Annular heater and semiconductor processing apparatus

Abstract

This application provides a ring heater and a semiconductor processing apparatus. The ring heater includes a ring housing with an annular cavity formed inside the housing; a heating element including a heating section and a lead-out section. The heating section includes multiple rings of heating portions surrounding the annular cavity. One end of the lead-out section is connected to the end of the heating section, and the other end of the lead-out section is located outside the annular housing. The ring heater of this application places the heating portion of the heating element within the annular cavity inside the ring housing. The heating section of the heating element includes multiple rings of heating portions surrounding the annular cavity. These multiple rings of heating portions continuously surround to form the heating section, ensuring both the structural integrity of the heating section and improving the heating uniformity of the heating section, thus reducing heat loss.

Description

Technical Field

[0001] This application belongs to the field of semiconductor technology, specifically, it relates to a ring heater and semiconductor processing equipment. Background Technology

[0002] When the ring heater heats the spray plate through the heating wire, hot spots and cold spots are prone to appear on the heating wire. The temperature at the hot spots is too high, while the temperature at the cold spots is insufficient, resulting in a large temperature difference in the heating area, which seriously affects the uniformity of heating. Moreover, the large temperature difference will also increase heat loss and reduce energy utilization efficiency. Utility Model Content

[0003] One objective of this application is to provide a new technical solution for a ring heater and a semiconductor processing apparatus.

[0004] According to a first aspect of the embodiments of this application, an annular heater is provided, comprising:

[0005] An annular shell, wherein an annular receiving cavity is formed inside the annular shell;

[0006] A heating element, comprising a heating section and an outlet section, wherein the heating section includes multiple heating portions surrounding the annular cavity, one end of the outlet section is connected to the end of the heating section, and the other end of the outlet section is located outside the annular housing.

[0007] Optionally, the multiple heating sections are formed by a single heating segment that surrounds the annular cavity.

[0008] Optionally, the multiple heating elements are arranged sequentially in the radial direction of the heating section.

[0009] Optionally, the multiple heating elements are arranged sequentially along the axial direction of the heating section.

[0010] Optionally, the end of the heating section is the low-temperature position of the heating section, and the position on the heating section away from the end is the high-temperature position of the heating section, and the temperature difference between the high-temperature position and the low-temperature position is less than or equal to 20°C.

[0011] Optionally, the end of the heating section is located outside the annular housing.

[0012] Optionally, the heating section is die-cast within the annular shell.

[0013] Optionally, the heating element is bent within the annular receiving cavity.

[0014] Optionally, the heating section includes a first heating part and a second heating part, both of which are wavy.

[0015] In the radial direction of the heating section, the concave region of the first heating part and the convex region of the second heating part are opposite to each other.

[0016] Optionally, the heating section includes a third heating section and a fourth heating section, both of which are wavy.

[0017] In the radial direction of the heating section, the concave regions of the third heating section and the fourth heating section are opposite each other, and the convex regions of the third heating section and the fourth heating section are opposite each other.

[0018] Optionally, the heating section includes a fifth heating section and a sixth heating section, both of which are wavy in shape;

[0019] Along the axial direction of the heating section, the concave region of the fifth heating part and the convex region of the sixth heating part are opposite to each other.

[0020] Optionally, the heating section includes a seventh heating section and an eighth heating section, both of which are wavy.

[0021] Along the axial direction of the heating section, the concave regions of the seventh heating part and the eighth heating part are opposite to each other, and the convex regions of the seventh heating part and the eighth heating part are opposite to each other.

[0022] According to a second aspect of the embodiments of this application, a semiconductor processing apparatus is provided, including a spray plate assembly and the annular heater described in the first aspect;

[0023] The annular heater is attached to one side of the spray plate assembly.

[0024] Optionally, the spray plate assembly includes a spray plate, a buffer structure, a cold plate, and a cover plate, wherein the buffer structure, the cold plate, and the cover plate are sequentially disposed on one side of the spray plate;

[0025] The annular heater surrounds the buffer structure and is in contact with the spray plate.

[0026] Optionally, the spray plate is provided with an annular step on the side near the buffer structure, and the annular heater is disposed on the annular step.

