Clamping mechanism for preventing damage of storage chip processing

Abstract

This utility model discloses a clamping mechanism for preventing damage during memory chip processing, relating to the field of chip clamping technology. The utility model includes a main structure comprising a support base, a hydraulic rod at the upper end of the support base, and a lifting plate at the upper end of the hydraulic rod; and a clamping structure comprising a mounting frame at the lower end of the lifting plate, a motor at one end of the mounting frame, a mounting shaft at the motor output end, mounting seats arranged in a circular array below the support base, a rotating shaft rotatably mounted inside the mounting seats, a clamping rod located on the outer wall of the rotating shaft, an airbag at one end of the clamping rod, a torsion spring sleeved on the outer side of the rotating shaft, and a pull rope connected to the mounting shaft and wound around its outer wall with one end connected to the clamping rod. This utility model, by setting up a clamping structure, solves the problem that small stroke errors during precise control of the robot's stroke affect the stable clamping of the chip, and that excessive clamping force can scratch or even break the chip, affecting its usability.

Description

Technical Field

[0001] This utility model relates to the field of chip clamping technology, and in particular to a clamping mechanism for preventing damage during memory chip processing. Background Technology

[0002] A chip is a miniature circuit assembly manufactured on a semiconductor wafer using processes such as photolithography and etching. It performs computing, storage, or control functions. After processing, chips undergo storage, transportation, and reprocessing. During reprocessing, a robotic arm is used to hold the chip.

[0003] Since the chip substrate is silicon, its clamping strength under localized stress is less than 1 GPa. When the hard material of the robotic arm's end effector contacts the wafer, the movement of the robotic arm is mostly driven by hydraulic pressure. The stroke of the robotic arm needs to be precisely controlled. Even a small stroke error can affect the stable clamping of the chip. Excessive clamping force can scratch or even shatter the chip, affecting its usability. Therefore, those skilled in the art have provided a clamping mechanism to prevent clamping damage in memory chip processing, in order to solve the problems mentioned in the background art. Utility Model Content

[0004] 1. Technical Solution

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model relates to a clamping mechanism for preventing damage during memory chip processing, comprising:

[0007] The main structure includes a support base, a hydraulic rod located at the upper end of the support base, and a lifting plate located at the upper end of the hydraulic rod;

[0008] The clamping structure includes a mounting frame located at the lower end of the lifting plate, a motor located at one end of the mounting frame, a mounting shaft located at the output end of the motor, mounting seats arranged in a circular array below the support base, a rotating shaft rotatably mounted inside the mounting seat, a clamping rod located on the outer wall of the rotating shaft, an airbag located at one end of the clamping rod, a torsion spring sleeved on the outside of the rotating shaft and connected at both ends to the clamping rod and the mounting seat respectively, and a pull rope connected to the mounting shaft, wound around the outer wall of the mounting shaft, and connected at one end to the clamping rod;

[0009] as well as;

[0010] The adjustment structure includes bearing seats located on all four sides of the support base, a screw rod rotatably installed inside the bearing seats, a worm gear located at one end of the screw rod, and a nut threadedly connected to the screw rod and whose lower end is connected to the mounting base.

[0011] Furthermore, the support base is provided with symmetrically distributed guide rails on all four sides, and the outer wall of the nut is provided with symmetrically distributed side blocks. Each side block has a ball bearing that is rotatably installed inside one end and rolls in contact with the guide rail.

[0012] Specifically, the nut is guided by balls sliding inside the guide rail at both ends.

[0013] Furthermore, a bearing bracket is provided at the upper end of the guide rail, and a worm gear meshing with a worm wheel and a torsion block located at one end of the worm gear are rotatably installed inside the bearing bracket;

[0014] Specifically, the bearing bracket provides rotational support for the worm gear, and the gripping torsion block facilitates the application of rotational force to the worm gear.

[0015] Furthermore, one end of the mounting base is provided with a stop bar located on one side of the clamping rod;

[0016] Specifically, when the clamping rod is elastically reset by the torsion spring, the stop bar limits the rotation angle of the clamping rod, thereby preventing the torsion force of the torsion spring from acting too much on the pull rope.

[0017] Furthermore, the mounting shaft is sleeved with symmetrically distributed limit wheels located outside the pull rope, and an electromagnetic brake is sleeved with the mounting shaft.

