A polishing pad and waste fluid recovery apparatus

Abstract

This utility model discloses a grinding pad and waste liquid recovery device, including a box body with densely arranged first through holes on the bottom surface of the box body; the side walls of the box body include movable side walls, which are connected to the bottom surface of the box body via torque hinges; inside the box body, with the bottom surface as the reference, a filter screen and several grinding pad slots are arranged sequentially from low to high, and the grinding pad slots are arranged along the bottom length of the box body; a liquid collection tank with slots matching the contour of the bottom surface of the box body is provided at the bottom of the box body, and the liquid collection tank is connected to the box body via a sealing component. By setting up a graded filtration mechanism with grinding pad slot through holes, filter screen, and through holes on the bottom surface of the box body, the components of the waste liquid are separated, which facilitates subsequent process parameter research; by setting up a liquid collection tank and a liquid level alarm, the cost of manual monitoring is reduced. This utility model further enhances the utilization value of residual liquid while centrally and classifying the disposal of hazardous waste.

Description

Technical Field

[0001] This utility model relates to the field of chemical mechanical grinding technology, specifically to a grinding pad and a waste liquid recovery device. Background Technology

[0002] Chemical mechanical polishing (CMP) is a critical surface planarization process in semiconductor manufacturing. During this process, rapid wear and surface morphology changes of the polishing pad directly affect polishing efficiency and product quality. Therefore, it is necessary to replace used polishing pads regularly to maintain CMP stability. Waste polishing pads are typically collected manually or using simple mechanical grabbing, without dedicated equipment for processing and disposal. This situation leads to the direct leakage or discharge of waste liquid containing metal particles, residual abrasives, and chemical additives into the environment, impacting environmental health and worker health, and increasing the cost of hazardous waste disposal. Furthermore, waste liquid leakage causes factories to miss important process analysis windows. Real-time monitoring of waste liquid composition (such as metal ion concentration, pH changes, and abrasive particle size distribution) allows for precise inference of key parameters during the polishing process, such as the friction coefficient and material removal rate, providing data support for optimizing process conditions such as polishing pressure and rotation speed matching. Summary of the Invention

[0003] Purpose of the utility model: To address the problems mentioned in the background art, this utility model discloses a grinding pad and waste liquid recovery device. Through a box containing movable side plates and grinding pad slots, it facilitates assembly, efficiently recovers waste grinding pads, and centrally stores them for harmless treatment. A graded filtration mechanism is formed by establishing through holes in the grinding pad slots, a filter screen, and through holes on the bottom of the box, accurately separating grinding pad fiber debris, dust, grinding particles, and waste liquid without solids, facilitating subsequent process parameter research. The inclusion of a collection tank and a liquid level alarm reduces manual monitoring costs.

[0004] Technical solution:

[0005] A grinding pad and waste liquid recovery device includes a housing, the housing having a bottom surface and four side walls. The bottom surface of the housing has densely arranged first through holes. At least one of the side walls is a movable side wall, which is connected to the bottom surface of the housing via a torque hinge. Inside the housing, with the bottom surface as a reference, a filter screen and several grinding pad slots are arranged sequentially from low to high, the grinding pad slots being arranged along the length of the bottom of the housing. A liquid collection tank with an opening matching the contour of the bottom surface of the housing is provided at the bottom of the housing, and the liquid collection tank is connected to the housing via a sealing assembly.

[0006] Furthermore, the contact surface between the grinding pad slot and the grinding pad is provided with densely arranged second through holes, the second through holes connecting to the bottom of the grinding pad slot to allow liquid to seep down to the filter screen; the diameter of the second through hole is larger than the mesh diameter of the filter screen, and the mesh diameter of the filter screen is larger than the diameter of the first through hole.

[0007] Furthermore, the filter screen is detachably connected to the bottom surface of the housing.

[0008] Furthermore, the grinding pad slot matches the shape of the grinding pad and is arranged at an angle inside the housing.

[0009] Furthermore, the sealing assembly includes a flange fixed along the contour of the bottom surface of the housing and a groove fixed along the contour of the liquid collection groove that matches the flange. A sealing lip is embedded in the groove, and the sealing lip is subjected to the force of the housing to form an interference fit, thereby achieving the purpose of sealing.

[0010] Furthermore, the box body and the liquid collection tank are connected by an angle steel flange, and the sealing lip is further squeezed to deform it and fill the gap of the connection surface.

[0011] Furthermore, the side wall of the collection tank is equipped with a liquid level alarm. When the liquid level in the collection tank rises to a set value, the liquid level alarm will trigger an early warning, reminding staff to promptly recycle the waste liquid or replace the collection tank.