[0027] Optionally, the spray plate assembly includes a base, a column, and a clamping member, wherein the base is disposed on the side of the spray plate away from the buffer structure;

[0028] One end of the column is connected to the base, and the other end of the column is provided with the clamping member, which is pressed against the side of the annular heater away from the spray plate.

[0029] Optionally, the clamping member includes a connecting rod, a pressure plate, and an elastic element. The connecting rod is connected to the other end of the column, the pressure plate is sleeved on the connecting rod and pressed against the annular heater, and the elastic element is clamped between the end of the connecting rod and the pressure plate.

[0030] One technical advantage of this application is:

[0031] This application provides an annular heater, which includes an annular shell with an annular cavity inside; a heating element including a heating section and an extension section. The heating section includes multiple rings of heating portions surrounding the annular cavity, and one end of the extension section is connected to the end of the heating section, while the other end of the extension section is located outside the annular shell. This annular heater places the heating portion of the heating element within the annular cavity inside the annular shell. The heating section of the heating element includes multiple rings of heating portions surrounding the annular cavity, and these multiple rings continuously surround to form the heating section. This ensures the structural integrity of the heating section, improves the heating uniformity of the heating section, and reduces heat loss.

[0032] Other features and advantages of this application will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0033] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present application and, together with their description, serve to explain the principles of the present application.

[0034] Figure 1 A schematic diagram of an annular heater provided for one embodiment of this application;

[0035] Figure 2 This is a schematic diagram of a heating element for a ring heater provided in the first embodiment of this application;

[0036] Figure 3 A schematic diagram of a heating element for a ring heater provided in the second embodiment of this application;

[0037] Figure 4 A schematic diagram of a heating element for a ring heater provided in the third embodiment of this application;

[0038] Figure 5 An overall view of an annular heater provided in one embodiment of this application;

[0039] Figure 6This is a schematic diagram of a heating element for a ring heater provided in the fourth embodiment of this application;

[0040] Figure 7 This is a schematic diagram of a heating element for a ring heater provided in the fifth embodiment of this application;

[0041] Figure 8 This is a schematic diagram of a heating element for a ring heater provided in the sixth embodiment of this application;

[0042] Figure 9 This is a schematic diagram of a semiconductor processing apparatus provided in one embodiment of this application;

[0043] Figure 10 for Figure 9 Local magnification in Figure 1 ;

[0044] Figure 11 for Figure 9 Local magnification in Figure 2 .

[0045] in:

[0046] 100. Annular heater; 1. Annular shell; 11. Mounting area; 2. Heating element; 21. Heating section; 211. Heating part; 212. First heating part; 213. Second heating part; 214. Third heating part; 215. Fourth heating part; 216. Fifth heating part; 217. Sixth heating part; 218. Seventh heating part; 219. Eighth heating part; 22. Lead-out section;

[0047] 200. Sprayer plate assembly; 201. Sprayer plate; 2011. Annular step; 202. Buffer structure; 2021. Buffer protrusion; 2022. Sealing ring; 2023. Shielding elastic element; 203. Cold plate; 204. Cover plate; 205. Base; 206. Column; 207. Clamping element; 2071. Connecting rod; 2072. Pressure plate; 2073. Elastic element;

[0048] 300, RPS cleaning parts. Detailed Implementation

[0049] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present application.

[0050] The embodiments of this application will now be described in detail, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0051] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0052] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0053] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0054] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0055] In related technologies, when a ring heater heats a spray plate through a heating wire, hot and cold spots easily appear on the heating wire. The temperature at the hot spots is too high, while the temperature at the cold spots is insufficient, resulting in a large temperature difference in the heating area, which seriously affects the uniformity of heating. Moreover, a large temperature difference will also increase heat loss and reduce energy utilization efficiency.

[0056] The annular heater provided in this application embodiment has the heating part of the heating element disposed in the annular cavity inside the annular shell; the heating section of the heating element includes multiple heating parts that surround the annular cavity, and the multiple heating parts continuously surround to form the heating section, which not only ensures the structural integrity of the heating section, but also improves the heating uniformity of the heating section and reduces heat loss.

