Evaporation source shielding device and evaporation device

Abstract

The utility model provides a kind of evaporation source shielding device, the evaporation source shielding device is correspondingly set with evaporation source, the evaporation source shielding device includes: evaporation source shielding part, by changing position to make evaporation source be in shielding state or open state;Vacuum collecting device, set in the evaporation source shielding part, when the evaporation source is in shielding state, for attracting and collecting evaporation material generated from the evaporation source.In the present application, by setting one evaporation source shielding part for each evaporation source, and setting vacuum collecting device in evaporation source shielding part, the shielding effect of the escaped material in evaporation source can be effectively improved, and cross contamination of different evaporation sources is prevented, and the separate recovery of different evaporation materials is realized.

Description

Technical Field

[0001] This application relates to the field of vacuum evaporation technology, and in particular to an evaporation source shielding device and an evaporation apparatus. Background Technology

[0002] In current vapor deposition equipment, metal evaporation tables are mostly single-crucible baffle structures. The main function of the crucible baffle is to cover the evaporation source during the pre-melting stage and the end of the process, preventing the material in the evaporation source from evaporating upwards, thereby ensuring the quality of the evaporated film.

[0003] Most existing baffles are made from metal materials through simple processing, and are usually rectangular or circular flat plates (such as...). Figure 1 As shown, the baffle's shielding effect on the material is not significant, and it is also detrimental to the recycling of the evaporation source material. Especially in the process of multi-metal composite evaporation, the existing single crucible cover structure may cause the metal already adhered to the crucible baffle to peel off due to differences in stress, adhesion, and melting points between the thin films of different metals. In severe cases, the metal may fall into the crucible, resulting in serious consequences such as contamination of the metal source and scrapping of the wafer.

[0004] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this application. Utility Model Content

[0005] The purpose of this invention is to provide an efficient evaporation source shielding device to prevent cross-contamination of different evaporation materials and improve the recycling rate of materials.

[0006] To address the aforementioned problems, in a first aspect, an evaporation source shielding device is provided, wherein the evaporation source shielding device is configured corresponding to an evaporation source, and the evaporation source shielding device includes:

[0007] An evaporation source shielding section can change the position of the evaporation source to either a shielded or open state.

[0008] A vacuum collection device is installed in the evaporation source shielding section. When the evaporation source is in a shielded state, it is used to attract and collect the vapor-deposited material generated from the evaporation source.

[0009] In this application, by setting an evaporation source shielding part for each evaporation source and setting a vacuum collection device in the evaporation source shielding part, the shielding effect of the material escaping from the evaporation source can be effectively improved, thereby preventing cross-contamination between different evaporation sources and realizing the individual recovery of different evaporation materials.

[0010] The evaporation source shielding section has an arc-shaped shielding member, the side of the arc-shaped shielding member facing the evaporation source being concave. By using the arc-shaped member as a baffle and setting the shielding surface as a concave surface, the shielding effect on the escaping material can be improved.

[0011] The evaporation source shielding part further includes a connecting rod and a driving part; one end of the connecting rod is fixedly connected to the arc-shaped shielding member, and the other end of the connecting rod is connected to the driving part; the driving part drives the arc-shaped shielding member to move through the connecting rod, so as to shield or open the evaporation source. By driving the shielding member to move through the driving mechanism, the opening and shielding of the evaporation source can be effectively controlled.

[0012] The vacuum collection device includes a collection port located in the center of the concave surface, which is connected to a collector via a vacuum pipeline. The vacuum collection device draws in vapor-deposited material generated from the evaporation source through the collection port and transports it to the collector via the vacuum pipeline. By positioning the collection port in the center of the concave surface and drawing in the vapor-deposited material entering the arc-shaped shielding component through vacuum extraction, the efficiency of material collection and shielding can be effectively improved.

[0013] The connecting rod has a hollow structure, within which the vacuum pipeline is formed. Incorporating the vacuum pipeline into the connecting rod reduces the size of the evaporation source shielding device, resulting in a more compact structure.

[0014] The drive unit includes a drive motor, which can drive the arc-shaped shield to rotate via the connecting rod to shield or open the evaporation source.

[0015] The arc-shaped shielding component is made of metal. Metal materials have good high-temperature resistance and are also more stable, which can reduce potential pollution.

[0016] On the other hand, this application also provides a vapor deposition apparatus, including a vapor deposition chamber and at least one evaporation source disposed in the vapor deposition chamber, wherein each evaporation source is provided with an evaporation source shielding device as described in any one of the first aspects.

[0017] It includes multiple evaporation sources and a corresponding number of evaporation source shielding devices; the multiple evaporation sources are arranged circumferentially in the evaporation chamber, and the multiple evaporation source shielding devices are arranged circumferentially, with each evaporation source shielding device corresponding to one evaporation source.

