Heating structure and processing apparatus
By using heating components to heat the gas in the ALD process, the problems of large temperature difference in boat structures and high cost of traditional auxiliary heat pipes are solved, achieving faster heating rates and higher production capacity, while reducing maintenance costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LAPLACE RENEWABLE ENERGY TECH CO LTD
- Filing Date
- 2025-06-25
- Publication Date
- 2026-06-23
AI Technical Summary
In the existing ALD process, the temperature difference is large due to uneven heat radiation when two boats are stacked, resulting in a low heating rate and long process time. In addition, traditional auxiliary heat pipes are expensive, easily damaged, and inconvenient to maintain.
The target gas is heated by a heating component, and the heat is transferred to the reaction chamber through the gas, which enhances the heat conduction and heat convection effect, reduces the temperature difference of the boat structure, and uses stainless steel heating pipes to reduce costs and extend service life.
It improves the heating rate, reduces process time, increases production capacity, lowers maintenance and upkeep costs, and ensures that heat is evenly transferred to the boat structure, thus improving process quality.
Smart Images
Figure CN224395017U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a heating structure and processing equipment. Background Technology
[0002] Atomic Layer Deposition (ALD) technology is widely used in photovoltaic solar cells, micro-nano electronics, and energy storage due to its excellent controllability, uniformity, and conformal properties. In solar cells, ALD is used to deposit aluminum oxide thin films, not only for silicon surface passivation but also for passivation of half-cell cut surfaces. It achieves good coverage of the cell cut surfaces and offers advantages such as excellent surface passivation performance, minimal side-wrap deposition, fast deposition speed, high throughput, and low mass production cost.
[0003] In the ALD process, to maximize production capacity, the boats entering the inner cavity are typically stacked in two layers. Heating is achieved using heating plates outside the inner cavity, primarily through thermal radiation. When two boats are stacked, the lower boat receives less thermal radiation than the upper boat due to the insulation provided by the paddle and bottom plate supporting the lower boat. This results in a significant temperature difference between the two boats, greatly impacting the process efficiency. Furthermore, relying mainly on thermal radiation for heat transfer leads to a slower heating rate and a longer process time. Utility Model Content
[0004] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a heating structure and a processing apparatus.
[0005] In a first aspect, one embodiment of this application provides a heating structure applied to a reactor. The reactor has an outer cavity and an inner cavity. The outer cavity has a receiving chamber, and the inner cavity has a reaction chamber. The inner cavity is disposed within the receiving chamber, and the reaction chamber is configured to house a boat structure, which is configured to carry a product. The heating structure includes: a heating plate disposed within the receiving chamber and configured to heat the inner cavity; and a heating assembly, at least partially disposed outside the receiving chamber, communicating with an external gas supply device and the reaction chamber, configured to receive a target gas provided by the external gas supply device, heat the target gas, and deliver the heated target gas to the reaction chamber so that the heated target gas heats the boat structure.
[0006] In some embodiments, the reaction chamber is configured to accommodate at least two boat structures arranged sequentially in a vertical direction.
[0007] In some embodiments, the heating assembly includes: a first gas pipe assembly connected to an external gas supply device; a gas valve connected to the first gas pipe assembly and configured to control the on / off state of a target gas; a second gas pipe assembly connected to the gas valve; a heating unit connected to the second gas pipe assembly and configured to heat the target gas; and a third gas pipe assembly connected to the heating unit and connected to a reaction chamber.
[0008] In some embodiments, the heating unit includes: a housing assembly having a cavity, a first through hole, and a second through hole; a heating pipe at least partially disposed in the cavity, the heating pipe having a first end and a second end, the first end and the second end of the heating pipe extending out of the cavity through the first through hole and the second through hole, respectively; a heating wire disposed in the cavity and configured to heat the heating pipe; a first connector, the first end of the heating pipe communicating with a second pipe assembly via the first connector; and a second connector, the second end of the heating pipe communicating with a third pipe assembly via the second connector.
[0009] In some embodiments, the heating pipe has a spiral portion, the spiral portion being helical, and a heating wire is wound around the spiral portion; and / or, the heating pipe is made of stainless steel.
[0010] In some embodiments, the heating assembly further includes a temperature detection assembly, the heating unit is connected to the temperature detection assembly, the temperature detection assembly is connected to the third gas tube assembly, and the temperature detection assembly is configured to detect the temperature of the heated target gas.
[0011] In some embodiments, the temperature detection assembly includes: a temperature detection connector having three interconnected ends, a first end of the temperature detection connector being connected to a heating unit, and a second end of the temperature detection connector being connected to a third gas tube assembly; and a temperature sensor having a detection end extending into the third end of the temperature detection connector, configured to detect the temperature of the heated target gas.
[0012] In some embodiments, the inner cavity has a first end and a second end disposed opposite to each other; wherein, the third tracheal assembly includes: a first branch assembly in communication with the heating unit; a second branch assembly in communication with the first branch assembly and extending through the first end of the inner cavity into the reaction chamber; and a third branch assembly in communication with the first branch assembly and extending through the second end of the inner cavity into the reaction chamber.