[0057] Reference Figure 1 and Figure 2 This application provides an annular heater 100, which includes:

[0058] An annular shell 1, with an annular receiving cavity formed inside the annular shell 1;

[0059] Heating element 2 includes heating section 21 and lead-out section 22. Heating section 21 includes multiple heating parts 211 that surround the annular cavity. For example, heating section 21 includes two, three, or four consecutive heating parts 211. One end of lead-out section 22 is connected to the end of heating section 21, and the other end of lead-out section 22 is located outside the annular shell 1.

[0060] In the above embodiments, the annular shell 1 can be a cast aluminum ring or a steel ring. The annular shell 1 provides structural support and protection for the entire annular heater 100, ensuring the safe and stable operation of the heating elements inside the annular heater 100. For example, the annular cavity formed inside the annular shell 1 provides a suitable surrounding space for the heating element 2, enabling the heating element 2 to lay the foundation for subsequent uniform heating and avoiding the heating performance being affected by unreasonable layout of the heating element 2.

[0061] See Figure 2 The two ends of the heating section 21 are arranged adjacently to facilitate the common lead-out of the ends of the heating section 21. At the cold point of the conventional heating wire, the surrounding heating part 211 can fill the heat supply of the cold point area, compensate the temperature of the cold point area, and raise the temperature of the originally insufficient cold point area. At the same time, the multiple rings of the surrounding heating part 211 can also disperse the heat of the hot point area, avoid the local temperature from being too high, effectively reduce the temperature difference between the high temperature position and the low temperature position on the heating section 21, and ensure the heating uniformity of the ring heater.

[0062] Specifically, the lead-out section 22 may not be used for heating, and the temperature at both ends of the heating section 21 will decrease. This means that there may be cold spots at the connection between the lead-out section 22 and the heating section 21, resulting in a large temperature difference between the high-temperature position (the position of the heating section 21 away from the lead-out section 22) and the low-temperature position (the position of the heating section 21 close to the lead-out section 22) on the heating section 21. However, by setting the heating section 21 in the form of multiple rings of heating parts 211, temperature compensation can be performed at the cold spots through the ring heating parts 211, reducing the temperature difference between the high-temperature position and the low-temperature position on the heating section 21, and ensuring the heating uniformity of the annular heater.

[0063] In the above embodiment, the lead-out section 22 provides a power access point for the heating section 21. The lead-out section 22 introduces electrical energy from an external power source into the heating section 21, enabling the heating section 21 to generate heat normally. The lead-out section 22 is an important bridge connecting the annular heater 100 to the external power source, ensuring the realization of the heating function.

[0064] The annular heater 100 provided in this application embodiment has the heating part of the heating element 2 disposed in the annular cavity inside the annular housing 1; the heating section 21 of the heating element 2 includes multiple heating parts 211 that surround the annular cavity. The multiple heating parts 211 continuously surround to form the heating section 21, which not only ensures the structural integrity of the heating section 21, but also improves the heating uniformity of the heating section 21 and reduces heat loss.

[0065] In one embodiment, the annular heater 100 is used to heat the spray plate. Uneven heating temperature of the annular heater 100 can lead to excessive power output, reducing its lifespan, and also cause uneven temperature distribution of the process gas ejected from the spray plate, resulting in uneven coating thickness. However, the annular heater 100 provided in this embodiment uses a multi-ring heating element 211 around the heating section 21. This allows for temperature compensation at cold spots, reducing the temperature difference between high and low temperature positions on the heating section 21, lowering the power consumption of the annular heater 100, ensuring heating uniformity and lifespan, and maintaining the uniformity of the coating thickness on the spray plate.

[0066] In some embodiments, see Figure 2 and Figure 6 The multi-turn heating section 211 is formed by a single heating segment 21 encircling the annular cavity. The structure of forming a multi-turn heating section 211 by a single heating segment 21 greatly simplifies the internal structure of the heating element 2. Compared with the structure of multiple heating wires stacked together, it reduces the number of connection points of the heating segment 21, reduces the risk of failure of the entire heating element 2 due to poor connection or local damage, and improves the reliability and service life of the annular heater.

