Aluminum support lifting mechanism for multi-layer substrate

Abstract

The utility model discloses a kind of aluminium support lifting mechanisms for multilayer substrate, it is related to vacuum coating equipment technical field, comprising: cavity, support plate, aluminium support for multilayer substrate, transmission assembly. Guiding limiting component is installed in cavity;Support plate is slidably connected in guiding limiting component, support plate can be up and down active, and first leveling assembly is provided on the upper end of support plate;Aluminium support for multilayer substrate is installed in first leveling assembly, and first leveling assembly is used to adjust the inclination angle of aluminium support for multilayer substrate;Transmission assembly is installed in cavity, and transmission assembly is used to drive jacking plate lifting, and second leveling assembly is provided on the upper end of jacking plate, and support plate is connected above second leveling assembly, and second leveling assembly is used to adjust the inclination angle of support plate. The utility model can provide high-precision horizontal adjustment capability for aluminium support for multilayer substrate of bearing substrate.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to an aluminum support lifting mechanism for multilayer substrates. Background Technology

[0002] In vacuum coating equipment for semiconductors and photovoltaics, integrated systems contain multiple chambers and need to store multiple substrates simultaneously. Therefore, the stability of substrate transport, the reliability of testing, and the ease of maintenance are paramount. Simple stackable trays, lacking an overall leveling mechanism, are susceptible to mechanical errors, thermal deformation, and load variations during lifting and lowering, leading to accumulated leveling deviations between substrate layers and causing product quality defects. Existing leveling mechanisms often employ single-stage compensation or elastic elements, which suffer from insufficient rigidity under process conditions, long-term angular drift, or limited adjustment resolution. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes an aluminum support lifting mechanism for multilayer substrates, which can provide high-precision horizontal adjustment capability for the aluminum support for multilayer substrates that carries the substrates.

[0004] A lifting mechanism for an aluminum support for a multilayer substrate according to a first aspect embodiment of the present invention includes: a cavity, a support plate, an aluminum support for a multilayer substrate, and a transmission assembly. A guide and limiting assembly is installed in the cavity; the support plate is slidably connected to the guide and limiting assembly, and the support plate is movable up and down; a first leveling assembly is provided at the upper end of the support plate; the aluminum support for the multilayer substrate is installed on the first leveling assembly, and the first leveling assembly is used to adjust the tilt angle of the aluminum support for the multilayer substrate; the transmission assembly is installed in the cavity, and the transmission assembly is used to drive a lifting plate to move up and down; a second leveling assembly is provided at the upper end of the lifting plate; the support plate is connected above the second leveling assembly, and the second leveling assembly is used to adjust the tilt angle of the support plate.

[0005] A lifting mechanism for an aluminum support for a multilayer substrate according to an embodiment of this utility model has at least the following beneficial effects: a transmission component drives the lifting plate to rise and fall; a first leveling component acts directly on the aluminum support for the multilayer substrate to finely adjust its tilt angle; a second leveling component acts on the support plate to adjust the overall tilt reference of the support plate. Through the two-stage leveling structure formed by the first and second leveling components, and the synergistic effect of the guide and limiting components, the aluminum support for the multilayer substrate provides high-precision horizontal adjustment capability and operational convenience, eliminating process defects caused by substrate tilting on the aluminum support for the multilayer substrate.

[0006] According to some embodiments of the present invention, the guide limiting assembly includes a guide shaft and a guide bearing. The guide shaft is vertically disposed in the cavity, the guide bearing is fixedly connected to the support plate, the guide bearing is sleeved on the guide shaft, and the guide bearing can slide along the guide shaft.

[0007] According to some embodiments of the present invention, a limiting block is fixedly connected to the guide shaft, and the limiting block is used to limit the travel of the support plate.

[0008] According to some embodiments of this utility model, multiple guide and limiting components are symmetrically arranged.

[0009] According to some embodiments of the present invention, the first leveling component includes a plurality of first connecting screws and a plurality of first stopping screws. The first stopping screws and the first connecting screws are symmetrically arranged. The first connecting screws are used to push the aluminum support for the multilayer substrate closer to the support plate, and the first stopping screws are used to push the aluminum support for the multilayer substrate away from the support plate.

