A graphite boat calibration device

Abstract

The utility model provides a kind of graphite boat calibration device, applied to calibration technical field, including positioning frame, lifting mechanism, calibration mechanism, pickup mechanism and tightness mechanism. Among them, pickup mechanism is driven to connect with lifting mechanism, for under the driving action of lifting mechanism along the first direction movement.Calibration mechanism is driven to connect with lifting mechanism, for under the driving action of lifting mechanism along the first direction movement, to approach or away from graphite boat.In addition, tightness mechanism is connected with positioning frame, for loosening or tightening fastener of graphite boat.Based on this, the utility model provides a kind of new graphite boat calibration device, integrated with multiple functional elements, can be in automatic reception corresponding graphite boat, and graphite boat is positioned and calibrated accurately and quickly, so as to can reach shorten calibration period, reduce calibration energy consumption, save manpower resources and the beneficial effect of improving calibration accuracy.

Description

Technical Field

[0001] This utility model relates to the field of calibration technology, and more specifically, to a graphite boat calibration device. Background Technology

[0002] With the continuous development of semiconductor manufacturing technology, graphite boats are being used more and more widely in the photovoltaic and semiconductor industries. In existing technologies, graphite boats serve as crucial tools for supporting silicon wafers, and their stability and precision directly affect product quality and production efficiency. During use, graphite boats may deform due to thermal stress or other reasons, thus affecting their normal operation.

[0003] In existing technologies, a common method involves manually placing the graphite boat into the temporary storage area of ​​the machine after deformation, followed by manual removal and transport. Next, the operator uses a manual boat calibrator to recalibrate the graphite boat. However, this process not only consumes significant manpower but is also prone to errors that can affect the stability of the graphite boat. Utility Model Content

[0004] The purpose of this invention is to provide a graphite boat calibration device that integrates multiple functional components. After automatically receiving the corresponding graphite boat, it can quickly and accurately locate and calibrate it, thereby achieving the beneficial effects of shortening the calibration cycle, reducing calibration energy consumption, saving human resources, and improving calibration accuracy.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] In a first aspect, this utility model provides a graphite boat calibration device, comprising:

[0007] The positioning frame is used to support the graphite boat.

[0008] The lifting mechanism is connected to the positioning frame.

[0009] The calibration mechanism is driven and connected to the lifting mechanism, and is used to move along a first direction under the driving action of the lifting mechanism to move closer to or away from the graphite boat.

[0010] The picking mechanism is driven and connected to the lifting mechanism, and is used to move along the first direction under the driving action of the lifting mechanism to pick up and place the graphite boat into the positioning frame.

[0011] The tensioning mechanism, connected to the positioning frame, is used to loosen or tighten the fasteners of the graphite boat.

[0012] In an optional implementation, the picking mechanism includes:

[0013] Boat gripper, which is driven and connected to the lifting mechanism, is used to hold or separate from the upper graphite block of the graphite boat under the action of the lifting mechanism;

[0014] The boat-holding assembly, connected to the boat gripper, is used to hold or separate from the lower graphite block of the graphite boat under the action of the lifting mechanism.

[0015] In an optional implementation, the pressure boat assembly includes:

[0016] The roller shaft has a U-shaped structure, and both ends of the roller shaft are connected to the boat gripper;

[0017] The pressure roller is fitted in the middle of the roller shaft and is used to abut against the lower graphite block of the graphite boat.

[0018] Two first straight flanges are respectively fitted onto both ends of the roller shaft;

[0019] Two first elastic elements are respectively sleeved on both ends of the roller shaft and located between the boat pressure roller and the boat grab.

[0020] In an optional implementation, the calibration mechanism includes two calibration components spaced apart along a second direction perpendicular to the first direction;

[0021] The lifting mechanism includes a first lifting component that is driven to be connected to the calibration component located above, and a second lifting component that is driven to be connected to the calibration component located below.

[0022] In an optional implementation, the calibration component includes:

[0023] The first lead screw has a first threaded portion and a second threaded portion spaced apart along the second direction, and the helical directions of the first threaded portion and the second threaded portion are opposite.

[0024] The school fixture driver is connected to the first lead screw drive.

