A precision XY translation stage

Abstract

This utility model relates to a precision XY-axis translation stage, comprising a movable panel, an intermediate platform, guide rails, lead screw assemblies, and a motor. Two movable panels are respectively mounted on opposite sides of the intermediate platform. The guide rails include mutually perpendicular X-axis and Y-axis guide rails, with the X-axis guide rail installed between one movable panel and the intermediate platform, and the Y-axis guide rail installed between the other movable panel and the intermediate platform. Two lead screw assemblies are mounted on the side of the intermediate platform, with each lead screw assembly's output end connected to one movable panel. The motor is connected to the lead screw assemblies. The movable panels and the intermediate platform move relative to each other in the X and Y directions, realizing the movement of the translation stage along the XY axes. Compared with existing technologies, this method has advantages such as a large movement range, high precision, high load capacity, simple structure, and ease of installation and maintenance.

Description

Technical Field

[0001] This utility model relates to a translation stage, and more particularly to a precision XY-axis translation stage. Background Technology

[0002] Translation stages are crucial components for the precise displacement of microscope stages. They employ high-precision guides and drive mechanisms, such as crossed roller guides and ball screws, to ensure micron-level positioning accuracy. Typical applications include biological sample positioning, semiconductor detection, and materials analysis; some models are compatible with vacuum environments. They can be combined with microscopes, rotary stages, and other equipment to meet multi-dimensional observation needs, making them essential tools for precision optics and scientific research experiments.

[0003] A search revealed that application publication number CN117826393A discloses a high-precision microscope scanner, specifically comprising: a base, a Y-axis cross-roller sliding assembly mounted on a common ZY-axis base plate, a Y-axis sliding drive assembly on one side of the base, an X-axis cross-roller sliding assembly and an X-axis sliding drive assembly mounted on the Y-axis cross-roller sliding assembly, a slide holder assembly and a global downlight assembly mounted on the X-axis cross-roller sliding assembly, a lifting focusing assembly in the middle of the base, and a Z-axis sliding assembly mounted on the common ZY-axis base plate. However, this prior art has low load-bearing capacity, limited mobility, and limited application scope.

[0004] Application publication number CN119987005A discloses a multi-degree-of-freedom adjustable microscope stage, specifically including: a base, a tilting platform, a support arm, a microscope lens, a lens depth knob, a lens angle knob, a lens height knob, a support arm horizontal knob, a support arm vertical knob, a platform vertical knob, a platform horizontal knob, a tilt adjustment module, a cross-roller X-axis guide rail, a cross-roller Y-axis guide rail, a cross roller bearing, a preloaded spring assembly, and a piezoelectric ceramic actuator. However, this prior art is not optimized for two-dimensional motion and also suffers from problems such as low load-bearing capacity, small range of motion, and limited application scope.

[0005] Existing translation stage structures generally suffer from problems such as complex structures, weak platform load-bearing capacity, and limited movement range, making it difficult to achieve large-scale, high-precision, high-load-bearing-capacity, high-rigidity, high-dynamic-response, and easy-to-install and maintain two-dimensional precision translation. Therefore, designing a two-dimensional translation stage that is easy to maintain is a key technical problem that needs to be solved. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of the existing technology, such as limited range of motion, limited load capacity, and limited application scope, and to provide a precision XY-axis translation stage.

[0007] The objective of this utility model can be achieved through the following technical solutions:

[0008] According to one aspect of this utility model, a precision XY-axis translation stage is provided, comprising a movable panel, an intermediate platform, guide rails, lead screw assemblies, and a motor. Two movable panels are respectively mounted on opposite sides of the intermediate platform. The guide rails include mutually perpendicular X-axis and Y-axis guide rails, with the X-axis guide rail installed between one movable panel and the intermediate platform, and the Y-axis guide rail installed between the other movable panel and the intermediate platform. Two lead screw assemblies are mounted on the side of the intermediate platform, with each lead screw assembly's output end connected to one movable panel. The motor is connected to the lead screw assemblies.

[0009] As a preferred technical solution, the side of the movable panel is provided with a first guide rail mounting position, and the two sides of the intermediate platform are respectively provided with a second guide rail mounting position and a third guide rail mounting position corresponding to the first guide rail mounting positions of the two movable panels.

