A turnover cart for semiconductor supplies
The turnover trolley design, which combines plastic and metal layers, solves the problem of easy corrosion of stainless steel boxes, thereby improving the reliability of semiconductor auxiliary materials and the lifespan of the trolley.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHUHAI WEIZHAO SEMICONDUCTOR CO LTD
- Filing Date
- 2025-09-08
- Publication Date
- 2026-06-23
Smart Images
Figure CN224392632U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor equipment technology, and more specifically to a turnover cart for semiconductor auxiliary materials. Background Technology
[0002] In the semiconductor manufacturing industry, various acid and alkali chemicals are used as auxiliary materials in the process, such as for cleaning, etching, or surface treatment. These acid and alkali auxiliary materials need to be frequently transferred within the factory area. Usually, trolleys are used to transport the auxiliary materials from the storage area to the production line. In the existing technology, the common transfer equipment is a box-type trolley, whose box body is mainly made of single-layer stainless steel. However, the existing box structure has obvious limitations in practical applications. Stainless steel boxes have high strength and impact resistance to a certain extent, but their acid and alkali resistance is limited. They are prone to corrosion in long-term contact or spraying of acid and alkali solutions, which can weaken the structure or even perforate it, thereby shortening the service life, resulting in a high scrap rate of trolleys, and even threatening personal safety. Utility Model Content
[0003] In view of this, this application provides a turnover trolley for semiconductor auxiliary materials to improve the reliability of semiconductor auxiliary material turnover and to increase the service life of the turnover trolley.
[0004] In a first aspect, embodiments of this application disclose a turnover trolley for semiconductor auxiliary materials, comprising: a support frame, a handrail frame, a wheel set, a metal layer box, and a plastic layer box;
[0005] The wheel assembly is located on the lower side of the support frame, the metal layer housing is welded to the upper side of the support frame, the metal layer housing has a first receiving cavity with an open top, the plastic layer housing is connected in the first receiving cavity, the armrest frame is located on one side of the metal layer housing, and one end of the armrest frame passes through the metal layer housing and is fixedly connected to the support frame; the plastic layer housing has a second receiving cavity with an open top for carrying semiconductor auxiliary materials, and a protective body is provided on the side of the plastic layer housing near the armrest frame, the protective body protruding from the top of the plastic layer housing and covering part of the armrest frame.
[0006] In one possible example, the support frame is welded with a plurality of longitudinal stiffeners and transverse stiffeners, the longitudinal stiffeners being evenly arranged within the support frame, and the transverse stiffeners being staggered between adjacent longitudinal stiffeners and between the longitudinal stiffeners and the sides of the support frame.
[0007] In one possible example, the wheel assembly includes oppositely arranged swivel wheels connected to the lower side of the support frame and close to the armrest frame.
[0008] In one possible example, the wheel assembly includes opposing, straight wheels connected to the lower side of the support frame and away from the handrail frame.
[0009] In one possible example, there is a preset gap between the metal layer box and the plastic layer box, the preset gap ranging from 5 to 10 mm.
[0010] In one possible example, the side of the plastic layer box is higher than the side of the metal layer box, and the height difference between the side of the plastic layer box and the side of the metal layer box includes 5~10cm.
[0011] In one possible example, the handrail frame is provided with at least one reinforcing beam, the two ends of which are welded and fixed to the sides of the handrail frame.
[0012] In one possible example, there is a gap space between the metal layer box and the plastic layer box, and a plurality of elastic buffer rubber pillars are arranged in a matrix in the gap space. The two ends of the elastic buffer rubber pillars are respectively connected to the outer wall of the plastic layer box and the inner wall of the metal layer box.
[0013] In one possible example, the metal layer housing is provided with a positioning block, which is integrally connected to the inner wall of the metal layer housing in the first accommodating cavity, and a corresponding alignment groove is provided on the outer wall of the plastic layer housing, and the positioning block matches the alignment groove.
[0014] In one possible example, the cross-sectional profile of the positioning block is set in an arc shape.
[0015] In summary, compared with the prior art, this application discloses a turnover trolley for semiconductor auxiliary materials, including a support frame, a handrail frame, a wheel assembly, a metal layer box, and a plastic layer box. The wheel assembly is located on the lower side of the support frame, the metal layer box is welded to the upper side of the support frame, the metal layer box has a first receiving cavity with an opening at the top, the plastic layer box is connected in the first receiving cavity, the handrail frame is located on one side of the metal layer box, and one end of the handrail frame passes through the metal layer box and is fixedly connected to the support frame. The plastic layer box has a second receiving cavity with an opening at the top for carrying semiconductor auxiliary materials, and a protective body is provided on the side of the plastic layer box near the handrail frame. The protective body protrudes from the top of the plastic layer box and covers part of the handrail frame. That is, through the above-mentioned configuration, the reliability of semiconductor auxiliary material turnover is improved, and the service life of the turnover trolley is increased. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a three-dimensional structural schematic diagram of the turnover cart for semiconductor auxiliary materials used in this application;
[0018] Figure 2 This is a bottom view of the structure of the turnover trolley for semiconductor auxiliary materials in this application;
[0019] Figure 3 This is a partially exploded view of the turnover cart for semiconductor auxiliary materials used in this application;
[0020] Figure 4 This is a cross-sectional view of the turnover trolley for semiconductor auxiliary materials used in this application;
[0021] Figure 5 yes Figure 4 Enlarged view of point A;
[0022] Figure 6 yes Figure 4 Enlarged view of point B. Detailed Implementation
[0023] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the claims.