[0025] The first calibration component is rotatably connected to the first threaded part and is used to reciprocate along the second direction under the action of the calibration tool drive component and the action of the first threaded part.

[0026] The second calibration component is rotatably connected to the second threaded portion and is used to reciprocate along the second direction under the action of the calibration tool drive component and the action of the second threaded portion.

[0027] In an optional implementation, the tensioning mechanism includes:

[0028] Tightening assembly for loosening or tightening fasteners on a graphite boat;

[0029] The propulsion component is connected to the positioning frame and driven by the screwing component, and is used to drive the screwing component to slide along a second direction perpendicular to the first direction.

[0030] In an optional implementation, the screwing assembly includes:

[0031] The tensioning drive has two locking nuts spaced apart on its output shaft.

[0032] A rotary wrench, the rotary wrench being mounted on the output shaft of the tightening / shortening drive component;

[0033] The second elastic element is sleeved on the output shaft of the tensioning drive and located between the two locking nuts. It is used to compress or extend under the driving action of the tensioning drive to drive the rotary wrench to rotate.

[0034] In an optional embodiment, the screwing assembly further includes:

[0035] The bushing, located inside the rotary wrench, has threads for engaging with fasteners on the graphite boat;

[0036] A torque sensor is connected to the propulsion assembly, and the output shaft of the torque sensor is connected to a bushing.

[0037] In an optional implementation, the propulsion component includes:

[0038] The second lead screw extends along the second direction, is connected to the positioning frame, and is slidably connected to the screwing assembly;

[0039] The push drive component is connected to the second lead screw drive and is used to drive the second lead screw to rotate so as to drive the turning assembly to reciprocate along the second direction.

[0040] In an optional embodiment, the graphite boat calibration device further includes a boat-pushing mechanism for positioning the graphite boat calibration device along a second direction perpendicular to the first direction.

[0041] The beneficial effects of the graphite boat calibration device provided in this embodiment of the invention include:

[0042] This invention provides a graphite boat calibration device, applied in the field of calibration technology, including a positioning frame, a lifting mechanism, a calibration mechanism, a pickup mechanism, and a tightening mechanism. The positioning frame supports the graphite boat, and the lifting mechanism is connected to the positioning frame. The pickup mechanism is driven by the lifting mechanism and moves along a first direction under the driving action of the lifting mechanism to pick up and place the graphite boat within the positioning frame. The calibration mechanism is also driven by the lifting mechanism and moves along the first direction under the driving action of the lifting mechanism to approach or move away from the graphite boat, thereby correspondingly calibrating the deformed blades of the graphite boat. Finally, the tightening mechanism is connected to the positioning frame and is used to loosen or tighten the fasteners of the graphite boat, thus completing the calibration of the graphite boat at the end. Based on the above description, this utility model provides a new graphite boat calibration device, which integrates functional components such as a positioning frame, lifting mechanism, calibration mechanism, picking mechanism, and tensioning mechanism. After automatically receiving the corresponding graphite boat, it can quickly and accurately position and calibrate the graphite boat. The entire process does not require manual intervention or additional cleaning procedures, thereby achieving the beneficial effects of shortening the calibration cycle, reducing calibration energy consumption, saving human resources, and improving calibration accuracy. Attached Figure Description

[0043] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 This is a schematic diagram of the graphite boat calibration device carrying a graphite boat provided in this embodiment;

[0045] Figure 2 This is a schematic diagram of the graphite boat calibration device provided in this embodiment;

[0046] Figure 3 This is a partial structural diagram of the picking mechanism, lifting mechanism, and positioning frame provided in this embodiment.

[0047] Figure 4 This is a schematic diagram of the boat gripper and boat-pressing assembly provided in this embodiment;

[0048] Figure 5 This is a schematic diagram of the calibration mechanism and positioning frame provided in this embodiment;

[0049] Figure 6 This is another structural schematic diagram of the calibration mechanism and positioning frame provided in this embodiment;

[0050] Figure 7 This is a schematic diagram of the screwing assembly and positioning frame provided in this embodiment;

[0051] Figure 8 Provided for this embodiment Figure 7 A magnified structural diagram of point A in the middle.

