A wafer arranging and detecting device before loading

Abstract

The utility model provides a kind of arrangement detection device before silicon wafer feeding, the design can realize the complete automation of entire full-automatic unpacking feeding and detection process, use robot to feed, full-automatic arrangement, blow, visual detection, pass through mechanical structure, electrostatic blow, visual identification, solve the technical problem existing in the process of robot automatic feeding, improve reliability, it includes base, the top of base is provided with longitudinal moving mechanism, two Y direction neat leaning boards are installed on longitudinal moving mechanism, the top of base is also fixedly installed with transverse moving mechanism, transverse moving mechanism is located above longitudinal moving mechanism, two X direction neat leaning boards are installed on transverse moving mechanism, the outside of two X direction neat leaning boards and two Y direction neat leaning boards is provided with electrostatic blow nozzle, the outside of one X direction neat leaning board in two X direction neat leaning boards is installed with industrial camera.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer pre-loading sorting and inspection technology, and in particular to a silicon wafer pre-loading sorting and inspection device. Background Technology

[0002] Currently, the first step in solar panel manufacturing is drawing round silicon ingots, followed by squaring them into square bars according to size requirements. These square bars are then sliced, packaged, and transported to a factory with silicon wafer texturing and cleaning equipment. From there, manual unpacking and placement into the wafer forming machine fixtures is required. This process is cumbersome, labor-intensive, and costly. Therefore, there is an urgent need for automated equipment to replace manual labor. During automated equipment operation, the removed silicon wafers may have uneven surfaces, foam residue, and potential breakage. A dedicated sorting and inspection device is needed to straighten the wafers, remove foam residue, and inspect the top surface for breakage. Only after this sorting and inspection process can the wafers be placed into the wafer forming machine for the texturing process.

[0003] Currently, production involves manual unpacking and inspection of silicon wafers, which cannot address residual foam after unpacking. In the future, this process will definitely be automated to replace manual labor. The automated unpacking equipment must include a dedicated device for the straightening, cleaning, and inspection of silicon wafers. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this utility model solves the following technical problem: Currently, production relies on manual unpacking and inspection, which leaves residual foam after unpacking unattended. This invention provides a sorting and inspection device for silicon wafers before loading.

[0005] To achieve the above objectives, this utility model provides:

[0006] A pre-loading inspection device for silicon wafers includes a base. A longitudinal moving mechanism is mounted on the top of the base, and two Y-direction alignment plates are installed on the longitudinal moving mechanism. A transverse moving mechanism is also fixedly mounted on the top of the base, located above the longitudinal moving mechanism. Two X-direction alignment plates are installed on the transverse moving mechanism. Anti-static cleaning nozzles are provided on the outer sides of both the X-direction and Y-direction alignment plates. An industrial camera with a ring light source is mounted on the outer side of one of the X-direction alignment plates. This solution improves work efficiency and effectively protects workers from injury, while also saving companies unnecessary expenses, compared to manual unpacking and visual inspection for breakage defects.

[0007] Preferably, the longitudinal moving mechanism includes longitudinal slide rails, both of which are fixedly installed on the top of the base. Two longitudinal sliders are slidably installed on the outer sides of the two longitudinal slide rails, and the two longitudinal sliders are fixedly installed on the bottom of the two Y-direction aligned plates.

[0008] Preferably, a longitudinal screw rod is rotatably mounted on the longitudinal slide rail via a bearing. The two ends of the longitudinal screw rod have opposite thread directions. Two longitudinal sliders are threadedly connected to the two ends of the longitudinal screw rod. A Y-direction servo motor is provided at the bottom of the longitudinal slide rail. Both the output shaft of the Y-direction servo motor and the outer side of the longitudinal screw rod are equipped with longitudinal pulleys. The outer sides of the two longitudinal pulleys are connected to the same longitudinal belt.

[0009] Preferably, the lateral movement mechanism includes a linear slide rail, which is mounted on the top of the base and above the longitudinal slide rail. Two linear sliders are slidably mounted on the linear slide rail, and the two linear sliders are fixedly mounted to the bottom of two X-direction aligned plates.

[0010] Preferably, a forward and reverse ball screw is rotatably mounted on the linear slide rail via a bearing. The two ends of the forward and reverse ball screw have opposite thread directions. Two linear sliders are threadedly connected to the two ends of the forward and reverse ball screws. An X-direction servo motor is mounted at the bottom of the linear slide rail. A transverse pulley is fixedly mounted on the output shaft of the X-direction servo motor and on the outer side of the forward and reverse ball screws. The outer sides of the two transverse pulleys are connected to the same transverse belt.

[0011] Preferably, a pneumatic floating platform is mounted on the top of the linear slide rail, and a silicon wafer is placed on the upper end of the pneumatic floating platform.

