A coated carrier and substrate transport device
By setting movable support components and track structures on the coating carrier, the problem of adapting and fixing printed patterns on existing coating carriers is solved, achieving adaptability to different battery patterns, avoiding black spot problems, and improving the applicable scenarios.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- XUANCHENG HUASHENG PHOTOVOLTAIC TECH CO LTD
- Filing Date
- 2025-06-06
- Publication Date
- 2026-06-16
AI Technical Summary
Existing coating substrates can only accommodate fixed printed patterns and cannot adapt to changes in different battery patterns, resulting in black spots after the printed patterns are changed.
A coating carrier plate was designed, and the support member can move along a preset path on the carrier plate body. By setting the first and second tracks, the support member can adjust its position according to different battery patterns and PAD positions to adapt to different printed patterns.
It achieves the universality of coating substrates, can adapt to different battery patterns, avoids the black spot problem caused by changes in the position of the support point, and improves the applicable scenarios of coating.
Smart Images
Figure CN224362869U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor product process equipment technology, and more specifically, to a coating carrier and substrate transport device. Background Technology
[0002] In the PECVD (Plasma Enhanced Chemical Vapor Deposition) process, the deposition carrier plays a crucial role. It not only supports the silicon wafer, ensuring its flatness during deposition, but also affects the quality and uniformity of the deposition. Because PECVD deposition is a planar deposition method, to prevent the silicon wafer from bending at the carrier position due to its thinness, which could cause scratches and plating issues, the PECVD carrier has internal supports to hold the silicon wafer in place and prevent bending.
[0003] Because contact points on silicon wafers can cause film damage and black spots at those locations, these contact points are typically covered by placing them on the pads of the printed pattern. However, some existing coated substrates can only accommodate fixed printed patterns, limiting their applicability. Utility Model Content
[0004] The purpose of this utility model is to provide a coating carrier plate that can adapt to different printed patterns and has a wide range of applications.
[0005] The embodiments of this utility model can be implemented as follows:
[0006] In a first aspect, this utility model provides a coating carrier plate, comprising:
[0007] Carrier board body;
[0008] The support is mounted on the side of the carrier plate body used to mount the substrate. The support can move along a preset path on the carrier plate body. The support is used to support the substrate. The preset path is parallel to the mounting surface of the carrier plate body.
[0009] In an optional embodiment, a first track extending along a first direction is provided on the carrier plate body, a support member is connected to the first track, and the support member can move relative to the first track along the first direction, the first direction being parallel to the mounting surface.
[0010] In an optional embodiment, a second track extending along a second direction is provided on the carrier plate body. The second track is connected to the first track. A support member is installed on the second track. The second track can move relative to the first track along a first direction. The support member can move on the second track. The second direction forms an angle with the first direction and is parallel to the mounting surface.
[0011] In an optional implementation, there are two first tracks, which are arranged at intervals along the second direction, and the two ends of the second tracks are respectively connected to the two second tracks.
[0012] In an optional implementation, there are multiple second tracks, which are spaced apart from the first track along a first direction, and each second track has at least one support member.
[0013] In an optional implementation, the first direction is the length direction of the carrier plate body, and the second direction is the width direction of the carrier plate body.
[0014] Alternatively, the first direction is the width direction of the carrier plate body, and the second direction is the length direction of the carrier plate body.
[0015] In an optional implementation, the second track can be locked to or unlocked from the first track; and / or the support member can be locked to or unlocked from the second track.
[0016] In an optional implementation, the second track is detachably connected to the first track; and / or the support is detachably connected to the second track.
[0017] In an optional embodiment, the end of the support member away from the carrier plate body is an arc surface or a plane, and / or the support member is made of stainless steel, ceramic or Teflon material.
[0018] Secondly, this utility model provides a substrate transport device, including a coated carrier plate of any of the foregoing embodiments.
