Reaction apparatus

Abstract

The application provides a reaction device, comprising: a bearing cavity provided with a reaction cavity, the bearing cavity is provided with openings communicated with the reaction cavity on both sides along a first direction, and the reaction cavity is used for accommodating a plurality of sheet materials; two furnace doors respectively located on both sides of the bearing cavity along the first direction and capable of respectively closing or opening the two openings; a plurality of heating assemblies arranged on the furnace doors and located on a side of the furnace doors facing the bearing cavity, the heating assemblies are used for generating heat to process the sheet materials in the reaction cavity; and a first heat preservation layer arranged on the furnace door and located on a side of the furnace door facing the other furnace door, the first heat preservation layer is used for blocking heat loss in the reaction cavity. Through the reaction device provided by the application, the sheet materials accommodated in the closed reaction cavity can be increased; thus, the number of the sheet materials completed after each processing can be increased, and the processing efficiency of the sheet materials can be improved.

Description

Technical Field

[0001] This application relates to the technical field of photovoltaic and semiconductor product manufacturing, and in particular to a reaction apparatus. Background Technology

[0002] In the production process of photovoltaic and semiconductor products, sheet materials need to be transferred to a reactor for heating, and reactive gases are output to the sheet materials to complete the coating process. For example, sheet materials can be coated using chemical vapor deposition (CVD) technology.

[0003] Currently, the heating structure and insulation components are all located on the cavity of the reactor, resulting in low utilization of the cavity space and a limited number of silicon wafers that can be accommodated in a cavity of the same size. Utility Model Content

[0004] In view of the above, it is necessary to provide a reaction apparatus to overcome the aforementioned deficiencies.

[0005] An embodiment of this application provides a reaction apparatus, comprising: a support cavity, wherein a reaction chamber is disposed within the support cavity, and openings communicating with the reaction chamber are formed on both sides of the support cavity along a first direction, the reaction chamber being used to accommodate multiple sheet materials; two furnace doors, which are respectively located on both sides of the support cavity along the first direction and are capable of closing or opening the two openings respectively; multiple heating components, disposed on the furnace doors and located on the side of the two furnace doors facing the support cavity, the heating components being used to generate heat to process the sheet materials in the reaction chamber; and a first insulation layer, disposed on the furnace door and located on the side of the furnace door facing the other furnace door, the first insulation layer being used to prevent heat loss from the reaction chamber.

[0006] Optionally, the heating assembly includes: a mounting tube disposed on the side of the furnace door facing the supporting cavity; and a heating wire housed within the mounting tube, with an insulating layer disposed on the outside of the heating wire, the heating wire being used to generate heat to heat the reaction chamber after being energized.

[0007] Optionally, in each heating assembly, there are multiple heating wires, each heating wire includes a heating part and a lead part. The heating part is spiral-shaped, and an insulating layer is provided on the outer side of both the heating part and the lead part. The lead part is connected to the heating part. The multiple heating parts are arranged along a second direction, and the multiple lead parts extend along the second direction to one side of the furnace door. At least some of the lead parts penetrate the heating parts along the second direction. The second direction is perpendicular to the first direction.

[0008] Optionally, the heating assembly further includes an insulating tube housed within a mounting tube, and a heating wire housed within the insulating tube.

[0009] Optionally, the reaction apparatus further includes: multiple carriers, all located within the reaction chamber, supported by the carrier chamber, each carrier having multiple slots for inserting multiple sheet materials, the multiple carriers being distributed along at least one of a first direction, a second direction, and a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other.

[0010] Optionally, the reaction apparatus further includes: a first moving mechanism, which is disposed on the side of the bearing cavity in the third direction, and is used to drive the bearing cavity to move, so that the bearing cavity moves into or out of the space between the two furnace doors, wherein the third direction is perpendicular to the first direction.

[0011] Optionally, the reaction apparatus further includes a second moving mechanism connected to the two furnace doors, which drives the two furnace doors to move so that the two furnace doors move closer to or further apart from each other.

[0012] Optionally, the supporting cavity is provided with a second heat insulation layer, which is located outside the reaction cavity and is used to block the loss of heat in the reaction cavity from both sides of the supporting cavity in the second direction and the third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other.