[0012] Compared with the prior art, the advantages of this utility model are:

[0013] 1. The sorting device uses a pneumatic floating platform, and the silicon wafers are placed on the pneumatic elastic surface, so that the silicon wafers will not be damaged due to height errors.

[0014] 2. The servo device drives the forward and reverse rotating lead screws to clamp the silicon wafers in torque mode. Different clamping forces can be used to clamp the wafers multiple times to ensure they are aligned and prevent damage.

[0015] 3. The cleaning mechanism is equipped with anti-static nozzles around its perimeter to blow away static electricity from the silicon wafer surface, effectively removing foam and other debris residue.

[0016] 4. Use a vision system to take pictures to determine if there are defects such as cracks on the top silicon wafer.

[0017] This invention can achieve complete automation of the entire fully automatic unpacking, loading, and inspection process. It uses robots for loading and unloading, fully automatic sorting, blowing, and visual inspection. Through mechanical structure, static electricity removal blowing, and visual recognition, it solves the technical problems existing in the automatic loading and unloading process of robots and improves reliability. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the main structure of this design;

[0019] Figure 2 For this design Figure 1 A schematic diagram of the front structure;

[0020] Figure 3 For this design Figure 2 Screenshot from direction A in the middle;

[0021] Figure 4 For this design Figure 2 Mid-side view structural schematic diagram;

[0022] Figure 5 This is a schematic diagram of the silicon wafer structure in this design.

[0023] In the diagram: 1. Base; 2. X-axis servo motor; 21. Horizontal pulley; 22. Horizontal belt; 3. Industrial camera; 4. Ring light source; 5. X-axis alignment plate; 6. Silicon wafer; 7. Pneumatic floating platform; 8. Static elimination blow nozzle; 9. Forward and reverse ball screws; 10. Y-axis alignment plate; 11. Y-axis servo motor; 111. Longitudinal pulley; 112. Longitudinal belt; 113. Longitudinal screw rod; 114. Longitudinal slide rail; 115. Longitudinal slider; 12. Linear slide rail; 13. Linear slider. Detailed Implementation

[0024] The embodiments of this utility model will be further described in detail below with reference to the accompanying drawings.

[0025] See Figure 1-5 As shown, a silicon wafer pre-loading sorting and inspection device includes a base 1. A longitudinal moving mechanism is provided on the top of the base 1, and two Y-direction alignment plates 10 are installed on the longitudinal moving mechanism. A transverse moving mechanism is also fixedly installed on the top of the base 1, located above the longitudinal moving mechanism. Two X-direction alignment plates 5 are installed on the transverse moving mechanism. Static elimination cleaning nozzles 8 are provided on the outer sides of both the two X-direction alignment plates 5 and the two Y-direction alignment plates 10. An industrial camera 3 is installed on the outer side of one of the two X-direction alignment plates 5, and a ring light source 4 is provided on the industrial camera 3.

[0026] In this embodiment, the longitudinal moving mechanism includes longitudinal slide rails 114, which are fixedly installed on the top of the base 1. Two longitudinal sliders 115 are slidably installed on the outer side of each of the two longitudinal slide rails 114. The two longitudinal sliders 115 are fixedly installed on the bottom of the two Y-direction aligned plates 10.

[0027] In this embodiment, a longitudinal screw rod 113 is rotatably mounted on the longitudinal slide rail 114 via bearings. The two ends of the longitudinal screw rod 113 have opposite thread directions. Two longitudinal sliders 115 are threadedly connected to the two ends of the longitudinal screw rod 113. A Y-direction servo motor 11 is provided at the bottom of the longitudinal slide rail 114. Both the output shaft of the Y-direction servo motor 11 and the outer side of the longitudinal screw rod 113 are equipped with longitudinal pulleys 111. The outer sides of the two longitudinal pulleys 111 are connected to the same longitudinal belt 112.

[0028] In this embodiment, the lateral movement mechanism includes a linear slide rail 12, which is installed on the top of the base 1 and above the longitudinal slide rail 114. Two linear sliders 13 are slidably installed on the linear slide rail 12, and the two linear sliders 13 are fixedly installed on the bottom of two X-direction aligned plates 5.

[0029] In this embodiment, a forward and reverse ball screw 9 is rotatably mounted on the linear slide rail 12 via bearings. The two ends of the forward and reverse ball screw 9 have opposite thread directions. Two linear sliders 13 are threadedly connected to the two ends of the forward and reverse ball screw 9. An X-direction servo motor 2 is mounted at the bottom of the linear slide rail 12. A transverse pulley 21 is fixedly mounted on the output shaft of the X-direction servo motor 2 and the outer side of the forward and reverse ball screw 9. The outer sides of the two transverse pulleys 21 are connected to the same transverse belt 22.

[0030] In this embodiment, a pneumatic floating platform 7 is installed on the top of the linear slide rail 12, and a silicon wafer 6 is placed on the upper end of the pneumatic floating platform 7.

