Exposure machine feeding device with automatic static electricity removing function

Abstract

The utility model relates to exposure machine technical field discloses an exposure machine feeding device with automatic function of removing static electricity, including adjusting mechanism, feeding mechanism and fixed establishment. The utility model discloses through the handle of personnel drive worm to rotate, the meshing of worm and worm wheel, worm wheel and rotating rod fixed, rotating rod and upper ion fan fixed to angle of upper ion fan can be adjusted, and worm drives worm no.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and in particular to an exposure machine feeding device with automatic static electricity removal function. Background Technology

[0002] An exposure machine is a device used to transfer patterns from a photomask onto a photosensitive material. It is widely used in semiconductor manufacturing, printed circuit board (PCB) production, and flat panel display manufacturing. In semiconductor manufacturing, the exposure machine uses a precise optical system to project the designed integrated circuit pattern onto a wafer coated with photoresist. Subsequent processes such as development and etching then form tiny circuit structures on the wafer.

[0003] In the prior art, the static eliminator on the exposure machine is fixed in a fixed manner, which may cause the ion wind to not evenly cover the surface of the circuit board. As a result, the static electricity in some areas of the circuit board cannot be effectively eliminated, and the residual static electricity may attract dust and other impurities, affecting the exposure quality. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a feeding device for an exposure machine with an automatic static electricity removal function.

[0005] This utility model is achieved by the following technical solution: a feeding device for an exposure machine with automatic static electricity removal function, comprising an adjustment mechanism, a feeding mechanism and a fixing mechanism, wherein the feeding mechanism is located inside the adjustment mechanism and the fixing mechanism is located inside the adjustment mechanism;

[0006] The adjustment mechanism includes an exposure machine, inside which a worm gear is rotatably connected. A handle is fixedly connected to the top of the worm gear. The worm gear is meshed with a worm wheel, and a rotating rod is fixedly connected inside the worm wheel. An upper ion fan is fixedly connected to the end of the rotating rod away from the worm wheel. A connecting rod is fixedly connected to the end of the worm gear away from the handle. The connecting rod is rotatably connected inside the exposure machine. A first worm gear is fixedly connected to the end of the connecting rod away from the worm gear. The first worm gear is rotatably connected inside the exposure machine. A first worm wheel is meshed with the first worm wheel, and a first rotating rod is fixedly connected inside the first worm wheel. A lower ion fan is fixedly connected to the end of the first rotating rod away from the first worm wheel.

[0007] Through the above technical solution, personnel can rotate the worm gear by using a handle. The worm gear meshes with the worm wheel, which is fixed to a rotating rod. Simultaneously, the rotating rod is fixed to the upper ion fan, allowing adjustment of the upper ion fan's angle. Simultaneously, the worm gear, through a connecting rod, drives a first worm gear to rotate, meshing with a first worm wheel. This causes the first worm wheel to drive the lower ion fan to adjust its angle via the rotating rod. By rotating the worm gear, the angles of the upper and lower ion fans are adjusted, ensuring the plasma air evenly covers the circuit board surface. Simultaneously, this adjustment prevents dust from being directly blown onto the circuit board surface, thus improving exposure quality. The upper and lower ion fans can simultaneously remove static electricity from both sides of the circuit board, reducing static residue.

[0008] As a further improvement to the above solution, the feeding mechanism includes a support plate, which is fixedly connected to the outer wall of the exposure machine, and a motor is fixedly connected to the top of the support plate.

[0009] As a further improvement to the above solution, a rotating rod two is fixedly connected to the output end of the motor, the rotating rod two is rotatably connected inside the exposure machine, and a conveyor belt is rotatably connected to the outer wall of the rotating rod two.

[0010] Through the above technical solution, a support plate is fixed on the outer wall of the motor to support the motor. At the same time, a rotating rod two is fixed at the output end of the motor, and a conveyor belt rotates on the outer wall of the rotating rod two, thereby stably conveying the circuit board on the fixing mechanism into the exposure machine, improving work efficiency.