[0018] Specifically, the pull rope that winds up the outer wall of the mounting shaft is limited by a limit wheel, and electromagnetic protection locks the mounting shaft when it stops rotating.

[0019] Furthermore, the nut has a travel groove inside, the lower end of the pull rope is located inside the travel groove, the outer walls of both the upper and lower ends of the nut are provided with guide wheels one, the upper end of the clamping rod is provided with guide wheels two, the lower end of the mounting frame is rotatably installed with guide wheels three, and the pull rope is rotatably installed inside guide wheels one, guide wheels two and guide wheels three;

[0020] Specifically, the pull rope moves longitudinally inside the nut end through the stroke groove. During the longitudinal movement of the pull rope, it is guided by guide wheel one, guide wheel two, and guide wheel three, so that the structural components do not interfere with each other and the pull rope can be moved and used effectively.

[0021] 2. Beneficial effects

[0022] Compared with existing technologies, the advantages of this utility model are:

[0023] This utility model uses four sets of clamping rods to clamp the chip at four points. During the clamping process, a pull rope pulls the chip, and the rotating clamping rods tighten inward. When the pull rope loosens, the clamping rods that support the rotation of the clamping rods automatically unfold outward through a torsion spring, preparing for clamping again. The relative positions between the clamping rods are adjustable to accommodate different specifications of memory chips.

[0024] Meanwhile, an airbag is provided at the position of the clamping rod that contacts the outer wall of the chip. The airbag has the characteristic of squeezing and shrinking, which effectively compensates for the small stroke error caused by debugging, avoids the chip being directly damaged by clamping, and improves the safety of the memory chip clamping.

[0025] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a front-view three-dimensional structural diagram of the present invention;

[0028] Figure 2 This is a bottom-view three-dimensional structural diagram of the present invention;

[0029] Figure 3 This is a three-dimensional structural diagram of the hydraulic rod of this utility model from a bottom view;

[0030] Figure 4 This is a top-view three-dimensional structural diagram of the screw of this utility model;

[0031] Figure 5 This is a front-view three-dimensional structural diagram of the clamping rod of this utility model.

[0032] The attached diagram lists the components represented by each number as follows:

[0033] 100. Main structure; 101. Support base; 102. Hydraulic rod; 103. Lifting plate;

[0034] 200. Clamping structure; 201. Mounting base; 202. Stop bar; 203. Rotating shaft; 204. Torsion spring; 205. Guide wheel one; 206. Guide wheel two; 207. Pull rope; 208. Clamping rod; 209. Airbag; 210. Motor; 211. Mounting frame; 212. Mounting shaft; 213. Limiting wheel; 214. Guide wheel three;

[0035] 300. Adjustment structure; 301. Screw; 302. Bearing housing; 303. Worm gear; 304. Bearing bracket; 305. Worm; 306. Torque block; 307. Nut; 308. Side block; 309. Ball bearing; 310. Stroke groove; 311. Guide rail. Detailed Implementation

[0036] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0037] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0038] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0039] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0040] Example 1

[0041] Please see Figure 1-5 As shown, this embodiment is a clamping mechanism for preventing pinch damage during memory chip processing, including:

[0042] The main structure 100 includes a support base 101, a hydraulic rod 102 located at the upper end of the support base 101, and a lifting plate 103 located at the upper end of the hydraulic rod 102;

[0043] The clamping structure 200 includes a mounting frame 211 located at the lower end of the lifting plate 103, a motor 210 located at one end of the mounting frame 211, a mounting shaft 212 located at the output end of the motor 210, mounting seats 201 arranged in a ring array below the support seat 101, a rotating shaft 203 rotatably mounted inside the mounting seat 201, a clamping rod 208 located on the outer wall of the rotating shaft 203, an airbag 209 located at one end of the clamping rod 208, a torsion spring 204 sleeved on the outside of the rotating shaft 203 and connected at both ends to the clamping rod 208 and the mounting seat 201 respectively, and a pull rope 207 connected to the mounting shaft 212, wound around the outer wall of the mounting shaft 212, and connected at one end to the clamping rod 208.

[0044] One end of the mounting base 201 is provided with a stop bar 202 located on one side of the clamping rod 208;

[0045] The mounting shaft 212 is fitted with symmetrically distributed limit wheels 213 located outside the pull rope 207, and an electromagnetic brake is fitted on the outer side of the mounting shaft 212.

