A graphite boat dismounting and positioning device and graphite boat dismounting equipment

Abstract

The application provides a graphite boat dismounting and mounting positioning device and graphite boat dismounting and mounting equipment. The graphite boat dismounting and mounting positioning device is applied to the graphite boat dismounting and mounting equipment. The graphite boat dismounting and mounting equipment comprises a dismounting and mounting platform for placing a graphite boat. The dismounting and mounting positioning device comprises a clamping module, a foot position correction mechanism, a body position correction mechanism and a positioning control device. The clamping module is connected to the back of the dismounting and mounting platform and is used for clamping nuts on the bottom surface of the graphite boat. The foot position correction mechanism is located at both ends of the length direction of the dismounting and mounting platform. The body position correction mechanism is located at both ends of the width direction of the dismounting and mounting platform. The positioning control device is arranged near the dismounting and mounting platform. The positioning control device is used for collecting position information of the graphite boat in real time and controlling the foot position correction mechanism and the body position correction mechanism to move according to the position information, so that the nuts on the bottom surface of the graphite boat placed on the dismounting and mounting platform are positioned in the clamping range of the clamping module.

Description

Technical Field

[0001] This application relates to the field of graphite boat disassembly and assembly equipment, and more particularly to a graphite boat disassembly and assembly positioning device and graphite boat disassembly and assembly equipment. Background Technology

[0002] Graphite boats are core carriers in photovoltaic cell coating and semiconductor diffusion processes. Their main structure consists of parallel-arranged graphite boat sheets, connecting rods running through each boat, and nuts at both ends of the connecting rods. Tightening the nuts on the connecting rods achieves tight stacking of the graphite boat sheets. Because graphite boats need to be used long-term in high-temperature and corrosive environments, they require periodic disassembly to replace damaged parts, clean deposits, or adjust the boat sheet spacing. Therefore, automated graphite boat assembly and disassembly equipment is widely used in this field.

[0003] When disassembling and assembling the graphite boat, the top nut of the graphite boat must be removed first. However, if the bottom nut of the graphite boat cannot be aligned with the clamping device and is not stably fixed when disassembling and assembling the top nut of the graphite boat, the connecting rod will be subjected to synchronous force and rotate, which will cause the top nut of the graphite boat to rotate synchronously and thus cannot be effectively disassembled and assembled.

[0004] Therefore, this application provides a graphite boat assembly and positioning device capable of aligning and clamping the bottom nut of a graphite boat. Utility Model Content

[0005] To address the aforementioned issues, this application provides a graphite boat disassembly and positioning device and a graphite boat disassembly and assembly machine, which can achieve dynamic correction, high-precision positioning, and stable clamping of graphite boat nuts.

[0006] To achieve the objectives of this application, the following technical solution is provided:

[0007] In a first aspect, this application provides a graphite boat disassembly and positioning device, which is applied to graphite boat disassembly and assembly equipment. The graphite boat disassembly and assembly equipment includes a disassembly and assembly platform for placing the graphite boat. The disassembly and positioning device includes: a clamping module, a foot position correction mechanism, a body position correction mechanism, and a positioning control device.

[0008] The clamping module is connected to the back of the disassembly and assembly platform and is used to clamp the nut on the bottom of the graphite boat. When the graphite boat is placed on the disassembly and assembly platform, the nut on the bottom of the graphite boat is located below the working through hole of the disassembly and assembly platform.

[0009] The disassembly and assembly platform is provided with the foot position correction mechanism in the length direction and the body position correction mechanism in the width direction.

[0010] The disassembly and assembly platform includes the positioning control device, which is used to collect the position information of the graphite boat in real time, and control the foot position correction mechanism and body position correction mechanism to move according to the position information, so that the nut placed on the bottom surface of the graphite boat on the disassembly and assembly platform is positioned within the clamping range of the clamping module.

[0011] In one possible implementation, the foot position correction mechanism includes a first limiting member, a first translation drive module, and a first lifting drive module;

[0012] The first limiting member moves along the length direction of the disassembly and assembly platform via the first lifting drive module, and the first limiting member moves along the vertical direction via the first lifting drive module.

[0013] The body position correction mechanism includes: a fixed correction component and a movable correction component that are disposed opposite to each other in the width direction of the disassembly and assembly platform;

[0014] The fixed correction component includes a fixed limiting element;

[0015] The active correction component includes one or more second limiting members and one or more second translation drive modules. The second limiting members move along the width direction of the disassembly and assembly platform via the corresponding second translation drive modules.