[0011] As a further improvement to the above solution, the fixing mechanism includes a fixing plate, which is fixedly connected to the outer wall of the conveyor belt, and a support rod is rotatably connected inside the fixing plate.

[0012] As a further improvement to the above solution, a connecting plate is slidably connected to the outer wall of the support rod, a rubber block is fixedly connected to the bottom of the connecting plate, and a sliding rod is fixedly connected to the top of the connecting plate.

[0013] As a further improvement to the above solution, a spring is slidably connected to the outer wall of the sliding rod, and a handle is fixedly connected to the end of the sliding rod away from the connecting plate.

[0014] As a further improvement to the above solution, a connecting plate is slidably connected to the outer wall of the sliding rod, and the connecting plate is fixedly connected to the outer wall of the support rod.

[0015] With the above technical solution, the operator moves the sliding rod by using handle one, causing the sliding rod to slide inside the connecting plate one. At the same time, the sliding rod is fixed to the connecting plate. When the connecting plate slides along the outer wall of the support rod, the spring is compressed. Then, the whole thing rotates at a right angle around the support rod as the center. The operator slowly releases handle one, fixing a rubber block at the bottom of the connecting plate. At this time, the rubber block contacts the surface of the circuit board. Through the elasticity of the spring, the circuit board is fixed to the surface of the fixed plate, so that it will not shift during feeding and exposure, improving the exposure effect of the circuit board and thus improving product quality.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] This invention allows a person to rotate a worm gear via a handle. The worm gear meshes with a worm wheel, which is fixed to a rotating rod. Simultaneously, the rotating rod is fixed to an upper ion fan, allowing adjustment of the upper ion fan's angle. The worm gear, via a connecting rod, rotates another worm gear, which meshes with a worm wheel. This worm wheel, through the rotating rod, adjusts the angle of the lower ion fan. By rotating the worm gear, the angles of the upper and lower ion fans are adjusted, ensuring the plasma air evenly covers the circuit board surface. This adjustment also prevents dust from being directly blown onto the circuit board surface, thus improving exposure quality. Furthermore, the upper and lower ion fans simultaneously remove static electricity from both sides of the circuit board, reducing static residue.

[0018] This invention allows a person to slide a sliding rod by using a handle, causing the sliding rod to slide inside a connecting plate while being fixed to the connecting plate. As the connecting plate slides along the outer wall of the support rod, the spring is compressed. Then, the entire assembly rotates at a right angle around the support rod. The person slowly releases the handle, fixing a rubber block at the bottom of the connecting plate. At this point, the rubber block contacts the surface of the circuit board, and the elasticity of the spring fixes the circuit board to the surface of the fixed plate. This prevents displacement during feeding and exposure, improving the exposure effect of the circuit board and thus improving product quality. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the adjustment mechanism of this utility model;

[0021] Figure 3 This utility model Figure 2 Enlarged structural diagram of section A in the middle;

[0022] Figure 4 This utility model Figure 2 Enlarged structural diagram of section B;

[0023] Figure 5 This is a schematic diagram of the feeding mechanism of this utility model;

[0024] Figure 6 This is a schematic diagram of the fixing mechanism of this utility model;

[0025] Figure 7 This utility model Figure 6 Enlarged structural diagram of section C.

[0026] Explanation of key symbols:

[0027] 1. Adjustment mechanism; 101. Exposure machine; 102. Worm gear; 103. Handle; 104. Worm wheel; 105. Rotating rod; 106. Upper ion fan; 107. Connecting rod; 108. Worm gear one; 109. Worm wheel one; 110. Rotating rod one; 111. Lower ion fan; 2. Feeding mechanism; 201. Support plate; 202. Motor; 203. Rotating rod two; 204. Conveyor belt; 3. Fixing mechanism; 301. Fixing plate; 302. Support rod; 303. Connecting plate; 304. Rubber block; 305. Sliding rod; 306. Spring; 307. Handle one; 308. Connecting plate one. Detailed Implementation

[0028] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0029] Example:

[0030] Please combine Figure 1-7 This embodiment provides a feeding device for an exposure machine with an automatic static electricity removal function, including an adjustment mechanism 1, a feeding mechanism 2, and a fixing mechanism 3. The feeding mechanism 2 is located inside the adjustment mechanism 1, and the fixing mechanism 3 is located inside the adjustment mechanism 1.