[0052] Icons: 10-Graphite boat calibration device; 30-Graphite boat; 100-Positioning frame; 200-Lifting mechanism; 210-First lifting component; 230-Second lifting component; 300-Calibration mechanism; 310-Calibration component; 331-First lead screw; 3311-First threaded part; 3313-Second threaded part; 350-Calibration tool drive; 371-First calibration component; 373-Second calibration component; 400-Pickup mechanism; 410-Boat gripper; 430-Boat pressure component; 431-Roller shaft; 433-Boat-pressing roller; 435-First linear flange; 437-First elastic element; 500-Tightening mechanism; 510-Tightening assembly; 511-Tightening drive element; 513-Rotating wrench; 515-Second elastic element; 517-Busset; 519-Torque sensor; 530-Propulsion assembly; 531-Second lead screw; 533-Propulsion drive element; 600-Boat-pushing mechanism; 710-First direction; 730-Second direction; 750-Third direction. Detailed Implementation

[0053] In related technologies, the calibration method for graphite boats involves the operator using a manual calibration device to calibrate the graphite boat. However, this calibration method requires a lot of human resources, has a long calibration cycle, and is prone to errors during operation.

[0054] To address the aforementioned problems, this utility model provides a graphite boat calibration device 10, which integrates multiple functional components. After automatically receiving the corresponding graphite boat 30, it can quickly and accurately locate and calibrate it, thereby achieving the beneficial effects of shortening the calibration cycle, reducing calibration energy consumption, saving human resources, and improving calibration accuracy.

[0055] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0056] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0057] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0058] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0059] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0060] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0061] The following describes in detail the overall structure, working principle, and technical effects of the graphite boat calibration device 10 provided by this utility model through embodiments and in conjunction with the accompanying drawings.

[0062] Figure 1 This is a schematic diagram of the graphite boat calibration device 10 carrying a graphite boat 30 provided in this embodiment. Figure 2 For a schematic diagram of the graphite boat calibration device 10 provided in this embodiment, please refer to [link / reference]. Figure 1 and Figure 2 This utility model provides a graphite boat calibration device 10, applied in the field of calibration technology, including a positioning frame 100, a lifting mechanism 200, a calibration mechanism 300, a pickup mechanism 400, and a tensioning mechanism 500. The positioning frame 100 is used to support the graphite boat 30, and the lifting mechanism 200 is connected to the positioning frame 100.

[0063] Based on the above, the pickup mechanism 400 is driven to move along the first direction 710 under the driving action of the lifting mechanism 200, to pick up and place the graphite boat 30 into the positioning frame 100. Similarly, the calibration mechanism 300 is driven to move along the first direction 710 under the driving action of the lifting mechanism 200, to move closer to or further away from the graphite boat 30, thereby correspondingly calibrating the deformed blades of the graphite boat 30. Furthermore, the tightening mechanism 500 is connected to the positioning frame 100, used to loosen or tighten the fasteners of the graphite boat 30, to complete the final calibration of the graphite boat 30.

[0064] In practical applications, the pickup mechanism 400, driven by the lifting mechanism 200, first moves along the first direction 710 to precisely pick up the graphite boat 30 located at the docking position and place it into the positioning frame 100. Subsequently, the calibration mechanism 300, driven by the lifting mechanism 200, moves along the first direction 710, approaches the graphite boat 30, and calibrates the deformed blades of the graphite boat 30. After the blade deformation is complete, the calibration mechanism 300, driven by the lifting mechanism 200, moves in response along the first direction 710, moves away from the graphite boat 30, and resets. Then, the tightening mechanism 500 tightens the fasteners of the graphite boat 30, which correspondingly lock the blades of the graphite boat 30, thus completing the calibration of the graphite boat 30.

[0065] Based on the above description, this utility model provides a new graphite boat calibration device 10, which integrates functional components such as a positioning frame 100, a lifting mechanism 200, a calibration mechanism 300, a pickup mechanism 400, and a tensioning mechanism 500. After automatically receiving the corresponding graphite boat 30, it can quickly and accurately position and calibrate the graphite boat 30. The entire process does not require manual intervention or additional cleaning procedures, thereby achieving the beneficial effects of shortening the calibration cycle, reducing calibration energy consumption, saving human resources, and improving calibration accuracy.