[0010] As a preferred technical solution, the middle platform is hollowed out in the middle.

[0011] As a preferred technical solution, there are two X-guide rails, symmetrically arranged on opposite sides of one side of the middle platform; and two Y-guide rails, symmetrically arranged on opposite sides of the other side of the middle platform.

[0012] As a preferred technical solution, the lead screw assembly includes a lead screw, a flange, a connecting plate, and a lead screw housing. The lead screw is installed inside the lead screw housing, the flange passes through the lead screw, and the connecting plate includes two mutually perpendicular sections, one of which is connected to the flange end face, and the other is fixed to one side of the movable panel mounting rail.

[0013] As a preferred technical solution, the translation stage further includes a motor fixing bracket, which includes a first end face, a second end face, and a connecting section located between the first end face and the second end face. The first end face is mounted on the lead screw housing, and the end face where the motor output shaft is located is fixed on the second end face. The connecting section is cylindrical with a hollowed-out circumference. The motor output shaft is connected to one end of the lead screw through a coupling, which is located inside the connecting section.

[0014] As a preferred technical solution, the motor is a stepper motor, and the output shaft of the stepper motor is connected to one end of the lead screw through a double diaphragm clamping coupling.

[0015] As a preferred technical solution, there are two lead screw assemblies, with the lead screw housings of the two lead screw assemblies fixed on the intermediate platform, and each of the connecting plates of the two lead screw assemblies connected to a movable panel.

[0016] As a preferred technical solution, the guide rail is a roller guide rail, which includes rollers and a cage, with the rollers installed inside the cage.

[0017] As a preferred technical solution, the movable panel is a movable panel made of aluminum alloy, and the intermediate platform is an intermediate platform made of aluminum alloy.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1) In this utility model, one movable panel and the middle platform move relative to each other in the X direction, and the middle platform and another movable panel move relative to each other in the Y direction, so as to realize the movement of the translation stage in the XY axis direction; the lead screw assembly is used for transmission, which has high transmission efficiency, simple three-layer structure, low cost, and is easy to install and maintain.

[0020] 2) This utility model installs guide rails at the second and third guide rail mounting positions, effectively ensuring the accuracy of the translation stage's movement; symmetrical installation of guide rails ensures smooth movement and consistent X-axis and Y-axis movement performance; the hollow design in the middle of the intermediate platform effectively reduces the weight of the translation stage itself, enabling faster and more accurate movement, improving the system's dynamic response speed, reducing inertia, and making it easier for the translation stage to achieve high-precision position control, further improving its stability.

[0021] 3) The movable panel of this utility model provides a larger support surface for load-bearing and also provides convenience for fixing the objective stage or sample stage, making operation more convenient and application more widespread.

[0022] 4) The lead screw of this utility model can ensure the motion accuracy of the translation stage; in order to prevent the motor shaft from rotating and vibrating after the stepper motor is connected to the lead screw, resulting in unstable transmission, a motor fixing bracket is designed to connect the motor and the lead screw housing to ensure stable motor operation; the circumferential surface of the protection section is provided with a hollow, which is convenient for tightening the coupling clamping bolts and also has an aesthetic appeal.

[0023] 5) The output shaft of the stepper motor of this utility model is connected to one end of the lead screw through a double diaphragm clamping coupling. The double diaphragm clamping coupling can effectively compensate for misalignment of the two shafts, withstand greater angular displacement than a gear coupling, has less radial reaction force and greater flexibility, allows for certain axial, radial and angular displacements, has a significant shock absorption effect, operates without noise or wear, and can operate safely even in impact and vibration environments. The transmission efficiency reaches 99.86%, and it is suitable for medium and high-speed high-power transmission. The double diaphragm clamping coupling has a simple structure, is lightweight and small in size, is easy to install and disassemble, requires no lubrication, can accurately transmit speed, and ensures zero slip during operation. The motor fixing bracket avoids strong vibration of the motor shaft during rotation, which would lead to transmission instability and ensures the stability of the motor during operation.