[0067] Moreover, the multiple rings of heating elements 211 formed by the continuous encirclement of a heating section 21 can ensure that the current distribution in the heating element 2 is more uniform, so that the heat generated by each ring of heating elements 211 is also more uniform, thereby achieving uniform heating of the object being heated.

[0068] In some embodiments, see Figure 6 The multi-ring heating elements 211 are arranged sequentially in the radial direction of the heating section 21.

[0069] In the above embodiment, the radial direction of the heating section 21 can be the horizontal direction of the plane around which the heating section 21 surrounds. Since the spray plate and other elements waiting to be heated are generally disc-shaped structures, uneven heating may occur at different radial positions of the spray plate. The multi-turn heating section 211 heats the spray plate in the horizontal direction by increasing the number of turns, which can increase the contact area between the heating section 21 and the spray plate, and also allow heat to be transferred to the spray plate simultaneously from different radial positions. This ensures that the spray plate is heated relatively uniformly at all positions in the radial direction, avoiding overheating or undercooling of some radial areas due to unreasonable distribution of heating elements, effectively reducing the temperature difference in the radial direction, and improving the uniformity of heating temperature.

[0070] In the above embodiments, the multiple rings of heating elements 211 arranged radially can contact each other sequentially to reduce the space occupied by the heating section 21; alternatively, the multiple rings of heating elements 211 arranged radially can be spaced apart by a set distance, such as 10%, 30%, 50%, 70%, or 100% of the diameter of the heating element 211, to avoid excessive temperature between adjacent heating elements 211, wherein the diameter of the heating element 211 is taken in the range of 0.09-1.6 mm.

[0071] In some embodiments, see Figure 7 The heating section 21 includes a first heating part 212 and a second heating part 213, both of which are wavy.

[0072] In the radial direction of the heating section 21, the concave region of the first heating part 212 and the convex region of the second heating part 213 are opposite to each other, and the convex region of the first heating part 212 and the concave region of the second heating part 213 are opposite to each other.

[0073] In the above embodiments, the wavy first heating section 212 and the second heating section 213 can increase the actual length of the heating section within the same radial space, thereby increasing the heating area. This helps to improve heat transfer efficiency, enabling the heating section to transfer heat to the workpiece to be heated more quickly and effectively, thus improving the overall heating effect. Moreover, the wavy undulation makes the heat distribution on the heating section more dispersed, avoiding excessive heat concentration in local areas and helping to reduce the occurrence of hot and cold spots.

[0074] In this embodiment, the nested arrangement of the first heating element 212 and the second heating element 213 creates complementary heating areas in the radial direction. For example, when the heat is relatively concentrated in the convex area of ​​the first heating element 212, the concave area of ​​the opposite second heating element 213 can disperse and supplement the heat, further reducing the temperature difference between high-temperature and low-temperature areas within the heating region, ensuring heating uniformity, and improving the stability and consistency of the spray plate's heating.

[0075] Furthermore, the opposing structure of the first heating section 212 and the second heating section 213 promotes the coordinated transfer of heat in the radial direction. During the heating process, heat can be transferred from the convex area of ​​one heating section to the concave area of ​​another heating section, forming a relay effect of heat transfer, which allows heat to diffuse more quickly and evenly throughout the entire heating area, improving the efficiency and effectiveness of heat transfer.

[0076] In another embodiment, see Figure 8 The heating section 21 includes a third heating part 214 and a fourth heating part 215, both of which are wavy. In the radial direction of the heating section 21, the concave regions of the third heating part 214 and the fourth heating part 215 are opposite to each other, and the convex regions of the third heating part 214 and the fourth heating part 215 are opposite to each other, so as to improve the structural compactness of the annular heater while ensuring heat transfer.

[0077] In some embodiments, see Figure 2 The multi-ring heating elements 211 are arranged sequentially along the axial direction of the heating section 21.

[0078] In the above embodiment, when a certain ring of heating element 211 generates heat, the surrounding medium (such as air or other heat transfer medium) will quickly absorb the heat and transfer it away. Since multiple rings of heating element 211 act simultaneously in the axial direction, heat can be transferred and diffused more quickly in the axial direction, reducing heat loss during the transfer process, improving heat transfer efficiency, and thus accelerating the heating speed of the spray plate and other heating elements.