[0016] In one possible implementation, the fixed limiting member, the first limiting member, and the second limiting member are each one or more limiting rods.

[0017] In one possible implementation, the disassembly and assembly platform has a calibration through hole, and the first limiting member and the second limiting member can move in the corresponding calibration through hole respectively.

[0018] In one possible implementation, the clamping module includes: a gripper and a gripper drive assembly;

[0019] The gripper drive assembly drives the gripper to perform opening and closing movements and to move the gripper in a direction parallel to the assembly / disassembly platform.

[0020] In one possible implementation, the number of clamping modules is multiple, and each clamping module is used to clamp one or two nuts.

[0021] In one possible implementation, the jaws of one or more of the clamping modules have a double-nut clamping portion, which can be used to clamp two nuts with a spacing less than a preset distance.

[0022] In one possible implementation, the gripper includes a first gripper, which includes a first clamping member and a second clamping member disposed opposite to each other;

[0023] The first clamping member and the second clamping member each have two grooves on their opposite sides, and the four grooves are opposite each other in pairs. The distance between the grooves of each clamping member is the same as the distance between the two nuts located on the foot.

[0024] In one possible implementation, the gripper includes a second gripper, which includes a third clamping member and a fourth clamping member disposed opposite to each other;

[0025] The third and fourth clamping members each have a groove on their two opposite surfaces, and the two grooves are opposite to each other.

[0026] Secondly, this application provides a graphite boat disassembly and assembly device, including: a graphite boat disassembly and assembly positioning device and a graphite boat flipping device as described in the first aspect;

[0027] The graphite boat turning device includes a turning station, a turning drive mechanism, and a clamping mechanism.

[0028] The flipping station includes a first support platform and a disassembly platform connected together. The angle between the first support platform and the disassembly platform matches the connection angle between the side surface and the bottom surface of the graphite boat. The first support platform and the disassembly platform are respectively used to support the side surface and the bottom surface of the graphite boat during the flipping process.

[0029] The flipping drive mechanism is connected to the flipping station, and the flipping drive mechanism is used to rotate the flipping station;

[0030] The first support platform is connected to the symmetrical clamping mechanism along its length, and the clamping mechanism is used to clamp the graphite boat feet at both ends along the length of the graphite boat;

[0031] The graphite boat disassembly and positioning device is used to move the graphite boat placed on the disassembly and assembly platform in a vertical position, and to clamp the nuts on the bottom surface of the graphite boat.

[0032] Thirdly, this application provides a graphite boat disassembly and assembly device, including: a graphite boat disassembly and assembly positioning device and a graphite boat disassembly and assembly component as described in the first aspect;

[0033] The graphite boat disassembly and positioning device is used to move the graphite boat placed on the disassembly and assembly platform in a vertical state, and to clamp the nuts on the bottom surface of the graphite boat.

[0034] The graphite boat disassembly and assembly assembly is used to disassemble and assemble the graphite boat top nut, graphite boat sheet, ceramic ring and electrode block.

[0035] This application provides a graphite boat disassembly and positioning device, which uses the coordinated action of a foot position correction mechanism and a body position correction mechanism, combined with a position sensor to collect the position information of the graphite boat in real time, to perform real-time dynamic correction on graphite boats that are not fully aligned after placement, and to ensure that the bottom nut is accurately positioned within the clamping range of the nut clamping module.

[0036] The clamping module can firmly fix the bottom nut when the top nut of the graphite boat is installed or removed, preventing the graphite boat from loosening or shifting due to the rotation of the connecting rod under force. Furthermore, through precise positioning and clamping, it avoids the problem of damage to the nut or graphite boat caused by forced alignment in traditional rigid clamps, thus improving the safety and reliability of operation.

[0037] Therefore, the graphite boat disassembly and positioning device of this application solves the problems of large positioning deviation, cumbersome operation and poor stability in the prior art through dynamic correction, high-precision positioning and stable clamping functions, which significantly improves the efficiency, accuracy and reliability of graphite boat disassembly and assembly, and has important industrial application value. Attached Figure Description

[0038] The accompanying drawings are provided to further understand this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof.