[0024] 6) The use of roller guides in this utility model offers the following advantages: ① Low rolling friction and good stability. ② Low starting friction and good follow-up performance. ③ Large contact area, small elastic deformation, multiple effective moving parts, and easy realization of high rigidity and high load motion. ④ Flexible structural design, easy to install and use. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of a precision XY-axis translation stage according to the present invention;

[0026] Figure 2 This is a schematic diagram of the movable panel structure of this utility model;

[0027] Figure 3 This is a schematic diagram of the intermediate platform structure of this utility model;

[0028] Figure 4 This is a schematic diagram of the roller guide structure of this utility model;

[0029] Figure 5 This is a schematic diagram of the lead screw assembly structure of this utility model;

[0030] Figure 6 This is a schematic diagram of the installation of the lead screw assembly of this utility model;

[0031] Figure 7 This is a schematic diagram of the structure of the double diaphragm clamping coupling of this utility model;

[0032] Figure 8 This is a schematic diagram of the motor fixing bracket structure of this utility model;

[0033] The numbers in the diagram are as follows:

[0034] 1. Moving panel; 10. First guide rail mounting position; 2. Intermediate platform; 20. Second guide rail mounting position; 21. Third guide rail mounting position; 3. Motor; 40. X-axis guide rail; 41. Y-axis guide rail; 5. Lead screw assembly; 50. Lead screw; 51. Flange; 52. Lead screw housing; 53. Connecting plate; 6. Motor mounting bracket; 60. First end face; 61. Second end face; 62. Connecting protection section; 7. Double diaphragm clamping coupling. Detailed Implementation

[0035] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present utility model.

[0036] like Figure 1 As shown, this invention provides a precision XY-axis translation stage, including a movable panel 1, an intermediate platform 2, guide rails, a lead screw assembly 5, a motor mounting bracket 6, and a motor 3. The guide rails include mutually perpendicular X-axis guide rails 40 and Y-axis guide rails 41. This invention achieves high-precision positioning within a 140mm × 140mm travel range through a modular structure, suitable for adjusting the planar position of samples in routine microscopic observation, unlike the complex scanning systems in existing technologies that integrate three-dimensional motion and optical components. The translation stage is 300mm (X-axis) × 300mm (Y-axis) in size and can achieve precise positioning within a 140mm (X-axis) × 140mm (Y-axis) travel range. It has a dual-phase positioning repeatability of ±100nm / mm and a load capacity of up to 15kg. The overall structure is compact and mainly used for XY-axis positioning and motion control of microscope objective stages.

[0037] Both the movable panel 1 and the intermediate platform 2 are square. The movable panel 1 has a first guide rail mounting position 10 on two sides along one direction. The intermediate platform 2 has a second guide rail mounting position 20 on two sides along the X direction on one side and a third guide rail mounting position 21 on two sides along the Y direction on the other side. There are two movable panels 1, installed on opposite sides of the intermediate platform 2. An X-guide rail 40 is installed within the first guide rail mounting position 10 and the second guide rail mounting position 20, forming a sliding pair between one movable panel 1 and the intermediate platform 2 via the X-guide rail 40. A Y-guide rail 41 is installed within the first guide rail mounting position 10 and the third guide rail mounting position 21, forming a sliding pair between the other movable panel 1 and the intermediate platform via the Y-guide rail 41.

[0038] Both the movable panel 1 and the middle platform 2 are made of aluminum alloy.

[0039] like Figure 4 As shown, the guide rail is a roller guide rail, including rollers and a cage. The rollers are mounted inside the cage to ensure smooth and precise movement. The guide rail can also be a roller cross guide pair, model VR3-300H×42Z from THK.

[0040] like Figure 5 and Figure 6 As shown, the lead screw assembly 5 includes a lead screw 50, a flange 51, and a lead screw housing 52. ， The lead screw 50 is installed inside the lead screw housing 52, and the flange 51 passes through the lead screw 50; the two lead screw assemblies 5 provide movement in the X and Y directions respectively, the lead screw housing 52 of the lead screw assembly 5 is fixed on the intermediate platform 2, and the two flanges 51 are each connected to a movable panel 1 through the connecting plate 53.

[0041] The ball screw assembly can be selected from the roller ball screw model C-KBS1204-230.

[0042] The connecting plate 53 includes two perpendicular sections, one of which is connected to the end face of the flange 51, and the other is fixed to one side of the mounting rail of the movable panel 1.