[0079] In the above embodiments, the multiple rings of heating elements 211 arranged sequentially in the axial direction can contact each other in sequence to reduce the space occupied by the heating section 21; or the multiple rings of heating elements 211 arranged sequentially in the axial direction can be spaced apart by a set distance, such as 10%, 30%, 50%, 70% or 100% of the diameter of the heating element 211, to avoid excessive temperature between adjacent heating elements 211.

[0080] In some embodiments, see Figure 3The heating section 21 includes a fifth heating section 216 and a sixth heating section 217, both of which are wavy.

[0081] In the axial direction of the heating section 21, the concave region of the fifth heating section 216 and the convex region of the sixth heating section 217 are opposite to each other, and the convex region of the fifth heating section 216 and the concave region of the sixth heating section 217 are opposite to each other.

[0082] In the above embodiments, the fifth heating section 216 and the sixth heating section 217 with wave-shaped structures increase the length of the heating section within the same axial space, thereby increasing the heating area of ​​the heating section. The larger heating area can transfer heat to the spray plate more quickly and effectively, improving heating efficiency and shortening heating time. Moreover, the wave-shaped undulations make the heat distribution on the heating section more dispersed, avoiding excessive heat concentration in local areas, which helps to reduce the problems of hot spots and cold spots.

[0083] Furthermore, the corrugated fifth heating section 216 and sixth heating section 217 provide them with a certain degree of elasticity. During the heating process, the heating sections may undergo thermal expansion and contraction due to temperature changes. The corrugated structure can better withstand this thermal stress, reducing deformation or damage caused by thermal stress and improving the service life and reliability of the heating sections.

[0084] In this embodiment, the fifth heating part 216 and the sixth heating part 217 are arranged in a nested configuration, forming complementary heating areas in the axial direction. For example, when the heat is relatively concentrated in the convex area of ​​the fifth heating part 216, the concave area of ​​the opposite sixth heating part 217 can disperse and supplement the heat, further reducing the temperature difference between high-temperature and low-temperature positions within the heating area, ensuring heating uniformity, and improving the stability and consistency of the spray plate's heating.

[0085] In another embodiment, see Figure 4 The heating section 21 includes a seventh heating section 218 and an eighth heating section 219, both of which are wavy. In the axial direction of the heating section 21, the concave regions of the seventh heating section 218 and the eighth heating section 219 are opposite to each other, and the convex regions of the seventh heating section 218 and the eighth heating section 219 are opposite to each other, so as to improve the structural compactness of the annular heater while ensuring heat transfer.

[0086] In some embodiments, the end of the heating section 21 is a low-temperature position of the heating section 21, and the position on the heating section 21 away from the end is a high-temperature position of the heating section 21, and the temperature difference between the high-temperature position and the low-temperature position is less than or equal to 20°C.

[0087] In the above embodiments, the end of the heating section is usually closer to external connecting components such as cables, making it prone to heat loss. Setting the end of the heating section 21 to a low-temperature position can effectively reduce energy loss due to heat dissipation, enabling more efficient use of heating energy. To ensure the component to be heated reaches the required temperature quickly and accurately, the heating section 21 needs to continuously generate heat, resulting in higher temperatures at locations further from the end of the heating section 21. A temperature difference of less than or equal to 20°C between the high-temperature and low-temperature positions ensures uniform heating of all parts of the component, avoiding product quality issues caused by temperature differences, thereby improving product quality and stability.

[0088] In one embodiment, see Figure 1 The annular housing 1 has an installation area 11 for setting temperature sensors. Two temperature sensors are set close to the low temperature position and the high temperature position respectively to monitor the real-time temperature of the low temperature position and the high temperature position.

[0089] In some embodiments, the end of the heating section 21 is located outside the annular housing 1.

[0090] In the above embodiment, the end of the heating section 21 is located outside the annular shell 1, which means that the heating area of ​​the heating section 21 can surround the interior of the annular shell 1 as much as possible, thereby increasing the effective heating area of ​​the heating section 21. At the same time, the two ends of the heating section 21 can be placed as close as possible or overlapped to ensure the integrity of the heating area.

