Magnetic rod biopsy device and vacuum apparatus

Abstract

The utility model provides a kind of magnetic pole piece taking device and vacuum equipment, belong to vacuum piece transmission technical field, magnetic pole piece taking device includes: first pipe body, magnetic force pipe, the magnetic force pipe is equipped in the outside of the first pipe body, transmission component, the transmission component is used to transmit substrate or target material under the drive of the magnetic force pipe;Locking assembly, the locking assembly can limit the magnetic force pipe rotates around the first pipe body.The utility model when carrying out piece, magnetic force pipe is moved or rotated to drive transmission component to carry out corresponding action, when clamping is completed, adjust locking assembly to be in first state, fix the magnetic force pipe, so that it cannot rotate, only can be moved along the axial adjustment of first pipe body, so as to avoid the situation that clamping appears loose and falls off, solve the deficiency of traditional structure.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum plate transfer technology, specifically relating to a magnetic rod plate picking device and vacuum equipment. Background Technology

[0002] In vacuum coating equipment, the substrate and target material can be arranged in a horizontally distributed manner, such as the substrate on top and the target material on the bottom, or the substrate on the bottom and the target material on top, with the two facing each other horizontally. They can also be arranged vertically, that is, the substrate and target material are placed vertically and facing each other in the horizontal direction.

[0003] To improve the vacuum level within the process chamber of vacuum coating equipment and avoid the impact of frequent quick-opening of the door for wafer transfer, a sample loading chamber is typically used for wafer loading and unloading. Magnetic rods are used for sampling during the loading and unloading process. However, when the substrate and target are placed vertically, the magnetic rods are difficult to use for loading and unloading, and are prone to loosening, leading to the risk of the clamps falling off. Utility Model Content

[0004] The present invention aims to at least solve one of the aforementioned technical problems existing in the prior art. To this end, in a first aspect, the present invention provides a magnetic rod plate-retrieving device, which can solve the problem of loosening and falling off during the clamping process.

[0005] Secondly, this utility model provides a vacuum device that utilizes the aforementioned magnetic rod plate-picking device.

[0006] The magnetic rod chip-picking device according to a first aspect embodiment of the present invention includes:

[0007] A first tube body, wherein a first mounting cavity is provided inside the first tube body;

[0008] A magnetic tube, which is sleeved on the outside of the first tube body and is capable of moving along the axial direction of the first tube body and rotating around the first tube body;

[0009] A transmission assembly is disposed within the first mounting cavity, with one end of the transmission assembly extending to the outside of the first mounting cavity, for conveying a substrate or target material under the drive of the magnetic tube.

[0010] A locking assembly is connected to the first tube body. The locking assembly has a first state and a second state. When the locking assembly is in the first state, the locking assembly is connected to the magnetic tube at a fixed angle to restrict the magnetic tube from rotating around the first tube body. When the locking assembly is in the second state, the angle fixation between the locking assembly and the magnetic tube is released, allowing the magnetic tube to rotate around the first tube body.

[0011] The magnetic rod plate-picking device according to the embodiments of the present invention has at least the following beneficial effects:

[0012] In this embodiment of the magnetic rod wafer picking device, when picking up a wafer, the magnetic tube moves or rotates to drive the transmission component to perform corresponding actions. After clamping is completed, the locking component is adjusted to the first state to fix the magnetic tube so that it cannot rotate and can only move and adjust along the axial direction of the first tube body. This can prevent the clamping from loosening and falling off, and solves the shortcomings of the traditional structure.

[0013] According to some embodiments of the present invention, the locking assembly includes:

[0014] A locking guide portion is fixedly connected to the first tube body and extends along the axial direction of the first tube body;

[0015] A locking mounting part is slidably connected to the locking guide part and rotatably connected to the magnetic tube so as to move synchronously with the magnetic tube;

[0016] The locking part is provided through the locking mounting part, and the locking part has a locked state that abuts against the magnetic tube and an unlocked state that is separated from the magnetic tube.

[0017] According to some embodiments of this utility model, the locking mounting part is sleeved on the outside of the magnetic tube.

[0018] According to some embodiments of this utility model, the locking part is threadedly connected to the locking mounting part, and the state is switched by adjusting the thread.

