Evaporation coating baffle mechanism

Abstract

This utility model discloses a baffle mechanism for evaporation coating, including a first baffle plate, a second baffle plate at the bottom of the first baffle plate, and vertical plates fixedly connected to the four corners of the top of the second baffle plate. The top of the vertical plates extends through to the top of the first baffle plate. A housing is fixedly connected to the central axis of the top of the first baffle plate, and fixing blocks are fixedly connected to both sides of the inner cavity of the housing. When the pull rod is pulled upwards, the pull rod moves the horizontal plate, which in turn moves the pin, causing the pin to move away from the rectangular plate. Then, the connecting handle is pushed inwards. When the force pushing the connecting handle can overcome the locking force between the hemisphere and the insert plate, the connecting handle moves the rectangular plate, which in turn moves the insert plate, causing the insert plate to move away from the vertical plate. Then, the second baffle plate moves downwards, causing the second baffle plate to move the vertical plate. After the vertical plate moves away from the first baffle plate, the disassembly is complete.

Description

Technical Field

[0001] This utility model relates to the field of evaporation coating technology, specifically a baffle mechanism for evaporation coating. Background Technology

[0002] In evaporation coating equipment, the baffle mechanism, as a key component controlling the coating area and protecting the substrate, plays a decisive role in coating quality. Currently, most mainstream evaporation coating baffles adopt an integrated, one-piece structure design, achieving the shielding function through overall translation or rotation. While this integrated baffle has advantages such as simple structure and high initial shielding accuracy, it reveals significant drawbacks in practical applications: during the coating process, evaporation particles continuously deposit on the baffle surface, especially in the area at the bottom of the baffle opposite the evaporation source, easily forming a large accumulation of coating material. With increased use, this adhered coating material not only causes baffle weight imbalance and decreased movement accuracy but may also peel off due to heat, contaminating the substrate or evaporation source and affecting the stability of the coating process.

[0003] To maintain a high vacuum environment, evaporation coating equipment has a compact internal layout and complex structure. When it is necessary to clean the baffles with coating material attached, the limited internal space makes it difficult for operators to use tools for effective cleaning. In some cases, a large number of peripheral components need to be disassembled to facilitate the cleaning work, resulting in cleaning time of up to several hours. In addition, frequent disassembly may damage the sealing structure of the equipment, increase the risk of vacuum leakage, and significantly reduce the operating efficiency and maintenance costs of the equipment. To address this, we propose a baffle mechanism for evaporation coating. Utility Model Content

[0004] To address the shortcomings of existing technologies, the purpose of this utility model is to provide a baffle mechanism for evaporation coating, which has the advantages of being easy to use. It solves the problem that in order to maintain a high vacuum environment, the internal space of evaporation coating equipment is compact and the structure is complex. When it is necessary to clean the baffle with the coating material attached, the operator has difficulty using tools to effectively clean it due to the limited internal space of the equipment. In some cases, a large number of peripheral components need to be disassembled to facilitate the cleaning work, resulting in a cleaning time of up to several hours. In addition, frequent disassembly may damage the sealing structure of the equipment, increase the risk of vacuum leakage, and significantly reduce the operating efficiency and maintenance cost of the equipment.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a baffle mechanism for evaporation coating, comprising a first baffle plate, a second baffle plate disposed at the bottom of the first baffle plate, vertical plates fixedly connected to the four corners of the top of the second baffle plate, the top of the vertical plates extending through to the top of the first baffle plate, a housing fixedly connected to the central axis of the top of the first baffle plate, fixing blocks fixedly connected to both sides of the inner cavity of the housing, an elastic telescopic rod fixedly connected to one side of the fixing block, an adjusting block fixedly connected to one side of the elastic telescopic rod, a hemisphere fixedly connected to one side of the adjusting block, an insert plate snapped into one side of the hemisphere, one side of the insert plate inserted into the vertical plate, a rectangular plate fixedly connected to the other side of the insert plate, a pin inserted into the inner cavity of the rectangular plate, a horizontal plate fixedly connected to the top of the pin, springs fixedly connected to the four corners of the top of the horizontal plate, and the tops of the springs fixedly connected to the housing.