[0046] Use of clamping structure 200;

[0047] The motor 210 at one end of the mounting frame 211 is started. The output end of the motor 210 drives the mounting shaft 212 to rotate. The mounting shaft 212 winds up the pull rope 207 connected to the outer wall. During the movement, the pull rope 207 moves longitudinally through the stroke groove 310 inside the nut 307 and is guided by the guide wheel 205 at the upper and lower ends of the nut 307, the guide wheel 206 at the upper end of the clamping rod 208, and the guide wheel 214 rotatably installed inside the lower end of the mounting frame 211. This ensures that the pull rope 207 moves effectively and that the structural components do not interfere with each other. When the pull rope 207 is tightened, it pulls the clamping rod 208, which is rotatably installed on the outer wall of the rotating shaft 203 inside the mounting base 201, to tighten inward and clamp the chip at four points. At this time, the airbag 209 set at the position of the clamping rod 208 that contacts the outer wall of the chip plays a role. Because it has the squeezing and micro-shrinkage characteristics, even if the robot arm has a small stroke error due to hydraulic drive, the airbag 209 can effectively compensate and avoid the chip being directly damaged.

[0048] When the chip needs to be released, the motor 210 reverses, and the mounting shaft 212 releases the pull rope 207. The pull rope 207 loosens, and at this time, the torsion spring 204, which is sleeved on the outside of the rotating shaft 203 and connected to the clamping rod 208 and the mounting base 201 at both ends respectively, plays a role in elastically resetting the clamping rod 208, so that it automatically unfolds outward to prepare for clamping again. At the same time, the electromagnetic brake sleeved on the outside of the mounting shaft 212 can lock the mounting shaft 212 when it stops rotating, ensuring the stability of the structure. Moreover, the stop bar 202 set at one end of the mounting base 201 can limit the rotation angle of the clamping rod 208 and prevent the torsion force of the torsion spring 204 from acting too much on the pull rope 207.

[0049] Meanwhile, after the positions of the pull rope 207 and the clamping rod 208 are adjusted, the motor 210 is driven to move longitudinally by the driving hydraulic rod 102, so that the pull rope 207 moves longitudinally synchronously. It is worth noting that this structure is connected to the robotic arm, and the connection end avoids contact with the lifting plate 103, providing sufficient movement space for the lifting plate 103. It is directly connected to the four corners of the support base 101. The connection end can be additionally equipped with a support leg structure for connection and installation with the support base 101, so that the clamping rod 208 can be used at any angle.

[0050] When compressed, the airbag 209 undergoes micron-level elastic deformation, increasing the contact area and reducing the local pressure to below the silicon material's clamping strength of 1 GPa. Hydraulic stroke errors are absorbed by the airbag 209's compression stroke, preventing hard contact that could lead to microcracks. This solves the problem of excessive clamping force caused by stroke errors in traditional robotic arms when holding chips, which can easily scratch or even break the chips. The airbag 209 further enhances the safety of chip clamping, providing reliable protection for memory chip processing and effectively improving production efficiency and product quality.

[0051] Example 2

[0052] Please see Figure 1-5 As shown, and;

[0053] The adjusting structure 300 includes bearing seats 302 located on the four sides of the support seat 101, a screw 301 rotatably installed inside the bearing seat 302, a worm gear 303 located at one end of the screw 301, and a nut 307 threadedly connected to the screw 301 and whose lower end is connected to the mounting seat 201.

[0054] The support base 101 is provided with symmetrically distributed guide rails 311 on all four sides, and the outer wall of the nut 307 is provided with symmetrically distributed side blocks 308. Each side block 308 has a ball bearing 309 rotatably installed inside one end, which is in rolling contact with the guide rail 311.

[0055] The upper end of the guide rail 311 is provided with a bearing bracket 304, and a worm 305 that meshes with the worm wheel 303 and a torsion block 306 located at one end of the worm 305 are rotatably installed inside the bearing bracket 304.