[0013] Optionally, multiple electrode rods are provided on the side of each furnace door facing the other furnace door. The electrode rods are used to apply an electric field to the reaction chamber to process sheet materials.

[0014] Optionally, one furnace door is equipped with an inlet pipe and the other furnace door is equipped with an exhaust pipe. The inlet pipe is used to transfer the reaction gas into the reaction chamber, and the exhaust pipe is used to discharge the gas from the reaction chamber.

[0015] The reaction apparatus provided in this application allows two furnace doors to close two openings from both sides, enabling the heating components on the two furnace doors to approach the sheet material inside the reaction chamber while simultaneously sealing the reaction chamber. Compared to related methods where the heating structure and insulation components are both located on the inner wall of the chamber, in this embodiment, the heating components for heating the sheet material and the first insulation layer for reducing heat loss are both located on the furnace doors. This reduces the space occupied by the heating components and the first insulation layer within the reaction chamber, increasing the amount of sheet material that can be accommodated within the sealed reaction chamber. Thus, after each sealing of the reaction chamber, the number of sheet materials that can be processed during the coating process increases, improving the efficiency of sheet material processing and increasing the amount of sheet material processed per cycle. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the reaction apparatus in an embodiment of this application.

[0017] Figure 2 This is an anatomical diagram of the furnace door and heating assembly in an embodiment of this application.

[0018] Figure 3 yes Figure 1 Enlarged view of section III.

[0019] Figure 4 yes Figure 1 Enlarged view of section IV in the middle.

[0020] Figure 5 yes Figure 2 A magnified view of the middle V section.

[0021] Figure 6 yes Figure 2 Enlarged view of section VI.

[0022] Explanation of key component symbols:

[0023] 100. Reaction apparatus; 101. Supporting mechanism; 102. First moving mechanism; 103. Processing mechanism; 104. Second moving mechanism; 10. Supporting cavity; 11. Reaction chamber; 12. Opening; 13. Second insulation layer; 20. Supporting component; 21. Slot; 30. Furnace door; 31. Storage space; 32. First insulation layer; 33. Electrode rod; 34. Air inlet pipe; 35. Exhaust pipe; 40. Heating assembly; 41. Mounting pipe; 42. Hot wire; 421. Heating element; 422. Lead wire; 43. Insulating tube; 200. Sheet material. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments.

[0025] The term "multiple" in this application refers to two or more. Furthermore, it should be understood that the terms "first," "second," etc., used in the description of this application are used only for descriptive purposes and should not be construed as indicating or implying relative importance, nor as indicating or implying order.

[0026] In the description of the embodiments in this application, the words "exemplary" or "for example" are used to indicate that they are examples, illustrations, or descriptions. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design options. Specifically, the use of the words "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0027] Please see Figure 1 and Figure 2 , Figure 1and Figure 2 A reaction apparatus 100 provided in this application is shown.

[0028] It is understood that the reaction device 100 can accommodate multiple sheet materials 200 and perform coating processing on the multiple sheet materials 200.

[0029] In the embodiments of this application, the type of sheet material 200 is not specifically limited. For example, sheet material 200 may be, but is not limited to, silicon wafers, silicon carbide wafers, or wafers.

[0030] In the embodiments of this application, the method of coating the sheet material 200 is not specifically limited. For example, the reaction device 100 can perform coating processing on the sheet material 200 using techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD).

[0031] For example, multiple sheet materials 200 can be horizontally placed within the reaction apparatus 100 and coated using plasma-enhanced chemical vapor deposition (PECVD). During the coating process, the reaction apparatus 100 needs to heat the sheet materials 200, apply a radio frequency electric field, and use a reactive gas. The heating temperature of the sheet materials 200, the electrical parameters of the applied radio frequency electric field, and the type of reactive gas are generally accepted information in the relevant field and will not be elaborated further here.

[0032] In embodiments of this application, the width, length, and height directions of the reaction device 100 can be defined as a first direction, a second direction, and a third direction, respectively. For example, the first direction could be... Figure 1 and Figure 2 The X direction and its opposite direction are shown. The second direction can be... Figure 2 The Y-direction and its opposite direction are shown. The third direction can be... Figure 1 and Figure 2 The Z direction and its opposite direction are shown.