[0010] According to some embodiments of the present invention, a positioning pin is vertically provided at the upper end of the support plate, and a positioning hole is provided at the lower end of the aluminum support for the multilayer substrate, and the positioning pin can be embedded in the positioning hole.

[0011] According to some embodiments of the present invention, the transmission assembly includes a driving component, a lead screw, and a nut. The lead screw is rotatably mounted in the cavity. The driving component is used to drive the lead screw to rotate. The lead screw is vertically arranged. The nut is fixedly connected to the support plate. The lead screw meshes with the nut.

[0012] According to some embodiments of this utility model, a bearing is sleeved on the lead screw, a bearing seat is connected to the cavity, and the bearing is installed in the bearing seat.

[0013] According to some embodiments of the present invention, the aluminum support for the multilayer substrate includes multiple trays and multiple columns. The trays are arranged horizontally, the multiple trays are spaced apart in the vertical direction, and the columns are arranged between adjacent trays to provide support.

[0014] According to some embodiments of the present invention, the second leveling assembly includes a plurality of second connecting screws and a plurality of second stopping screws. The second stopping screws and the second connecting screws are symmetrically arranged. The second connecting screws are used to push the support plate closer to the lifting plate, and the second stopping screws are used to push the support plate away from the lifting plate.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0017] Figure 1 This is an overall side view of one embodiment of the present utility model;

[0018] Figure 2 for Figure 1 A cross-sectional view along the AA direction;

[0019] Figure 3 for Figure 1 Cross-sectional view along the BB direction;

[0020] Figure 4 for Figure 3 A cross-sectional view along the CC direction;

[0021] Figure 5 This is a cross-sectional view of a transmission component according to an embodiment of the present invention;

[0022] Figure 6 for Figure 5 A cross-sectional view along the DD direction;

[0023] Figure 7 This is a bottom view of one embodiment of the present invention;

[0024] Figure 8 This is an installation diagram of one embodiment of the present invention.

[0025] Icon labels:

[0026] Cavity 100, bearing housing 101;

[0027] Guide and limit assembly 200, guide shaft 210, limit block 211, guide bearing 220;

[0028] Support plate 300;

[0029] First leveling component 400, first connecting screw 410, first locking screw 420;

[0030] Aluminum support 500, tray 510, and interposer 520 for multilayer substrates;

[0031] Transmission assembly 600, drive component 610, lead screw 620, bearing 621, nut 630;

[0032] Lifting plate 700;

[0033] Second leveling component 800, second connecting screw 810, second stop screw 820. Detailed Implementation

[0034] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0035] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0036] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0037] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0038] Reference Figures 1 to 8As shown, an embodiment of the present invention provides a lifting mechanism for an aluminum support for a multilayer substrate, comprising: a cavity 100, a support plate 300, an aluminum support for a multilayer substrate 500, and a transmission assembly 600. The specific structure of the cavity 100 is prior art and will not be described in detail. A guide and limiting assembly 200 is installed inside the cavity 100; the support plate 300 is slidably connected to the guide and limiting assembly 200, allowing the support plate 300 to move up and down. The guide and limiting assembly 200 guides the support plate 300, ensuring that the support plate 300 can only move in the vertical direction. A first leveling assembly 400 is provided at the upper end of the support plate 300; the aluminum support for a multilayer substrate 500 is mounted on the first leveling assembly 400. Since the aluminum support for a multilayer substrate 500 is mounted on the support plate 300 via the first leveling assembly 400, the tilt angle of the aluminum support for a multilayer substrate 500 can be controlled by the first leveling assembly 400. The first leveling component 400 is operated to adjust the tilt angle of the aluminum support 500 for the multilayer substrate, ensuring that the aluminum support 500 is precisely level. A transmission component 600 is installed inside the cavity 100 and is connected to the lifting plate 700. The transmission component 600 drives the lifting plate 700 to rise and fall. A second leveling component 800 is located at the upper end of the lifting plate 700, and a support plate 300 is connected above the second leveling component 800. Since the support plate 300 is mounted on the lifting plate 700 via the second leveling component 800, the tilt angle of the support plate 300 can be controlled by the second leveling component 800. The second leveling component 800 is used to adjust the tilt angle of the support plate 300. By operating the second leveling component 800, the tilt angle of the aluminum support 500 for the multilayer substrate is further adjusted, ensuring that the aluminum support 500 is precisely level. The first leveling component 400 acts directly on the aluminum support 500 for multilayer substrates to fine-tune its tilt angle; the second leveling component 800 acts on the support plate 300 to adjust the overall tilt reference of the support plate 300. This layered adjustment method provides two degrees of freedom: "coarse adjustment" and "fine adjustment." Through the two-stage leveling structure formed by the first leveling component 400 and the second leveling component 800, and the synergistic effect of the guide and limiting component 200, the multilayer substrate aluminum support 500, which supports the substrate, is provided with high-precision leveling capability and ease of operation in precision manufacturing, eliminating process defects caused by substrate tilting on the multilayer substrate aluminum support 500.

