Measuring device based on line-spectroscopic confocal sensor

Abstract

The utility model discloses a measuring device based on line spectrum confocal sensor, including support base, auxiliary stabilizing mechanism, line spectrum confocal sensor module, bearing platform and adjusting platform, support base is placed stable through auxiliary stabilizing mechanism, and the top fixedly seted has support side plate, and the bearing platform horizontal fixed setting is on support side plate, and the top is connected with the movable platform that can move front and back and left and right through adjusting mechanism, line spectrum confocal sensor module sets up above support base, and movable platform is transparent, and the bearing platform central has the through -hole that coordinates line spectrum confocal sensor module work, and after work piece is put into movable platform, line spectrum confocal sensor module carries out thickness measurement work. The utility model discloses compared with prior art's advantage lies in: set movable platform that can move front and back and left and right, realize the continuous, stable movement in X Y direction, support full area automatic scanning, improve operating efficiency.

Description

Technical Field

[0001] This utility model relates to the field of line spectrum confocal sensor technology, specifically to a measurement device based on a line spectrum confocal sensor. Background Technology

[0002] With the increasing demand for non-contact high-precision measurement in fields such as precision manufacturing, microelectronics, optical components, and new energy batteries, line spectrum confocal sensors are widely used in online or offline detection of parameters such as surface morphology, thickness, step height, and flatness due to their advantages such as submicron resolution, strong resistance to ambient light interference, and applicability to transparent / reflective / multilayer materials.

[0003] Existing measurement devices based on line spectrum confocal sensors include a support and a line spectrum confocal sensor. The line spectrum confocal sensor can be directly mounted on the support for use. However, when it is necessary to scan the sample point by point, the position of the sample needs to be adjusted manually. This operation is cumbersome and inefficient, and it is difficult to meet the demand for efficient detection in modern intelligent manufacturing.

[0004] Therefore, a high-efficiency measurement device based on a line spectrum confocal sensor is needed. Utility Model Content

[0005] The technical problem to be solved by this invention is low efficiency, and a high-efficiency measurement device based on a line spectrum confocal sensor is provided.

[0006] To solve the above-mentioned technical problems, the technical solution provided by this utility model is: a measuring device based on a line spectrum confocal sensor, including a support base, an auxiliary stabilization mechanism, a line spectrum confocal sensor module, a load-bearing platform, and an adjustment platform;

[0007] After the support base is stabilized by the auxiliary stabilizing mechanism, a support side plate is fixedly installed on the top surface. After the load-bearing platform is horizontally fixed on the support side plate, a movable platform that can move forward, backward, left and right is connected to the top surface through an adjustment mechanism.

[0008] The line spectrum confocal sensor module is mounted above the support base. The moving platform is transparent, and a through hole is opened in the center of the load-bearing platform to work with the line spectrum confocal sensor module. After the workpiece is placed on the moving platform, the line spectrum confocal sensor module performs thickness measurement.

[0009] As an improvement, the line spectrum confocal sensor module includes a light source emitter and a spectral analysis receiver. The light source emitter is connected to the support side plate and is located above the moving platform. The spectral analysis receiver is fixedly installed on the top surface of the support base and located below the moving platform.

[0010] As an improvement, the auxiliary stabilizing mechanism includes a horizontal plate, a fastening screw, and a suction cup;

[0011] The horizontal plate is fixedly installed on the side of the support side plate away from the support base. After the fastening screw is threadedly connected to the horizontal plate, it extends to the bottom of the horizontal plate and is connected to a suction cup. A pair of fastening screws are mirrored. After the support base is placed stably, the two fastening screws are rotated to push the two suction cups to stick tightly to the mounting surface.

[0012] As an improvement, the adjustment mechanism includes a left-right adjustment mechanism and a front-back adjustment mechanism;

[0013] The left and right adjustment mechanism includes a left and right adjustment groove, a first hydraulic telescopic rod, and left and right sliders. The left and right adjustment groove is fixedly installed on the top surface of the support platform, and the left and right sliders are slidably installed inside. The left and right sliders slide left and right under the action of the first hydraulic telescopic rod, and the front and rear adjustment mechanism is fixedly installed on the left and right sliders.