[0033] Please refer to the following: Figure 3 and Figure 4 In one embodiment, the reaction device 100 may include a support mechanism 101 and a first moving mechanism 102.

[0034] The support mechanism 101 may include a support cavity 10 and multiple support members 20. The support cavity 10 has a rectangular annular cross-section. A reaction chamber 11 is formed in the center of the support cavity 10, and openings 12 are formed on both sides of the support cavity 10 in a first direction, both openings 12 communicating with the reaction chamber 11. Multiple support members 20 can be housed within the reaction chamber 11 and are all kept upright. Each support member 20 has multiple slots 21, which can be spaced apart along a third direction. Each slot 21 can accommodate a horizontally placed sheet material 200. The multiple support members 20 can be arranged along at least one of the second, first, and third directions and can be relatively fixed to the support cavity 10.

[0035] The first moving mechanism 102 can be fixedly installed on the third-direction side of the bearing mechanism 101. The first moving mechanism 102 can drive the bearing mechanism 101 to move in the second direction and the first direction, so that the bearing cavity 10, the bearing member 20 in the reaction cavity 11 and the sheet material 200 carried by the bearing member 20 move synchronously.

[0036] In the embodiments of this application, the fixing method for fixed installation and fixed connection is not specifically limited. For example, the fixing method may include, but is not limited to, welding fixing, bolt fixing, screw fixing and integral molding fixing.

[0037] In the embodiments of this application, it can be defined that when the height direction of an element coincides with a third direction, the element is set upright.

[0038] It is understood that the carrier 20 can be a quartz boat or a graphite boat for carrying the sheet material 200. Multiple carriers 20 can be stacked along a third direction and can be arranged adjacent to each other in the reaction chamber 11 along the second direction and the first direction.

[0039] In the embodiments of this application, the specific method of fixing the multiple carriers 20 relative to the carrier cavity 10 is not limited.

[0040] In some cases, multiple carriers 20 can be arranged along a second direction, a first direction, and a third direction. The bottom of the reaction chamber 11 can support all the carriers 20 located at the bottom, and the top of each carrier 20 can support another carrier 20. The two side walls of the reaction chamber 11 in the second direction can abut against all the carriers 20 located on the outer side in the second direction. Combined with the abutment between adjacent carriers 20 in the second direction, the two side walls of the reaction chamber 11 in the second direction can clamp all the carriers 20. In this way, the relative fixation of multiple carriers 20 with the carrier chamber 10 can be achieved.

[0041] In other cases, a plug-in positioning structure that restricts the relative movement between the carrier 20 and the adjacent carrier 20 can be provided, and a plug-in positioning structure that restricts the relative movement between the carrier 20 and the inner wall of the reaction chamber 11 can be provided, thereby achieving relative fixation between multiple carriers 20 and the carrier cavity 10.

[0042] It is understood that since multiple carriers 20 are fixed inside the reaction chamber 11, when loading and unloading sheet materials 200, it is not necessary to move the carriers 20 into or out of the reaction chamber 11. Instead, multiple sheet materials 200 need to be grasped and moved into or out of the reaction chamber 11. In this way, the process of moving the carriers 20 into and out of the reaction chamber 11 can be saved, and the collection of processed sheet materials 200 and the replenishment of sheet materials 200 to be processed can be directly realized, thereby improving the processing efficiency of sheet materials 200.

[0043] In the embodiments of this application, the type of the first moving mechanism 102 is not specifically limited. For example, the first moving mechanism 102 can be fixedly installed at the bottom of the bearing cavity 10, and the moving mechanism can be a wheeled or tracked mechanism that can travel in multiple directions on the ground. For example, the first moving mechanism 102 can be an Automated Guided Vehicle (AGV).

[0044] In this embodiment, the reaction device 100 may further include a processing mechanism 103 and a second moving mechanism 104.