[0039] Reference Figures 3 to 7As shown, the guide limiting assembly 200 includes a guide shaft 210 and a guide bearing 220. The guide shaft 210 is vertically disposed within the cavity 100, with both its upper and lower ends bolted to a guide fixing seat. The guide fixing seat is bolted to the side wall of the cavity 100. The guide shaft 210 serves as a rigid reference shaft, securely fixed to the guide fixing seat by bolts at both ends. The guide fixing seat is directly bolted to the inner side wall of the cavity 100, ensuring the positional stability of the guide shaft 210. The guide shaft 210 uses a smooth guide rail. The guide bearing 220 uses a linear bearing, which typically has an adjustable or preloaded function, effectively reducing backlash and wobbling during movement. The guide bearing 220 is bolted to the support plate 300, providing reliable fastening force and allowing for disassembly. The guide bearing 220 is sleeved on the guide shaft 210 and can slide along the guide shaft 210. The guide shaft 210 and the guide bearing 220 work together to ensure that the support plate 300 can only move up and down, thus ensuring the precise leveling and lifting functions of the aluminum support 500 for multilayer substrates.

[0040] Reference Figures 3 to 7 As shown, it can be understood that a limiting block 211 is fixedly connected to the guide shaft 210. The limiting block 211 is a D-type optical axis fixing ring, and it is used to limit the travel of the support plate 300. There are two limiting blocks 211, and the support plate 300 is located between the two limiting blocks 211. The limiting blocks 211 define the starting and ending points of the movement of the support plate 300 and the aluminum support 500 for the multilayer substrate carried on the upper end of the support plate 300, effectively preventing overtravel accidents and protecting expensive and precision mechanical components and process loads.

[0041] Reference Figure 7 and Figure 8 As shown, it can be understood that four guide limiting assemblies 200 are symmetrically arranged. The load of the support plate 300 and the aluminum support 500 for the multilayer substrate is evenly distributed to the four guide limiting assemblies 200. This significantly reduces the local load on each guide shaft 210 and reduces its deformation. It also prevents the support plate 300 and the aluminum support from tilting and swaying during lifting or when stationary.

[0042] Reference Figure 6As shown, the first leveling component 400 includes multiple first connecting screws 410 and multiple first locking screws 420. The first locking screws 420 and the first connecting screws 410 are symmetrically arranged. The head of the first connecting screw 410 abuts against the aluminum support 500 for the multilayer substrate, and the tail of the first connecting screw 410 is threadedly connected to the support plate 300. The first connecting screw 410 is used to push the aluminum support 500 for the multilayer substrate closer to the support plate 300, and the first locking screw 420 is used to push the aluminum support 500 for the multilayer substrate away from the support plate 300. The first locking screw 420 is threadedly connected to the aluminum support 500 for the multilayer substrate, and its tail abuts against the upper end of the support plate 300. The first connecting screws 410 and the first locking screws 420 act in pairs on the aluminum support 500 for the multilayer substrate in different directions, providing a reliable bidirectional adjustment force. Multi-point rigid locking ensures the long-term stability of the leveling effect, guaranteeing its long-term stability.