[0012] Beneficial effects:

[0013] 1. This utility model provides a movable side plate in the housing, allowing workers to open the side plate directly when filling the grinding pad. This facilitates filling and the side plate itself also serves as a guide, further reducing the outflow of waste liquid from the device.

[0014] 2. This utility model places the grinding pad slots at an angle into the box, rather than arranging them neatly and tightly, making it easier to pick up and put down the grinding pad slots and less likely to tip them over, thus further improving the filling efficiency.

[0015] 3. This utility model forms a graded filtration mechanism by setting up through holes in the grinding pad slot, filter screen and through holes on the bottom of the box, which accurately separates grinding pad fiber debris, dust and grinding particles as well as waste liquid without solids. While treating the waste liquid in a harmless manner, it filters and classifies the components, which facilitates the subsequent process component research and provides convenience for further harmless treatment.

[0016] 4. This utility model features a liquid level alarm installed on the side wall of the collection tank. When the waste liquid in the collection tank reaches a preset value, an alarm is triggered, reminding staff to replace the waste. This eliminates the need for frequent manual removal of the tank for inspection, reducing manual monitoring costs. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present invention;

[0018] Figure 2 This is a schematic diagram of the internal structure of the box in an embodiment of the present invention;

[0019] Figure 3 This is a schematic diagram of the grinding pad slot structure of the present invention;

[0020] Figure 4 This is a cross-sectional view of the sealing assembly of the present invention;

[0021] Figure 5 This is a schematic diagram of the grinding pad of the present invention.

[0022] 1. Box body, 11. Box bottom surface, 111. First through hole, 12. Box side wall, 121. Movable side wall, 2. Filter screen, 3. Grinding pad groove, 31. Contact surface, 311. Second through hole, 4. Liquid collection tank, 5. Sealing assembly, 51. Flange, 52. Groove, 521. Sealing lip, 53. Angle steel flange, 6. Liquid level alarm. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0024] Example 1:

[0025] like Figure 1-5 As shown, this embodiment discloses a grinding pad and waste liquid recovery device, including a box 1. The box 1 includes a bottom surface 11 and four side walls 12. The bottom surface 11 is provided with densely arranged first through holes 111. The side wall 12 includes a movable side wall 121, which is connected to the bottom surface 11 by a torque hinge. Inside the box 1, with the bottom surface 11 as the reference, a filter screen 2 and several grinding pad slots 3 are arranged from low to high. The grinding pad slots 3 are arranged along the bottom length of the box 1. A liquid collection tank 4 with an opening matching the contour of the bottom surface 11 is provided below the box 1. The liquid collection tank 4 is connected to the box 1 by a sealing assembly 5.

[0026] like Figure 2-3As shown, the contact surface 31 between the grinding pad groove 3 and the grinding pad is provided with densely arranged second through holes 311. The second through holes 311 connect to the bottom of the grinding pad groove 3, allowing liquid to seep down to the filter screen 2. The diameter of the pores of the second through holes 311 is larger than the mesh diameter of the filter screen 2, and the mesh diameter of the filter screen 2 is larger than the diameter of the pores of the first through holes 111. Depending on different filtration requirements, the diameters of the through holes and the mesh can be adjusted according to the needs of the filtered material, while still meeting the requirements of the above-mentioned three-stage filtration.

[0027] In this embodiment, the second through-hole 311 has a pore diameter of 5 mm and is used to separate grinding pad debris and waste liquid. The filter screen 2 has a mesh diameter of 2 mm (which can be replaced according to different filtration needs) and is used to separate most of the solid impurities and grinding slurry in the waste liquid. The first through-hole 111 has a pore diameter of 1 mm and is used to separate crystals formed by chemical reactions or settling in the grinding slurry, while also filtering out some smaller solid impurities. The ultimate goal of this device is to obtain waste grinding slurry that is as free of solids as possible for subsequent process analysis.

[0028] In this embodiment, the filter screen 2 is magnetically connected to the bottom surface 11 of the housing via a magnet attached to it, allowing for the replacement of filter screens 2 of different sizes according to different filtration needs. This facilitates the easy disassembly and replacement of filter screens 2 with different mesh sizes as needed.

[0029] The grinding pad slots 3 are shaped to match the grinding pads and are arranged at an angle within the housing 1. They support the grinding pads while guiding any residual liquid on them downwards for further seepage. The angled arrangement of the grinding pad slots 3 makes them easier to access and less prone to tipping over compared to tightly packed slots. The angled slots allow water to flow naturally along the inclined surface to the edges and then to the lower filter layer, further improving filtration efficiency.