[0091] In one embodiment, the heating section 21 is die-cast into the annular shell 1.

[0092] In the above embodiment, the heating part 211 of the heating section 21 is die-cast into the annular shell 1, so that the heating section 21 and the annular shell 1 are integrated into one piece, and a tight and firm connection is formed between the heating section 21 and the annular shell 1, which can make the contact surface between the heating part 211 and the workpiece to be heated larger and the heating more uniform.

[0093] In one specific embodiment, the spray plate is heated by an annular heater with two radially arranged heating sections. The heating power is 53% of the rated power (rated power is 4KW), the heating temperature is set to 250℃, the diameter of the heating section is 0.5mm, the heating section includes a protective layer and a heating wire embedded in the protective layer. The heating wire is made of nickel-chromium alloy (Ni80Gr20), and the protective layer is made of stainless steel mesh filled with magnesium oxide. This can reduce the temperature difference between the high-temperature position and the low-temperature position on the heating section 21 to 18℃.

[0094] In some embodiments, see Figure 3 and Figure 4 The heating element 211 is bent and disposed within the annular receiving cavity.

[0095] In the above embodiment, the bending arrangement of the heating part 211 can increase the heating area within the limited space of the annular cavity, so that the heating area of ​​the annular heater can make more sufficient contact with the spray plate, which helps to improve the heat transfer efficiency, allowing more heat to be transferred to the spray plate quickly and effectively, thereby improving the overall heating effect and ensuring that the spray plate can reach the required temperature more quickly.

[0096] Furthermore, the bent heating element 211 allows heat to diffuse in multiple directions, reducing the problem of heat concentration. When a hot spot appears in a certain area of ​​the heating element 211, the bent portion can disperse some of the heat to adjacent areas; at the same time, in cold spots, the bent heating element 211 can also provide heat from multiple angles to compensate for the temperature, effectively reducing the temperature difference between high-temperature and low-temperature locations within the heating area and ensuring heating uniformity.

[0097] See Figure 9 This application provides a semiconductor processing apparatus, which includes a spray plate assembly 200 and the aforementioned annular heater 100;

[0098] The annular heater 100 is attached to one side of the spray plate assembly 200.

[0099] In the above embodiment, the annular heater 100 of the semiconductor processing equipment sets the heating part of the heating element 2 in the annular cavity inside the annular housing 1; the heating section 21 of the heating element 2 includes multiple heating parts 211 that surround the annular cavity. The multiple heating parts 211 continuously surround to form the heating section 21, which not only ensures the structural integrity of the heating section 21, but also improves the heating uniformity of the heating section 21 and reduces heat loss.

[0100] See Figure 9 The semiconductor processing equipment also includes an RPS (Remote Plasma Source) cleaning component 300, which is used to clean the internal cavity of the spray plate assembly 200.

[0101] In some embodiments, see Figure 9 and Figure 10 The spray plate assembly 200 includes a spray plate 201, a buffer structure 202, a cold plate 203, and a cover plate 204, with the buffer structure 202, the cold plate 203, and the cover plate 204 sequentially disposed on one side of the spray plate 201.

[0102] The annular heater 100 surrounds the buffer structure 202 and is in contact with the spray plate 201.

[0103] In the above embodiments, the spray plate 201 can uniformly disperse the process medium into the processing area, ensuring that the surface of the semiconductor substrate receives uniform process treatment and guaranteeing the uniformity of the semiconductor film thickness. The buffer structure 202 is disposed between the spray plate 201 and the cold plate 203, which can buffer the process gas. The cold plate 203 can cool the spray plate assembly 200, removing the heat generated inside the spray plate assembly 200, thereby precisely controlling the temperature of the spray plate assembly 200. The cover plate 204 is located on the outermost side of the spray plate assembly 200, serving a sealing and protective function.

[0104] See Figure 9 The annular heater 100 surrounds the buffer structure 202 and distributes heat evenly around the spray plate 201, thereby achieving uniform heating of the spray plate 201. This avoids the problem of local overheating or undercooling of the spray plate 201, ensures the overall temperature consistency of the spray plate 201, and improves the uniformity and stability of the spraying process.