[0066] Furthermore, it should be noted that the graphite boat calibration device 10 provided by this utility model independently picks up the graphite boat 30 located at the docking position for calibration, without affecting the normal production operation of the machine. In addition, the graphite boat calibration device 10 also improves the utilization rate and efficiency of the graphite boat 30 in a single use cycle, avoids the need for a large amount of manual labor, and avoids the risk of injury such as pinching that may occur when manually calibrating the graphite boat 30 using a manual calibration device.

[0067] like Figure 3 and Figure 4As shown, in some embodiments, the picking mechanism 400 includes a boat gripper 410 and a boat-pressing assembly 430. The boat gripper 410 is driven to connect with the lifting mechanism 200 and is used to hold or separate from the upper graphite block of the graphite boat 30 under the action of the lifting mechanism 200. The boat-pressing assembly 430 is connected to the boat gripper 410 and is used to hold or separate from the lower graphite block of the graphite boat 30 under the action of the lifting mechanism 200. Based on the above configuration, it is easy to understand that during the picking of the graphite boat 30, the picking mechanism 400 is located between the upper and lower graphite blocks of the graphite boat 30, and moves reciprocally along the first direction 710 as the lifting mechanism 200 moves.

[0068] In practical applications, after receiving the calibration signal, the remote control system dispatches an AGV (Automated Guided Vehicle) to transport the graphite boat calibration device 10 provided in this application to the corresponding machine. The machine's fixing device securely fixes the graphite boat calibration device 10, ensuring that no displacement occurs during the calibration process. Subsequently, the lifting mechanism 200 precisely moves the picking mechanism 400 to a safe position between the upper and lower graphite blocks of the graphite boat 30, avoiding damage to the structure of the graphite boat 30.

[0069] Subsequently, the graphite boat calibration device 10 and the machine tool communicate in real time via signal transmission to ensure that each operation is performed only after confirmation by both parties. That is, when the graphite boat calibration device 10 is ready to receive the graphite boat 30, it sends a signal. After receiving the signal, the machine tool performs a transport operation via docking, transporting the graphite boat 30 to be calibrated to the docking position, and sends a signal to the graphite boat calibration device 10 again. After receiving the signal, the graphite boat calibration device 10 drives the picking mechanism 400 to move upward along the first direction 710 via the lifting mechanism 200, so that the boat gripper 410 and the upper graphite block of the graphite boat 30 abut against each other, lifting the graphite boat 30 upward.

[0070] When the distance between the graphite boat 30 and the docking device reaches the preset distance, the graphite boat calibration device 10 sends a reception completion signal to the machine. Upon receiving the signal, the machine retracts the docking device into its interior and, after resetting, sends a retraction signal to the graphite boat calibration device 10. Upon receiving this signal, the graphite boat calibration device 10 uses the lifting mechanism 200 to move the picking mechanism 400 downwards along the first direction 710 until the lower graphite block of the graphite boat 30 contacts the positioning frame 100, and the graphite boat 30 is placed inside the positioning frame 100. Afterwards, the picking mechanism 400 continues to move downwards until the distance between itself and the upper graphite block of the graphite boat 30 reaches the safe distance.

[0071] It should be further noted that during the aforementioned handling process of placing the graphite boat 30 into the positioning frame 100 using the pickup device, the graphite boat 30 is allowed a certain range of movement within its limits. Furthermore, as... Figure 3 As shown, to prevent the graphite boat 30 from directly contacting the hard surface, the positioning frame 100 is provided with rollers for contacting the lower graphite block of the graphite boat 30. Additionally, it should be noted that the number of pick-up mechanisms 400 can be set to two, symmetrically arranged along a second direction 730 perpendicular to the first direction 710, for collaboratively transporting the graphite boat 30 during actual calibration.

[0072] Following the above process, the lifting mechanism 200 drives the picking mechanism 400 to move downwards along the first direction 710, causing the boat-pressing assembly 430 on the other side of the boat gripper 410 to abut against the lower graphite block of the graphite boat 30, thereby fixing the graphite boat 30 and facilitating the normal conduct of subsequent calibration work. Figure 4 As shown, the boat-pressing assembly 430 includes a roller shaft 431 and a boat-pressing roller 433. The roller shaft 431 has a U-shaped structure, and both ends of the roller shaft 431 are connected to the boat gripper 410. The boat-pressing roller 433 is fitted into the middle of the roller shaft 431 and is used to abut against the lower graphite block of the graphite boat 30, thereby achieving the positioning of the graphite boat 30.