[0013] In some embodiments, the first gas tube assembly includes: a fourth branch assembly connected to an external gas supply device; a fifth branch assembly connected to the fourth branch assembly and connected to a gas valve; and a sixth branch assembly connected to the fourth branch assembly and connected to a reaction chamber; wherein the target gas provided by the external gas supply device can enter the reaction chamber through the fourth branch assembly and the sixth branch assembly to control the volume of the target gas entering the reaction chamber and adjust the gas pressure in the reaction chamber to a preset gas pressure value.
[0014] Secondly, one embodiment of this application provides a processing apparatus, comprising: a reactor having an outer cavity and an inner cavity, the outer cavity having a receiving chamber, the inner cavity having a reaction chamber, the inner cavity being disposed within the receiving chamber, the reaction chamber being configured to accommodate at least two boat structures arranged sequentially in a vertical direction, the boat structures being configured to carry products; an external gas supply device configured to provide a target gas; and a heating structure according to any of the first aspects above, wherein a heating plate of the heating structure is disposed within the receiving chamber and configured to heat the inner cavity, and a heating component of the heating structure is at least partially disposed outside the receiving chamber, the heating component being connected to the external gas supply device and the reaction chamber, and configured to receive the target gas provided by the external gas supply device, heat the target gas, and deliver the heated target gas to the reaction chamber so that the heated target gas heats the boat structures.
[0015] The heating structure and processing equipment proposed in this application have the following advantages.
[0016] First, based on the use of heating plates for heating, the target gas heated by the heating components enters the reaction chamber, which enhances the effects of heat conduction and convection, improves the heat transfer effect, thereby increasing the heating rate, reducing the process time, and increasing the production capacity.
[0017] Secondly, since the heated target gas can fully contact at least two boat structures through gaps (such as gaps in the boat structure, gaps between the boat structure and the paddle structure, etc.) without being blocked by the paddle structure, boat bottom plate, etc., the heat can be fully and evenly transferred to at least two boat structures, thereby reducing the temperature difference between at least two boat structures and improving the process quality.
[0018] Third, since the heating components can be embedded in the original gas path system of the reactor and are at least partially located outside the containment chamber, installation and maintenance are relatively convenient.
[0019] Fourth, compared to the traditional method of adding auxiliary heat pipes, which has high costs and is easily damaged during the process, the method of heating the target gas using heating components has low maintenance and upkeep costs, long service life, and low power consumption. Attached Figure Description
[0020] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.
[0021] Figure 1 The diagram shown is a schematic diagram of the structure of a heating assembly provided in an exemplary embodiment of this application.
[0022] Figure 2 The diagram shown is a schematic diagram of a heating structure provided in an exemplary embodiment of this application.
[0023] Figure 3 The diagram shown is a structural schematic of a heating unit and a temperature detection component provided in an exemplary embodiment of this application.
[0024] Figure 4 The diagram shown is a structural schematic of a heating unit and a temperature detection component provided in another exemplary embodiment of this application.
[0025] Figure 5 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.
[0026] Figure label:
[0027] 100. Heating structure; 110. Heating assembly; 111. First gas pipe assembly; 1111. Fourth branch assembly; 1112. Fifth branch assembly; 1113. Sixth branch assembly; 112. Gas valve; 113. Second gas pipe assembly; 114. Heating unit; 1141. Housing assembly; 11411. Support sheet metal; 11412. Flange; 1142. First connector; 1143. Second connector; 115. Third gas pipe assembly; 1151. First branch assembly; 1152. Second branch assembly; 1153. Third branch assembly; 116. Temperature detection assembly; 1161. Temperature detection connector; 1162. Third connector; 120. Heating plate; 200. Reactor; 210. Outer cavity; 220. Inner cavity; 300. External gas supply device; 400. Processing equipment. Detailed Implementation
[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0029] Application Overview
[0030] In related technologies, in addition to using heating plates for heating, several auxiliary heat pipes are usually added to the bottom of the inner cavity (i.e., the bottom of the lower boat). The auxiliary heat pipes also work simultaneously during the process to enhance heat transfer. In this way, the temperature difference between the upper and lower boats can be significantly reduced, and the heating rate can also be increased.
[0031] However, this approach also has obvious drawbacks, as detailed below.
[0032] First, multiple auxiliary heat pipes need to be laid inside the cavity, which is costly.
[0033] Secondly, auxiliary heat pipes are usually made of quartz, while the inner cavity is usually made of stainless steel. Under high temperatures, the inner cavity deforms and can easily damage the auxiliary heat pipe. Furthermore, quartz auxiliary heat pipes are also prone to deformation under high temperatures. If the auxiliary heat pipe deforms, the paddle can easily collide with the auxiliary heat pipe after entering the inner cavity, which can lead to the auxiliary heat pipe breaking.