[0045] The processing mechanism 103 may include two furnace doors 30 and multiple heating components 40. The two furnace doors 30 may be symmetrically arranged along a first direction. A receiving space 31 is formed between the two furnace doors 30, which can accommodate the supporting cavity 10, and the two furnace doors 30 can respectively cover and close two openings 12. Each furnace door 30 has a rectangular cross-section and is erected vertically. Multiple heating components 40 are respectively fixedly installed on the opposite side of the two furnace doors 30. On each furnace door 30, there are multiple heating components 40, and the multiple heating components 40 are spaced apart along a third direction. Each heating component 40 can generate heat after being powered on, thereby heating the storage space 31. When the bearing cavity 10 is located between the two furnace doors 30 and the two furnace doors 30 close the two openings 12, the reaction cavity 11 becomes a sealed space. At this time, multiple heating components 40 can heat the reaction cavity 11, thereby raising the temperature of the sheet material 200 in the reaction cavity 11 and enabling the sheet material 200 to undergo coating processing.

[0046] The second moving mechanism 104 can be fixedly installed on the two furnace doors 30. The second moving mechanism 104 can drive the two furnace doors 30 to move closer and further apart in the first direction. Initially, the distance between the two furnace doors 30 in the first direction can be greater than the width of the bearing cavity 10 in the first direction. When the bearing cavity 10 carrying the sheet material 200 to be processed moves into the storage space 31, the second moving mechanism 104 can drive the two furnace doors 30 to move closer together, so that the two furnace doors 30 close the two openings 12, making the reaction cavity 11 a sealed space, and then the sheet material 200 in the reaction cavity 11 can be processed; after the processing of the sheet material 200 is completed, the second moving mechanism 104 can drive the two furnace doors 30 to move further apart, so that the furnace doors 30 are separated from the bearing cavity 10, so that the bearing cavity 10 can leave from the storage space 31.

[0047] A first insulation layer 32 can be fixedly installed on the side of each furnace door 30 facing the other furnace door 30. When the two furnace doors 30 close the two openings 12, the first insulation layer 32 on the two furnace doors 30 can block heat from both sides in the first direction, reduce the loss of heat in the reaction chamber 11 when the sheet material 200 is processed, and improve the stability and reliability of the reaction device 100 in processing the sheet material 200.

[0048] In some cases, the first insulation layer 32 may form a sidewall of the furnace door 30 facing the supporting cavity 10. In other cases, the first insulation layer 32 may be located between the two sidewalls of the furnace door 30 in the first direction. The embodiments of this application are not limited in this respect.

[0049] In some cases, the heating component 40 is disposed on the furnace door 30 and located on the side of the first insulation layer 32 facing the supporting cavity 10. In other cases, the first insulation layer 32 is disposed on the furnace door 30, and the first insulation layer 32 has a mounting groove, in which the heating component 40 is disposed. The embodiments of this application are not limited in this respect.

[0050] In the embodiments of this application, the number of second moving mechanisms 104 is not specifically limited. For example, the number of second moving mechanisms 104 may be one, which may be a linear drive mechanism with two movers, and the second moving mechanism 104 may be located on one side of the two furnace doors 30 in a third direction. The two movers of the second moving mechanism 104 may move closer to or further away from each other along the first direction. Alternatively, the number of second moving mechanisms 104 may be two, which may be fixedly installed on one side of the two furnace doors 30 respectively. Each second moving mechanism 104 may drive the corresponding furnace door 30 to move in the first direction, allowing the two furnace doors 30 to move closer to or further away from each other.

[0051] In the embodiments of this application, the type of the second moving mechanism 104 is not specifically limited. For example, the second moving mechanism 104 may be, but is not limited to, a linear motor, a cylinder, a hydraulic cylinder, or an automated guided vehicle.

[0052] It is understood that multiple support members 20 can be arranged in the reaction chamber 11 along the first, second, and third directions, and each support member 20 can carry multiple sheet materials. Two furnace doors 30 with rectangular cross-sections can approach the support chamber 10 from both sides in the first direction and close the two openings 12, so that the heating components 40 on the two furnace doors 30 approach the sheet materials 200 in the reaction chamber 11 while closing the reaction chamber 11, thus completing the assembly and closure of the reaction device 100. Compared with the method in related fields where the heating structure and heat insulation components are set on the inner wall of the cavity, in the embodiment of this application, the heating components 40 for heating the sheet materials 200 and the first heat insulation layer 32 for reducing heat loss are both set on the furnace door 30, which reduces the occupation of the heating components 40 and the first heat insulation layer 32 on the reaction chamber 11, increases the number of support members 20 that can be accommodated in the closed reaction chamber 11, and thus increases the amount of sheet materials 200 that can be accommodated in the closed reaction chamber 11. Thus, after each reaction chamber 11 is closed, the number of sheet materials 200 processed by the reaction device 100 during the coating process can be increased, thereby increasing the number of sheet materials 200 processed after each processing and improving the processing efficiency of sheet materials 200.