[0043] Reference Figures 1 to 8 As shown, it can be understood that a positioning pin is vertically installed at the upper end of the support plate 300, and a positioning hole is provided at the lower end of the aluminum support 500 for multilayer substrates, into which the positioning pin can be inserted. The positioning pin and the positioning hole work together to achieve high-precision repeatable positioning. When installing the aluminum support 500 for multilayer substrates, the operator only needs to roughly align the positioning hole on the aluminum support 500 with the positioning pin on the support plate 300, and install and position it by gravity or slight pressure, which significantly shortens the installation time.

[0044] Reference Figure 3 and Figure 5 As shown, the transmission assembly 600 includes a drive component 610, a lead screw 620, and a nut 630. The drive component 610 is a servo motor, which can achieve precise angle and speed control. The drive component 610 is bolted to the lower end of the cavity 100 via a motor bracket. The lead screw 620 is rotatably mounted inside the cavity 100, and the output shaft of the drive component 610 is connected to the lead screw 620 via a coupling. The drive component 610 drives the lead screw 620 to rotate. The lead screw 620 is vertically mounted, and the nut 630 drives the support plate 300 to move vertically, so that the lead screw 620 mainly bears the axial load. The nut 630 is bolted to the support plate 300, and the lead screw 620 meshes with the nut 630. When the lead screw 620 rotates, it drives the support plate 300 to move up and down through the nut 630. The design of the lead screw 620 and the nut 630 converts the rotational motion of the drive component 610 into linear displacement control of the support plate 300.

[0045] Reference Figure 5As shown, it can be understood that a bearing 621 is fitted onto the lead screw 620, and the bearing 621 is a deep groove ball bearing to withstand axial loads. A bearing housing 101 is bolted inside the cavity 100, and the bearing 621 is mounted on the bearing housing 101. The bearing 621 is used to reduce the rotational resistance of the lead screw 620 and improve the rotational accuracy of the lead screw 620.

[0046] Reference Figure 1 As shown, the aluminum support 500 for multilayer substrates includes multiple trays 510 and multiple spacers 520. The number of trays 510 is proportional to the vertical dimension of the cavity 100, and the number of trays 510 can be increased or decreased according to process requirements. By stacking multiple horizontal trays 510 vertically, multiple substrate trays 510 can be simultaneously supported horizontally. The multiple trays 510 are spaced apart vertically, and the spacers 520 are placed between adjacent trays 510 to provide support. The function of the spacers 520 is to maintain the inherent levelness of each tray 510 and prevent the trays 510 from bending or deforming due to their own weight or load.

[0047] Reference Figure 7 As shown, the second leveling assembly 800 includes multiple second connecting screws 810 and multiple second stop screws 820. The second leveling assembly 800 directly adjusts the overall posture of the support plate 300, serving a coarse adjustment function. The second leveling assembly 800 can correct tilting caused by unevenness of the cavity 100 mounting surface, machining errors of the lifting plate 700, and verticality deviation of the lead screw 620. The second stop screws 820 and second connecting screws 810 are arranged in pairs. Both the second stop screws 820 and the second connecting screws 810 are symmetrically arranged. The second connecting screw 810 is used to push the support plate 300 closer to the lifting plate 700; the head of the second connecting screw 810 abuts against the lower end of the lifting plate 700, and the tail of the second connecting screw 810 is threadedly connected to the support plate 300. The second stop screw 820 is used to push the support plate 300 away from the lifting plate 700. The second stop screw 820 is threadedly connected to the lifting plate 700, and the tail of the second stop screw 820 abuts against the support plate 300. Similar to the first leveling assembly 400, the second connecting screw 810 pushes the support plate 300 upwards and the second stop screw 820 presses the support plate 300 downwards, providing a two-way adjustment function. This allows for easy adjustment of the tilt angle of the support plate 300 relative to the lifting plate 700, initially adjusting the support plate 300 to a near-horizontal state.

[0048] It is foreseeable that, in some other embodiments of this utility model, the angle adjustment range of the second leveling component 800 is greater than the angle adjustment range of the first leveling component 400.

[0049] Working principle: A servo motor drives the lead screw 620, which in turn drives the nut 630 and the lifting plate 700 to achieve vertical lifting and lowering. Four symmetrically arranged guide shafts 210 and linear bearings guide the support plate 300. The second leveling assembly 800 coarsely adjusts the tilt of the support plate 300 relative to the lifting plate 700 using symmetrically arranged second connecting screws 810 and second stop screws 820. The first leveling assembly 400 finely adjusts the flatness of the aluminum support 500 for the multilayer substrate on the support plate 300 reference using symmetrically arranged first connecting screws 410 and first stop screws 420, supplemented by positioning pins and positioning holes to ensure repeatability. During processing, multiple substrates are placed on corresponding trays 510 for processing.