[0073] Furthermore, the boat-pressing assembly 430 also includes two first linear flanges 435 and two first elastic elements 437. The two first linear flanges 435 are respectively fitted onto both ends of the roller shaft 431, restricting the roller shaft 431 from sliding along a preset trajectory. The two first elastic elements 437 are respectively fitted onto both ends of the roller shaft 431 and are located between the boat-pressing roller 433 and the boat gripper 410. It is easy to understand that the first elastic elements 437 can effectively absorb impact force and reduce damage to the graphite boat 30 when the boat-pressing roller 433 abuts against the lower graphite block of the graphite boat 30.

[0074] Additionally, in some embodiments, to facilitate the positioning of the graphite boat 30 in the second direction 730, please refer again to... Figure 2 The graphite boat calibration device 10 also includes a pushing mechanism 600. It is readily understood that the pushing mechanism 600 is used to position the graphite boat calibration device 10 along a second direction 730 perpendicular to the first direction 710. In actual calibration, before the aforementioned pressing assembly 430 presses against the lower graphite block of the graphite boat 30, the pushing mechanism 600 pushes the graphite boat 30 along the second direction 730. Optionally, the stroke limit of the electric cylinder in the pushing mechanism 600 is precisely in contact with the surface of the graphite boat 30. Furthermore, the number of pushing mechanisms 600 can be set to two, arranged opposite each other along the second direction 730, to facilitate cooperative positioning of the graphite boat 30 in the second direction 730.

[0075] Based on the aforementioned boat-pushing mechanism 600 and picking mechanism 400, the graphite boat 30 within the positioning frame 100 has been positioned and aligned with the various reference surfaces of this graphite boat calibration device 10. The specific structure and working principle of the calibration mechanism 300 will be described in detail below. Please refer to... Figure 5 and Figure 6 The calibration mechanism 300 includes two calibration components 310 spaced apart along a second direction 730 perpendicular to the first direction 710. Correspondingly, the lifting mechanism 200 includes a first lifting component 210 drivenly connected to the upper calibration component 310 and a second lifting component 230 drivenly connected to the lower calibration component 310. Based on this, under the action of the first lifting component 210 and the second lifting component 230, the upper and lower calibration components 310 move towards the upper and lower surfaces of the graphite boat 30, respectively.

[0076] Specifically, the first lifting assembly 210 includes a first lifting member and a second lifting member. The first lifting member is connected to the positioning frame 100 and is driven by the pickup mechanism 400 and the second lifting member, used to drive the pickup mechanism 400 and the second lifting member to reciprocate along the first direction 710 as a whole. The second lifting member is connected to the upper calibration assembly 310 and is used to drive the upper calibration assembly 310 to reciprocate along the first direction 710 independently. Based on this, during the aforementioned transport of the graphite boat 30, the upper calibration assembly 310 maintains a safe distance from the graphite boat 30 under the action of the first and second lifting members. Optionally, there are two first lifting driving members, and the two second lifting driving members are spaced apart along the second direction 730.

[0077] The second lifting assembly 230 includes multiple third lifting components connected to the positioning frame 100, and each of the third driving components is connected to the lower calibration assembly 310. Optionally, each of the aforementioned lifting components includes a lifting motor and a lifting screw connected to the lifting motor. The difference is that the lower calibration assembly 310 has its height adjusted by the lifting screw of the third lifting component, while the upper calibration assembly 310 has its height adjusted by the combined lifting screws of the first and second lifting components.

[0078] To ensure calibration effectiveness, in some embodiments, the upper / lower calibration assembly 310 includes a calibration tool drive 350 and a first lead screw 331. The calibration tool drive 350 is driven to the first lead screw 331, driving its rotation. The first lead screw 331 has a first threaded portion 3311 and a second threaded portion 3313 spaced apart along a second direction 730, with opposite helical directions. Therefore, the first lead screw 331 is a forward / reverse lead screw, and components connected to its two threaded portions will move in opposite directions along the second direction 730.