[0014] As an improvement, the front and rear adjustment mechanism includes a front and rear adjustment groove, a front and rear slider, and a second hydraulic telescopic rod;

[0015] The front and rear adjustment grooves are fixedly installed on the left and right sliders and are perpendicular to the left and right adjustment grooves. After the front and rear sliders are slidably installed in the front and rear adjustment grooves, they are pushed forward and backward by the second hydraulic telescopic rod. The moving platform can be detachably installed on the front and rear sliders.

[0016] As an improvement, the bottom surface of the mobile platform is mirrored with a pair of L-shaped mounting plates. After the mobile platform is placed on the front and rear sliders by the two L-shaped mounting plates, the bolts pass through the preset mounting holes on the L-shaped mounting plates and engage with the preset threaded holes on the front and rear sliders for threaded connection.

[0017] The advantages of this utility model compared with the prior art are as follows:

[0018] 1. It adopts a combination structure of "support base + auxiliary stabilization mechanism", which actively adheres to the mounting surface through suction cups and works with a horizontal plate to achieve posture stability, effectively isolate external vibrations and ensure measurement accuracy;

[0019] 2. An orthogonal sliding platform system consisting of "left and right adjustment slots + front and rear adjustment slots" is set up, which is driven by hydraulic telescopic rods to realize continuous, stable and programmable movement of the mobile platform in the XY direction, support automatic scanning of the whole area, and improve operating efficiency;

[0020] 3. The mobile platform is connected to the front and rear sliders by an L-shaped mounting plate, which can be quickly disassembled for cleaning or replacement. Attached Figure Description

[0021] Figure 1 This is a first perspective view of the measuring device based on a line spectrum confocal sensor according to this utility model.

[0022] Figure 2 This is a second perspective view of the measuring device based on a line spectrum confocal sensor according to this utility model.

[0023] Figure 3 This is a disassembled view of the measuring device based on a line spectrum confocal sensor according to this utility model.

[0024] Figure 4 This is a perspective view of the moving platform of the measuring device based on a line spectrum confocal sensor according to this utility model.

[0025] As shown in the figure: 1. Support base; 2. Load-bearing platform; 3. Adjustment platform; 4. Support side plate; 5. Through hole; 6. Light source emitter; 7. Spectrum analysis receiver; 8. Horizontal plate; 9. Fastening screw; 10. Suction cup; 11. Left and right adjustment groove; 12. First hydraulic telescopic rod; 13. Left and right slider; 14. Front and rear adjustment groove; 15. Front and rear slider; 16. Second hydraulic telescopic rod; 17. L-shaped mounting plate; 18. Threaded hole; 19. Mounting hole. Detailed Implementation

[0026] In the description of this utility model, it should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Additionally, the term "comprising" and any variations thereof are intended to cover non-exclusive inclusion.

[0027] The present invention will now be described in further detail with reference to the accompanying drawings.

[0028] Example 1

[0029] Measurement device based on line spectrum confocal sensor, combined with attached Figures 1-3As shown, the system includes a support base 1, an auxiliary stabilization mechanism, a line spectrum confocal sensor module, a load-bearing platform 2, and an adjustment platform 3. After the support base 1 is stabilized by the auxiliary stabilization mechanism, a support side plate 4 is fixedly installed on its top surface. The load-bearing platform 2 is horizontally fixed on the support side plate 4, and a movable platform that can move forward, backward, left, and right is connected to its top surface through an adjustment mechanism. The adjustment mechanism includes a left-right adjustment mechanism and a front-back adjustment mechanism. The left-right adjustment mechanism includes a left-right adjustment groove 11, a first hydraulic telescopic rod 12, and left-right sliders 13. The left-right adjustment groove 11 is fixedly installed on the top surface of the load-bearing platform 2, and the left-right sliders 13 are slidably installed inside it. The left-right sliders 13 slide left and right under the action of the first hydraulic telescopic rod 12. The front-back adjustment mechanism is fixedly installed on the left-right sliders 13. The front-back adjustment mechanism includes a front-back adjustment groove 14, a front-back slider 15, and a second hydraulic telescopic rod 16. The front-back adjustment groove 14 is fixedly installed on the left-right sliders 13 and is perpendicular to the left-right adjustment groove 11. The front-back sliders 15 are slidably installed in the front-back adjustment groove 14 and are pushed forward and backward by the second hydraulic telescopic rod 16. The movable platform is detachably installed on the front-back sliders 15.