[0024] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, components, features, and elements with the same names in different embodiments of this application may have the same meaning or different meanings, the specific meaning of which must be determined by its interpretation in that specific embodiment or further in conjunction with the context of that specific embodiment.
[0025] It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit this application.
[0026] In the following description, the use of suffixes such as "module," "part," or "unit" to denote elements is solely for the purpose of illustrative purposes and has no specific meaning in itself. Therefore, "module," "part," or "unit" may be used interchangeably.
[0027] In the description of this application, it should be noted that the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0028] The technical solutions shown in this application will be described in detail below through specific embodiments. It should be noted that the order of description of the following embodiments is not intended to limit the priority of the embodiments.
[0029] Please refer to Figures 1 to 6 The trolley for semiconductor auxiliary materials according to the present application includes: a support frame 1, a handrail frame 2, a wheel set 3, a metal layer box 4, and a plastic layer box 5.
[0030] In the specific implementation process, the wheel set 3 is located on the lower side of the support frame 1 to realize the movement of the trolley. The metal layer box 4 is welded to the upper side of the support frame 1 and has a first accommodating cavity 41 with an opening at the top. The plastic layer box 5 is connected in the first accommodating cavity 41 and has a second accommodating cavity 51 with an opening at the top, which is used to carry semiconductor auxiliary materials.
[0031] Thus, under the metal support of the metal layer box 4, the acid and alkali chemical additives for semiconductors are transported by the plastic layer box 5. The handrail frame 2 is located on one side of the metal layer box 4, and one end of the handrail frame 2 passes through the metal layer box 4 and is fixedly connected to the support frame 1, so that the staff can push the cart.
[0032] Additionally, a protective body 52 is provided on the side of the plastic layer box 5 near the handrail frame 2. The protective body 52 protrudes from the top of the plastic layer box 5 and covers part of the handrail frame 2, thereby preventing auxiliary materials from splashing onto the handrail frame 2 or the staff during the pushing process, thus improving the reliability of the trolley.
[0033] Therefore, the plastic layer box 5, as the direct load-bearing box, comes into contact with acidic and alkaline chemicals and has excellent corrosion resistance, avoiding the problem of traditional metal boxes being easily corroded by acids and alkalis. At the same time, the plastic layer box 5 is supported by the metal layer box 4 on the outside, which can significantly improve the overall impact resistance and prevent the plastic box from breaking due to handling or collision, thus improving the reliability of semiconductor auxiliary material turnover. The metal layer box 4 is fixed to the support frame 1 by welding and connected to the handrail frame 2 to form a rigid whole, which can maintain good structural stability when bearing chemical auxiliary materials, preventing the box from loosening or deforming. One end of the handrail frame 2 is directly fixed to the support frame 1, preferably by welding. Workers can stably push the cart through the handrail frame 2. With the arrangement of the wheel set 3, the flexibility and controllability of the cart during movement are ensured.
[0034] In one possible implementation of this application, in order to improve structural strength, a number of longitudinal stiffeners 11 and transverse stiffeners 12 are welded on the support frame 1. The longitudinal stiffeners 11 are evenly distributed within the support frame 1, while the transverse stiffeners 12 are staggered between adjacent longitudinal stiffeners 11 and between the longitudinal stiffeners 11 and the sides of the support frame 1. Through the staggered reinforcement design, the load-bearing capacity and overall stability of the support frame 1 can be significantly enhanced.
[0035] In the specific implementation of the wheel set 3, there are two types, including omnidirectional wheels 31 arranged opposite to each other. The omnidirectional wheels 31 are connected to the lower side of the support frame 1 and close to the handle frame 2 for flexible steering; and straight wheels 32 arranged opposite to each other. The straight wheels 32 are connected to the lower side of the support frame 1 and away from the handle frame 2 to ensure the directional stability of the cart during forward movement. That is, through the combination of omnidirectional wheels 31 and straight wheels 32, both operational flexibility and stability during straight movement are achieved.
[0036] To further enhance structural stability, at least one reinforcing beam 21 can be installed on the handrail frame 2. The two ends of the reinforcing beam 21 are welded and fixed to the sides of the handrail frame 2, thereby enhancing the handrail frame 2's ability to resist impacts during pushing and improving the overall strength of the handrail frame 2.
[0037] In one example, there is a preset gap between the metal layer box 4 and the plastic layer box 5, which facilitates the detachable connection of the plastic layer box 5 relative to the metal layer box 4, that is, it is convenient to remove the plastic layer box 5 as needed for replacement or cleaning, etc.