[0105] In some embodiments, see Figure 9 and Figure 10 An annular step 2011 is provided on the side of the spray plate 201 near the buffer structure 202, and an annular heater 100 is provided on the annular step 2011.

[0106] In the above embodiments, the annular step 2011 provides a clearly defined installation position for the annular heater 100. When assembling the spray plate assembly 200 and the annular heater 100, the annular heater 100 can be quickly and accurately placed in the designated position based on the shape and size of the annular step 2011, avoiding problems such as uneven heating and component interference caused by inaccurate installation. Furthermore, the annular step 2011 effectively prevents the annular heater 100 from shifting relative to the spray plate 201, ensuring the relative positional stability between the annular heater 100 and the spray plate 201, thereby ensuring the stability and reliability of the heating effect.

[0107] See Figure 11 The buffer structure 202 has a buffer protrusion 2021, which serves as a heat insulation element to reduce heat loss. The buffer protrusion 2021 is equipped with a sealing ring 2022 and a shielding elastic element 2023. The sealing ring 2022 ensures the airtightness of the internal space of the buffer structure 202. The shielding elastic element 2023 can be a helical spring or a spiral tube, and the material can be stainless steel, beryllium copper, or Hastelloy, to provide radio frequency shielding and grounding.

[0108] In some embodiments, see Figure 9 and Figure 10The spray plate assembly 200 includes a base 205, a column 206 and a clamping member 207. The base 205 is located on the side of the spray plate 201 away from the buffer structure 202.

[0109] One end of the column 206 is connected to the base 205, and the other end of the column 206 is provided with a clamping member 207, which is pressed against the side of the annular heater 100 away from the spray plate 201.

[0110] In the above embodiment, multiple columns 206 can be provided and evenly arranged around the base 205. A clamping member 207 is provided at the other end of the column 206 so that the clamping member 207 can be stably pressed onto the annular heater 100, thereby firmly fixing the annular heater 100 onto the spray plate 201, ensuring close contact between the annular heater 100 and the spray plate 201, which is conducive to the effective transfer of heat.

[0111] In some embodiments, see Figure 10 The clamping member 207 includes a connecting rod 2071, a pressure plate 2072, and an elastic member 2073. The connecting rod 2071 is connected to the other end of the column 206. The pressure plate 2072 is sleeved on the connecting rod 2071 and pressed against the annular heater 100. The elastic member 2073 is sandwiched between the end of the connecting rod 2071 and the pressure plate 2072.

[0112] In the above embodiment, the pressure plate 2072 can be annular, and the pressure plate 2072 presses the annular heater 100 against the spray plate 201 to avoid air leakage; the elastic element 2073 can be a compression spring. Due to thermal expansion, the dimensions of the annular heater 100 and the spray plate 201 in the vertical direction (the extension direction of the column) will increase. The compression spring can keep the annular heater 100 close to the spray plate 201.

[0113] See Figure 10 The pressure plate 2072 is sleeved on the connecting rod 2071 and presses against the annular heater 100. The large contact area of ​​the pressure plate 2072 can evenly distribute the clamping force on the surface of the annular heater 100, which can prevent the annular heater 100 from being damaged due to excessive local stress. At the same time, it can also ensure a tight fit between the annular heater 100 and the spray plate 201, improving heat transfer efficiency. The elastic element 2073 has a certain elastic deformation capacity and can automatically adjust the clamping force according to the thermal expansion and contraction between the annular heater 100 and the spray plate 201. For example, when the annular heater 100 and the spray plate 201 undergo thermal expansion or contraction, the elastic element 2073 can maintain an appropriate clamping force on the annular heater 100 through its own elastic deformation, ensuring the continuity and stability of heat transfer.

[0114] While specific embodiments of this application have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of this application. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of this application. The scope of this application is defined by the appended claims.

Claims

1. A ring heater, characterized in that, include: An annular housing (1) has an annular receiving cavity formed inside it; The heating element (2) includes a heating section (21) and an outlet section (22). The heating section (21) includes multiple heating portions (211) that surround the annular cavity. One end of the outlet section (22) is connected to the end of the heating section (21), and the other end of the outlet section (22) is located outside the annular housing (1).