[0053] In some embodiments, a second insulation layer 13 may be fixedly installed in the support cavity 10, and the second insulation layer 13 may be located outside the reaction cavity 11. The second insulation layer 13 may extend along the direction surrounding the reaction cavity 11, and may block heat from both sides in the second direction and both sides in the third direction, thereby reducing heat loss in the reaction cavity 11 during the processing of the sheet material 200 and improving the stability and reliability of the reaction device 100 in processing the sheet material 200.

[0054] In some cases, the second insulation layer 13 can form the inner wall of the reaction chamber 11. In other cases, the second insulation layer 13 and the inner wall of the reaction chamber 11 can be spaced apart, and the second insulation layer 13 and the outer peripheral wall of the supporting cavity 10 can be spaced apart. The embodiments of this application do not limit this.

[0055] In the embodiments of this application, the materials of the second insulation layer 13 and the first insulation layer 32 are not specifically limited. For example, the materials of the second insulation layer 13 and the first insulation layer 32 can be, but are not limited to, aluminum silicate.

[0056] In some embodiments, multiple electrode rods 33 may be fixedly installed on the side of each furnace door 30 facing the other furnace door 30, and each electrode rod 33 may protrude from one side of the furnace door 30 along a first direction. When the two furnace doors 30 close the two openings 12, the electrode rods 33 on the two furnace doors 30 may extend into the reaction chamber 11. All of the multiple electrode rods 33 may apply a radio frequency electric field to the reaction chamber 11.

[0057] Of the two furnace doors 30, one furnace door 30 has multiple air inlet pipes 34 that can be fixedly connected to the furnace door 30. When the furnace door 30 closes the opening 12, the air inlet pipes 34 can communicate with the reaction chamber 11 and can introduce reaction gas into the reaction chamber 11. The other furnace door 30 has multiple exhaust pipes 35 that can be fixedly connected to the furnace door 30. When the furnace door 30 closes the opening 12, the exhaust pipes 35 can communicate with the reaction chamber 11 and can allow the gas generated in the reaction chamber 11 after processing the sheet material 200 to be discharged from the reaction chamber 11 through the exhaust pipes 35.

[0058] It is understood that by applying a radio frequency electric field, supplementing the reaction gas, and heating the reaction chamber 11, the sheet material 200 in the reaction chamber 11 can be coated by chemical vapor deposition. The exhaust pipe 35 can discharge the gas generated by the chemical vapor deposition process from the reaction chamber 11, thereby increasing the concentration of the reaction gas in the reaction chamber 11 and improving the processing efficiency of the sheet material 200.

[0059] It is understandable that multiple electrode rods 33 can be arranged at intervals along the third direction and the second direction on each furnace door 30.

[0060] It is understood that multiple air inlet pipes 34 can be spaced apart along the second and third directions on the corresponding furnace door 30. These multiple air inlet pipes 34 can be connected to a gas source mechanism (not shown) and a gas pump (not shown). The gas source mechanism can store or generate reaction gas, and the gas pump can drive the reaction gas through the air inlet pipes 34 into the reaction chamber 11. The air inlet pipes 34 can be connected to the gas source mechanism and the gas pump via pipelines, and valves can be installed in these pipelines. The valves can regulate the opening and closing of the channels from the gas source mechanism to the multiple air inlet pipes 34, and can control the opening degree of the channels. Operators can control whether reaction gas flows into the reaction chamber 11 and adjust the flow rate of reaction gas into the reaction chamber 11 by operating the valves.

[0061] The principles governing the opening and closing of the valve control channel, as well as the control channel opening degree, are common principles in the relevant fields and will not be elaborated here.