[0038] Preferably, the preset gap ranges from 5 to 10 mm.
[0039] In one example, the side of the plastic layer box 5 is higher than the side of the metal layer box 4 to facilitate the handling of the plastic layer box 5. The plastic layer box 5 can also protect the metal layer box 4 to prevent the auxiliary materials from spilling directly onto the edge of the metal layer box 4 when it is tilted or shaken.
[0040] Preferably, the height difference between the side of the plastic layer box 5 and the side of the metal layer box 4 is 5~10cm.
[0041] In one possible implementation of this application, there is a gap space between the metal layer box 4 and the plastic layer box 5 (as shown in the attached diagram). Figure 5 (Identification J) Several elastic buffer rubber pillars 6 are arranged in a matrix in the gap space. The two ends of the elastic buffer rubber pillars 6 are connected to the outer wall of the plastic layer box 5 and the inner wall of the metal layer box 4, respectively. They can provide elastic buffer when the trolley is hit or vibrated, prevent the plastic layer box 5 from breaking due to hard impact, and improve the reliability of the trolley.
[0042] In one possible implementation of this application, see below. Figure 6 The metal layer box 4 is provided with a positioning block 42. The positioning block 42 is integrally connected to the inner wall of the metal layer box 4 in the first accommodating cavity 41, and the outer wall of the plastic layer box 5 is provided with a corresponding alignment groove 53. The positioning block 42 and the alignment groove 53 are matched to limit the shaking of the plastic layer box 5 in the metal layer box 4 and ensure that the connection structure between the two is stable.
[0043] Preferably, the cross-sectional profile of the positioning block 42 is designed to be arc-shaped, which makes the process of installing the plastic layer box 5 into the metal layer box 4 smoother and reduces the risk of damage caused by stress concentration.
[0044] The present application has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only for the purpose of helping to understand the core ideas of the present application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of the present application. Therefore, the content of this specification should not be construed as a limitation of the present application.
Claims
1. A turnover cart for semiconductor auxiliary materials, characterized in that, include: Support frame, handrail frame, wheel assembly, metal-layer housing and plastic-layer housing; The wheel assembly is located on the lower side of the support frame, the metal layer housing is welded to the upper side of the support frame, the metal layer housing has a first receiving cavity with an open top, the plastic layer housing is connected in the first receiving cavity, the armrest frame is located on one side of the metal layer housing, and one end of the armrest frame passes through the metal layer housing and is fixedly connected to the support frame; the plastic layer housing has a second receiving cavity with an open top for carrying semiconductor auxiliary materials, and a protective body is provided on the side of the plastic layer housing near the armrest frame, the protective body protruding from the top of the plastic layer housing and covering part of the armrest frame.
2. The turnover cart for semiconductor auxiliary materials as described in claim 1, characterized in that, The support frame is welded with a number of longitudinal stiffeners and transverse stiffeners. The longitudinal stiffeners are evenly arranged within the support frame, and the transverse stiffeners are staggered between adjacent longitudinal stiffeners and between the longitudinal stiffeners and the sides of the support frame.
3. The turnover cart for semiconductor auxiliary materials as described in claim 1, characterized in that, The wheel assembly includes omnidirectional wheels arranged opposite each other, the omnidirectional wheels being connected to the lower side of the support frame and close to the handrail frame.
4. The turnover cart for semiconductor auxiliary materials as described in claim 1, characterized in that, The wheel assembly includes opposing straight wheels that are connected to the lower side of the support frame and away from the handrail frame.
5. The turnover cart for semiconductor auxiliary materials as described in claim 1, characterized in that, There is a preset gap between the metal layer box and the plastic layer box, and the value of the preset gap ranges from 5 to 10 mm.
6. The turnover cart for semiconductor auxiliary materials as described in claim 1, characterized in that, The side of the plastic layer box is higher than the side of the metal layer box, and the height difference between the side of the plastic layer box and the side of the metal layer box includes 5~10cm.
7. The turnover cart for semiconductor auxiliary materials as described in claim 1, characterized in that, The handrail frame is provided with at least one reinforcing beam, and the two ends of the reinforcing beam are welded and fixed to the side of the handrail frame respectively.
8. The turnover cart for semiconductor auxiliary materials as described in claim 1, characterized in that, There is a gap between the metal layer box and the plastic layer box. Several elastic buffer rubber columns are arranged in a matrix in the gap space. The two ends of the elastic buffer rubber columns are respectively connected to the outer wall of the plastic layer box and the inner wall of the metal layer box.
9. The turnover cart for semiconductor auxiliary materials as described in claim 1, characterized in that, The metal layer box is provided with a positioning block. The positioning block is integrally connected to the inner wall of the metal layer box in the first accommodating cavity, and a corresponding alignment groove is provided on the outer wall of the plastic layer box. The positioning block matches the alignment groove.
10. The turnover cart for semiconductor auxiliary materials as described in claim 9, characterized in that, The cross-sectional profile of the positioning block is arc-shaped.