[0030] The first hydraulic telescopic rod 12 pushes the left and right sliders 13 to slide in the left and right adjustment grooves 11 to achieve X-direction movement. The second hydraulic telescopic rod 16 pushes the front and rear sliders 15 to slide in the front and rear adjustment grooves 14 to achieve Y-direction movement. The two work together to control the moving platform and the workpiece on it to move along a preset path (such as grid scanning) to complete the point-by-point measurement of the entire area.

[0031] The line spectrum confocal sensor module is mounted above the support base 1. The line spectrum confocal sensor module includes a light source emitter 6 and a spectral analysis receiver 7. After the light source emitter 6 is connected to the support side plate 4, it is located above the moving platform. The spectral analysis receiver 7 is fixedly mounted on the top surface of the support base 1 and located below the moving platform. The moving platform is transparent, and a through hole 5 is opened in the center of the load-bearing platform 2 to cooperate with the line spectrum confocal sensor module. After the workpiece is placed on the moving platform, the line spectrum confocal sensor module performs thickness measurement.

[0032] Place the workpiece to be measured stably on the surface of the transparent moving platform, ensuring that the workpiece is within the measurement area and avoiding obstruction of the central through hole 5. The line spectrum confocal sensor module is activated, and the upper light source emitter 6 emits broadband white light, which is focused by the dispersive lens and vertically illuminates the surface of the workpiece. The reflected light passes through the workpiece (if transparent) or is reflected from the surface and enters the lower spectral analysis receiver 7 through the bottom through hole 5. The receiver determines the focal position based on the spectral peak wavelength, thereby calculating the surface height or thickness.

[0033] Example 2

[0034] Based on Example 1, combined with Appendix Figure 4As shown, the auxiliary stabilization mechanism includes a horizontal plate 8, fastening screws 9, and suction cups 10. The horizontal plate 8 is fixedly installed on the side of the support side plate 4 away from the support base 1. After the fastening screws 9 are threadedly connected to the horizontal plate 8, they extend to the bottom of the horizontal plate 8 and are connected to the suction cups 10. A pair of fastening screws 9 are mirror images of each other. After the support base 1 is placed stably, the two fastening screws 9 are rotated to push the two suction cups 10 to stick tightly to the mounting surface, thereby improving the stability of use and improving the measurement accuracy.

[0035] The bottom surface of the mobile platform is mirrored with a pair of L-shaped mounting plates 17. After the mobile platform is placed on the front and rear sliders 15 by the two L-shaped mounting plates 17, the bolts pass through the preset mounting holes 19 on the L-shaped mounting plates 17 and engage with the preset threaded holes 18 on the front and rear sliders 15 for threaded connection. This facilitates the installation and disassembly of the mobile platform, thereby making it easier to inspect and maintain.

[0036] In the specific implementation of this utility model, the entire measuring device is first placed on the target mounting surface (such as a test bench or production line workbench), and the two fastening screws 9 are rotated to drive the suction cup 10 at the lower end to gradually move down until it is close to the table surface. The screws are then rotated to apply pressure, so that the suction cup 10 generates negative pressure adsorption force to firmly fix the device.

[0037] Place the workpiece to be measured (such as a glass cover, battery electrode, optical film, etc.) stably on the surface of the transparent moving platform, ensuring that the workpiece is within the measurement area and avoiding obstruction of the central through hole 5. The line spectrum confocal sensor module is activated, and the upper light source emitter 6 emits broadband white light, which is focused by the dispersive lens and vertically illuminates the surface of the workpiece. The reflected light passes through the workpiece (if transparent) or is reflected from the surface and enters the lower spectral analysis receiver 7 through the bottom through hole 5. The receiver determines the focal position based on the spectral peak wavelength, thereby calculating the surface height or thickness.