[0019] This utility model provides a coating carrier plate including a carrier plate body and a support member. The support member is mounted on the side of the carrier plate body used for mounting the substrate. The support member can move along a preset path on the carrier plate body to support the substrate. The preset path is parallel to the mounting surface of the carrier plate body. Operators can adjust the position of the support member on the carrier plate body according to different battery patterns and the positions of the corresponding battery pattern PADs, thereby adapting to different printed patterns and making it applicable to a wide range of scenarios. Attached Figure Description
[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0021] Figure 1 This is a schematic diagram of the structure of the coating carrier plate provided in this embodiment.
[0022] Icons: 1-Coated carrier plate; 100-Carrier plate body; 101-Mounting surface; 110-First track; 120-Second track; 200-Support component. Detailed Implementation
[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0025] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0026] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0027] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.
[0028] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.
[0029] It should be noted that the support points on the existing coating substrate are fixed. Once the battery pattern is changed, the position of the main grid PAD will change, causing the support points on the coating substrate to no longer be located on the PAD of the printed pattern. Once the silicon wafer is placed on the coating substrate, black spots will occur after coating and printing. Therefore, coating substrates with fixed support points are not suitable for scenarios after the printed pattern has been changed.
[0030] The following describes in detail, with reference to the accompanying drawings, the specific structure of a coating carrier plate provided by this utility model and the corresponding technical effects it brings.
[0031] Please refer to Figure 1 The present invention provides a coating carrier plate 1 comprising a carrier plate body 100 and a support member 200.
[0032] The support member 200 is installed on the side of the carrier plate body 100 used for mounting the substrate. The support member 200 can move along a preset path on the carrier plate body 100. The support member 200 is used to support the substrate. The preset path is parallel to the mounting surface 101 of the carrier plate body 100.
[0033] It should be noted that, in this embodiment, the support member 200 and the substrate can also be understood as the silicon wafer mentioned above, in relation to the fulcrum in the background art.
[0034] Understandably, the position of the main grid PAD may change in different types of battery patterns. In this embodiment, since the support member 200 can move along a preset path on the carrier plate body 100 to adjust the position of the support member 200 on the carrier plate body 100, the operator can adjust the position of the support member 200 on the carrier plate body 100 according to different battery patterns and the position of the corresponding battery pattern PAD, thereby adapting to different printed patterns and making it applicable to a wide range of scenarios.
[0035] Furthermore, since the preset path is parallel to the mounting surface 101 of the carrier plate body 100, that is, the moving direction of the support member 200 is parallel to the mounting surface 101 of the carrier plate body 100.
[0036] In detail, in this embodiment, a first track 110 extending along a first direction is provided on the carrier plate body 100, and the support member 200 is connected to the first track 110. The support member 200 can move relative to the first track 110 along the first direction. The first direction is parallel to the mounting surface 101. It can be understood that by setting the first track 110, the stability of the support member 200 moving on the carrier plate body 100 can be guaranteed.
[0037] Optionally, the first direction can be a straight line or a curved line. In this embodiment, the first direction is a straight line. It is understood that the movement of the support member 200 in a straight line can also improve the stability of the movement of the support member 200 relative to the first track 110 in the first direction.
[0038] Optionally, the first direction can be the length direction or the width direction of the carrier plate body 100, or other directions that form an angle with the length direction, or other straight directions that form an angle with the width direction.
[0039] To increase the range of movement of the support member 200 on the carrier plate body 100 to accommodate more battery patterns, a second track 120 extending along a second direction is provided on the carrier plate body 100. The second track 120 is connected to the first track 110. The support member 200 is mounted on the second track 120. The second track 120 can move relative to the first track 110 along a first direction. The support member 200 can move on the second track 120. The second direction forms an angle with the first direction and is parallel to the mounting surface 101.
[0040] Understandably, by setting the second track 120, the support member 200 can not only move relative to the first track 110 in the first direction along the second track 120, but also move along the second direction on the second track 120, thereby increasing the range of movement of the support member 200.
[0041] The second direction can be either a straight line or a curve. In this embodiment, the second direction is a straight line. It can be understood that the movement of the support member 200 in a straight line can also improve the stability of the movement of the support member 200 on the second track 120.