[0031] The adjustment mechanism 1 includes an exposure machine 101. A worm gear 102 is rotatably connected inside the exposure machine 101. A handle 103 is fixedly connected to the top of the worm gear 102. A worm wheel 104 is meshed with the worm gear 102. A rotating rod 105 is fixedly connected inside the worm wheel 104. An upper ion fan 106 is fixedly connected to the end of the rotating rod 105 away from the worm wheel 104. A connecting rod 107 is fixedly connected to the end of the worm gear 102 away from the handle 103. The connecting rod 107 is rotatably connected inside the exposure machine 101. A worm gear 108 is fixedly connected to the end of the connecting rod 107 away from the worm gear 102. The worm gear 108 is rotatably connected inside the exposure machine 101. A worm wheel 109 is meshed with the worm gear 108. A rotating rod 110 is fixedly connected inside the worm wheel 109. A lower ion fan 111 is fixedly connected to the end of the rotating rod 110 away from the worm wheel 109.

[0032] The feeding mechanism 2 includes a support plate 201, which is fixedly connected to the outer wall of the exposure machine 101, and a motor 202 is fixedly connected to the top of the support plate 201.

[0033] A rotating rod 203 is fixedly connected to the output end of the motor 202. The rotating rod 203 is rotatably connected inside the exposure machine 101. A conveyor belt 204 is rotatably connected to the outer wall of the rotating rod 203.

[0034] The fixing mechanism 3 includes a fixing plate 301, which is fixedly connected to the outer wall of the conveyor belt 204, and a support rod 302 is rotatably connected inside the fixing plate 301.

[0035] A connecting plate 303 is slidably connected to the outer wall of the support rod 302. A rubber block 304 is fixedly connected to the bottom of the connecting plate 303, and a sliding rod 305 is fixedly connected to the top of the connecting plate 303.

[0036] A spring 306 is slidably connected to the outer wall of the sliding rod 305, and a handle 307 is fixedly connected to the end of the sliding rod 305 away from the connecting plate 303.

[0037] A connecting plate 308 is slidably connected to the outer wall of the sliding rod 305, and the connecting plate 308 is fixedly connected to the outer wall of the support rod 302.

[0038] The implementation principle of the feeding device for an exposure machine with automatic anti-static function in this embodiment is as follows: The circuit board is placed on top of the fixed plate 301. A person slides the sliding rod 305 using handle 307, causing the sliding rod 305 to slide inside the connecting plate 308. Simultaneously, the sliding rod 305 is fixed to the connecting plate 303. When the connecting plate 303 slides along the outer wall of the support rod 302, the spring 306 is compressed. Then, the entire assembly rotates at a right angle around the support rod 302. The person slowly releases handle 307, and a rubber block 304 is fixed at the bottom of the connecting plate 303. The rubber block 304 then contacts the surface of the circuit board. Through the elasticity of the spring 306, the circuit board is fixed to the surface of the fixed plate 301, preventing displacement during feeding and exposure, thus improving the exposure effect of the circuit board and improving product quality. A support plate 201 is fixed to the outer wall of the motor 202, supporting the motor 202. Simultaneously, a rotating rod 203 is fixed to the output end of the motor 202. The outer wall rotating conveyor belt 204 stably transports the circuit board on the fixing mechanism 3 into the exposure machine 101, improving work efficiency. The operator drives the worm gear 102 to rotate via the handle 103. The worm gear 102 meshes with the worm wheel 104, which is fixed to the rotating rod 105. Simultaneously, the rotating rod 105 is fixed to the upper ion fan 106, allowing adjustment of the angle of the upper ion fan 106. Simultaneously, the worm gear 102 drives the worm gear 108 to rotate via the connecting rod 107. 08 meshes with worm gear 109, causing worm gear 109 to drive the lower ion fan 111 to adjust its angle via rotating rod 110. By rotating worm 102, the upper ion fan 106 and the lower ion fan 111 are angled, so that the plasma air is evenly covered on the surface of the circuit board. At the same time, the adjustment prevents dust from being blown directly onto the surface of the circuit board, thereby improving the exposure quality. The upper ion fan 106 and the lower ion fan 111 can simultaneously remove static electricity from both sides of the circuit board, reducing static electricity residue.