[0019] According to some embodiments of the present invention, the transmission assembly includes:

[0020] A transmission rod, which passes through the first mounting cavity, and is provided with a magnetic part;

[0021] The second tube is sleeved on the transmission rod. The second tube is axially fixed to the transmission rod, and the second tube is angularly fixed to the first tube.

[0022] The magnetic tube can drive the magnetic part to move along the axial direction of the first tube body through magnetic force, thereby driving the transmission rod and the second tube body to move synchronously, and driving the magnetic part to rotate, thereby driving the transmission rod to rotate relative to the first tube body and the second tube body.

[0023] According to some embodiments of the present invention, the transmission assembly further includes:

[0024] A sampling fork, which is fixedly connected to the second tube body;

[0025] A pressure plate, which is slidably disposed on the sampling fork along the radial direction of the first tube body, and the pressure plate is provided with a rack;

[0026] A gear, which is fixedly connected to the transmission rod and meshes with the rack;

[0027] When the transmission rod rotates relative to the second tube, the pressure plate is adjusted relative to the sampling fork by the gear.

[0028] According to some embodiments of the present invention, the sampling fork is provided with an opening and closing guide portion, the opening and closing guide portion extends along the opening and closing direction of the pressure plate, and the pressure plate is rotatably provided with guide wheels on one or both sides of the opening and closing guide portion, the guide wheels abutting against the opening and closing guide portion.

[0029] According to some embodiments of the present invention, the magnetic rod picking device further includes a positioning mechanism, which is located on the moving path of the magnetic tube and is used to limit the moving distance of the magnetic tube.

[0030] According to some embodiments of this utility model, the positioning mechanism includes:

[0031] A positioning guide is fixedly connected to the first tube body and extends along the axial direction of the first tube body;

[0032] A positioning locking part is connected to the positioning guide part and can be adjusted and moved along the length direction of the positioning guide part;

[0033] The positioning part is rotatably connected to the positioning locking part, and the positioning part can enter or exit the movement path of the magnetic tube during rotation.

[0034] The vacuum device according to a second aspect of the present invention includes the magnetic rod plate-taking device of any of the above embodiments.

[0035] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and some of these additional aspects and advantages will become apparent from the description or may be learned by practice of the invention. Attached Figure Description

[0036] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0037] Figure 1 This is a schematic diagram of an overall axonometric structure of the present invention;

[0038] Figure 2 This is a schematic diagram illustrating the connection between a magnetotube and a transmission assembly.

[0039] Figure 3 A schematic diagram of one installation of a sampling fork;

[0040] Figure 4 A schematic diagram of an axonal structure for a sampling fork;

[0041] Figure 5 This is a schematic diagram of a sampling fork drive. Detailed Implementation

[0042] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0043] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0044] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0045] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0046] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0047] Reference Figures 1 to 5 This utility model provides a magnetic rod substrate picking device, including a first tube 100, a magnetic tube 200, a transmission assembly, and a locking assembly 300. The first tube 100 provides a mounting base, serving as the structural foundation of the magnetic rod substrate picking device. A first mounting cavity is provided inside the first tube 100, which can be formed through the internal cavity of the first tube 100. The magnetic tube 200 is sleeved on the outside of the first tube 100, capable of moving axially along the first tube 100 and rotating around the first tube 100, providing driving force. The transmission assembly passes through the first mounting cavity, with one end extending to the outside of the first mounting cavity, for conveying the substrate or target material under the drive of the magnetic tube 200. The locking component 300 is disposed on the first tube body 100. The locking component 300 has a first state and a second state. When the locking component 300 is in the first state, the locking component 300 is connected to the magnetic tube 200 in a fixed angle manner to restrict the magnetic tube 200 from rotating around the first tube body 100. When the locking component 300 is in the second state, the angle fixation between the locking component 300 and the magnetic tube 200 is released, so that the magnetic tube 200 can rotate around the first tube body 100.

[0048] During operation, the magnet tube 200 moves to drive the transmission assembly to move, thus entering and exiting the corresponding chambers. It rotates to drive the transmission assembly to perform clamping or releasing actions.