[0038] When it is necessary to change the measurement point, the control system activates the hydraulic system. The first hydraulic telescopic rod 12 pushes the left and right sliders 13 to slide in the left and right adjustment grooves 11 to achieve movement in the X direction. The second hydraulic telescopic rod 16 pushes the front and rear sliders 15 to slide in the front and rear adjustment grooves 14 to achieve movement in the Y direction. The two work together to control the moving platform and the workpiece on it to move along a preset path (such as grid scanning) to complete the point-by-point measurement of the entire area. The data acquisition and processing unit records the height / thickness information of each point in real time and generates a three-dimensional topography map or thickness distribution map.

[0039] The present invention and its embodiments have been described above. This description is not restrictive, and the accompanying drawings are only one embodiment of the present invention; the actual structure is not limited thereto. In conclusion, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A measurement device based on a line spectral confocal sensor, characterized in that: It includes a support base (1), an auxiliary stabilization mechanism, a line spectrum confocal sensor module, a load-bearing platform (2), and an adjustment platform (3); After the support base (1) is placed and stabilized by the auxiliary stabilizing mechanism, the top surface is fixedly provided with a support side plate (4). After the load-bearing platform (2) is horizontally fixed on the support side plate (4), the top surface is connected to a movable platform that can move forward, backward, left and right through the adjustment mechanism. The line spectrum confocal sensor module is set above the support base (1). The moving platform is transparent. The center of the load-bearing platform (2) has a through hole (5) that works with the line spectrum confocal sensor module. After the workpiece is placed on the moving platform, the line spectrum confocal sensor module performs thickness measurement.

2. The measuring device based on a line spectrum confocal sensor according to claim 1, characterized in that: The line spectrum confocal sensor module includes a light source emitter (6) and a spectral analysis receiver (7). The light source emitter (6) is connected to the support side plate (4) and is located above the moving platform. The spectral analysis receiver (7) is fixedly installed on the top surface of the support base (1) and located below the moving platform.

3. The measuring device based on a line spectrum confocal sensor according to claim 1, characterized in that: The auxiliary stabilizing mechanism includes a horizontal plate (8), a fastening screw (9), and a suction cup (10); The horizontal plate (8) is fixedly set on the side of the support side plate (4) away from the support base (1). After the fastening screw (9) is threadedly connected to the horizontal plate (8), it extends to the bottom of the horizontal plate (8) and is connected to the suction cup (10). The fastening screw (9) is mirrored with a pair. After the support base (1) is placed stably, the two fastening screws (9) are rotated to push the two suction cups (10) to stick to the mounting surface.

4. The measuring device based on a line spectrum confocal sensor according to claim 1, characterized in that: The adjustment mechanism includes a left-right adjustment mechanism and a front-back adjustment mechanism; The left and right adjustment mechanism includes a left and right adjustment groove (11), a first hydraulic telescopic rod (12), and left and right sliders (13). The left and right adjustment groove (11) is fixedly installed on the top surface of the support platform (2), and the left and right sliders (13) are slidably installed inside. The left and right sliders (13) slide left and right under the action of the first hydraulic telescopic rod (12), and the front and rear adjustment mechanism is fixedly installed on the left and right sliders (13).

5. The measuring device based on a line spectrum confocal sensor according to claim 4, characterized in that: The front and rear adjustment mechanism includes a front and rear adjustment groove (14), a front and rear slider (15), and a second hydraulic telescopic rod (16); The front and rear adjustment groove (14) is fixedly set on the left and right sliders (13) and is perpendicular to the left and right adjustment grooves (11). After the front and rear sliders (15) are slidably set in the front and rear adjustment grooves (14), they are pushed to slide forward and backward by the second hydraulic telescopic rod (16). The moving platform can be detachably installed on the front and rear sliders (15).

6. The measuring device based on a line spectrum confocal sensor according to claim 5, characterized in that: The bottom surface of the mobile platform is mirrored with a pair of L-shaped mounting plates (17). After the mobile platform is placed on the front and rear sliders (15) by the two L-shaped mounting plates (17), the bolts pass through the preset mounting holes (19) on the L-shaped mounting plates (17) and are threadedly connected with the preset threaded holes (18) on the front and rear sliders (15).

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