[0039] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A feeding device for an exposure machine with automatic static electricity removal function, characterized in that, It includes an adjustment mechanism (1), a feeding mechanism (2) and a fixing mechanism (3), wherein the feeding mechanism (2) is located inside the adjustment mechanism (1) and the fixing mechanism (3) is located inside the adjustment mechanism (1); The adjustment mechanism (1) includes an exposure machine (101), inside which a worm gear (102) is rotatably connected. A handle (103) is fixedly connected to the top of the worm gear (102). A worm wheel (104) is meshed with the worm gear (102). A rotating rod (105) is fixedly connected inside the worm wheel (104). An upper ion fan (106) is fixedly connected to the end of the rotating rod (105) away from the worm wheel (104). A connecting rod is fixedly connected to the end of the worm gear (102) away from the handle (103). 107), the connecting rod (107) is rotatably connected inside the exposure machine (101), and the end of the connecting rod (107) away from the worm (102) is fixedly connected to the worm gear (108). The worm gear (108) is rotatably connected inside the exposure machine (101). The worm gear (108) is meshed with the worm wheel (109). The rotating rod (110) is fixedly connected inside the worm wheel (109). The end of the rotating rod (110) away from the worm wheel (109) is fixedly connected to the lower ion fan (111).

2. The feeding device for an exposure machine with automatic static electricity removal function as described in claim 1, characterized in that: The feeding mechanism (2) includes a support plate (201), which is fixedly connected to the outer wall of the exposure machine (101), and a motor (202) is fixedly connected to the top of the support plate (201).

3. The feeding device for an exposure machine with automatic static electricity removal function as described in claim 2, characterized in that: The output end of the motor (202) is fixedly connected to a rotating rod two (203), the rotating rod two (203) is rotatably connected inside the exposure machine (101), and a conveyor belt (204) is rotatably connected to the outer wall of the rotating rod two (203).

4. The feeding device for an exposure machine with automatic static electricity removal function as described in claim 3, characterized in that: The fixing mechanism (3) includes a fixing plate (301), which is fixedly connected to the outer wall of the conveyor belt (204), and a support rod (302) is rotatably connected inside the fixing plate (301).

5. The feeding device for an exposure machine with automatic static electricity removal function as described in claim 4, characterized in that: The outer wall of the support rod (302) is slidably connected to a connecting plate (303), a rubber block (304) is fixedly connected to the bottom of the connecting plate (303), and a sliding rod (305) is fixedly connected to the top of the connecting plate (303).

6. The feeding device for an exposure machine with automatic static electricity removal function as described in claim 5, characterized in that: A spring (306) is slidably connected to the outer wall of the sliding rod (305), and a handle (307) is fixedly connected to the end of the sliding rod (305) away from the connecting plate (303).

7. The feeding device for an exposure machine with automatic static electricity removal function as described in claim 6, characterized in that: The outer wall of the sliding rod (305) is slidably connected to a connecting plate (308), and the connecting plate (308) is fixedly connected to the outer wall of the support rod (302).

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