Nozzle temperature measurement fixture and system for suction of silicon carbide chips

By designing a nozzle temperature measurement fixture, the flat and continuous surface of the heat conductor is used to contact the temperature measuring instrument, eliminating contact gaps. This achieves accurate measurement of nozzle temperature and reliable bonding between the silicon carbide chip and the carrier, solving the problem of inaccurate temperature measurement.

CN224382646UActive Publication Date: 2026-06-19基本半导体(无锡)有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
基本半导体(无锡)有限公司
Filing Date
2025-06-16
Publication Date
2026-06-19

AI Technical Summary

Technical Problem

In the existing technology, the inaccurate temperature measurement of the nozzle leads to insufficient bonding force between the silicon carbide chip and the carrier, making it difficult to achieve high reliability in the packaging of silicon carbide power modules.

Method used

A nozzle temperature measuring fixture was designed, including a heating seat, a top screw, and a fixture body. The flat and continuous surface of the heat conductor contacts the temperature measuring instrument, eliminating contact gaps and achieving accurate heat transfer and measurement.

Benefits of technology

This improved the accuracy of temperature measurement, enhanced the bonding force between the silicon carbide chip and the carrier, and avoided adhesion failure caused by inaccurate temperature.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a kind of suction nozzle temperature measurement fixtures and systems for sucking silicon carbide chip, belong to the technical field of semiconductor manufacturing, including heating seat, top screw rod and fixture body, heating seat includes seat body and the heating head connected with seat body, heating head is separately provided with mounting hole and top screw hole, top screw hole is communicated with mounting hole;Fixture body includes support rod and heat conductor, one end of support rod is inserted into mounting hole, top screw rod is inserted with the one end of support rod and is clamped with top screw hole, to detachably install support rod in heating seat;Heat conductor includes opposite mounting face and heat conduction contact surface, mounting face is fixedly connected with the other end of support rod, heat conduction contact surface is smooth continuous surface, the projection of temperature measuring probe temperature measuring contact surface contact surface in the direction of being close to heat conduction contact surface is located on heat conduction contact surface.The utility model reaches the technical effect of improving the precision of temperature measurement of suction nozzle, improves the binding force between silicon carbide chip and carrier.
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