A sintering tool for silicon carbide ceramic crystal boats

Abstract

The utility model relates to sintering processing technical field especially relates to a kind of sintering frock of silicon carbide ceramic crystal boat, including base, intermediate support plate, first backing plate and backing plate etc., the upper side of base middle part is connected with left and right two intermediate support plates, the first backing plate is placed in the front and rear two parts of intermediate support plate, the first backing plate is placed with backing plate uniformly.This utility model is fixed with the contact and fixation of first limiting plate and first limiting base and base, then install first backing plate and second backing plate etc., then the crystal boat body is placed on backing plate, and is fixed after contact with backrest, then install adjusting limiting plate, and then push adjusting compression plate and move to the crystal boat body limiting, to be able to quickly position, clamping and support to crystal boat body, it is convenient for crystal boat body quick fixation, prevent crystal boat body displacement or wobble in sintering process, reduce deformation and crack, improve sintering quality.

Description

Technical Field

[0001] This utility model relates to the field of sintering processing technology, and in particular to a sintering fixture for a silicon carbide ceramic boat. Background Technology

[0002] Silicon carbide, as a high-performance advanced material, possesses numerous excellent physical and chemical properties, such as high hardness, high strength, good wear resistance, corrosion resistance, and high-temperature stability. These properties enable silicon carbide to have wide and important applications in many high-tech fields such as semiconductors. Sintering is a key step in the silicon carbide preparation process, which directly affects the final performance and quality of the material.

[0003] Existing silicon carbide ceramic boat sintering typically involves mounting the boat on a sintering fixture before sintering. However, the traditional fixture's structural design is not ideal during the sintering process, resulting in insufficient precision in supporting and positioning the boat. This leads to displacement or deformation of the boat during sintering, affecting the sintering quality and making it difficult to achieve high standards in terms of dimensional accuracy and appearance of the finished product.

[0004] Therefore, it is necessary to design a sintering fixture for silicon carbide ceramic crystal boats that can quickly position, clamp, and support the crystal boat body, facilitate rapid fixation of the crystal boat body, prevent displacement or shaking of the crystal boat body during sintering, reduce deformation and cracks, and improve sintering quality. Utility Model Content

[0005] To overcome the shortcomings of traditional tooling in the sintering process of silicon carbide ceramic boats, which suffers from inadequate structural design and insufficient precision in supporting and positioning the boat, leading to displacement or deformation during sintering and affecting the sintering quality, thus making it difficult to achieve high standards in dimensional accuracy and appearance of the finished product, this utility model provides a sintering tooling for silicon carbide ceramic boats that can quickly position, clamp, and support the boat body, facilitate rapid fixation of the boat body, prevent displacement or shaking of the boat body during sintering, reduce deformation and cracks, and improve sintering quality.

[0006] The technical implementation scheme of this utility model is as follows: A sintering fixture for a silicon carbide ceramic crystal boat includes a crystal boat body, a base, a fixed limiting plate, an intermediate support plate, a backing plate, a support plate, a locking screw, a locking nut, a first pad, a second pad, a limiting strip, a pad, a cover plate, and a positioning component. Two intermediate support plates are connected to the upper middle part of the base. First pads are placed on both the front and rear sides of the intermediate support plates, and pads are placed on both the first pads. Second pads are placed on the upper part of the intermediate support plates, and pads are also placed on the upper side of the second pads. The crystal boat body is placed between the pads. A fixed limiting plate is detachably connected to the upper left side of the base via a locking screw and a locking nut. A backing plate is connected to the right side of the fixed limiting plate. Support plates are connected to the upper left and right sides of the base. Limiting strips are connected to both the front and rear sides of the pads, and the limiting strips are in contact with the crystal boat body. A cover plate is engaged between two adjacent limiting strips on the upper part of the intermediate support plate. A positioning component for positioning and fixing the crystal boat body is provided on the right side of the crystal boat body.

[0007] Preferably, the fixed limiting plate is L-shaped.

[0008] Preferably, the cover plates are all U-shaped.

[0009] Preferably, the positioning assembly includes a first limiting base plate, a second limiting base plate, an adjusting top plate, an adjusting limiting plate, and an adjusting pressure plate. The upper right side of the base is detachably connected to two first limiting base plates via locking screws and locking nuts. The first limiting base plates are detachably connected to each other via locking screws and locking nuts. An adjusting top plate is connected to the upper middle part of the second limiting base plate. An adjusting limiting plate is detachably connected to the upper left part of the second limiting base plate via locking screws and locking nuts. An adjusting pressure plate is slidably engaged on the adjusting limiting plate.

[0010] Preferably, the adjusting limit plate is T-shaped.

[0011] Preferably, the right side of the adjusting clamping plate is inclined.