[0030] like Figure 4 As shown, the sealing assembly 5 includes a flange 51 fixed along the contour of the bottom surface 11 of the housing 1 and a groove 52 fixed along the contour of the opening of the liquid collection tank 4, which matches the flange 51. A sealing lip 521 is embedded in the groove 52. The sealing lip 521 is pressed by the gravity of the housing 1 to form an interference fit, thereby achieving the purpose of sealing. The housing 1 and the liquid collection tank 4 are connected by an angle steel flange 53, which further compresses the sealing lip 521 to deform it and fill the gap of the connection surface.

[0031] The side wall of the collection tank 4 is equipped with a liquid level alarm 6. When the liquid level in the collection tank 4 rises to the set value, the liquid level alarm 6 will trigger an alarm, reminding staff to promptly recycle the waste liquid or replace the collection tank 4.

[0032] Example 2:

[0033] Based on the previous embodiment, in this embodiment, the filter screen 2 is connected to the bottom surface 11 of the housing by bolts. Although the magnetic connection in the previous embodiment is more difficult to disassemble, the connection is more secure.

[0034] Example 3:

[0035] Based on the previous embodiment, the housing 1, grinding pad slot 3, filter screen 2, and liquid collection tank 4 in this embodiment are all made of acid and alkali resistant glass or nickel-plated metal, which can be used for filtering and collecting grinding fluids containing corrosive substances.

[0036] The working principle of this utility model is as follows:

[0037] Workers open the movable side panel of box 1 and can place the waste grinding pad into the grinding pad slot 3 inside box 1 using manual or mechanical grippers. The grinding pad is placed in the grinding pad slot as follows: Figure 5 As shown, the waste liquid on the discarded grinding pad first flows into the grinding pad slot 3, where it undergoes the first filtration through the second through hole 311. The filtered waste liquid then flows to the filter screen 2 for a second filtration. Finally, the solid-free waste liquid flows into the collection tank 4 through the first through hole 111 on the bottom surface 11 of the tank. When the collection tank 4 is saturated with waste liquid, the liquid level alarm detects that the liquid level has reached a preset height and immediately sounds an alarm. Upon receiving this information, the operator can disassemble the angle steel flange 53 and replace the collection tank 4 to allow the device to continue operating.

[0038] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to the embodiments will be readily apparent to those skilled in the art. The general principles of the present invention may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention should not be limited to the embodiments shown herein, but should cover the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A polishing pad and waste liquid recovery apparatus comprising a case (1), characterized by, The box body (1) includes a bottom surface (11) and four side walls (12). The bottom surface (11) is provided with densely arranged first through holes (111). At least one side wall (121) is provided in the side wall (12). The side wall (121) is connected to the bottom surface (11) of the box body by a torque hinge. The inside of the box body is provided with a filter screen (2) and several grinding pad slots (3) from low to high, with the bottom surface of the box body as the reference. The grinding pad slots (3) are arranged along the bottom length of the box body. The bottom of the box body is provided with a liquid collection tank (4) with the groove matching the outline of the bottom surface of the box body. The liquid collection tank (4) is connected to the box body (1) by a sealing component (5).

2. The polishing pad and waste fluid recovery apparatus of claim 1, wherein, The grinding pad slot (3) and the contact surface (31) of the grinding pad are provided with densely arranged second through holes (311). The second through holes (311) connect to the bottom of the grinding pad slot so that the liquid seeps down to the filter screen (2). The diameter of the hole of the second through hole (311) is larger than the mesh diameter of the filter screen (2), and the mesh diameter of the filter screen (2) is larger than the diameter of the hole of the first through hole (111).

3. The polishing pad and waste fluid recovery apparatus of claim 1, wherein, The filter screen (2) is detachably connected to the bottom surface (11) of the box.

4. The grinding pad and waste liquid recovery device according to claim 2, characterized in that, The grinding pad slot (3) matches the shape of the grinding pad and is arranged at an angle inside the housing (1).

5. The grinding pad and waste liquid recovery device according to claim 1, characterized in that, The sealing assembly (5) includes a flange (51) fixed along the bottom surface contour of the box body and a groove (52) fixed along the groove contour of the liquid collection tank matching the flange. The sealing lip (521) is embedded in the groove. The sealing lip (521) is subjected to the force of the box body to form an interference fit, thereby achieving the purpose of sealing.

6. The grinding pad and waste liquid recovery device according to claim 5, characterized in that, The box (1) and the liquid collection tank (4) are connected by an angle steel flange (53), and the sealing lip (521) is further squeezed to deform it and fill the gap of the connection surface.

7. The grinding pad and waste liquid recovery device according to claim 1, characterized in that, The liquid collection tank (4) is equipped with a liquid level alarm (6) on its side wall. When the liquid level in the liquid collection tank (4) rises to the set value, the liquid level alarm (6) triggers an early warning, reminding the staff to recycle the waste liquid or replace the liquid collection tank in time.

Images