[0039] Figure 1 This is a schematic diagram of the structure of a graphite boat provided in an embodiment of this application;

[0040] Figure 2 This is a schematic diagram of the structure of a graphite boat disassembly and positioning device provided in an embodiment of this application;

[0041] Figure 3 This is a schematic diagram of the structure of the rear side of the disassembly and assembly platform provided in the embodiments of this application;

[0042] Figure 4 for Figure 3 Enlarged view of region A in the middle;

[0043] Figure 5 A schematic diagram of the structure of the graphite boat placed in the graphite boat disassembly and positioning device provided in the embodiments of this application;

[0044] Figure 6 This is a schematic diagram of the foot alignment mechanism provided in the embodiments of this application;

[0045] Figure 7 This is a schematic diagram of the body position correction mechanism provided in the embodiments of this application;

[0046] Figure 8 This is a schematic diagram of the structure of a clamping module provided in an embodiment of this application;

[0047] Illustrations: 1. Graphite boat; 11. Graphite boat sheet; 12. Graphite boat foot; 13. Nut; 14. Bottom surface of graphite boat; 2. Assembly / disassembly platform; 21. Working through hole; 22. Alignment through hole; 3. Assembly / disassembly positioning device; 4. Clamping module; 41. Gripper; 411. First gripper; 4111. First clamping component; 4112. Second clamping component; 4113. Groove; 42. Gripper drive assembly; 5. Foot position correction mechanism; 51. First limiting component; 52. First translation drive module; 53. First lifting drive module; 6. Body position correction mechanism; 61. Fixed correction assembly; 611. Fixed limiting component; 62. Movable correction assembly; 621. Second limiting component; 622. Second translation drive module. Detailed Implementation

[0048] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0049] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0050] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of this application, unless otherwise stated, "multiple" means two or more.

[0051] In the manufacturing process of solar cells, uncoated silicon wafers need to be inserted into a wafer carrier of a vacuum coating equipment and sent into a furnace tube for coating. Specifically, fixing points are set on a graphite boat, such as a graphite boat, to fix the silicon wafer. Then, the graphite boat is placed into the furnace tube, and a passivation film is deposited on the front or back of the silicon wafer. After coating is completed, the graphite boat is removed from the furnace tube, and finally, the coated silicon wafer is unloaded from the graphite boat.

[0052] Figure 1 This is a schematic diagram of the structure of a graphite boat provided in an embodiment of this application, as shown below. Figure 1 As shown, the graphite boat 1 includes graphite boat sheets 11, ceramic rings, insulating rods, and graphite boat feet 12. The graphite boat sheets 11 are arranged in parallel at a predetermined distance, and ceramic rings are provided between the graphite boat sheets 11 to ensure the spacing between them. Each graphite boat sheet 11 has a fixing hole. The graphite boat sheet 11 includes a first graphite boat sheet and a second graphite boat sheet. The insulating rod passes through the fixing hole on the first graphite boat sheet, the ceramic ring, and the fixing hole on the second graphite boat sheet in sequence. The two ends of the insulating rod are fastened with nuts 13 to achieve a stable connection between the graphite boat sheets 11. Each graphite boat sheet 11 has multiple slots at intervals, and multiple locking holes are provided around each slot. The locking holes connect to locking points, and the silicon wafer can be fixed to the surface of the graphite boat sheet 11 through the locking points around the slots.

[0053] The graphite boat 1 has graphite boat feet 12 at both ends along its length. Each graphite boat foot 12 consists of boat lugs at both ends of the graphite boat sheet 11, electrode blocks, electrode rods, and nuts 13. Specifically, electrode blocks are disposed between the boat lugs, and electrode rods pass through the boat lugs and electrode blocks of the graphite boat sheet 11, with the ends of the electrode rods secured by nuts 13. For example, the electrode rods and connecting rods are threaded rods.

[0054] It should be noted that: A horizontal graphite boat 1 means the plane containing the graphite boat sheet 11 is perpendicular to the horizontal plane; the graphite boat 1 is generally placed horizontally in the furnace tube. A vertical graphite boat 1 means the plane containing the graphite boat sheet 11 is parallel to the horizontal plane. When the graphite boat 1 is in a vertical position, the graphite boat sheets 11 are stacked vertically. This arrangement facilitates the assembly and disassembly of the nuts 13 on the top surface of the graphite boat and makes it easier to grasp or place the graphite boat sheets 11, thus facilitating their assembly and disassembly. Therefore, the graphite boat 1 is placed vertically on the assembly / disassembly platform 2.

[0055] The transport mechanism places the graphite boat 1 vertically on the disassembly and assembly platform 2. The disassembly and assembly components are ready to disassemble and assemble the graphite boat 1. Before disassembly and assembly, the graphite boat 1 needs to be positioned to clamp and fix the nut 13 on the bottom surface 14 of the graphite boat so as to facilitate the disassembly of the nut 13 on the top surface of the graphite boat. Therefore, this application embodiment provides a graphite boat disassembly and assembly positioning device 3.