[0012] The beneficial effects of this utility model are as follows: 1. This utility model fixes and limits the base by fixing the fixed limiting plate and the first limiting base plate, then installing the first pad and the second pad, then placing the crystal boat body on the pad and fixing it after contacting the backing plate, then installing the adjusting limiting plate, and then pushing the adjusting clamping plate to move and limit the crystal boat body, thereby enabling the crystal boat body to be quickly positioned, clamped and supported, which facilitates the rapid fixing of the crystal boat body, prevents the crystal boat body from shifting or shaking during sintering, reduces deformation and cracks, and improves sintering quality.

[0013] 2. During the sintering process, this utility model absorbs or buffers thermal deformation stress under the action of the first pad, the second pad, the limiting strip, the pad, and the cover plate, thereby absorbing or buffering thermal deformation stress during sintering and reducing the impact of tooling deformation on the positioning accuracy of the crystal boat.

[0014] 3. Based on the thickness and specifications of the crystal boat body, this utility model adjusts the overall height of the tooling or the installation position of the crystal boat by installing an appropriate number of first and second pads, and then installs the crystal boat body. This allows for the installation of different numbers of first and second pads to adjust the overall height of the tooling or the installation position of the crystal boat, making it easier to adapt to the clamping requirements of crystal boats of different thicknesses or specifications and improving the versatility of the tooling. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0016] Figure 2 This is a three-dimensional structural diagram of the pad and cover plate and other components of this utility model.

[0017] Figure 3 This is a three-dimensional structural diagram of the locking screw and locking nut components of this utility model.

[0018] Figure 4 This is a three-dimensional structural diagram of the backrest and support plate and other components of this utility model.

[0019] The components in the attached diagram are labeled as follows: 1. Crystal boat body, 2. Base, 3. Fixed limiting plate, 4. Intermediate support plate, 5. Backing plate, 6. Support plate, 7. First limiting base plate, 8. Second limiting base plate, 9. Adjusting top plate, 10. Adjusting limiting plate, 11. Adjusting pressure plate, 12. Locking screw, 13. Locking nut, 14. First pad, 15. Second pad, 16. Limiting strip, 17. Pad, 18. Cover plate. Detailed Implementation

[0020] The present invention will be further described below with reference to specific embodiments. The illustrative embodiments and descriptions of the present invention are used to explain the present invention, but are not intended to limit the present invention.

[0021] A sintering fixture for a silicon carbide ceramic boat, such as Figures 1-4As shown, the system includes a crystal boat body 1, a base 2, a fixed limiting plate 3, an intermediate support plate 4, a backing plate 5, a support plate 6, a locking screw 12, a locking nut 13, a first pad 14, a second pad 15, a limiting strip 16, a pad 17, a cover plate 18, and a positioning assembly. Two intermediate support plates 4 are connected to the upper middle part of the base 2. First pads 14 are placed on both the front and rear parts of the intermediate support plates 4, and pads 17 are placed on each of the first pads 14. Second pads 15 are placed on the upper part of each intermediate support plate 4, and pads 17 are also placed on the upper side of each of the second pads 15. A crystal boat is placed between the pads 17. The upper left side of the boat body 1 and the base 2 is detachably connected to a fixed limiting plate 3 via a locking screw 12 and a locking nut 13. The fixed limiting plate 3 is L-shaped for easy positioning. A backing plate 5 is connected to the right side of the fixed limiting plate 3. Support plates 6 are connected to the upper left and right sides of the base 2. Limiting strips 16 are connected to the front and rear sides of the pad 17. The limiting strips 16 are in contact with the boat body 1. A cover plate 18 is snapped between two adjacent limiting strips 16 on the upper part of the middle support plate 4. The cover plates 18 are U-shaped for easy fixing. A positioning component for positioning and fixing the boat body 1 is provided on the right side.

[0022] like Figures 1-3 As shown, the positioning assembly includes a first limiting base plate 7, a second limiting base plate 8, an adjusting top plate 9, an adjusting limiting plate 10, and an adjusting pressure plate 11. The upper right side of the base 2 is detachably connected to two first limiting base plates 7 via locking screws 12 and locking nuts 13. The second limiting base plate 8 is detachably connected between the first limiting base plates 7 via locking screws 12 and locking nuts 13. An adjusting top plate 9 is connected to the upper middle part of the second limiting base plate 8. An adjusting limiting plate 10 is detachably connected to the upper left side of the second limiting base plate 8 via locking screws 12 and locking nuts 13. The adjusting limiting plate 10 is T-shaped, and an adjusting pressure plate 11 is slidably engaged on the adjusting limiting plate 10. The right side of the adjusting pressure plate 11 is inclined for easy compression positioning.