[0062] It is understood that multiple exhaust pipes 35 can be spaced apart along the second and third directions on the corresponding furnace door 30. The multiple exhaust pipes 35 can be connected to a gas pump, which can drive the reaction gas to move out of the reaction chamber 11 through the exhaust pipes 35. The exhaust pipes 35 and the gas pump can be connected and communicated through pipelines, and valves can be installed in the pipelines. The valves can adjust the opening and closing of the multiple exhaust pipes 35 and control the opening degree of the exhaust pipes 35.

[0063] In some embodiments, a pneumatic control assembly (not shown) may be fixedly installed on one side of each furnace door 30 in the second direction. The pneumatic control assembly may include a pneumatic control cabinet, an air pump connected to an exhaust pipe 35 or an inlet pipe 34, and a controller capable of controlling the operation of valves connected to the exhaust pipe 35 or the inlet pipe 34. The pneumatic control cabinet may be fixedly installed on the furnace door 30 and may be located on the first side of the furnace door 30 in the second direction. Both the air pump and the controller may be fixedly installed in the pneumatic control cabinet.

[0064] It is understandable that setting the gas control component on one side in the second direction can improve the space utilization of the side wall of the furnace door 30, and can reduce the probability of the gas control component being hit when the furnace door 30 moves in the first direction, thereby increasing the service life of the gas control component.

[0065] It is understood that in the second direction, there may be a first side and a second side that are set opposite to each other, the first side of the storage space 31 and the first side of the furnace door 30 are the same side, and the second side of the storage space 31 and the second side of the furnace door 30 are the same side.

[0066] The supporting cavity 10 can enter the storage space 31 from the first side of the storage space 31. Then, the two furnace doors 30 can move closer to each other to close the two openings 12 so that the reaction chamber 11 is closed. The reaction device 100 can process the sheet material 200 in the reaction chamber 11. After the processing is completed, the two furnace doors 30 move away from each other, and the supporting cavity 10 can move along the second direction and be removed from the second side of the storage space 31.

[0067] Please refer to the following: Figure 5 and Figure 6 In some embodiments, each heating assembly 40 may include a mounting tube 41 and a heating wire 42. The mounting tube 41 may extend in a second direction and may be fixedly mounted on the side of the furnace door 30 facing the other furnace door 30 in a first direction. The heating wire 42 may be housed within the mounting tube 41. The heating wire 42 may generate heat when energized to heat the reaction chamber 11. An insulating layer may be fixedly connected to the outside of each heating wire 42, which may cover the heating wire 42 to prevent short circuits.

[0068] Each mounting tube 41 may include multiple heating wires 42, and each heating wire 42 may include a heating element 421 and a lead wire 422. Both the heating element 421 and the lead wire 422 are covered with an insulating layer. The multiple heating elements 421 may be arranged along a second direction. Each lead wire 422 may be fixedly connected to a corresponding heating element 421, and the multiple lead wires 422 may extend along the second direction to the same side of the furnace door 30 in the second direction. Each lead wire 422 may be electrically connected to a power source (not shown), thereby transmitting current to the heating element 421, enabling the heating element 421 to heat the reaction chamber 11. Each heating wire 42 can be connected to current through its lead wire 422, meaning that each heating wire 42 can operate independently. Thus, the hot wires 42 located at different positions in the second direction and / or the third direction can heat the corresponding space in the reaction chamber 11, thereby forming multiple hot fields arranged along the second direction and / or the third direction in the reaction chamber 11; all the hot wires 42 corresponding to each hot field can be connected to the same power source and work synchronously after the current is applied.

[0069] It is understandable that within the reaction chamber 11, the closer the location is to the inner wall of the reaction chamber 11, the greater the probability of heat loss. Therefore, the heating wires 42 corresponding to different thermal fields need to operate at different power levels to ensure that the temperature at various points within the reaction chamber 11 is within the same preset range. This preset range can be the temperature required for the sheet material 200 to undergo coating processing. Therefore, by independently operating multiple heating wires 42, the temperature difference between multiple thermal fields can be reduced, thereby improving the consistency of the reaction device 100 in processing the sheet material 200.

