A chip removal filter device for a cooling liquid
By designing a chip removal and filtration device for coolant, the device utilizes the rotation of the liquid flow pipe and the filter screen to filter debris. Combined with the dual filtration of the connecting pipe and the filter screen, the problem of debris clogging in the coolant is solved, and the efficient recovery and reuse of coolant is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU DEBI MATERIAL TECH CO LTD
- Filing Date
- 2025-07-21
- Publication Date
- 2026-06-23
AI Technical Summary
In existing technologies, coolant mixes with debris during silicon wafer cutting, causing filter blockage, affecting coolant recovery, and rendering the coolant unusable.
Design a chip removal and filtration device for coolant. Through the sealed connection between the liquid passage pipe and the clamp ring and the motor drive, the device uses a mesh screen to filter debris, and further improves the purity of the coolant through the connecting pipe and the filter screen.
It effectively removes debris from the coolant, improves the purity of the coolant, and facilitates recycling and reuse.
Smart Images
Figure CN224388289U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of silicon wafer cutting technology, specifically to a chip removal and filtration device for coolant. Background Technology
[0002] Silicon wafer cutting refers to the process of cutting silicon rods or large blocks of silicon into thin wafers or small pieces, and it is one of the basic steps in the fabrication of semiconductor devices.
[0003] Currently, when cutting silicon wafers, a coolant is sprayed onto the cutting tool to cool it. After the coolant cools down on the surface of the cutting tool, it flows into the pipe through the lower drain platform for recycling. However, during the cutting process, the blade comes into contact with the silicon wafer and generates debris, which mixes with the coolant and flows into the pipe for collection. This causes the filter screen at the inlet of the collection box to be blocked by debris, affecting the normal recycling of the coolant. Based on the shortcomings of the existing technology, this utility model designs a chip removal and filtration device for coolant. Utility Model Content
[0004] To address the shortcomings of existing technologies, this invention provides a coolant chip removal and filtration device, which has the advantage of filtering out debris during coolant recovery.
[0005] This utility model provides the following technical solution: a chip removal and filtration device for coolant, comprising a mounting plate, a support column mounted on the top of the outer surface of the mounting plate, a cutting table clamped on the top of the support column, and a chip removal structure provided on one side of the outer surface of the cutting table; the chip removal structure includes a liquid passage pipe, which is welded together from two pipe sections and three rods on its inner wall, a slot is provided at the bottom of the liquid passage pipe, a threaded sleeve is fitted onto the outer surface of the slot, an insert plate is inserted inside the slot, a sleeve is installed at the bottom of the insert plate, and a mesh is clamped inside the sleeve; a fixing ring is mounted on one side of the outer surface of the cutting table, a motor is installed inside the fixing ring, and one end of the output shaft of the motor is fixedly connected to the liquid passage pipe.
[0006] As a preferred embodiment of this utility model, a slotted platform is installed inside the cutting table, and a guide channel is installed at the bottom of the slotted platform.
[0007] As a preferred embodiment of this utility model, a recycling pipe is installed at the bottom of the guide channel, and a hoop is installed at one end of the recycling pipe that passes through the cutting table.
[0008] As a preferred embodiment of this utility model, the recovery pipe has a through hole inside, and the inner wall of the hoop is sealed to the liquid pipe and can rotate.
[0009] As a preferred embodiment of this utility model, a collection structure is installed on the top of the outer surface of the mounting plate, and the collection structure includes a collection shell.
[0010] As a preferred embodiment of this utility model, a connecting pipe is installed on the top of the collecting shell, and the connecting pipe and the sleeve are rotatably connected.
[0011] As a preferred embodiment of this utility model, a collection box is slidably installed inside the collection shell, a filter screen is provided inside the collection box, and a handle is installed on one side of the outer surface of the collection box.