[0056] This application provides a graphite boat disassembly and positioning device 3, which is applied to graphite boat disassembly and assembly equipment. The graphite boat disassembly and assembly equipment includes a disassembly and assembly platform 2 for placing a graphite boat 1. Lifting drive components are connected to both ends of the disassembly and assembly platform 2 in the length direction for adjusting the height of the disassembly and assembly platform 2.

[0057] Figure 2This is a schematic diagram of the structure of a graphite boat disassembly and positioning device provided in an embodiment of this application, as shown below. Figure 2 As shown, the disassembly and positioning device 3 includes: a clamping module 4, a foot position correction mechanism 5, a body position correction mechanism 6, and a positioning control device.

[0058] Figure 3 This is a schematic diagram of the structure of the rear side of the assembly / disassembly platform 2 provided in an embodiment of this application. Figure 4 for Figure 3 An enlarged diagram of region A in the middle, as shown below. Figure 3 and Figure 4 As shown, the clamping module 4 is connected to the back of the disassembly and assembly platform 2 and is used to clamp the nut 13 on the bottom surface 14 of the graphite boat. When the graphite boat 1 is placed on the disassembly and assembly platform 2, the nut 13 on the bottom surface 14 of the graphite boat is located below the working through hole 21 of the disassembly and assembly platform 2.

[0059] The disassembly and assembly platform 2 is provided with a foot position correction mechanism 5 in the length direction and a body position correction mechanism 6 in the width direction.

[0060] To automate the positioning of the graphite boat 1, this application embodiment also provides a positioning control device, including a position sensor, photoelectric detector, or detection camera, and a controller. The controller is electrically connected to the drive modules of the position sensor, clamping module 4, foot position correction mechanism 5, and body position correction mechanism 6. The positioning control device can collect the position information of the graphite boat 1 in real time, and control the foot position correction mechanism 5 and body position correction mechanism 6 to move according to the position information, so that the nut 13 on the bottom surface 14 of the graphite boat placed in the graphite boat placement area is positioned within the clamping range of the clamping module 4. See [link to relevant documentation]. Figure 5 A schematic diagram of the graphite boat placed in the graphite boat disassembly and positioning device provided in the embodiments of this application.

[0061] The graphite boat disassembly and positioning device 3 provided in this application embodiment can move the graphite boat placed on the disassembly and positioning platform 2 until the nut 13 on the bottom surface 14 of the graphite boat is aligned with the working through hole 21 opened on the disassembly and positioning platform 2 and enters the clamping range of the clamping module 4 through the working through hole 21. The clamping module 4 clamps the nut 13, thus achieving the purpose of disassembly and positioning of the graphite boat. This avoids the problem that the nut 13 on the top surface of the graphite boat cannot be properly disassembled due to synchronous rotation when the graphite boat disassembly and positioning components disassemble the nut 13 on the top surface of the graphite boat.

[0062] In order to adjust the position of the graphite boat 1 along the length of the disassembly and assembly platform 2, in some embodiments, foot position correction mechanisms 5 are provided at both ends of the length of the disassembly and assembly platform 2, with at least one foot position correction mechanism 5 provided at each end. Figure 6 A schematic diagram of the foot alignment mechanism provided in an embodiment of this application is shown, as follows: Figure 2 and Figure 6As shown, each foot position correction mechanism 5 includes a first limiting member 51, a first translation drive module 52, and a first lifting drive module 53; wherein, the first limiting member 51 moves along the length direction of the disassembly and assembly platform 2 through the first translation drive module 52, and the first limiting member 51 moves along the vertical direction through the first lifting drive assembly to match graphite of different height specifications.

[0063] In order to adjust the position of the graphite boat 1 in the width direction of the disassembly and assembly platform 2, in some embodiments, a body position correction mechanism 6 is provided at both ends of the width direction of the disassembly and assembly platform 2. Figure 7 A schematic diagram of the body posture correction mechanism is shown, such as... Figure 2 and Figure 7 As shown, the body alignment mechanism 6 includes a fixed alignment component 61 and a movable alignment component 62 respectively disposed at both ends of the assembly / disassembly platform 2 in the width direction. The body alignment mechanism 6 includes one or more fixed alignment components 61 and one or more movable alignment components 62. The number of fixed alignment components 61 and movable alignment components 62 can be the same or different, and the fixed alignment components 61 and movable alignment components 62 can be disposed correspondingly at both ends of the assembly / disassembly platform 2 in the width direction or staggered.