[0049] In this embodiment, the magnetic rod picking device moves or rotates the magnetic tube 200 to drive the transmission component to perform corresponding actions when picking up the magnetic tube. After clamping is completed, the locking component 300 is adjusted to the first state to fix the magnetic tube 200 so that it cannot rotate and can only move and adjust along the axial direction of the first tube 100. This can prevent the clamping from loosening and falling off, and solve the shortcomings of the traditional structure.

[0050] Reference Figures 1 to 2In some embodiments of this utility model, the locking assembly 300 includes a locking guide portion 301, a locking mounting portion 302, and a locking portion 303. Specifically, the locking guide portion 301 is fixedly disposed on the first tube body 100 and extends along the axial direction of the first tube body 100 to provide guidance in the axial direction of the first tube body 100. The locking mounting portion 302 is slidably mounted on the locking guide portion 301. At the same time, the locking mounting portion 302 is rotatably connected to the magnetic tube 200, so as to move synchronously with the magnetic tube 200 without affecting the rotation of the magnetic tube 200 around the first tube body 100. The locking part 303 passes through the locking mounting part 302. The locking part 303 has a locked state and an unlocked state. In the unlocked state, the locking part 303 remains separated from the magnetic tube 200. In the locked state, the locking part 303 abuts against the magnetic tube 200, providing rotational resistance to the magnetic tube 200 to limit its rotation. It can be understood that when the locking part 303 is in the locked state, that is, when the locking assembly 300 is in the first state, and when the locking part 303 is in the unlocked state, that is, when the locking assembly 300 is in the second state.

[0051] It is understood that in this embodiment, the locking assembly 300 and the locking mounting part 302 will move synchronously with the magnetic tube 200 moving along the axial direction of the first tube body 100. After the magnetic tube 200 rotates to control the transmission assembly to clamp the substrate or target, it is only necessary to adjust the locking part 303 to press against the magnetic tube 200 to restrict the rotation of the magnetic tube 200, thereby avoiding the problem of the transmission assembly loosening due to uncontrolled rotation of the magnetic tube 200.

[0052] In addition, the locking component 300 can also adopt other structural forms, as long as it can restrict the rotation of the magnet tube 200 after the transmission component is clamped.

[0053] In some embodiments of this utility model, the locking mounting part 302 is sleeved on the outside of the magnetic tube 200 with a bearing structure so as to move with the magnetic tube 200 and at the same time realize relative rotation between the two.

[0054] In some embodiments of this utility model, the locking part 303 is threadedly connected to the locking mounting part 302, and the state is switched by adjusting the thread. The locking part 303 can be set as a bolt to simplify the structural design.

[0055] Reference Figures 2 to 3In some embodiments of this utility model, the transmission assembly includes a transmission rod 102 and a second tube 101. The transmission rod 102 passes through a first mounting cavity and is provided with a magnetic part 1021, which matches the magnetic tube 200. The second tube 101 is sleeved on the transmission rod 102. The second tube 101 and the transmission rod 102 are axially fixed, and the second tube 101 and the first tube 100 are angularly fixed. The magnetic tube 200 can drive the magnetic part 1021 to move axially along the first tube 100 via magnetic force, thereby driving the transmission rod 102 and the second tube 101 to move synchronously, and can also drive the magnetic part 1021 to rotate, thereby driving the transmission rod 102 to rotate relative to the first tube 100 and the second tube 101.

[0056] Combination Figure 2 As shown, a bushing 1011 is provided at one end of the second tube 101, and the bushing 1011 slides in contact with the inner wall of the first tube 100. A bearing structure is provided between the bushing 1011 and the transmission rod 102 for connection and engagement, while the magnetic part 1021 is fixedly connected to the transmission rod 102. With the structural configuration of this embodiment, the magnetic tube 200 drives the magnetic part 1021 by magnetic force, causing the magnetic part 1021 to move or rotate, thereby causing the transmission rod 102 to move or rotate, and simultaneously driving the second tube 101 to move based on the bushing 1011.

[0057] The outer wall of the second tube 101 is provided with a non-cylindrical limiting wall, and the first tube 100 is provided with a limiting part that abuts against the limiting wall. The abutment between the limiting part and the limiting wall restricts the rotation of the second tube 101 relative to the first tube 100. This ensures that only the transmission rod 102 can rotate under the drive of the magnetic tube 200.