[0042] In this embodiment, there are two first tracks 110, which are arranged at intervals along the second direction. The two ends of the second track 120 are respectively connected to the two second tracks 120. It can be understood that the two first tracks 110 enable the second track 120 to move more stably relative to the first track 110 in the first direction.
[0043] Optionally, there are multiple second tracks 120, which are spaced apart from the first track 110 along the first direction. Each second track 120 has at least one support member 200. It is understood that since there are multiple second tracks 120 and each second track 120 has at least one support member 200, the support strength of the substrate can be improved. Thus, the weight of the substrate can be distributed on multiple support members 200 to reduce the support force of a single support member 200 on the substrate, thereby avoiding damage to the coating on the substrate due to excessive support force.
[0044] It should be noted that in this embodiment, "multiple" refers to two or more quantities.
[0045] In this embodiment, there are two second tracks 120, and each second track 120 is connected to two first tracks 110 at both ends.
[0046] Of course, in some other alternative embodiments, the number of second tracks 120 can also be 3, 4, 5, etc.
[0047] In this embodiment, the first direction is the length direction of the carrier plate body 100, and the second direction is the width direction of the carrier plate body 100. Therefore, the second track 120 can move along the length direction of the carrier plate body 100 on the first track 110, and the support member 200 can move along the width direction of the carrier plate on the second track 120.
[0048] Of course, in some other embodiments, the first direction may also be the width direction of the carrier plate body 100, and the second direction may be the length direction of the carrier plate body 100.
[0049] It should be noted that, in this embodiment, the two first tracks 110 are spaced apart on both sides of the carrier plate body 100 along the width direction of the carrier plate body 100.
[0050] Optionally, after the operator has adjusted the position of the support 200, in order to ensure that the support 200 does not easily move relative to the carrier plate body 100, the second track 120 can be locked with or unlocked from the first track 110. That is, when the second track 120 needs to move on the first track 110, the second track 120 can unlock from the first track 110, and when the second track 120 moves into place, the second track 120 can lock with the first track 110, thereby ensuring the relative position of the second track 120 and the first track 110.
[0051] Optionally, the support member 200 can be locked or unlocked with the second track 120. Therefore, when the support member 200 needs to move on the second track 120, the lock between the support member 200 and the second track 120 can be released to allow the support member 200 to move on the second track 120. When the support member 200 moves into position on the second track 120, the support member 200 can be locked with the second track 120 to ensure the relative position of the support member 200 and the first track 110.
[0052] Optionally, the first track 110 may have a plurality of first mating holes arranged at intervals along the first direction, and the two ends of the second track 120 may have first mounting holes corresponding to the first mating holes on the first track 110. When the second guide rail moves into position relative to the first track 110, the operator can insert fasteners into the first mating holes and the first mounting holes to lock the first track 110 and the second track 120. When the second track 120 needs to move relative to the first track 110, the corresponding fasteners can be removed. The fasteners can be fastening pins or threaded fasteners.
[0053] Of course, in some other embodiments, the first track 110 may also be provided with a plurality of first mating parts arranged at intervals along the first direction, and the two ends of the second track 120 are provided with first connecting parts. The first connecting parts and the first mating parts may be snap-fit or threaded connection to achieve locking of the first track 110 and the second track 120.
[0054] Similarly, the second track 120 is provided with a plurality of spaced second mating holes along its extension direction, and the support member 200 is provided with mounting holes corresponding to the second mating holes. When the support member 200 moves into place relative to the second track 120, the operator can insert fasteners into the second mating holes and the second mounting holes to lock the support member 200 and the second track 120. When the support member 200 needs to move relative to the second track 120, the corresponding fasteners can be removed. The fasteners can be fastening pins or threaded fasteners.
[0055] To facilitate disassembly and assembly by operators, in some optional embodiments, the second track 120 is detachably connected to the first track 110, and the support member 200 is detachably connected to the second track 120, so as to facilitate the replacement of different second tracks 120 and support members 200. Of course, in some embodiments, the first track 110 can also be detachably connected to the carrier plate body 100.
