the cleaning machine of this utility model.

[0046] Figure 24 This is a schematic diagram of a preferred embodiment of the cleaning machine of this utility model.

[0047] The components include: housing-1; upper cavity-11; lower cavity-12; corrugated sealing plate-13; wafer basket inlet / outlet-14; sealing ring-15; exhaust vent-16; liquid inlet pipe through-hole-17; liquid inlet pipe-18; liquid outlet pipe through-hole-19; liquid outlet pipe-110; and observation window-111.

[0048] Horizontal guide rail - 2; Horizontal slide plate - 21; Rotary shaft through hole - 22; Vertical plate - 23; Horizontal motion drive motor - 24; Horizontal rack - 25; First drive gear - 26;

[0049] Horizontal partition -3; through hole -31;

[0050] Vertical lifting device-4; lead screw and slider-41; vertical lead screw-42; lead screw rotation drive motor-43; rotating shaft drive motor-44; second drive gear-45; third drive gear-46;

[0051] Rotating shaft -5;

[0052] Turntable-6; Chip basket gripping robot mounting through hole-61;

[0053] Flower basket gripping device-7; gripper-71; hook-72; horizontal lead screw drive motor-73; horizontal lead screw sliding block-74; horizontal lead screw-75;

[0054] Washing tank-8; Turnover table-81;

[0055] Chip Basket-9. Detailed Implementation

[0056] The utility model will now be further described in conjunction with the accompanying drawings and embodiments.

[0057] Example 1. As... Figure 1-22 As shown, a flower basket gripping device is a rotatable cleaning machine, characterized in that it includes a housing 1, a frame, a gripping mechanism, and two cleaning tanks.

[0058] The inner cavity of the box 1 is provided with a horizontal partition 3, which divides the inner cavity of the box 1 into an upper cavity 11 and a lower cavity 12.

[0059] Each cleaning tank group includes six cleaning tanks 8 arranged laterally on the bottom surface of the lower cavity 12.

[0060] The frame includes two transverse guide rails 2 installed in the upper cavity 11, a transverse slide plate 21 that can move laterally installed on the two transverse guide rails 2, and a transverse drive device installed on the transverse slide plate 21; the transverse slide plate 21 is provided with a vertical rotating shaft through hole 22.

[0061] The gripping mechanism includes a vertical lifting device 4 mounted on a horizontal sliding plate 21. A rotating shaft 5 and a rotating shaft drive device connected to the rotating shaft 5 are vertically mounted on the vertical lifting device 4. The bottom end of the rotating shaft 5 is connected to the centroid of the top surface of the turntable 6, which has a horizontal top surface. A horizontal through hole 31 is provided on the horizontal partition 3. The rotating shaft 5 passes through the rotating shaft through hole 22 and the long through hole 31. A basket gripping device 7 is connected to one end of the bottom surface of the turntable 6. The longitudinal distance between the centroid of each cleaning tank 8 and the centroid of the turntable 6 is equal and smaller than the radius of the turntable 6.

[0062] like Figure 9 As shown, a corrugated sealing plate 13, capable of laterally sealing the top surface of the elongated through hole 31, is installed above the top surface of the horizontal partition 3 on the frame. The rotating shaft 5 passes through the corrugated sealing plate 13 and is connected to the corrugated sealing plate 13 via a sealing ring 15.

[0063] like Figure 16 As shown, a turntable 81 is provided on the left side of the leftmost cleaning tank 8 of each cleaning tank group on the lower cavity 12. The longitudinal distance between the centroid of each turntable 81 and the centroid of the turntable 6 is less than the radius of the turntable 6.

[0064] like Figure 1 As shown. A wafer basket inlet / outlet 14 is located on the front side of the housing 1 near the turnover table 81. The wafer basket inlet / outlet 14 is a double door. This technical solution facilitates the entry and exit of the wafer basket into and out of the cleaning tank of the cleaning machine through the turnover table 81 and the wafer basket inlet / outlet 14.

[0065] like Figure 2 As shown, the housing 1 is provided with several inlet pipe through holes 17 that communicate with the lower cavity 12. Each cleaning tank 8 is connected to an inlet pipe. The inlet pipe 18 passes through an inlet pipe through hole 17 and is connected to an external cleaning liquid supply device. The housing 1 is provided with several drain pipe through holes 19 that communicate with the lower cavity 12. Each cleaning tank 8 is connected to a drain pipe 110. The drain pipe passes through a drain pipe through hole and is connected to an external cleaning liquid collection device.

[0066] The housing 1 is equipped with an exhaust port 16 that communicates with the lower cavity 12. This technical solution allows for the removal of volatile substances from the cleaning fluid. The cleaning fluid is an acid.