[0018] Multiple evaporation source shielding parts share one driving unit.

[0019] Compared with the prior art, the beneficial effects of this utility model mainly include the following: 1) The vacuum collection device can effectively improve the shielding effect of the material escaping from the evaporation source, thereby preventing cross-contamination between different evaporation sources and realizing the individual recovery of different evaporation materials; 2) The evaporation source shielding device corresponds to each metal evaporation source, which can reduce material peeling caused by the difference in melting points between different metals, reduce source contamination and product yield loss; 3) The frequency of equipment maintenance of the evaporation source shielding device is reduced, and the normal operating time of the machine is increased; 4) The evaporation source shielding device collects a single metal material, making metal recovery and component cleaning convenient. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of a vapor deposition apparatus in the prior art.

[0022] Figure 2 A schematic diagram of the evaporation source shielding device provided by this utility model.

[0023] Figure 3 A schematic diagram of the vapor deposition apparatus provided by this utility model. Detailed Implementation

[0024] The foregoing and other technical contents, features, and effects of this utility model will be clearly presented in the following detailed description of a preferred embodiment with reference to the accompanying drawings. The directional terms mentioned in the following embodiments, such as up, down, left, right, front, or back, are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting this application.

[0025] The embodiments of this application will now be described in detail with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the embodiments of this application to facilitate a better understanding of the application. However, the technical solutions claimed in this application can be implemented even without these technical details and various variations and modifications based on the following embodiments.

[0026] The steps in the following embodiments do not correspond one-to-one with the content of the utility model.

[0027] like Figure 1 The diagram shown is a schematic of a vapor deposition apparatus in the prior art. (Reference) Figure 1 In a vapor deposition apparatus, an evaporation source 1 is provided. Evaporation source 1 typically includes a heating element and a crucible. The material to be vaporized is placed in the crucible, and the heating element heats the crucible and the material inside, causing the material to evaporate and escape into the vapor deposition chamber, thereby forming a film on the substrate surface. It can be understood that evaporation source 1 is usually in a heated state, and the material inside continuously escapes. However, during the coating process, it is not desirable for the material to reach the vapor deposition chamber at every moment. Therefore, a baffle 2 is provided to cover the evaporation source 1 when not needed (e.g., during the pre-melting stage of the material and after the process is completed) to prevent material escape, and to expose the evaporation source 1 when needed for coating. Figure 1 As shown, the existing baffle 2 is usually a flat plate that can be rotated or translated by a drive mechanism to shield or open the evaporation source 1.

[0028] Existing vapor deposition apparatuses typically have multiple evaporation sources 1, each capable of depositing different materials to achieve composite vapor deposition of multiple metals. However, the existing baffle 2 structure is insufficient to effectively shield materials from the evaporation sources 1, potentially leading to cross-contamination between different evaporation sources 1 and affecting film quality. On the other hand, current vapor deposition apparatuses use a single baffle 2 structure, where materials from different evaporation sources 1 can deposit on the same baffle 2, which may cause peeling during the shielding process, contaminating the evaporation sources 1.

[0029] Example 1

[0030] To address the above problems, this application provides an evaporation source shielding device. Figure 2 This is a schematic diagram of the evaporation source shielding device provided by this utility model, wherein, Figure 2 In the diagram, 'a' is a front view of the evaporation source shielding device. Figure 2 In the diagram, b is a bottom view of the evaporation source shielding device.

[0031] refer to Figure 2 As shown in the figure, in this application, the evaporation source shielding device 3 is provided corresponding to the evaporation source 1 (not shown in the figure). The evaporation source shielding device 3 includes an evaporation source shielding part and a vacuum collection device. The evaporation source shielding part includes a driving part 42, a connecting rod 41 and an arc-shaped shielding member 40. The vacuum collection device includes a collection port 51, a vacuum pipeline 52 and a collector 53.

[0032] The evaporation source shielding part can change the position of the evaporation source 1 to be in a shielded state or an open state; a vacuum collection device is correspondingly provided in the evaporation source shielding part, which can attract and collect the vapor deposition material generated from the evaporation source 1 when the evaporation source 1 is in a shielded state.

[0033] refer to Figure 2 In embodiment a, the evaporation source shielding section has an arc-shaped shielding member 40, which is made of metal and has a concave surface on the side facing the evaporation source 1. The arc-shaped shielding member 40 is fixedly connected to a connecting rod 41, and the other end of the connecting rod 41 is connected to a drive unit 42. The drive unit 42 includes a drive motor, which outputs power to drive the arc-shaped shielding member 40 to move via the connecting rod 41, thereby shielding or opening the evaporation source 1. It can be understood that to achieve shielding or opening of the evaporation source 1 by the arc-shaped shielding member 40, it can be achieved by translating the arc-shaped shielding member 40 or by rotating the arc-shaped shielding member 40, depending on the spatial structure of the vapor deposition equipment. In this embodiment, the arc-shaped shielding member 40 can rotate under the action of the drive unit 42 and the connecting rod 41 to shield or open the evaporation source 1.