[0012] Compared with the prior art, the present invention has the following beneficial effects:
[0013] 1. This coolant chip removal and filtration device, through a cutting table and chip removal structure, allows coolant to flow into the recovery pipe through a drain table and guide channel, and out through a through hole. Since the liquid pipe is sealed to the inner wall of the clamp ring and has a gap in the middle, coolant can flow into the liquid pipe. At this time, driven by the motor, its output shaft drives the liquid pipe to rotate. Since there is a clip inside the sleeve, the debris in the coolant is thrown into the clip under the high-speed rotation of the liquid pipe, thereby achieving the discharge of debris mixed inside the coolant. After the coolant is recovered, by rotating the threaded sleeve upward, the insert plate can be pulled out of the slot, and then the sleeve can be cleaned. At the same time, the clip can be removed and cleaned. After cleaning, the insert plate can be reinserted into the slot and the threaded sleeve can be reset and fixed.
[0014] 2. This coolant chip removal and filtration device, through a collection structure, allows the coolant to enter the collection housing through a connecting pipe after being filtered by the chip removal structure. At this time, the coolant can be further filtered through the filter screen set inside the connecting pipe, which can improve the purity of the coolant. After the collection is completed, the collection box can be pulled out by pulling the handle for further processing and reuse of the coolant. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the appearance and structure of this utility model;
[0016] Figure 2 This is a schematic diagram of the funnel structure of this utility model;
[0017] Figure 3 This is a schematic diagram of the through-hole structure of this utility model;
[0018] Figure 4 This is a schematic diagram of the chip removal structure of this utility model;
[0019] Figure 5 This is a schematic diagram of the collection structure of this utility model.
[0020] In the diagram: 1. Mounting plate; 2. Support column; 3. Cutting table; 31. Drainage platform; 32. Guide channel; 33. Recycling pipe; 34. Through hole; 35. Hoop ring; 4. Chip removal structure; 41. Liquid passage pipe; 42. Slot; 43. Threaded sleeve; 44. Insert plate; 45. Sleeve; 46. Mesh clamp; 5. Collection structure; 51. Collection shell; 52. Connecting pipe; 53. Collection box; 54. Filter screen; 55. Pull handle; 6. Fixing ring; 7. Motor. Detailed Implementation
[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0022] Please see Figure 1-5 A chip removal and filtration device for coolant includes a mounting plate 1. A support column 2 is mounted on the top of the outer surface of the mounting plate 1. A cutting table 3 is clamped on the top of the support column 2. A chip removal structure 4 is provided on one side of the outer surface of the cutting table 3. The chip removal structure 4 includes a liquid passage pipe 41, which is welded from two pipe sections and three rods on its inner wall. A slot 42 is opened at the bottom of the liquid passage pipe 41. A threaded sleeve 43 is fitted on the outer surface of the slot 42. An insert plate 44 is inserted inside the slot 42. A sleeve 45 is installed at the bottom of the insert plate 44. A mesh 46 is clamped inside the sleeve 45. A fixing ring 6 is mounted on one side of the outer surface of the cutting table 3. A motor 7 is installed inside the fixing ring 6. One end of the output shaft of the motor 7 is fixedly connected to the liquid passage pipe 41.
[0023] Please see Figure 2-3 The cutting table 3 has a drain platform 31 installed inside, and a guide channel 32 is installed at the bottom of the drain platform 31. A recovery pipe 33 is installed at the bottom of the guide channel 32, and a clamping ring 35 is installed at one end of the recovery pipe 33 that passes through the cutting table 3. The recovery pipe 33 has a through hole 34 inside, and the inner wall of the clamping ring 35 is sealed to the liquid passage pipe 41 and can rotate.
[0024] When the coolant flows into the recovery pipe 33 through the drain platform 31 and the guide channel 32, the coolant flows out through the through hole 34. Since the liquid pipe 41 is sealed with the inner wall of the clamp ring 35 and there is a gap in the middle, the coolant can flow into the liquid pipe 41.
[0025] Please see Figure 5A collection structure 5 is mounted on the top of the outer surface of the mounting plate 1. The collection structure 5 includes a collection housing 51. A connecting pipe 52 is mounted on the top of the collection housing 51, and the connecting pipe 52 is rotatably connected to the sleeve 45. A collection box 53 is slidably mounted inside the collection housing 51. A filter screen 54 is provided inside the collection box 53, and a handle 55 is mounted on one side of the outer surface of the collection box 53.