[0023] When sintering a silicon carbide ceramic boat, this device can be used. The base 2 contacts the bottom surface, and then the fixing limiting plate 3 and the first limiting base plate 7 are brought into contact with the base 2. The fixing limiting plate 3 is L-shaped. The fixing limiting plate 3 and the first limiting base plate 7 are then fixed using locking screws 12 and locking nuts 13. Next, the backing plate 5 and the adjusting top plate 9 are installed. Then, the first pad 14 and the second pad 15 are placed on the intermediate support plate 4, and the pad 17 is placed on the first pad 14 and the second pad 15. Finally, the limiting strip 16 is placed. Pick up the crystal boat body 1 and place it on the pad 17, making contact with the backing plate 5. The limiting strip 16 will then limit its position. Next, snap the cover plate 18 into the limiting strip 16 to secure the crystal boat body 1. Alternatively, depending on the thickness and specifications of the crystal boat body 1, install an appropriate number of first pads 14 and second pads 15 to adjust the overall height of the fixture or the installation position of the crystal boat. Then, install the crystal boat body 1. This allows for the installation of different numbers of first pads 14 and second pads 15 to adjust the overall height of the fixture or the installation position of the crystal boat, accommodating different thicknesses or specifications. To meet the requirements of crystal boat clamping and improve the versatility of tooling, all cover plates 18 are U-shaped. After fixing, the adjusting limit plate 10 is placed on the second limiting base plate 8, and the position of the adjusting limit plate 10 is adjusted. After adjusting to the appropriate position, the adjusting limit plate 10 is tightened by the locking screw 12 and locking nut 13 on the adjusting clamping plate 9, and the adjusting limit plate 10 is fixed by the locking screw 12 and locking nut 13. The adjusting limit plate 10 is T-shaped. Then, the adjusting pressure plate 11 is lifted and contacts the adjusting limit plate 10. The right side of the adjusting pressure plate 11 is inclined. The adjusting clamping plate 11 is pushed to move and contact the crystal boat body 1 for limiting, thereby enabling the crystal boat body 1 to be quickly positioned, clamped and supported, facilitating the rapid fixation of the crystal boat body 1, preventing displacement or shaking of the crystal boat body 1 during sintering, reducing deformation and cracks, and improving sintering quality. Subsequently, the crystal boat body 1 is sintered. During the sintering process, the first pad 14, the second pad 15, the limiting strip 16, the pad 17 and the cover plate 18 absorb or buffer thermal deformation stress, thereby absorbing or buffering thermal deformation stress during sintering and reducing the impact of tooling deformation on the positioning accuracy of the crystal boat.

[0024] The present application has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of the present application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of the present application. Therefore, the content of this specification should not be construed as a limitation of the present application.

Claims

1. A sintering fixture for a silicon carbide ceramic boat, characterized in that it includes: The vessel consists of a main body (1), a base (2), a fixed limiting plate (3), a middle support plate (4), a backing plate (5), a support plate (6), a locking screw (12), a locking nut (13), a first pad (14), a second pad (15), a limiting strip (16), a pad (17), a cover plate (18), and a positioning assembly. The upper part of the middle of the base (2) is connected to two middle support plates (4). The first pad (14) is placed on both the front and back of the middle support plate (4). The first pad (17) is placed on the first pad (14). The second pad (15) is placed on the upper part of the middle support plate (4). The pad (17) is also placed on the upper side of the second pad (15). The crystal boat body (1) is placed between the plate (17) and the pad (17). The upper left side of the base (2) is detachably connected to the fixed limiting plate (3) by the locking screw (12) and the locking nut (13). The right side of the fixed limiting plate (3) is connected to the back plate (5). The upper left and right sides of the base (2) are connected to the support plate (6). The front and rear sides of the pad (17) are connected to the limiting strip (16). The limiting strip (16) is in contact with the crystal boat body (1). The upper two adjacent limiting strips (16) of the middle support plate (4) are snapped together with the cover plate (18). The right side of the crystal boat body (1) is provided with a positioning component for positioning and fixing the crystal boat body (1).

2. The sintering fixture for a silicon carbide ceramic boat according to claim 1, characterized in that, The fixed limiting plate (3) is L-shaped.

3. The sintering fixture for a silicon carbide ceramic boat according to claim 1, characterized in that, The cover plates (18) are all U-shaped.

4. The sintering fixture for a silicon carbide ceramic boat according to claim 1, characterized in that, The positioning assembly includes a first limiting base plate (7), a second limiting base plate (8), an adjusting top plate (9), an adjusting limiting plate (10), and an adjusting pressure plate (11). The upper right side of the base (2) is detachably connected to the front and rear first limiting base plates (7) via a locking screw (12) and a locking nut (13). The first limiting base plates (7) are detachably connected to each other via a locking screw (12) and a locking nut (13). The upper middle side of the second limiting base plate (8) is connected to the adjusting top plate (9). The upper left side of the second limiting base plate (8) is detachably connected to the adjusting limiting plate (10) via a locking screw (12) and a locking nut (13). The adjusting pressure plate (11) is slidably engaged on the adjusting limiting plate (10).

5. The sintering fixture for a silicon carbide ceramic boat according to claim 4, characterized in that, The adjustment limit plate (10) is T-shaped.

6. The sintering fixture for a silicon carbide ceramic boat according to claim 4, characterized in that, The right side of the adjusting clamping plate (11) is an inclined plane.

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