[0034] In this embodiment, to achieve a more efficient shielding effect, prevent cross-contamination between different evaporation sources 1, and allow for the separate recovery of different evaporation materials, a vacuum collection device is correspondingly provided in the evaporation source shielding device. (Reference) Figure 2 In section a and b, the collection port 51 of the vacuum collection device is located at the center of the concave surface of the arc-shaped shield 40. The rear part of the collection port 51 is connected to the collector 53 via a vacuum pipeline 52. The vacuum collection device draws the vapor-deposited material generated from the evaporation source 1 from the collection port 51, transports it through the vacuum pipeline 52, and finally collects it in the collector 53. Regarding the setting of the vacuum pipeline 52, it can be an independent pipeline, or the connecting rod 41 can be a hollow structure, forming the vacuum pipeline 52 within the hollow structure. It is understood that in order to achieve vacuum suction, a negative pressure source needs to be provided at the rear end of the vacuum pipeline 52. This negative pressure source can be set separately or can be achieved by utilizing the vacuum system of the vapor deposition equipment itself.

[0035] Example 2

[0036] This application also provides a vapor deposition apparatus, which includes an evaporation source shielding device 3 as described in Embodiment 1.

[0037] Specifically, the vapor deposition apparatus includes a vapor deposition chamber and at least one evaporation source disposed within the vapor deposition chamber, with each evaporation source corresponding to an evaporation source shielding device 3. (Reference) Figure 3 As shown, in this embodiment, there are 4 evaporation sources 1 and 4 evaporation source shielding devices 3; the 4 evaporation sources 1 are arranged circumferentially in the vapor deposition chamber, and the 4 evaporation source shielding devices 3 are also arranged circumferentially, and the 4 evaporation source shielding parts 40 share a driving part 4.

[0038] The common English terms or letters used in this utility model for the purpose of clear description are for illustrative purposes only and are not intended to be limiting or specific. They should not be used to limit the scope of protection of this application based on their possible Chinese translations or specific letters.

[0039] It should also be noted that in this article, relational terms such as “first” and “second” are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

Claims

1. An evaporation source shielding device, characterized in that, The evaporation source shielding device is configured correspondingly to the evaporation source, and the evaporation source shielding device includes: An evaporation source shielding section can change the position of the evaporation source to either a shielded or open state. A vacuum collection device is installed in the evaporation source shielding section. When the evaporation source is in a shielded state, it is used to attract and collect the vapor-deposited material generated from the evaporation source.

2. The evaporation source shielding device according to claim 1, characterized in that, The evaporation source shielding part is formed with an arc-shaped shielding member, and the side of the arc-shaped shielding member facing the evaporation source is concave.

3. The evaporation source shielding device according to claim 2, characterized in that, The evaporation source shielding part also includes a connecting rod and a driving part; One end of the connecting rod is fixedly connected to the arc-shaped shield, and the other end of the connecting rod is connected to the driving part; The drive unit drives the arc-shaped shielding member to move via the connecting rod, so as to shield or open the evaporation source.

4. The evaporation source shielding device according to claim 3, characterized in that, The vacuum collection device includes a collection port located in the middle of the concave surface, and the collection port is connected to the collector through a vacuum pipeline; The vacuum collection device draws in the vaporized material generated from the evaporation source through the collection port and transports it to the collector through the vacuum pipeline.

5. The evaporation source shielding device according to claim 4, characterized in that, The connecting rod has a hollow structure, and the vacuum pipeline is formed in the hollow structure.

6. The evaporation source shielding device according to claim 3, characterized in that, The drive unit includes a drive motor, which can drive the arc-shaped shield to rotate via the connecting rod to shield or open the evaporation source.

7. The evaporation source shielding device according to claim 2, characterized in that, The arc-shaped shielding component is a metal part.

8. A vapor deposition apparatus, comprising a vapor deposition chamber and at least one evaporation source disposed in the vapor deposition chamber, characterized in that, Each of the evaporation sources is provided with an evaporation source shielding device as described in any one of claims 1-7.

9. The vapor deposition apparatus according to claim 8, characterized in that, Includes multiple evaporation sources and a corresponding number of evaporation source shielding devices; Multiple evaporation sources are arranged circumferentially in the vapor deposition chamber, and multiple evaporation source shielding devices are arranged circumferentially, with each evaporation source shielding device corresponding to one evaporation source.

10. A vapor deposition apparatus according to claim 9, characterized in that, Multiple evaporation source shielding parts share one driving unit.

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