[0079] Specifically, the upper / lower calibration assembly 310 further includes a first calibration element 371 and a second calibration element 373. The first calibration element 371 is rotatably connected to a first threaded portion 3311 and is used to reciprocate along the second direction 730 under the action of the calibration tool drive 350 and the action of the first threaded portion 3311. Correspondingly, the second calibration element 373 is rotatably connected to a second threaded portion 3313 and is used to reciprocate along the second direction 730 under the action of the calibration tool drive 350 and the action of the second threaded portion 3313.

[0080] It should be noted that on the third direction 750, which is perpendicular to both the first direction 710 and the third direction 750, the first calibration component 371 and the second calibration component 373 are provided with multiple slots spaced apart, and the number and position of the slots correspond one-to-one with the boat blades of the graphite boat 30. In practical applications, driven by the first lead screw 331, the first calibration component 371 and the second calibration component 373 move back and forth towards or away from each other, calibrating the boat blades through the slots until the boat blade deformation completely disappears, and the calibration component 310 completes the boat blade calibration of the graphite boat 30. Afterwards, driven by the first lifting component 210, the upper calibration component 310 disengages from the upper surface of the boat blades of the graphite boat 30 and resets to its initial position, and driven by the second lifting component 230, the lower calibration component 310 disengages from the lower surface of the boat blades of the graphite boat 30 and resets to its initial position.

[0081] Additionally, to further improve the calibration accuracy of the calibration component 310, the calibration component 310 may further include a first flange, a second flange, a first slider, a second slider, and a slide rail. The slide rail is connected to the positioning frame 100 and extends along the second direction 730. The first calibration component 371 is slidably connected to the first threaded portion 3311 via the first flange and to the slide rail via the first slider. Similarly, the second calibration component 373 is slidably connected to the second threaded portion 3313 via the second flange and to the slide rail via the second slider.

[0082] Please see Figure 7 and Figure 8After the aforementioned calibration process, the tightening mechanism 500 needs to tighten the fasteners of the graphite boat 30 accordingly to lock the boat blades of the graphite boat 30. In this embodiment, the tightening mechanism 500 includes a screwing assembly 510 and a pushing assembly 530. The screwing assembly 510 is used to loosen or tighten the fasteners of the graphite boat 30. The pushing assembly 530 is connected to the positioning frame 100 and is driven by the screwing assembly 510 to drive the screwing assembly 510 to slide along a second direction 730 perpendicular to the first direction 710. Based on this, along the second direction 730, the screwing assembly 510 will sequentially tighten the fasteners on the graphite boat 30 under the driving action of the pushing assembly 530. Optionally, there are two tightening mechanisms 500, and the two tightening mechanisms 500 are arranged opposite each other along a third direction 750.

[0083] Considering the high-precision linear motion provided by the lead screw drive system, to ensure accurate displacement of the turning assembly 510 in the second direction 730, the propulsion assembly 530 includes a second lead screw 531 and a propulsion drive 533. The second lead screw 531 extends along the second direction 730, connects to the positioning frame 100, and is slidably connected to the turning assembly 510. The propulsion drive 533 is drively connected to the second lead screw 531 and drives the second lead screw 531 to rotate, thereby causing the turning assembly 510 to reciprocate along the second direction 730. Optionally, the propulsion drive 533 is a servo motor with a built-in encoder used to calculate the position of the turning assembly 510. Furthermore, an additional encoder is installed at the end of the second lead screw 531 for simultaneous calculation with the motor's encoder, serving as a reference to prevent damage to the graphite boat's blades by the turning assembly 510 in the event of an encoder malfunction.

[0084] Since the graphite boat 30 is provided with fasteners along the third direction 750, the same propulsion assembly 530 can be connected to two tightening assemblies 510. The two tightening assemblies 510 are spaced apart along the first direction 710, each corresponding to a fastener spaced apart on the graphite boat 30 along the first direction 710. Further, as... Figure 7 As shown, the tightening assembly 510 specifically includes a tightening / loosening drive 511, a rotary wrench 513, and a second elastic element 515. Two locking nuts are spaced apart on the output shaft of the tightening / loosening drive 511. The rotary wrench 513 is sleeved on the output shaft of the tightening / loosening drive 511. The second elastic element 515 is sleeved on the output shaft of the tightening / loosening drive 511 and located between the two locking nuts. It is easy to understand that the tightening assembly 510 is used to compress or extend under the driving action of the tightening / loosening drive 511 to drive the rotary wrench 513 to rotate.