[0006] Preferably, a coolant inlet pipe is sleeved on the left side of the first baffle, and a first heat exchange pipe is connected to the right side of the coolant inlet pipe. A second heat exchange pipe is fixedly connected to the inner cavity of the second baffle, and a coolant outlet pipe is connected to the right side of the second heat exchange pipe. A first corrugated pipe is connected to the left side of the top of the first heat exchange pipe, and a second corrugated pipe is connected to the right side of the top of the first heat exchange pipe. A fixing pipe is inserted into one side of the second corrugated pipe, and one side of the fixing pipe is connected to the second heat exchange pipe. A second corrugated pipe is connected to the right side of the top of the first heat exchange pipe, and a hollow pipe is connected to one side of the second corrugated pipe, and one side of the hollow pipe is connected to the second heat exchange pipe.

[0007] Preferably, rectangular grooves are provided on both sides of the inner cavity of the housing, and the inner cavity of the rectangular grooves is slidably connected to the insert plate.

[0008] Preferably, a pull rod is fixedly connected to the central axis at the top of the horizontal plate, and a connecting handle is fixedly connected to the outer side of the rectangular plate.

[0009] Preferably, the inner cavity of the horizontal plate is slidably connected to a prism, and the top of the prism is fixedly connected to the shell.

[0010] Preferably, a slot is provided on one side of the vertical plate, and the slot is adapted to the insert plate.

[0011] Preferably, a groove is provided on one side of the insert plate, and the groove is adapted to the hemisphere.

[0012] Preferably, a first sealing ring is fixedly connected to the top of the outer surface of the fixed tube, and a second sealing ring is fixedly connected to the top of the outer surface of the hollow tube.

[0013] Compared with the prior art, the present invention provides a baffle mechanism for evaporation coating, which has the following beneficial effects:

[0014] 1. When cleaning the bottom of the second baffle plate, the first corrugated pipe is separated from the fixed pipe, and the second corrugated pipe is separated from the hollow pipe. The pull rod is pulled upward, which moves the horizontal plate. The horizontal plate moves the pin, causing the pin to move away from the rectangular plate. Then, the connecting handle is pushed inward. When the force of pushing the connecting handle can overcome the locking force between the hemisphere and the insert plate, the connecting handle will move the rectangular plate. The rectangular plate will move the insert plate, causing the insert plate to move away from the vertical plate. Then, the second baffle plate is moved downward, and the second baffle plate moves the vertical plate. After the vertical plate moves away from the first baffle plate, the disassembly work can be completed. Moreover, a new second baffle plate can be replaced during the cleaning process to avoid affecting the work progress.

[0015] 2. During the operation of this utility model, coolant is discharged through the coolant inlet pipe, and then the coolant enters the first heat exchange tube. Through the cooperation of the first corrugated pipe and the fixed pipe, part of the coolant will be diverted to the second heat exchange tube. As the coolant flows in the inner cavity of the first heat exchange tube, it is discharged into the inner cavity of the second heat exchange tube through the second corrugated pipe and the hollow pipe, and then discharged through the coolant outlet pipe. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This is a first-view structural schematic diagram of the shell of this utility model in cross-section.

[0018] Figure 3 This is a second-view structural schematic diagram of the shell of this utility model in cross-section.

[0019] Figure 4 This is a cross-sectional view of the first shielding plate of this utility model;

[0020] Figure 5 This is a cross-sectional view of the second shielding plate of this utility model;

[0021] Figure 6 This is an enlarged structural diagram of point A in this utility model.

[0022] In the diagram: 1. First baffle plate; 2. Second baffle plate; 3. Vertical plate; 4. Shell; 5. Fixing block; 6. Elastic telescopic rod; 7. Adjusting block; 8. Hemisphere; 9. Insert plate; 10. Spring; 11. Horizontal plate; 12. Pull rod; 13. Rectangular plate; 14. Connecting handle; 15. Coolant inlet pipe; 16. First heat exchanger tube; 17. Second heat exchanger tube; 18. Fixing pipe; 19. First corrugated pipe; 20. Second corrugated pipe; 21. Hollow pipe; 22. Coolant outlet pipe; 23. Pin. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0025] Example 1:

[0026] Please see Figure 1 , Figure 2 , Figure 3 and Figure 6 As shown, this utility model provides a baffle mechanism for evaporation coating, including a first baffle plate 1, a second baffle plate 2 at the bottom of the first baffle plate 1, vertical plates 3 fixedly connected to the four corners of the top of the second baffle plate 2, the top of the vertical plates 3 extending through to the top of the first baffle plate 1, a housing 4 fixedly connected to the central axis of the top of the first baffle plate 1, fixing blocks 5 fixedly connected to both sides of the inner cavity of the housing 4, an elastic telescopic rod 6 fixedly connected to one side of the fixing block 5, an adjusting block 7 fixedly connected to one side of the elastic telescopic rod 6, a hemisphere 8 fixedly connected to one side of the adjusting block 7, an insert plate 9 snapped into one side of the hemisphere 8, one side of the insert plate 9 being inserted into the vertical plate 3, and the other side of the insert plate 9 being fixedly connected to... A rectangular plate 13 is attached, and a pin 23 is inserted into the inner cavity of the rectangular plate 13. A horizontal plate 11 is fixedly connected to the top of the pin 23. Springs 10 are fixedly connected to the four corners of the top of the horizontal plate 11. The top of the springs 10 is fixedly connected to the housing 4. Rectangular grooves are opened on both sides of the inner cavity of the housing 4, and the inner cavity of the rectangular grooves is slidably connected to the insert plate 9. A pull rod 12 is fixedly connected to the central axis of the top of the horizontal plate 11. A connecting handle 14 is fixedly connected to the outer side of the rectangular plate 13. A prism is slidably connected to the inner cavity of the horizontal plate 11, and the top of the prism is fixedly connected to the housing 4. A slot is opened on one side of the vertical plate 3, and the slot is adapted to the insert plate 9. A groove is opened on one side of the insert plate 9, and the groove is adapted to the hemisphere 8.

[0027] The specific function of this technical solution is as follows: When the bottom of the second shielding plate 2 needs to be cleaned, the first corrugated pipe 19 is separated from the fixed pipe 18, and the second corrugated pipe 20 is separated from the hollow pipe 21. The pull rod 12 is pulled upward, and the pull rod 12 drives the horizontal plate 11 to move. The horizontal plate 11 drives the pin 23 to move, so that the pin 23 moves away from the rectangular plate 13. Then, the connecting handle 14 is pushed inward. When the force of pushing the connecting handle 14 can overcome the locking force between the hemisphere 8 and the insert plate 9, the connecting handle 14 will drive the rectangular plate 13 to move. The rectangular plate 13 drives the insert plate 9 to move, so that the insert plate 9 moves away from the vertical plate 3. Then, the second shielding plate 2 is moved downward, and the second shielding plate 2 drives the vertical plate 3 to move. After the vertical plate 3 moves away from the first shielding plate 1, the disassembly work can be completed. Moreover, during the cleaning process, a new second shielding plate 2 can be replaced to avoid affecting the work progress.

[0028] Example 2:

[0029] Based on Embodiment 1, this utility model is as follows: Figure 1 , Figure 4 and Figure 5 As shown, a coolant inlet pipe 15 is sleeved on the left side of the first baffle 1, and a first heat exchange pipe 16 is connected to the right side of the coolant inlet pipe 15. A second heat exchange pipe 17 is fixedly connected to the inner cavity of the second baffle 2, and a coolant outlet pipe 22 is connected to the right side of the second heat exchange pipe 17. A first corrugated pipe 19 is connected to the left side of the top of the first heat exchange pipe 16, and a second corrugated pipe 20 is connected to the right side of the top of the first heat exchange pipe 16. A fixing pipe 18 is inserted into one side of the second corrugated pipe 20, and one side of the fixing pipe 18 is connected to the second heat exchange pipe 17. A second corrugated pipe 20 is connected to the right side of the top of the first heat exchange pipe 16, and a hollow pipe 21 is connected to one side of the second corrugated pipe 20. One side of the hollow pipe 21 is connected to the second heat exchange pipe 17. A first sealing ring is fixedly connected to the top of the outer surface of the fixing pipe 18, and a second sealing ring is fixedly connected to the top of the outer surface of the hollow pipe 21.

[0030] The specific function of this technical solution is as follows: During operation, coolant is discharged through coolant inlet pipe 15, and then coolant enters the first heat exchange tube 16. Through the cooperation of the first corrugated pipe 19 and the fixed pipe 18, part of the coolant will be diverted to the second heat exchange tube 17. As the coolant flows in the inner cavity of the first heat exchange tube 16, it is discharged into the inner cavity of the second heat exchange tube 17 through the second corrugated pipe 20 and the hollow pipe 21, and then discharged through coolant outlet pipe 22.

[0031] Working principle: When the bottom of the second shield 2 needs to be cleaned, the first corrugated pipe 19 is separated from the fixed pipe 18, and the second corrugated pipe 20 is separated from the hollow pipe 21. Pull the lever 12 upward, the lever 12 drives the horizontal plate 11 to move, the horizontal plate 11 drives the pin 23 to move, so that the pin 23 moves away from the rectangular plate 13. Then push the connecting handle 14 inward. When the force of pushing the connecting handle 14 can overcome the clamping force between the hemisphere 8 and the insert plate 9, the connecting handle 14 will drive the rectangular plate 13 to move, the rectangular plate 13 drives the insert plate 9 to move, so that the insert plate 9 moves away from the vertical plate 3. Then move the second shield 2 downward, the second shield 2 drives the vertical plate 3 to move. After the vertical plate 3 moves away from the first shield 1, the disassembly work can be completed. Moreover, during the cleaning process, a new second shield 2 can be replaced to avoid affecting the work progress.