[0067] like Figure 11-13As shown, a vertical plate 23 is installed on the horizontal sliding plate 21. A vertical lifting device 4 is provided vertically on the side of the vertical plate 23 near the through hole 22 of the rotating shaft. A lead screw slider 41 is connected to the vertical lifting device 4. A rotating shaft 5 is installed vertically on the lead screw slider 41.

[0068] The vertical lifting device includes a vertical lead screw 42, a lead screw slider 41 connected to the vertical lead screw 42, and a lead screw rotation drive motor 43 provided at the top of the vertical lead screw 42.

[0069] The rotating shaft drive device includes a rotating shaft drive motor 44 vertically mounted on the lead screw slider 41. A second drive gear 45 is provided on the output shaft of the rotating shaft drive motor 44, and a third drive gear 46 meshing with the second drive gear 45 is provided on the rotating shaft 5.

[0070] like Figure 4 As shown, the lateral drive device includes a lateral motion drive motor 24 vertically mounted on a horizontal slide plate 21 and a lateral rack 25 disposed on a lateral guide rail 2. The output shaft of the lateral motion drive motor 24 is provided with a first drive gear 26 that meshes with the lateral rack 25.

[0071] like Figure 9 As shown, the two ends of the corrugated sealing plate 13 are connected to the two ends of the elongated through hole 31, respectively.

[0072] like Figure 22 As shown, the flower basket gripping device 7 includes two grippers 71, and each gripper 71 has a hook 72 at its bottom end. The two grippers 71 are connected to a gripper horizontal movement drive device installed on the turntable 6. Under the action of the gripper horizontal movement drive device, the two grippers 71 move closer to each other or further away.

[0073] Specifically, the turntable 6 has a through hole 61 for mounting the wafer basket gripper robot. The center line of the through hole 61 passes through the centroid of the turntable 6. The horizontal movement drive device for the grippers includes a horizontal lead screw 75 mounted on the through hole, a horizontal lead screw drive motor 73 connected to the horizontal lead screw 75, a horizontal lead screw sliding block 74 mounted on the horizontal lead screw 75, one of the two grippers 71 connected to the horizontal lead screw sliding block 74, and the other gripper 71 fixed to the turntable. The two grippers are located on opposite sides of the center of the through hole. Under the action of the horizontal lead screw drive motor 73, the two grippers 71 move closer to or further away from each other. The horizontal lead screw 75 passes through the central axis of the turntable.

[0074] The horizontal sliding plate 21 moves laterally on the two horizontal guide rails 1. The vertical lifting device 4 drives the rotating shaft 5 to rotate and rise. One end of the bottom surface of the turntable 6 is connected to the basket gripping device 7. Driven by the turntable 6 drive device, the turntable 6 rotates along its central axis. Thus, under the action of the horizontal drive device and the vertical lifting device 4, the basket gripping device 7 can move laterally and vertically. Since the rotating shaft 5 can rise and fall and rotate along its central axis, the longitudinal gripping range of the basket gripping device 7 is the lateral width of the bottom surface of the turntable 4. The longitudinal distance from the centroid of each cleaning tank 8 to the centroid of the turntable 6 is equal. Thus, each row of cleaning tanks and the turnover table 81 are all within the gripping range of the basket gripping device 7. With the same number of cleaning tanks, compared with the existing technology that sets up a gripping mechanism for a single row of cleaning tanks, the volume is smaller, the running time of the horizontal sliding plate 21 on the two horizontal guide rails 1 is shorter, and the cleaning efficiency is higher. A corrugated sealing plate 13 is installed above the top surface of the horizontal partition 3 on the frame, which can seal the top surface of the long through hole 31 laterally. The rotating shaft 5 passes through the corrugated sealing plate 13 and is connected to the corrugated sealing plate 13 through the sealing ring 15, which can prevent the volatile substances of the cleaning liquid from corroding the power mechanism such as the horizontal drive device and the vertical lifting device 4 in the upper cavity 11.

[0075] Example 2. (As shown) Figure 23 As shown, the difference between this embodiment and Embodiment 1 is that a wafer basket entrance / exit 14 is provided on the left side of the box 1 near the turnover table 81. The wafer basket entrance / exit 14 is a lifting door.

[0076] Example 3. (As shown) Figure 24 As shown, the difference between this embodiment and embodiment 1 is that a turnover platform 81 is provided on the right side of the rightmost cleaning tank of each cleaning tank group on the lower cavity 12.

[0077] The embodiments listed above are for understanding the present utility model only and are not intended to limit the technical solutions described herein. Those skilled in the art can make various changes or modifications, and all equivalent changes or modifications should be covered within the protection scope of the present utility model. Any aspects not detailed in the present utility model are well-known to those skilled in the art.