[0064] In some embodiments, the fixed correction component 61 includes a fixed limiting member 611. The position of the fixed correction component 61 is fixed and unchanged. The fixed limiting member 611 is directly fixedly connected to the disassembly and assembly platform 2, or the fixed limiting member 611 is vertically inserted through the disassembly and assembly platform 2 and fixed on the base.

[0065] The active correction component 62 includes one or more second limiting members 621 and one or more second translation drive modules 622. The second limiting members 621 move along the width direction of the disassembly and assembly platform 2 through the corresponding second translation drive modules 622 to push the graphite boat 1 to move in the width direction of the disassembly and assembly platform 2.

[0066] This application embodiment also provides a body position correction mechanism 6, including movable correction components 62 respectively disposed at both ends of the width direction of the disassembly and assembly platform 2, with more than two movable correction components 62 at each end of the width direction of the disassembly and assembly platform 2. The second limiting member 621 of the movable correction component 62 located at both ends of the width direction of the disassembly and assembly platform 2 moves along the width direction of the disassembly and assembly platform 2 through the corresponding translation drive component, so as to push the graphite boat 1 to move in the width direction of the disassembly and assembly platform 2.

[0067] Therefore, by moving the graphite boat 1 placed on the disassembly and assembly platform 2 in the forward, backward, left and right directions through the foot position correction mechanism 5 and the body position correction mechanism 6, the alignment of the nut 13 on the bottom surface 14 of the graphite boat with the clamping module 4 is achieved.

[0068] To facilitate the movement of the active correction component 62, such as Figure 3The schematic diagram of the structure on the back of the disassembly and assembly platform shows that the disassembly and assembly platform 2 is also provided with a positioning through hole 22, and the first limiting member 51 and the second limiting member 621 can move in the corresponding positioning through hole 22.

[0069] The fixed limiting member 611, the first limiting member 51, and the second limiting member 621 are one or more limiting rods, or they can be limiting plates, limiting posts, etc. The fixed limiting member 611, the first limiting member 51, and the second limiting member 621 are perpendicular to the plane of the disassembly and assembly platform 2. The height of the fixed limiting member 611, the first limiting member 51, and the second limiting member 621 is higher than the height of the graphite boat 1 in the vertical state.

[0070] In some embodiments, the clamping module 4 includes a gripper 41 and a gripper drive assembly 42. The gripper drive assembly 42 drives the gripper 41 to perform opening and closing movements and to move the gripper 41 in a direction parallel to the disassembly / assembly platform 2, such as moving the gripper 41 along the length or width direction of the disassembly / assembly platform 2. The gripper drive assembly 42 drives the gripper 41 to perform opening and closing movements and to move the gripper 41 in a direction parallel to the disassembly / assembly platform 2 as follows: The gripper drive assembly includes a pneumatic drive mechanism and a linear drive motor. The linear drive motor is connected to the back of the disassembly / assembly platform and is capable of driving the gripper and the pneumatic drive mechanism to move horizontally on the back of the disassembly / assembly platform. The pneumatic drive mechanism drives the gripper to open and close. The clamp drive assembly includes a linkage pneumatic drive mechanism, which drives the clamp to open and close and to move the clamp closer to or away from the nut.

[0071] Nuts 13 of a standard graphite boat bottom surface 14 are distributed at preset intervals. When the distance between nuts 13 is greater than the preset distance, a clamping module 4 capable of clamping only one nut 13 can be connected to the back of the disassembly platform 2 at the edge of the working through hole 21 corresponding to the nut 13. When the distance between two nuts 13 is closer, for example, less than the preset distance, a clamping module 4 capable of clamping both nuts 13 simultaneously can be connected to the back of the disassembly platform 2 at the edge of the working through hole 21 corresponding to the two nuts 13. Figure 1 In the graphite boat shown, the distance between the two nuts 13 in the middle of the bottom surface 14 and the two nuts 13 of the feet 12 is relatively close (less than a preset distance). Therefore, a clamping module 4 with a double-nut 13 clamping part that can clamp two nuts 13 simultaneously can be used for clamping. If the distance between the other nuts 13 on the bottom surface 14 is relatively far (greater than a preset distance), a clamping module 4 with a single-nut clamping part that can clamp one nut 13 can be used for clamping.

[0072] Figure 8The diagram shows a structural schematic of a clamping module provided in an embodiment of this application. An example of the clamping module is a pneumatic gripper. In some embodiments, the gripper 41 of the clamping module 4 includes a first gripper 411, which includes a first clamping member 4111 and a second clamping member 4112 disposed opposite to each other.