2. The annular heater according to claim 1, characterized in that, The heating section (211) is formed by a heating segment (21) that surrounds the annular cavity.

3. The annular heater according to claim 1, characterized in that, The heating elements (211) are arranged in sequence in the radial direction of the heating section (21).

4. The annular heater according to claim 1, characterized in that, The heating elements (211) are arranged sequentially along the axial direction of the heating section (21).

5. The annular heater according to claim 1, characterized in that, The end of the heating section (21) is the low temperature position of the heating section (21), and the position on the heating section (21) away from the end is the high temperature position of the heating section (21). The temperature difference between the high temperature position and the low temperature position is less than or equal to 20°C.

6. The annular heater according to claim 1, characterized in that, The end of the heating section (21) is located outside the annular shell (1).

7. The annular heater according to claim 1, characterized in that, The heating section (21) is die-cast into the annular shell (1).

8. The annular heater according to claim 1, characterized in that, The heating element (211) is bent and disposed within the annular cavity.

9. The annular heater according to claim 2, characterized in that, The heating section (21) includes a first heating part (212) and a second heating part (213), both of which are wavy. In the radial direction of the heating section (21), the concave region of the first heating part (212) and the convex region of the second heating part (213) are opposite to each other, and the convex region of the first heating part (212) and the concave region of the second heating part (213) are opposite to each other.

10. The annular heater according to claim 2, characterized in that, The heating section (21) includes a third heating part (214) and a fourth heating part (215), both of which are wavy. In the radial direction of the heating section (21), the concave region of the third heating part (214) and the concave region of the fourth heating part (215) are opposite to each other, and the convex region of the third heating part (214) and the convex region of the fourth heating part (215) are opposite to each other.

11. The annular heater according to claim 3, characterized in that, The heating section (21) includes a fifth heating section (216) and a sixth heating section (217), both of which are wavy. In the axial direction of the heating section (21), the concave region of the fifth heating part (216) and the convex region of the sixth heating part (217) are opposite to each other, and the convex region of the fifth heating part (216) and the concave region of the sixth heating part (217) are opposite to each other.

12. The annular heater according to claim 3, characterized in that, The heating section (21) includes a seventh heating part (218) and an eighth heating part (219), both of which are wavy. In the axial direction of the heating section (21), the concave region of the seventh heating part (218) and the concave region of the eighth heating part (219) are opposite to each other, and the convex region of the seventh heating part (218) and the convex region of the eighth heating part (219) are opposite to each other.

13. A semiconductor processing apparatus, characterized in that, Includes a spray plate assembly (200) and an annular heater (100) according to any one of claims 1-12; The annular heater (100) is attached to one side of the spray plate assembly (200).

14. The semiconductor processing equipment according to claim 13, characterized in that, The spray plate assembly (200) includes a spray plate (201), a buffer structure (202), a cold plate (203), and a cover plate (204), wherein the buffer structure (202), the cold plate (203), and the cover plate (204) are sequentially disposed on one side of the spray plate (201); The annular heater (100) surrounds the buffer structure (202) and is in contact with the spray plate (201).

15. The semiconductor processing equipment according to claim 14, characterized in that, The spray plate (201) has an annular step (2011) on the side near the buffer structure (202), and the annular heater (100) is disposed on the annular step (2011).

16. The semiconductor processing equipment according to claim 14, characterized in that, The spray plate assembly (200) includes a base (205), a column (206) and a clamping member (207), wherein the base (205) is disposed on the side of the spray plate (201) away from the buffer structure (202); One end of the column (206) is connected to the base (205), and the other end of the column (206) is provided with the clamping member (207), which is pressed against the side of the annular heater (100) away from the spray plate (201).

17. The semiconductor processing equipment according to claim 16, characterized in that, The clamping member (207) includes a connecting rod (2071), a pressure plate (2072), and an elastic member (2073). The connecting rod (2071) is connected to the other end of the column (206). The pressure plate (2072) is sleeved on the connecting rod (2071) and pressed against the annular heater (100). The elastic member (2073) is sandwiched between the end of the connecting rod (2071) and the pressure plate (2072).

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