Claims

1. A washing machine with a rotatable flower basket gripping device, characterized in that: The device includes a housing (1), a frame, a gripping mechanism, and two cleaning tank groups. The housing (1) has a horizontal partition (3) inside, which divides the housing (1) into an upper cavity (11) and a lower cavity (12). Each cleaning tank group includes several cleaning tanks (8) arranged laterally on the bottom surface of the lower cavity (12). The frame includes two transverse guide rails (2) installed in the upper cavity (11), a transverse sliding plate (21) that can move laterally installed on the two transverse guide rails (2), and a transverse drive device installed on the transverse sliding plate (21). The transverse sliding plate (21) has a vertical rotating shaft through hole (22). The gripping mechanism includes a vertical lifting device (4) installed on the horizontal slide plate (21). A rotating shaft (5) and a rotating shaft drive device connected to the rotating shaft (5) are vertically installed on the vertical lifting device (4). The bottom end of the rotating shaft (5) is connected to the centroid of the top surface of the turntable (6) whose top surface is horizontal. A long through hole (31) is provided horizontally on the horizontal partition plate (3). The rotating shaft (5) passes through the rotating shaft through hole (22) and through the long through hole (31). A basket gripping device (7) is connected to one end of the bottom surface of the turntable (6). The longitudinal distance between the centroid of each cleaning tank (8) and the centroid of the turntable (6) is equal and smaller than the radius of the turntable (6). A corrugated sealing plate (13) that can horizontally seal the top surface of the long through hole (31) is installed above the top surface of the horizontal partition plate (3) on the frame. The rotating shaft (5) passes through the corrugated sealing plate (13) and is connected to the corrugated sealing plate (13) through a sealing ring (15).

2. The flower basket gripping device of claim 1, which is a rotatable cleaning machine, is characterized in that: A turntable (81) is provided on the left side of the leftmost cleaning tank (8) or the right side of the rightmost cleaning tank in each cleaning tank group on the lower cavity (12). The longitudinal distance between the centroid of each turntable (81) and the centroid of the turntable (6) is less than the radius of the turntable (6). A wafer basket inlet / outlet (14) is provided on the side of the box (1) near the turntable (81).

3. The flower basket gripping device of claim 1, which is a rotatable cleaning machine, is characterized in that: The box body (1) is provided with several inlet pipe through holes (17) that are connected to the lower cavity (12). Each cleaning tank (8) is connected to an inlet pipe. The inlet pipe (18) passes through an inlet pipe through hole (17) and is connected to a cleaning liquid supply device. The box body (1) is provided with several drain pipe through holes (19) that are connected to the lower cavity (12). Each cleaning tank (8) is connected to a drain pipe (110). The drain pipe passes through a drain pipe through hole and is connected to a cleaning liquid collection device.

4. The flower basket gripping device of claim 1, which is a rotatable cleaning machine, is characterized in that: The housing (1) is provided with an exhaust vent (16) that communicates with the lower cavity (12).

5. The flower basket gripping device of claim 4, which is a rotatable cleaning machine, is characterized in that: A vertical plate (23) is installed on the horizontal sliding plate (21). A vertical lifting device (4) is provided on the side of the vertical plate (23) near the through hole (22) of the rotating shaft. A lead screw slider (41) is connected to the vertical lifting device (4). A rotating shaft (5) is installed vertically on the lead screw slider (41).

6. The flower basket gripping device of claim 5, which is a rotatable cleaning machine, is characterized in that: The vertical lifting device includes a vertical lead screw (42), a lead screw slider (41) connected to the vertical lead screw (42), and a lead screw rotation drive motor (43) provided at the top of the vertical lead screw (42).

7. The flower basket gripping device of claim 6, which is a rotatable cleaning machine, is characterized in that: The rotating shaft drive device includes a rotating shaft drive motor (44) mounted vertically on the lead screw slider (41), a second drive gear (45) is provided on the output shaft of the rotating shaft drive motor (44), and a third drive gear (46) is provided on the rotating shaft (5) to mesh with the second drive gear (45).

8. The flower basket gripping device of claim 1, which is a rotatable cleaning machine, is characterized in that: The lateral drive device includes a lateral motion drive motor (24) mounted vertically on a horizontal slide plate (21) and a lateral rack (25) mounted on a lateral guide rail (2). The output shaft of the lateral motion drive motor (24) is provided with a first drive gear (26) that meshes with the lateral rack (25).

9. The flower basket gripping device of claim 8, which is a rotatable cleaning machine, is characterized in that: The two ends of the corrugated sealing plate (13) are connected to the two ends of the long through hole (31).

10. The flower basket gripping device of claim 1, which is a rotatable cleaning machine, is characterized in that: The flower basket gripping device (7) includes two grippers (71), each gripper (71) has a hook (72) at its bottom end. The two grippers (71) are connected to a gripper horizontal motion drive device installed on the turntable (6). Under the action of the gripper horizontal motion drive device, the two grippers (71) move closer to each other or further away.

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