[0032] During operation, coolant is discharged through coolant inlet pipe 15, and then coolant enters first heat exchange tube 16. Through the cooperation of first corrugated pipe 19 and fixed pipe 18, some coolant is diverted to second heat exchange tube 17. As coolant flows in the inner cavity of first heat exchange tube 16, it is discharged into the inner cavity of second heat exchange tube 17 through second corrugated pipe 20 and hollow pipe 21, and then discharged through coolant outlet pipe 22.

[0033] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or rearranged according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0034] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to implementing the present invention) may be omitted.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the essence and scope of the technical solutions of this utility model.

Claims

1. A baffle mechanism for evaporation coating, comprising a first baffle (1), characterized in that: A second shield (2) is provided at the bottom of the first shield (1). Vertical plates (3) are fixedly connected to the four corners of the top of the second shield (2). The top of the vertical plates (3) extends through to the top of the first shield (1). A housing (4) is fixedly connected to the central axis of the top of the first shield (1). Fixing blocks (5) are fixedly connected to both sides of the inner cavity of the housing (4). An elastic telescopic rod (6) is fixedly connected to one side of the fixing block (5). An adjusting block (7) is fixedly connected to one side of the elastic telescopic rod (6). A hemisphere (8) is fixedly connected to one side of the adjusting block (7), and a plug plate (9) is snapped into one side of the hemisphere (8). One side of the plug plate (9) is inserted into the vertical plate (3), and a rectangular plate (13) is fixedly connected to the other side of the plug plate (9). A pin (23) is inserted into the inner cavity of the rectangular plate (13), and a horizontal plate (11) is fixedly connected to the top of the pin (23). Springs (10) are fixedly connected to the four corners of the top of the horizontal plate (11), and the top of the springs (10) is fixedly connected to the housing (4).

2. The baffle mechanism for evaporation coating according to claim 1, characterized in that: A coolant inlet pipe (15) is sleeved on the left side of the first baffle (1), and a first heat exchange pipe (16) is connected to the right side of the coolant inlet pipe (15). A second heat exchange pipe (17) is fixedly connected to the inner cavity of the second baffle (2). A coolant outlet pipe (22) is connected to the right side of the second heat exchange pipe (17). A first corrugated pipe (19) is connected to the left side of the top of the first heat exchange pipe (16), and a second corrugated pipe (20) is connected to the right side of the top of the first heat exchange pipe (16). A fixing pipe (18) is inserted into one side of the second corrugated pipe (20), and one side of the fixing pipe (18) is connected to the second heat exchange pipe (17). A second corrugated pipe (20) is connected to the right side of the top of the first heat exchange pipe (16), and a hollow pipe (21) is connected to one side of the second corrugated pipe (20). One side of the hollow pipe (21) is connected to the second heat exchange pipe (17).

3. The baffle mechanism for evaporation coating according to claim 1, characterized in that: The inner cavity of the housing (4) is provided with rectangular grooves on both sides, and the inner cavity of the rectangular grooves is slidably connected to the insert plate (9).

4. The baffle mechanism for evaporation coating according to claim 1, characterized in that: A pull rod (12) is fixedly connected to the central axis at the top of the horizontal plate (11), and a connecting handle (14) is fixedly connected to the outer side of the rectangular plate (13).

5. The baffle mechanism for evaporation coating according to claim 1, characterized in that: The inner cavity of the horizontal plate (11) is slidably connected to a prism, and the top of the prism is fixedly connected to the shell (4).

6. The baffle mechanism for evaporation coating according to claim 1, characterized in that: A slot is provided on one side of the vertical plate (3), and the slot is adapted to the insert plate (9).

7. The baffle mechanism for evaporation coating according to claim 1, characterized in that: The insert plate (9) has a groove on one side, and the groove is adapted to the hemisphere (8).

8. The baffle mechanism for evaporation coating according to claim 2, characterized in that: A first sealing ring is fixedly connected to the top of the outer surface of the fixed tube (18), and a second sealing ring is fixedly connected to the top of the outer surface of the hollow tube (21).

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