[0085] In practical applications, after the tightening assembly 510 moves to a position coaxial with a fastener on the graphite boat 30, the output end of the tightening / loosening drive 511 moves towards the graphite boat 30, compressing the second elastic element 515. The compressed second elastic element 515 then drives the rotary wrench 513 to rotate, tightening the fastener at the corresponding position on the graphite boat 30. It should be noted that because the angles of the fasteners at different positions on the graphite boat 30 are different, the rotary wrench 513 may not properly engage with the fastener. In this case, the second elastic element 515 should be used to slowly rotate the rotary wrench 513 one full turn until it properly engages with the fastener. With two tightening mechanisms 500 arranged opposite each other along a third direction 750, the same operation can be performed on the other side of the third direction 750. After confirming that the coaxial fasteners of the graphite boat 30 on the third direction 750 are correctly engaged with the corresponding rotary wrench 513, the two tightening assemblies 510 on the third direction 750 operate synchronously to tighten the two fasteners on the same ceramic rod of the graphite boat 30. Considering that the rotary wrench 513 may move along the third direction 750 during the above process, the tightening assembly 510 also includes a track that cooperates with the rotary wrench 513, which extends along the third direction 750.

[0086] Furthermore, to facilitate the determination of whether the fastener torque on the graphite boat 30 is qualified, the tightening assembly 510 also includes a bushing 517 and a torque sensor 519. The bushing 517 is located inside the rotary wrench 513 and has threads for engaging with the fasteners on the graphite boat 30. The torque sensor 519 is connected to the propulsion assembly 530, and its output shaft is connected to the bushing 517. It is easy to understand that the torque sensor 519 can monitor the applied torque in real time during tightening. Operators can combine this with the output torque of the tightening / loosening drive 511 to ensure that each fastener reaches the predetermined tightening force, avoiding overtightening or undertightening.

[0087] After the above process is completed, the graphite boat 30 is calibrated. Then, the boat pushing mechanism 600 returns to its initial position, and the picking mechanism 400 moves upward along the first direction 710 under the action of the lifting mechanism 200, lifting the graphite boat 30 to a safe position via the boat grabber 410. Afterwards, the graphite boat calibration device 10 sends a calibration completion signal to the machine. Upon receiving the corresponding signal, the machine extends its docking receiver to receive the graphite boat 30 and then transports it back to the workstation. Following this, the machine sends a task completion signal to the AGV (Automated Guided Vehicle), which then transports the graphite boat calibration device 10 back to its initial position.

[0088] In summary, this utility model provides a graphite boat calibration device 10, applied in the field of calibration technology, including a positioning frame 100, a lifting mechanism 200, a calibration mechanism 300, a pickup mechanism 400, and a tightening mechanism 500. The positioning frame 100 supports the graphite boat 30, and the lifting mechanism 200 is connected to the positioning frame 100. Based on this, the pickup mechanism 400 is driven to the lifting mechanism 200 and moves along a first direction 710 under the driving action of the lifting mechanism 200 to pick up and place the graphite boat 30 within the positioning frame 100. The calibration mechanism 300 is also driven to the lifting mechanism 200 and moves along the first direction 710 under the driving action of the lifting mechanism 200 to approach or move away from the graphite boat 30, thereby correspondingly calibrating the deformed boat blades of the graphite boat 30. Furthermore, the tightening mechanism 500 is connected to the positioning frame 100 and is used to loosen or tighten the fasteners of the graphite boat 30 to complete the calibration of the graphite boat 30 at the end. Based on the above description, this utility model provides a new graphite boat calibration device 10, which integrates functional components such as a positioning frame 100, a lifting mechanism 200, a calibration mechanism 300, a pickup mechanism 400, and a tensioning mechanism 500. After automatically receiving the corresponding graphite boat 30, it can quickly and accurately position and calibrate the graphite boat 30. The entire process does not require manual intervention, thereby achieving the beneficial effects of shortening the calibration cycle, reducing calibration energy consumption, saving human resources, and improving calibration accuracy.