[0073] Two grooves 4113 are provided on each of the two opposing surfaces of the first clamping member 4111 and the second clamping member 4112, and the four grooves 4113 are opposite each other in pairs. The distance between the grooves 4113 of each clamping member is the same as the distance between the two nuts 13 located on the graphite boat foot 12.

[0074] This application provides a clamping module 4 with a single nut clamping part capable of clamping a nut 13. The clamping jaw 41 of the clamping module 4 includes a second jaw, and the second jaw includes a third clamping member and a fourth clamping member disposed opposite to each other. A groove 4113 is provided on each of the two opposite surfaces of the third clamping member and the fourth clamping member, and the grooves 4113 are opposite to each other.

[0075] This application also provides a graphite boat disassembly and assembly device, including the graphite boat disassembly and assembly positioning device 3 and the graphite boat flipping device described above.

[0076] The graphite boat tilting device includes a tilting station, a tilting drive mechanism, and a clamping mechanism;

[0077] The flipping station includes a first support platform and a disassembly platform 2 connected together. The angle between the first support platform and the disassembly platform 2 matches the connection angle between the side surface of the graphite boat and the bottom surface of the graphite boat 14. The first support platform and the disassembly platform 2 are used to support the side surface of the graphite boat and the bottom surface of the graphite boat 14 respectively during the flipping process.

[0078] The tilting drive mechanism is connected to the tilting station and is used to rotate the tilting station.

[0079] The first support platform is connected to a symmetrical clamping mechanism along its length. The clamping mechanism is used to clamp the graphite boat feet 12 at both ends along the length of the graphite boat.

[0080] The graphite boat disassembly and positioning device 3 is used to move the graphite boat placed on the disassembly and assembly platform 2 in a vertical position, and to clamp the nut 13 on the bottom surface 14 of the graphite boat.

[0081] It should be noted that, since both the body position correction mechanism 6 and the foot position correction mechanism 5 are equipped with lifting drives, in order to ensure that the flipping station is not restricted during flipping, the body position correction mechanism 6 and the foot position correction mechanism 5 are lowered so that they do not overlap with the flipping area of ​​the flipping station, thus achieving the purpose of compatibility between the graphite boat disassembly and assembly positioning device 3 and the flipping device.

[0082] Working principle: A graphite boat is placed horizontally on the flipping station. A horizontal first support platform supports the side of the graphite boat, a vertical assembly / disassembly platform 2 is attached to the bottom surface 14 of the graphite boat, and a clamping mechanism clamps the graphite boat feet 12 at both ends of the graphite boat, thus ensuring the stability and fixation of the graphite boat during the flipping process. Then, the rotating shaft of the flipping drive mechanism drives the flipping station to rotate until the graphite boat is flipped to a vertical position. At this time, the vertical graphite boat is placed on the horizontal assembly / disassembly platform 2, and the bottom surface 14 of the graphite boat contacts the assembly / disassembly platform 2. Finally, the graphite boat-shaped positioning mechanism moves the graphite boat on the assembly / disassembly platform 2, realizing the alignment of the nut 13 on the bottom surface 14 of the graphite boat with the clamping module 4.

[0083] This application also provides a graphite boat disassembly and assembly device, including a graphite boat disassembly and assembly positioning device 3 and a graphite boat disassembly and assembly component.

[0084] The graphite boat disassembly and positioning device 3 is used to move the graphite boat placed on the disassembly and assembly platform 2 in a vertical position, and to clamp the nut 13 on the bottom surface 14 of the graphite boat.

[0085] The graphite boat disassembly and assembly assembly is used to disassemble and assemble the graphite boat top nut 13, ceramic ring, and electrode block.

[0086] This application also provides a graphite boat disassembly and assembly device, including a loading and unloading turnover mechanism, a graphite boat rotation and transportation mechanism, a graphite boat disassembly and assembly positioning device 3, a disassembly and assembly platform 2, and a graphite boat disassembly and assembly component.

[0087] It should be noted that the loading and unloading mechanism is used to load and unload the graphite boat.

[0088] The graphite boat rotation and conveying mechanism is used to grab the graphite boat of the loading and unloading turnover mechanism, flip the graphite boat to a vertical state, and transport the graphite boat in the vertical state to the disassembly and assembly platform 2. It is also used to grab the graphite boat of the disassembly and assembly platform 2, flip the graphite boat to a horizontal state, and transport the graphite boat in the horizontal state to the loading and unloading turnover mechanism.

[0089] The graphite boat disassembly and positioning device 3 is used to move the graphite boat on the disassembly and assembly platform 2 to clamp the nut 13 on the bottom surface 14 of the graphite boat.