[0026] After being filtered through the chip removal structure 4, the coolant enters the collection shell 51 through the connecting pipe 52. At this time, the coolant can be further filtered through the filter screen 54 set inside the connecting pipe 52, which can improve the purity of the coolant. After the recycling is completed, the collection box 53 can be pulled out by pulling the handle 55 to process and reuse the coolant.
[0027] Working principle: When a coolant chip removal and filtration device is used, initially, during silicon wafer cutting, the coolant sprayed on the surface of the cutting tool flows into the recovery pipe 33 through the drain platform 31 and guide channel 32. Because the liquid passage pipe 41 is sealed to the inner wall of the clamping ring 35 and has a gap in the middle, the coolant can flow into the liquid passage pipe 41. At this time, driven by the motor 7, its output shaft drives the liquid passage pipe 41 to rotate. Because the sleeve 45 has a retaining mesh 46 inside, under the high-speed rotation of the liquid passage pipe 41, the debris in the coolant is thrown into the retaining mesh 46 and trapped, thereby achieving the removal of debris mixed inside the coolant. The coolant that has discharged debris enters the collection housing 51 through the connecting pipe 52. At this time, the coolant can be further filtered by the filter screen 54 set inside the connecting pipe 52, which can improve the purity of the coolant. After the collection is completed, the collection box 53 can be pulled out by pulling the handle 55 to process and reuse the coolant. Finally, after the coolant is recovered, the insert plate 44 can be pulled out from the slot 42 by turning the threaded sleeve 43 upward. Then the sleeve 45 can be cleaned, and the clip 46 can be removed and cleaned. After cleaning, the insert plate 44 can be reinserted into the slot 42 and the threaded sleeve 43 can be reset and fixed.
[0028] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A chip removal and filtration device for coolant, comprising a mounting plate (1), characterized in that: A support column (2) is installed on the top of the outer surface of the mounting plate (1), and a cutting table (3) is clamped on the top of the support column (2). A chip removal structure (4) is provided on one side of the outer surface of the cutting table (3). The chip removal structure (4) includes a liquid passage pipe (41), which is welded together from two pipe sections and three rods on its inner wall. A slot (42) is provided at the bottom of the liquid passage pipe (41), and a threaded sleeve (43) is fitted onto the outer surface of the slot (42). An insert plate (44) is inserted into the inside of the slot (42), and a sleeve (45) is installed at the bottom of the insert plate (44). A mesh (46) is installed inside the sleeve (45). A fixing ring (6) is installed on one side of the outer surface of the cutting table (3). A motor (7) is installed inside the fixing ring (6). One end of the output shaft of the motor (7) is fixedly connected to the liquid pipe (41).
2. The coolant chip removal and filtration device according to claim 1, characterized in that: The cutting table (3) has a slotted platform (31) installed inside, and a guide channel (32) is installed at the bottom of the slotted platform (31).
3. A chip removal and filtration device for coolant according to claim 2, characterized in that: A recycling pipe (33) is installed at the bottom of the guide channel (32), and a hoop (35) is installed at one end of the recycling pipe (33) that passes through the cutting table (3).
4. A chip removal and filtration device for coolant according to claim 3, characterized in that: The recovery pipe (33) has a through hole (34) inside, and the inner wall of the hoop (35) is sealed to the liquid pipe (41) and can rotate.
5. A chip removal and filtration device for coolant according to claim 3, characterized in that: A collection structure (5) is mounted on the top of the outer surface of the mounting plate (1), the collection structure (5) including a collection shell (51).
6. A chip removal and filtration device for coolant according to claim 5, characterized in that: A connecting pipe (52) is installed on the top of the collecting shell (51), and the connecting pipe (52) is rotatably connected to the sleeve (45).
7. A chip removal and filtration device for coolant according to claim 6, characterized in that: A collection box (53) is slidably installed inside the collection housing (51), a filter screen (54) is provided inside the collection box (53), and a handle (55) is installed on one side of the outer surface of the collection box (53).