[0056] Of course, in some other embodiments, the first track 110 can also be welded to the carrier plate body 100 to ensure the connection strength between the first track 110 and the carrier plate body 100.
[0057] Optionally, the end of the support member 200 away from the carrier plate body 100 is an arc surface or a flat surface, thereby reducing the possibility of the support member 200 damaging the coating on the substrate.
[0058] Optionally, the support 200 is made of stainless steel, ceramic or Teflon material. It is understood that stainless steel, ceramic or Teflon material has good high temperature resistance and corrosion resistance, and has a certain degree of elasticity to adapt to the substrate's process environment and reduce the possibility of the support 200 damaging the substrate.
[0059] This utility model embodiment also provides a substrate transport device, including the above-mentioned coating carrier plate 1. It can be understood that since the substrate transport device includes the above-mentioned coating carrier plate 1, the substrate transport device also has the same beneficial effects as the coating carrier plate 1. The technical effects of the substrate transport device will not be described in detail here.
[0060] In summary, the coating carrier 1 provided in this embodiment of the present invention includes a carrier body 100 and a support member 200. The support member 200 is mounted on the side of the carrier body 100 used for mounting the substrate. The support member 200 can move along a preset path on the carrier body 100. The support member 200 is used to support the substrate, and the preset path is parallel to the mounting surface 101 of the carrier body 100. Operators can adjust the position of the support member 200 on the carrier body 100 according to different battery patterns and the positions of the corresponding battery pattern PADs, thereby adapting to different printing patterns and making it applicable to a wide range of scenarios.
[0061] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.
Claims
1. A coating carrier plate, characterized in that, include: Carrier board body (100); A support member (200) is mounted on the side of the carrier plate body (100) for mounting the substrate. The support member (200) can move along a preset path on the carrier plate body (100). The support member (200) is used to support the substrate. The preset path is parallel to the mounting surface (101) of the carrier plate body (100).
2. The coating carrier plate according to claim 1, characterized in that: The carrier plate body (100) is provided with a first track (110) extending along a first direction. The support member (200) is connected to the first track (110). The support member (200) can move relative to the first track (110) along the first direction. The first direction is parallel to the mounting surface (101).
3. The coating carrier plate according to claim 2, characterized in that: The carrier plate body (100) is provided with a second track (120) extending along a second direction. The second track (120) is connected to the first track (110). The support member (200) is installed on the second track (120). The second track (120) can move relative to the first track (110) along the first direction. The support member (200) can move on the second track (120). The second direction is at an angle to the first direction. The second direction is parallel to the mounting surface (101).
4. The coating carrier plate according to claim 3, characterized in that: There are two first tracks (110), and the two first tracks (110) are arranged at intervals along the second direction. The two ends of the second track (120) are respectively connected to the two second tracks (120).
5. The coating carrier plate according to claim 3, characterized in that: The number of the second track (120) is multiple, and the multiple second tracks (120) are spaced apart from the first track (110) along the first direction, and at least one support member (200) is provided on each second track (120).
6. The coating carrier plate according to claim 3, characterized in that: The first direction is the length direction of the carrier plate body (100), and the second direction is the width direction of the carrier plate body (100); Alternatively, the first direction is the width direction of the carrier plate body (100), and the second direction is the length direction of the carrier plate body (100).
7. The coating carrier plate according to claim 3, characterized in that: The second track (120) can be locked or unlocked with the first track (110); and / or the support (200) can be locked or unlocked with the second track (120).
8. The coating carrier plate according to claim 3, characterized in that: The second track (120) is detachably connected to the first track (110); and / or the support (200) is detachably connected to the second track (120).
9. The coating carrier plate according to claim 1, characterized in that: The end of the support member (200) away from the carrier plate body (100) is an arc surface or a plane, and / or the support member (200) is made of stainless steel, ceramic or Teflon material.
10. A substrate transport device, characterized in that, Includes the coating carrier plate according to any one of claims 1-9.