[0050] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. An aluminum support lift mechanism for a multi-layer substrate, characterized by, include: A cavity (100) is provided with a guide and limiting assembly (200). A support plate (300) is slidably connected to the guide limiting component (200). The support plate (300) can move up and down. A first leveling component (400) is provided at the upper end of the support plate (300). A multilayer substrate aluminum support (500) is mounted on the first leveling assembly (400), which is used to adjust the tilt angle of the multilayer substrate aluminum support (500). A transmission assembly (600) is installed inside the cavity (100). The transmission assembly (600) is used to drive the lifting plate (700) to rise and fall. A second leveling assembly (800) is provided at the upper end of the lifting plate (700). The support plate (300) is connected above the second leveling assembly (800). The second leveling assembly (800) is used to adjust the tilt angle of the support plate (300).

2. The multi-stage substrate aluminum boat lift mechanism according to claim 1, characterized by: The guide limiting assembly (200) includes a guide shaft (210) and a guide bearing (220). The guide shaft (210) is vertically disposed in the cavity (100). The guide bearing (220) is fixedly connected to the support plate (300). The guide bearing (220) is sleeved on the guide shaft (210). The guide bearing (220) can slide along the guide shaft (210).

3. The multi-stage substrate aluminum boat lift mechanism according to claim 2, characterized by: A limiting block (211) is fixedly connected to the guide shaft (210), and the limiting block (211) is used to limit the travel of the support plate (300).

4. The aluminum support lifting mechanism for multilayer substrates according to claim 2, characterized in that: Multiple guide and limit components (200) are symmetrically arranged.

5. The aluminum support lifting mechanism for multilayer substrates according to claim 4, characterized in that: The first leveling assembly (400) includes a plurality of first connecting screws (410) and a plurality of first stop screws (420). The first stop screws (420) and the first connecting screws (410) are symmetrically arranged. The first connecting screws (410) are used to push the aluminum support (500) for the multilayer substrate closer to the support plate (300), and the first stop screws (420) are used to push the aluminum support (500) for the multilayer substrate away from the support plate (300).

6. The aluminum support lifting mechanism for multilayer substrates according to claim 5, characterized in that: The upper end of the support plate (300) is vertically provided with a positioning pin, and the lower end of the aluminum support (500) for the multilayer substrate is provided with a positioning hole, and the positioning pin can be embedded in the positioning hole.

7. The aluminum support lifting mechanism for multilayer substrates according to claim 1, characterized in that: The transmission assembly (600) includes a drive member (610), a lead screw (620), and a nut (630). The lead screw (620) is rotatably installed in the cavity (100). The drive member (610) is used to drive the lead screw (620) to rotate. The lead screw (620) is vertically arranged. The nut (630) is fixedly connected to the support plate (300). The lead screw (620) and the nut (630) mesh.

8. The aluminum support lifting mechanism for multilayer substrates according to claim 7, characterized in that: A bearing (621) is sleeved on the lead screw (620), and a bearing seat (101) is connected inside the cavity (100). The bearing (621) is installed on the bearing seat (101).

9. The aluminum support lifting mechanism for multilayer substrates according to claim 1, characterized in that: The aluminum support (500) for the multilayer substrate includes multiple trays (510) and multiple columns (520). The trays (510) are arranged horizontally, and the multiple trays (510) are spaced apart in the vertical direction. The columns (520) are arranged between adjacent trays (510) to provide support.

10. The aluminum support lifting mechanism for multilayer substrates according to claim 1, characterized in that: The second leveling assembly (800) includes a plurality of second connecting screws (810) and a plurality of second stop screws (820). The second stop screws (820) and the second connecting screws (810) are symmetrically arranged. The second connecting screws (810) are used to push the support plate (300) closer to the lifting plate (700), and the second stop screws (820) are used to push the support plate (300) away from the lifting plate (700).

Images