[0043] like Figure 8 As shown, the motor mounting bracket 6 includes a first end face 60, a second end face 61, and a connecting protection section 62 located between the first end face 60 and the second end face 61. The first end face 60 is mounted on the lead screw housing 52, and the end face where the output shaft of the motor 3 is located is fixed on the second end face 61. The connecting protection section 62 is cylindrical with a hollowed-out surface on its circumference. The output shaft of the motor 3 is located inside the connecting protection section 62 and connected to one end of the lead screw 50. By driving the lead screw 50 to rotate through the motor 3, the connecting plate 53 between the lead screw 50 and the movable panel 1 is driven, achieving precise motion control of the X and Y axes. This effectively ensures accurate position control and stable movement, meeting the requirements of microscopic operation for high-precision positioning and reliable movement.

[0044] Motor 3 is a stepper motor. The output shaft of the stepper motor is connected to one end of the lead screw 50 through a double diaphragm clamping type coupling 7. The double diaphragm clamping type coupling 7 (E-LMCPW19-5-8) is selected, with a transmission efficiency of 99.86%. It drives the translation table to move through the flange 51 of the lead screw 50.

[0045] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A precision XY translation stage, characterized by, The system includes a movable panel (1), an intermediate platform (2), guide rails, a lead screw assembly (5), and a motor (3). There are two movable panels (1), which are respectively fastened to the two sides of the intermediate platform (2). The guide rails include mutually perpendicular X-guide rails (40) and Y-guide rails (41). The X-guide rails (40) are installed between one movable panel (1) and the intermediate platform (2), and the Y-guide rails (41) are installed between the other movable panel (1) and the intermediate platform (2). There are two lead screw assemblies (5), which are installed on the side of the intermediate platform (2). The output ends of the two lead screw assemblies (5) are each connected to one movable panel (1). The motor (3) is connected to the lead screw assembly (5).

2. The precision XY translation stage of claim 1, wherein, The movable panel (1) is provided with a first guide rail mounting position (10) on its side, and the middle platform (2) is provided with a second guide rail mounting position (20) and a third guide rail mounting position (21) on its two sides, respectively, corresponding to the first guide rail mounting positions (10) of the two movable panels (1).

3. The precision XY translation stage of claim 1, wherein, The middle platform (2) is hollowed out in the middle.

4. The precision XY translation stage of claim 1, wherein, The X-guide rails (40) are two in number and are symmetrically arranged on opposite sides of one side of the middle platform (2); the Y-guide rails (41) are two in number and are symmetrically arranged on opposite sides of the other side of the middle platform (2).

5. The precision XY translation stage of claim 1, wherein, The lead screw assembly (5) includes a lead screw (50), a flange (51), a connecting plate (53), and a lead screw housing (52). The lead screw (50) is installed inside the lead screw housing (52), and the flange (51) passes through the lead screw (50). The connecting plate (53) includes two mutually perpendicular sections, one of which is connected to the end face of the flange (51), and the other is fixed to one side of the mounting rail of the movable panel (1).

6. The precision XY translation stage of claim 5, wherein, The translation stage also includes a motor mounting bracket (6), which includes a first end face (60), a second end face (61), and a connecting section (62) located between the first end face (60) and the second end face (61). The first end face (60) is mounted on the lead screw housing (52), and the end face where the output shaft of the motor (3) is located is fixed on the second end face (61). The connecting section (62) is cylindrical with a hollowed-out surface on its circumference. The output shaft of the motor (3) is connected to one end of the lead screw (50) through a coupling (7), which is located inside the connecting section.

7. A precision XY-axis translation stage according to claim 5, characterized in that, The motor (3) is a stepper motor, and the output shaft of the stepper motor is connected to one end of the lead screw (50) through a double diaphragm clamping coupling (7).

8. The precision XY translation stage of claim 5, wherein, There are two lead screw assemblies (5), and the lead screw housings (52) of the two lead screw assemblies (5) are fixed on the intermediate platform (2). The connecting plates (53) of the two lead screw assemblies (5) are each connected to a movable panel (1).

9. The precision XY translation stage of claim 1, wherein, The guide rail is a roller guide rail, which includes rollers and a cage, with the rollers installed inside the cage.

10. The precision XY translation stage of claim 1, wherein, The movable panel (1) is made of aluminum alloy, and the intermediate platform (2) is made of aluminum alloy.

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