[0058] Reference Figures 3 to 5 In some embodiments of this utility model, the transmission assembly further includes a sampling fork 400, a pressure plate 401, and a gear 402. Specifically, the second tube 101 and the transmission rod 102 both extend from one end of the first tube 100, and the transmission rod 102 also extends to the outside of the second tube 101. The sampling fork 400 is fixedly connected to the end of the second tube 101 that extends to the outside of the first tube 100. The end of the sampling fork 400 remains vertical. The pressure plate 401 is slidably mounted on the sampling fork 400 along the radial direction of the first tube 100 to achieve opening and closing adjustment with the sampling fork 400, and the end of the pressure plate 401 also remains vertical to achieve horizontal opening and closing adjustment with the sampling fork 400. A rack 4012 is provided on the pressure plate 401, and the length direction of the rack 4012 is consistent with the sliding direction of the pressure plate 401. The gear 402 is fixedly mounted on the transmission rod 102 and meshes with the rack 4012.

[0059] During operation, the magnetic tube 200 moves axially along the first tube 100, causing the second tube 101 and the transmission rod 102 to move synchronously. This causes the sampling fork 400, the pressure plate 401, and the gear 402 to move synchronously. After moving into position, the magnetic tube 200 rotates, causing the transmission rod 102 to rotate. This causes the gear 402 to rotate and drive the rack 4012 to move, thereby causing the pressure plate 401 to open or close relative to the sampling fork 400. After the clamping is completed, the angle of the magnetic tube 200 is locked by the locking assembly 300 to prevent the magnetic tube 200 from rotating. This effectively ensures that the sampling fork 400 and the pressure plate 401 are clamped and fixed.

[0060] Combination Figure 5 In some embodiments of this utility model, the sampling fork 400 is provided with an opening and closing guide portion 4001, which extends along the opening and closing direction of the pressure plate 401. Meanwhile, guide wheels 4011 are rotatably mounted on both sides of the pressure plate 401 of the opening and closing guide portion 4001, with the guide wheels 4011 abutting against both sides of the opening and closing guide portion 4001 to ensure the stability and smoothness of the opening and closing adjustment process.

[0061] Combination Figure 5 The sampling fork 400 is provided with an opening and closing guide portion 4001 at both the upper and lower ends. The pressure plate 401 extends above and below the two opening and closing guide portions 4001, and guide wheels 4011 that abut against the two side walls of the opening and closing guide portions 4001 are provided through this extension portion.

[0062] The structural design of this embodiment can effectively ensure the installation stability of the pressure plate 401, thereby ensuring stability when clamping the substrate or target material.

[0063] In some embodiments of this utility model, the magnetic rod picking device further includes a positioning mechanism located on the moving path of the magnetic tube 200, which is used to limit the moving distance of the magnetic tube 200.

[0064] Combination Figure 1 Specifically, in some embodiments of this utility model, the positioning mechanism includes a positioning guide 500, a positioning locking part 501, and a positioning part 502. The positioning guide 500 is fixedly disposed on the outer side of the first tube 100 and extends along the axial direction of the first tube 100. The positioning locking part 501 is mounted on the positioning guide 500 and can be adjusted and moved along the length direction of the positioning guide 500. It is understood that the positioning locking part 501 is not freely adjustable, but its position is adjusted as needed to change the limiting distance on the magnetic tube 200. The positioning part 502 is rotatably connected to the positioning locking part 501, and the positioning part 502 can enter or exit the movement path of the magnetic tube 200 during rotation.

[0065] In application, the moving distance of the magnetic tube 200 can be determined according to the required distance for the sampling fork 400 to enter the corresponding chamber. Based on this distance, the position of the positioning locking part 501 on the positioning guide part 500 is adjusted, and the positioning part 502 is rotated to enter the moving path of the magnetic tube 200. When the magnetic tube 200 moves to abut against the positioning part 502, it is blocked and will not continue to advance, thus preventing the sampling fork 400 from touching other components in the chamber and causing damage. If necessary, the positioning part 502 can be rotated to exit the moving path of the magnetic tube 200, causing it to cross the distance limited by the positioning part 502.