[0056] The nut 307 has a stroke groove 310 inside, the lower end of the pull rope 207 is located inside the stroke groove 310, the upper and lower outer walls of the nut 307 are provided with guide wheels 205, the upper end of the clamping rod 208 is provided with guide wheels 206, the lower end of the mounting frame 211 is rotatably installed with guide wheels 214, and the pull rope 207 is rotatably installed inside guide wheels 205, guide wheels 206 and guide wheels 214;

[0057] Use the adjustment structure 300;

[0058] When using this memory chip to process the anti-pinch damage clamping mechanism, the position is first adjusted to adapt to chips of different specifications. This is done by gripping and rotating the torsion block 306 at one end of the worm 305 inside the upper bearing bracket 304 of the guide rail 311. Since the worm 305 meshes with the worm wheel 303 at one end of the screw 301, the rotation of the worm 305 will drive the worm wheel 303 to rotate, thereby causing the screw 301 to rotate within the bearing seat 302. When the screw 301 rotates, the nut 3, which is threaded onto it and whose lower end is connected to the mounting base 201, engages with it. 07. Guided by the symmetrically distributed guide rails 311 on all four sides of the support base 101, the ball bearings 309, which are rotatably mounted inside one end of the side block 308, slide within the guide rails 311 to achieve smooth longitudinal movement. This adjusts the relative position of the mounting base 201, allowing the four sets of mounting bases 201 arranged in a circular array to be rationally arranged around the chip. The four sets of clamping rods 208 form an inner diameter specification that adapts to the chip size. Through the adjustable clamping structure 200, it can adapt to the clamping requirements of chips of different specifications.

[0059] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0060] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A clamping mechanism for preventing damage during memory chip processing, characterized in that: include, The main structure (100) includes a support base (101), a hydraulic rod (102) located at the upper end of the support base (101), and a lifting plate (103) located at the upper end of the hydraulic rod (102); The clamping structure (200) includes a mounting frame (211) located at the lower end of the lifting plate (103), a motor (210) located at one end of the mounting frame (211), a mounting shaft (212) located at the output end of the motor (210), mounting seats (201) arranged in a ring array below the support seat (101), a rotating shaft (203) rotatably mounted inside the mounting seat (201), a clamping rod (208) located on the outer wall of the rotating shaft (203), an airbag (209) located at one end of the clamping rod (208), a torsion spring (204) sleeved on the outside of the rotating shaft (203) and connected at both ends to the clamping rod (208) and the mounting seat (201) respectively, and a pull rope (207) connected to the mounting shaft (212), wound around the outer wall of the mounting shaft (212), and connected at one end to the clamping rod (208); as well as; The adjusting structure (300) includes bearing seats (302) located on the four sides of the support seat (101), a screw (301) rotatably installed inside the bearing seat (302), a worm gear (303) located at one end of the screw (301), and a nut (307) threadedly installed with the screw (301) and connected at its lower end to the mounting seat (201).

2. The clamping mechanism for preventing pinch damage during memory chip processing according to claim 1, characterized in that: The support base (101) is provided with symmetrically distributed guide rails (311) on all four sides, and the outer wall of the nut (307) is provided with symmetrically distributed side blocks (308). Each side block (308) has a ball bearing (309) rotatably installed inside one end, which is in rolling contact with the guide rail (311).

3. The clamping mechanism for preventing pinch damage during memory chip processing according to claim 2, characterized in that: The upper end of the guide rail (311) is provided with a bearing bracket (304), and a worm (305) that meshes with the worm wheel (303) and a torsion block (306) located at one end of the worm (305) are rotatably installed inside the bearing bracket (304).

4. The clamping mechanism for preventing pinch damage during memory chip processing according to claim 1, characterized in that: One end of the mounting base (201) is provided with a stop bar (202) located on one side of the clamping rod (208).

5. The clamping mechanism for preventing damage during memory chip processing according to claim 1, characterized in that: The mounting shaft (212) is fitted with symmetrically distributed limit wheels (213) located outside the pull rope (207), and an electromagnetic brake is fitted on the outside of the mounting shaft (212).

6. The clamping mechanism for preventing pinch damage during memory chip processing according to claim 1, characterized in that: The nut (307) has a travel groove (310) inside. The lower end of the pull rope (207) is located inside the travel groove (310). The outer walls of both the upper and lower ends of the nut (307) are provided with guide wheels one (205). The upper end of the clamping rod (208) is provided with guide wheels two (206). The lower end of the mounting frame (211) is rotatably installed with guide wheels three (214). The pull rope (207) is rotatably installed inside guide wheels one (205), guide wheels two (206) and guide wheels three (214).

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