[0031] Working method: First, a robot places a stack of silicon wafers 6 onto the pneumatic floating platform 7 of the stack inspection device. A ring light source 4 is turned on for supplemental lighting, and an industrial camera 3 takes pictures to inspect the top silicon wafers for cracks. Then, the X-direction servo motor 2 drives the forward and reverse ball screws 9 via two transverse pulleys 21 and a transverse belt 22. The forward and reverse ball screws 9 drive two X-direction alignment plates 5 to move towards the center. The clamping force of the two X-direction alignment plates 5 on the silicon wafers 6 is controlled by the servo motor torque mode. Initially, 30% force is used for pre-clamping, then 2 mm is released. Afterwards, the Y-direction servo motor 11... Two longitudinal pulleys 111 and a longitudinal belt 112 drive the longitudinal screw rod 113 to rotate. The rotation of the longitudinal screw rod 113 drives the two Y-direction alignment plates 10 to move towards the center. The clamping force of the two Y-direction alignment plates 10 on the silicon wafer 6 is controlled by the torque mode of the servo motor. First, 30% force is used for pre-clamping, then 2 mm is loosened, and then the four sides of the silicon wafer 6 are blown by the electrostatic blowing nozzle 8 to ensure that there are no foams or other impurities on the surface of the silicon wafer. Finally, the XY-direction alignment plates clamp 100% at the same time, and the silicon wafer is aligned. One working process is completed, which prepares for the next step of robot unloading.

[0032] This utility model is not limited to the above-described preferred embodiment. Anyone can derive other products in various forms under the guidance of this utility model. However, regardless of any changes made in its shape or structure, any technical solution that is the same as or similar to this utility model is within its protection scope.

Claims

1. A silicon wafer pre-loading sorting and inspection device, comprising a base (1), characterized in that: The top of the base (1) is provided with a longitudinal moving mechanism, on which two Y-direction aligned back plates (10) are installed. The top of the base (1) is also fixedly provided with a transverse moving mechanism, which is located above the longitudinal moving mechanism. Two X-direction aligned back plates (5) are installed on the transverse moving mechanism. The outer sides of the two X-direction aligned back plates (5) and the two Y-direction aligned back plates (10) are provided with anti-static blowing nozzles (8). An industrial camera (3) is installed on the outer side of one of the two X-direction aligned back plates (5). The industrial camera (3) is provided with a ring light source (4).

2. The silicon wafer pre-loading sorting and inspection device according to claim 1, characterized in that: The longitudinal moving mechanism includes a longitudinal slide rail (114), which is fixedly installed on the top of the base (1). Two longitudinal sliders (115) are slidably installed on the outer side of the two longitudinal slide rails (114). The two longitudinal sliders (115) are fixedly installed on the bottom of the two Y-direction aligned back plates (10).

3. The silicon wafer pre-loading sorting and inspection device according to claim 2, characterized in that: A longitudinal screw rod (113) is rotatably mounted on the longitudinal slide rail (114) via a bearing. The two ends of the longitudinal screw rod (113) have opposite thread directions. Two longitudinal sliders (115) are threaded to the two ends of the longitudinal screw rod (113). A Y-direction servo motor (11) is provided at the bottom of the longitudinal slide rail (114). A longitudinal pulley (111) is mounted on the output shaft of the Y-direction servo motor (11) and on the outer side of the longitudinal screw rod (113). The outer sides of the two longitudinal pulleys (111) are connected to the same longitudinal belt (112).

4. The silicon wafer pre-loading sorting and inspection device according to claim 2, characterized in that: The lateral movement mechanism includes a linear slide rail (12), which is mounted on the top of the base (1). The linear slide rail (12) is located above the longitudinal slide rail (114). Two linear sliders (13) are slidably mounted on the linear slide rail (12). The two linear sliders (13) are fixedly mounted to the bottom of two X-direction aligned back plates (5).

5. The silicon wafer pre-loading sorting and inspection device according to claim 4, characterized in that: The linear slide rail (12) is rotatably mounted with a forward and reverse ball screw (9) via a bearing. The two ends of the forward and reverse ball screw (9) have opposite thread directions. Two linear sliders (13) are threaded to the two ends of the forward and reverse ball screw (9). An X-direction servo motor (2) is mounted at the bottom of the linear slide rail (12). A transverse pulley (21) is fixedly mounted on the output shaft of the X-direction servo motor (2) and the outer side of the forward and reverse ball screw (9). The outer side of the two transverse pulleys (21) is connected to the same transverse belt (22).

6. The silicon wafer pre-loading sorting and inspection device according to claim 4, characterized in that: A pneumatic floating platform (7) is mounted on the top of the linear slide rail (12), and a silicon wafer (6) is placed on the upper end of the pneumatic floating platform (7).

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