[0070] It is understood that the heating section of each heating wire 42 can be spiral-shaped, and the lead portion 422 of each heating wire 42 can pass through the space surrounded by the heating section in the second direction. Furthermore, a portion of the lead portion 422 can pass through the spiral portions of other adjacent heating wires 42 in the second direction, extending to one side of the furnace door 30 in the second direction. The insulating layer provided on the heating wire 42 can achieve insulation between multiple adjacent heating wires 42, preventing short circuits caused by mutual contact between the heating wires 42, thereby improving the reliability and service life of the heating assembly 40.

[0071] It is understood that the insulating layer can be coated onto the outside of the hot wire 42 by casting a slurry. In the embodiments of this application, the material of the insulating layer is not specifically limited. For example, the material of the insulating layer can be, but is not limited to, ceramic or silicone.

[0072] In the embodiments of this application, the material of the mounting tube 41 is not specifically limited. For example, the material of the mounting tube 41 may be, but is not limited to, stainless steel.

[0073] In some cases, the mounting tube 41 can be fixedly mounted on the side wall of the furnace door 30 facing the reaction chamber 11 in the first direction. In other cases, the mounting tube 41 can be embedded in the side of the furnace door 30 facing the reaction chamber 11 in the second direction. The embodiments of this application are not limited in this respect.

[0074] It is understood that the first insulation layer 32 can be located on the side of the multiple mounting tubes 41 away from the reaction chamber 11 in the first direction, and can be spaced apart from the multiple mounting tubes 41.

[0075] In some embodiments, each heating assembly 40 may further include an insulating tube 43. The insulating tube 43 may be housed within the mounting tube 41, and the insulating tube 43 may house multiple heating wires 42, with multiple heating portions of the multiple heating wires 42 within the same insulating tube 43 arranged along a second direction. The insulating tube 43 can enhance the isolation between the heating wires 42 and the mounting tube 41, enhance the protection of the heating wires 42, and protect against short circuits of the heating wires 42.

[0076] In the embodiments of this application, the material of the insulating tube 43 is not specifically limited. For example, the material of the insulating tube 43 may be, but is not limited to, quartz or ceramic.

[0077] According to the embodiments of this application, when the sheet material 200 has been fed onto all the carrier members 20 in the carrier cavity 10, the first moving mechanism 102 can drive the carrier cavity 10 to move in the second direction, so that the carrier mechanism 101 enters the receiving space 31 from the first side. When the projection of the carrier mechanism 101 in the first direction coincides with the projection of the two furnace doors 30 in the first direction, the first moving mechanism 102 stops working. At this time, there is a gap between the two furnace doors 30 and the carrier cavity 10 in the first direction.

[0078] Then, the second moving mechanism 104 operates, bringing the two furnace doors 30 closer together and abutting against the supporting cavity 10. The two furnace doors 30 close the two openings 12, thereby sealing the reaction cavity 11. Then, the heating wires 42, electrode rods 33, and air pumps on the two furnace doors 30 begin to operate, raising the temperature of the reaction cavity 11 to the temperature required for processing the sheet material 200. A radio frequency electric field is applied inside the reaction cavity 11, causing the reaction gas to enter the reaction cavity 11 through the inlet pipe 34 and exit the reaction cavity 11 through the exhaust pipe 35. After processing of the sheet material 200 is completed, the second moving mechanism 104 operates to move the two furnace doors 30 away from the supporting cavity 10, and then the first moving mechanism 102 operates to move the supporting cavity 10 out of the storage space 31 from the second side. Then, the sheet material 200 that has been processed on the carrier cavity 10 can be cooled. The staff can collect the cooled sheet material 200 and replenish the sheet material 200 to be processed for each carrier 20. The carrier cavity 10 can be moved back into the storage space 31, and the reaction device 100 can continue to process the sheet material 200.