[0066] The present invention also proposes a vacuum device, including the magnetic rod plate-taking device of any of the above embodiments.

[0067] It is understood that the vacuum equipment of this embodiment, by applying the above-mentioned magnetic rod plate-picking device, can effectively ensure the stability of clamping and avoid the situation of clamping loosening.

[0068] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A magnetic rod plate-picking device, characterized in that, include: A first tube body, wherein a first mounting cavity is provided inside the first tube body; A magnetic tube, which is sleeved on the outside of the first tube body and is capable of moving along the axial direction of the first tube body and rotating around the first tube body; A transmission assembly is disposed within the first mounting cavity, with one end of the transmission assembly extending to the outside of the first mounting cavity, for conveying a substrate or target material under the drive of the magnetic tube. A locking assembly is connected to the first tube body. The locking assembly has a first state and a second state. When the locking assembly is in the first state, the locking assembly is connected to the magnetic tube at a fixed angle to restrict the magnetic tube from rotating around the first tube body. When the locking assembly is in the second state, the angle fixation between the locking assembly and the magnetic tube is released, allowing the magnetic tube to rotate around the first tube body.

2. The magnetic rod plate-retrieving device according to claim 1, characterized in that, The locking assembly includes: A locking guide portion is fixedly connected to the first tube body and extends along the axial direction of the first tube body; A locking mounting part is slidably connected to the locking guide part and rotatably connected to the magnetic tube so as to move synchronously with the magnetic tube; The locking part is provided through the locking mounting part, and the locking part has a locked state that abuts against the magnetic tube and an unlocked state that is separated from the magnetic tube.

3. The magnetic rod plate-retrieving device according to claim 2, characterized in that, The locking mounting part is sleeved on the outside of the magnetic tube.

4. The magnetic rod plate-retrieving device according to claim 2, characterized in that, The locking part is threadedly connected to the locking mounting part, and the state is switched by adjusting the thread.

5. The magnetic rod plate-retrieving device according to claim 1, characterized in that, The transmission assembly includes: A transmission rod, which passes through the first mounting cavity, and is provided with a magnetic part; The second tube is sleeved on the transmission rod. The second tube is axially fixed to the transmission rod, and the second tube is angularly fixed to the first tube. The magnetic tube can drive the magnetic part to move along the axial direction of the first tube body through magnetic force, thereby driving the transmission rod and the second tube body to move synchronously, and driving the magnetic part to rotate, thereby driving the transmission rod to rotate relative to the first tube body and the second tube body.

6. The magnetic rod plate-retrieving device according to claim 5, characterized in that, The transmission assembly also includes: A sampling fork, which is fixedly connected to the second tube body; A pressure plate, which is slidably disposed on the sampling fork along the radial direction of the first tube body, and the pressure plate is provided with a rack; A gear, which is fixedly connected to the transmission rod and meshes with the rack; When the transmission rod rotates relative to the second tube, the pressure plate is adjusted relative to the sampling fork by the gear.

7. The magnetic rod plate-retrieving device according to claim 6, characterized in that, The sampling fork is provided with an opening and closing guide portion, which extends along the opening and closing direction of the pressure plate. The pressure plate is provided with guide wheels on one or both sides of the opening and closing guide portion, and the guide wheels abut against the opening and closing guide portion.

8. The magnetic rod plate-retrieving device according to claim 1, characterized in that, The magnetic rod plate-taking device further includes a positioning mechanism located on the moving path of the magnetic tube, which is used to limit the moving distance of the magnetic tube.

9. The magnetic rod plate-retrieving device according to claim 8, characterized in that, The positioning mechanism includes: A positioning guide is fixedly connected to the first tube body and extends along the axial direction of the first tube body; A positioning locking part is connected to the positioning guide part and can be adjusted and moved along the length direction of the positioning guide part; The positioning part is rotatably connected to the positioning locking part, and the positioning part can enter or exit the movement path of the magnetic tube during rotation.

10. A vacuum device, characterized in that, The magnetic rod plate-retrieving device includes any one of claims 1 to 9.

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