[0090] The graphite boat disassembly and assembly assembly is used to disassemble and assemble the graphite boat top nut 13, ceramic ring, and electrode block.

[0091] The graphite boat handling mechanism is used to move graphite boats away from or to the disassembly and assembly platform 2.

[0092] The working principle of the graphite boat assembly / disassembly equipment provided in this application embodiment is as follows: First, the loading and unloading turnover mechanism loads the graphite boat 1. Then, the graphite boat rotation and conveying mechanism picks up the graphite boat 1 from the loading and unloading turnover mechanism and flips the graphite boat 1 to a vertical position. After that, the graphite boat 1 in the vertical position is transported to the assembly / disassembly platform 2. Then, the foot position correction mechanism 5 and the body position correction mechanism 6 of the graphite boat assembly / disassembly positioning device 3 move the graphite boat 1 on the assembly / disassembly platform 2 so that the nut 13 on the bottom surface 14 of the graphite boat is positioned within the clamping range of the clamping module 4. The clamping module 4 of the graphite boat disassembly and positioning device 3 clamps the nut 13 on the bottom surface 14 of the graphite boat. Then, the nut 13, ceramic ring, and electrode block on the top surface of the graphite boat are disassembled by the graphite boat disassembly and assembly component. The graphite boat sheet transport mechanism sequentially picks up the graphite boat sheet 11 and places it into the graphite boat sheet transmission device. The graphite boat sheet transmission device transports the graphite boat sheet 11 to the boat sheet temporary buffer mechanism. After the checkpoint machine detects and changes the checkpoint, the graphite boat sheet 11 is sent back to the graphite boat disassembly and assembly component for assembly. The assembled graphite boat is then sent back to the loading and unloading turnover mechanism for unloading. This graphite boat disassembly and assembly equipment has a high degree of automation, and the disassembly and assembly are completed in one step, which greatly improves the efficiency of graphite boat sheet calibration and parts replacement.

[0093] The beneficial effects of using the embodiments of this application are as follows:

[0094] Through the coordinated action of the foot position correction mechanism and the body position correction mechanism, and combined with the position sensor to collect the position information of the graphite boat in real time, the graphite boat that is not fully aligned after placement can be dynamically corrected in real time to ensure that the bottom nut is accurately positioned within the clamping range of the clamping module.

[0095] The clamping module can firmly fix the nut on the bottom of the graphite boat when the nut on the top of the graphite boat is removed or installed, preventing the graphite boat sheet from loosening or shifting due to the rotation of the connecting rod under force. Furthermore, through precise positioning and clamping, it avoids the problem of damage to the nut or graphite boat sheet caused by forced alignment of traditional rigid clamps, thus improving the safety and reliability of operation.

[0096] In summary, the graphite boat disassembly and positioning device of this application solves the problems of large positioning deviation, cumbersome operation, and poor stability in the prior art through dynamic correction, high-precision positioning, and stable clamping functions. It significantly improves the efficiency, accuracy, and reliability of graphite boat disassembly and assembly, and has important industrial application value.

[0097] In the embodiments provided in this application, it should be understood that the disclosed systems, modules, and methods can be implemented in other ways. For example, the module embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces, or indirect coupling or communication connection between modules or units, and may be electrical, mechanical, or other forms.

[0098] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit it. This application is not limited to the exact structures described above and illustrated in the accompanying drawings, and it should not be considered that the specific implementation of this application is limited to these descriptions. For those skilled in the art, various changes and modifications made without departing from the concept of this application should be considered to fall within the protection scope of this application.

Claims

1. A graphite boat disassembly and positioning device, applied to graphite boat disassembly and assembly equipment, the graphite boat disassembly and assembly equipment comprising a disassembly and assembly platform (2) for placing a graphite boat (1), characterized in that, The disassembly and positioning device (3) includes: a clamping module (4), a foot position correction mechanism (5), a body position correction mechanism (6), and a positioning control device; The clamping module (4) is connected to the back of the disassembly platform (2) and is used to clamp the nut (13) on the bottom surface (14) of the graphite boat. When the graphite boat (1) is placed on the disassembly platform (2), the nut (13) on the bottom surface (14) of the graphite boat is located below the working through hole (21) of the disassembly platform (2). The disassembly and assembly platform (2) is provided with the foot position correction mechanism (5) in the length direction and the body position correction mechanism (6) in the width direction. The disassembly and assembly platform (2) includes the positioning control device, which is used to collect the position information of the graphite boat (1) in real time, and control the foot position correction mechanism (5) and body position correction mechanism (6) to move according to the position information, so that the nut (13) placed on the bottom surface (14) of the graphite boat on the disassembly and assembly platform (2) is positioned within the clamping range of the clamping module (4).