[0079] Thus, multiple support members 20 can be arranged in the reaction chamber 11 along the first, second, and third directions, and each support member 20 can carry multiple sheet materials. Two furnace doors 30 can close the two openings 12 from the first direction, allowing the heating components 40 on the two furnace doors 30 to approach the sheet materials 200 inside the reaction chamber 11 while simultaneously sealing the reaction chamber 11. Compared to methods in related fields where the heating structure and insulation components are both located on the inner wall of the cavity, in this embodiment, the heating components 40 for heating the sheet materials 200 and the first insulation layer 32 for reducing heat loss are both located on the furnace door 30. This reduces the occupancy of the heating components 40 and the first insulation layer 32 on the reaction chamber 11, increasing the number of support members 20 that can be accommodated in the sealed reaction chamber 11, thereby increasing the amount of sheet materials 200 that can be accommodated in the sealed reaction chamber 11. Thus, after each reaction chamber 11 is closed, the number of sheet materials 200 processed by the reaction device 100 during the coating process can be increased, thereby increasing the number of sheet materials 200 processed after each processing and improving the processing efficiency of sheet materials 200.

[0080] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments described above should be considered exemplary and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application.

Claims

1. A reaction apparatus, characterized in that, include: A support cavity is provided with a reaction chamber. The support cavity has openings on both sides along a first direction that communicate with the reaction chamber. The reaction chamber is used to hold multiple sheet materials. Two furnace doors are located on both sides of the bearing cavity along the first direction, and are capable of closing or opening the two openings respectively; Multiple heating components are disposed at the furnace door and located on one side of the two furnace doors facing the bearing cavity. The heating components are used to generate heat to process the sheet material in the reaction chamber. A first insulation layer is disposed on the furnace door and located on the side of the furnace door facing the other furnace door. The first insulation layer is used to prevent the loss of heat in the reaction chamber.

2. The reaction apparatus as described in claim 1, characterized in that, The heating component includes: The mounting pipe is disposed on the side of the furnace door facing the bearing cavity; A hot wire is housed within the mounting tube, and an insulating layer is provided on the outside of the hot wire. The hot wire is used to generate heat after being energized to heat the reaction chamber.

3. The reaction apparatus as described in claim 2, characterized in that, In each of the heating components, there are multiple heating wires, each heating wire includes a heating part and a lead part, the heating part is spiral, and an insulating layer is provided on the outer side of both the heating part and the lead part, and the lead part is connected to the heating part; The plurality of heating elements are arranged along the second direction, and the plurality of lead wires extend along the second direction to one side of the furnace door, with at least a portion of the lead wires penetrating the heating elements along the second direction; The second direction is perpendicular to the first direction.

4. The reaction apparatus as described in claim 2, characterized in that, The heating assembly also includes: An insulating tube is housed within the mounting tube, and the heating wire is housed within the insulating tube.

5. The reaction apparatus as described in claim 1, characterized in that, The reaction apparatus further includes: Multiple carriers are located within the reaction chamber and supported by the carrier cavity. Each carrier has multiple slots for inserting multiple sheet materials. The multiple carriers are distributed along at least one of the first direction, the second direction, and the third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other.

6. The reaction apparatus as described in claim 1, characterized in that, The reaction apparatus further includes: A first moving mechanism is disposed on one side of the bearing cavity in the third direction. The first moving mechanism is used to drive the bearing cavity to move, so that the bearing cavity moves into or out of the space between the two furnace doors, wherein the third direction is perpendicular to the first direction.

7. The reaction apparatus as described in claim 1, characterized in that, The reaction apparatus further includes: A second moving mechanism is connected to the two furnace doors and is used to drive the two furnace doors to move so that the two furnace doors move closer to or further apart from each other.

8. The reaction apparatus as described in claim 1, characterized in that, The supporting cavity is provided with a second heat insulation layer, which is located outside the reaction cavity and is used to block the loss of heat in the reaction cavity from both sides of the supporting cavity in the second direction and the third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other.

9. The reaction apparatus as described in claim 1, characterized in that, Each of the furnace doors is provided with multiple electrode rods on one side facing the other furnace door. The electrode rods are used to apply an electric field to the reaction chamber to process the sheet material.

10. The reaction apparatus as claimed in claim 1, characterized in that, One of the furnace doors is equipped with an inlet pipe, and the other furnace door is equipped with an exhaust pipe. The inlet pipe is used to transmit reaction gas to the reaction chamber, and the exhaust pipe is used to discharge the gas in the reaction chamber.

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