[0089] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A graphite boat calibration device, characterized in that, include: A positioning frame for supporting a graphite boat; A lifting mechanism, which is connected to the positioning frame; A calibration mechanism, which is drivenly connected to the lifting mechanism, is used to move along a first direction under the driving action of the lifting mechanism to move closer to or further away from the graphite boat; A picking mechanism, which is drivenly connected to the lifting mechanism, is used to move along the first direction under the driving action of the lifting mechanism to pick up and place the graphite boat into the positioning frame; A tightening mechanism, connected to the positioning frame, is used to loosen or tighten the fasteners of the graphite boat.

2. The graphite boat calibration device according to claim 1, characterized in that, The picking mechanism includes: A boat gripper, which is driven and connected to the lifting mechanism, is used to hold or separate from the upper graphite block of the graphite boat under the action of the lifting mechanism; A boat-pressing assembly, connected to the boat gripper, is used to abut or separate from the lower graphite block of the graphite boat under the action of the lifting mechanism.

3. The graphite boat calibration device according to claim 2, characterized in that, The pressure vessel assembly includes: The roller shaft has a U-shaped structure, and both ends of the roller shaft are connected to the boat gripper; A pressure roller is sleeved in the middle of the roller shaft and is used to abut against the lower graphite block of the graphite boat. Two first straight flanges are respectively fitted onto both ends of the roller shaft; Two first elastic elements are respectively sleeved on both ends of the roller shaft and located between the boat-pressing roller and the boat gripper.

4. The graphite boat calibration device according to claim 1, characterized in that, The calibration mechanism includes two calibration components spaced apart along a second direction perpendicular to the first direction; The lifting mechanism includes a first lifting component that is driven to be connected to the calibration component located above, and a second lifting component that is driven to be connected to the calibration component located below.

5. The graphite boat calibration device according to claim 4, characterized in that, The calibration components include: The first lead screw has a first threaded portion and a second threaded portion spaced apart along the second direction, and the helical directions of the first threaded portion and the second threaded portion are opposite. A calibration tool drive unit, wherein the calibration tool drive unit is connected to the first lead screw drive unit; The first calibration component is rotatably connected to the first threaded portion and is used to reciprocate along the second direction under the action of the calibration tool drive component and the action of the first threaded portion. The second calibration component is rotatably connected to the second threaded portion and is used to reciprocate along the second direction under the action of the calibration tool drive component and the action of the second threaded portion.

6. The graphite boat calibration device according to claim 1, characterized in that, The tensioning mechanism includes: A screwing assembly for loosening or tightening the fasteners of the graphite boat; A propulsion assembly is connected to the positioning frame and driven to the screwing assembly, for driving the screwing assembly to slide along a second direction perpendicular to the first direction.

7. The graphite boat calibration device according to claim 6, characterized in that, The screwing assembly includes: A tensioning drive component, wherein two locking nuts are spaced apart on the output shaft of the tensioning drive component; A rotary wrench, wherein the rotary wrench is mounted on the output shaft of the tightening / shortening drive component; The second elastic element is sleeved on the output shaft of the tensioning drive and located between the two locking nuts. It is used to compress or extend under the driving action of the tensioning drive to drive the rotary wrench to rotate.

8. The graphite boat calibration device according to claim 7, characterized in that, The screwing assembly also includes: A bushing, located inside the rotary wrench, is provided with threads for engaging with fasteners on the graphite boat; A torque sensor is provided, which is connected to the propulsion assembly, and the output shaft of the torque sensor is connected to the bushing.

9. The graphite boat calibration device according to claim 6, characterized in that, The propulsion component includes: The second lead screw extends along the second direction, is connected to the positioning frame, and is slidably connected to the screwing assembly; A propulsion drive component is connected to the second lead screw and is used to drive the second lead screw to rotate, thereby causing the turning assembly to reciprocate along the second direction.

10. The graphite boat calibration apparatus according to any one of claims 1 to 9, characterized in that, The graphite boat calibration device further includes a boat-pushing mechanism for positioning the graphite boat calibration device along a second direction perpendicular to the first direction.

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