2. The graphite boat disassembly and positioning device according to claim 1, characterized in that, The foot position correction mechanism (5) includes a first limiting member (51), a first translation drive module (52), and a first lifting drive module (53); The first limiting member (51) moves along the length direction of the disassembly and assembly platform (2) through the first lifting drive module (53), and the first limiting member (51) moves along the vertical direction through the first lifting drive module (53). The body position correction mechanism (6) includes: a fixed correction component (61) and a movable correction component (62) disposed opposite to each other in the width direction of the disassembly and assembly platform (2); The fixed correction component (61) includes a fixed limiting member (611); The active correction component (62) includes one or more second limiting members (621) and one or more second translation drive modules (622), wherein the second limiting member (621) moves along the width direction of the disassembly and assembly platform (2) through the corresponding second translation drive module (622).

3. The graphite boat disassembly and positioning device according to claim 2, characterized in that, The fixed limiting member (611), the first limiting member (51) and the second limiting member (621) are each one or more limiting rods.

4. The graphite boat disassembly and positioning device according to claim 2 or 3, characterized in that, The disassembly and assembly platform (2) has a calibration through hole (22), and the first limiting member (51) and the second limiting member (621) can move in the corresponding calibration through hole (22).

5. The graphite boat disassembly and positioning device according to claim 1, characterized in that, The clamping module (4) includes: a gripper (41) and a gripper drive assembly (42); The gripper drive assembly (42) drives the gripper to perform opening and closing movements and drives the gripper (41) to move in a direction parallel to the disassembly and assembly platform (2).

6. The graphite boat disassembly and positioning device according to claim 1 or 5, characterized in that, The number of clamping modules (4) is multiple, and each clamping module (4) is used to clamp one or two nuts (13).

7. The graphite boat disassembly and positioning device according to claim 6, characterized in that, One or more of the clamping modules (4) have a gripper (41) with a double nut (13) clamping part, which can be used to clamp two nuts (13) with a spacing of less than a preset distance.

8. The graphite boat disassembly and positioning device according to claim 7, characterized in that, The gripper (41) includes a first gripper (411), and the first gripper (411) includes a first clamping member (4111) and a second clamping member (4112) disposed opposite to each other; Two grooves (4113) are provided on each of the two opposite surfaces of the first clamping member (4111) and the second clamping member (4112), and the four grooves (4113) are opposite each other in pairs. The distance between the grooves (4113) of each clamping member is the same as the distance between the two nuts (13) located on the foot position.

9. The graphite boat disassembly and positioning device according to claim 7, characterized in that, The gripper (41) includes a second gripper, which includes a third clamping member and a fourth clamping member disposed opposite to each other; The third clamping member and the fourth clamping member are provided with grooves (4113) on their two opposite sides, and the two grooves (4113) are opposite to each other.

10. A graphite boat disassembly and assembly device, characterized in that, include: The graphite boat disassembly and positioning device (3) and the graphite boat overturning device as described in any one of claims 1 to 9; The graphite boat turning device includes a turning station, a turning drive mechanism, and a clamping mechanism. The flipping station includes a first support platform and a disassembly platform (2) connected together. The angle between the first support platform and the disassembly platform (2) matches the connection angle between the side surface of the graphite boat and the bottom surface of the graphite boat (14). The first support platform and the disassembly platform (2) are respectively used to support the side surface of the graphite boat and the bottom surface of the graphite boat (14) during the flipping process. The flipping drive mechanism is connected to the flipping station, and the flipping drive mechanism is used to rotate the flipping station; The first support platform is connected to the symmetrical clamping mechanism along its length, and the clamping mechanism is used to clamp the graphite boat feet (12) at both ends of the graphite boat along its length. The graphite boat disassembly and positioning device (3) is used to move the graphite boat (1) placed on the disassembly platform (2) and in a vertical state, and to clamp the nut (13) on the bottom surface (14) of the graphite boat.

11. A graphite boat disassembly and assembly device, characterized in that, include: The graphite boat disassembly and positioning device (3) and graphite boat disassembly and assembly components as described in any one of claims 1 to 9; The graphite boat disassembly and positioning device (3) is used to move the graphite boat (1) placed on the disassembly platform (2) and in a vertical state, and to clamp the nut (13) on the bottom surface (14) of the graphite boat. The graphite boat disassembly and assembly assembly is used to disassemble and assemble the graphite boat top nut (13), graphite boat sheet (11), ceramic ring and electrode block.

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