[0034] Third, the auxiliary heat pipe is located inside the cavity, making it difficult to maintain and replace; fourth, the auxiliary heat pipe consumes a lot of energy, such as a single auxiliary heat pipe with a power of about 4000W.
[0035] Therefore, there is an urgent need for a better heating structure to reduce the temperature difference between the upper and lower boats and to increase the heating rate.
[0036] In view of this, this application proposes a heating structure and processing equipment, which have the following advantages.
[0037] First, based on the use of heating plates for heating, the target gas heated by the heating components enters the reaction chamber, which enhances the effects of heat conduction and convection, improves the heat transfer effect, thereby increasing the heating rate, reducing the process time, and increasing the production capacity.
[0038] Secondly, since the heated target gas can fully contact at least two boat structures through gaps (such as gaps in the boat structure, gaps between the boat structure and the paddle structure, etc.) without being blocked by the paddle structure, boat bottom plate, etc., the heat can be fully and evenly transferred to at least two boat structures, thereby reducing the temperature difference between at least two boat structures and improving the process quality.
[0039] Third, since the heating components can be embedded in the original gas path system of the reactor and are at least partially located outside the containment chamber, installation and maintenance are relatively convenient.
[0040] Fourth, compared to the traditional method of adding auxiliary heat pipes, which has high costs and is easily damaged during the process, the method of heating the target gas using heating components has low maintenance and upkeep costs, long service life, and low power consumption.
[0041] Exemplary device
[0042] Figure 1 The diagram shown is a structural schematic of a heating assembly provided in an exemplary embodiment of this application. Figure 2 The diagram shown is a schematic diagram of a heating structure provided in an exemplary embodiment of this application.
[0043] like Figure 1 and Figure 2 As shown, this application embodiment provides a heating structure 100 applied to a reactor 200. The reactor 200 has an outer cavity 210 and an inner cavity 220. The outer cavity 210 has a receiving chamber, and the inner cavity 220 has a reaction chamber. The inner cavity 220 is disposed in the receiving chamber, and the reaction chamber is configured to receive a boat structure, which is configured to carry a product. The heating structure 100 includes a heating plate 120 and a heating assembly 110. The heating plate 120 is disposed in the receiving chamber and configured to heat the inner cavity 220. The heating assembly 110 is at least partially disposed outside the receiving chamber, communicating with an external gas supply device 300 and the reaction chamber. It is configured to receive a target gas provided by the external gas supply device 300, heat the target gas, and deliver the heated target gas to the reaction chamber so that the heated target gas heats the boat structure.
[0044] For example, the product can be a silicon wafer, a glass substrate, a crystal wafer, or a solar cell.
[0045] For example, during the process, the paddle structure extends into the reaction chamber and carries at least two boat structures arranged in sequence along the vertical direction.
[0046] For example, the target gas includes at least one of nitrogen, argon, or other inert gases. This application does not limit this, as long as it ensures that the target gas does not react with the product. In practical applications, the target gas can be high-purity nitrogen.
[0047] For example, the heating assembly 110 includes at least one tubing assembly and a heating unit. The tubing assembly is used to transport the target gas, and the heating unit is used to heat the target gas.
[0048] In some applications, the reaction chamber is configured to accommodate at least two boat structures arranged sequentially in a vertical direction.
[0049] For example, the three boat structures in the reaction chamber are arranged in sequence along the vertical direction.
[0050] In practical applications, when the process begins, the external gas supply device 300 can first provide the target gas. The target gas is heated by the heating component 110 and then enters the reaction chamber, making full contact with the stacked boat structures to complete heat transfer. At the same time, the heating plate 120 also continues to heat. When the stacked boat structures reach the process temperature, the target gas is extracted from the reaction chamber (by a vacuum pump). The heating plate 120 continues to heat. When the pressure in the reaction chamber reaches the set value and remains stable, the process gas is introduced into the reaction chamber to carry out the process.
[0051] The heating structure 100 provided in the above embodiments has the following advantages.
[0052] First, based on heating with heating plate 120, the target gas heated by heating component 110 enters the reaction chamber, which enhances the effect of heat conduction and heat convection, improves the heat transfer effect, thereby increasing the heating rate, reducing the process time, and increasing the production capacity.
[0053] Secondly, since the heated target gas can fully contact at least two boat structures through gaps (such as gaps in the boat structure, gaps between the boat structure and the paddle structure, etc.) without being blocked by the paddle structure, boat bottom plate, etc., the heat can be fully and evenly transferred to at least two boat structures, thereby reducing the temperature difference between at least two boat structures and improving the process quality.
[0054] Third, since the heating component 100 can be embedded in the original gas path system of the reactor and is at least partially located outside the containment chamber, installation and maintenance are relatively convenient.
[0055] Fourth, compared to the traditional method of adding auxiliary heat pipes, which has high costs and is easily damaged during the process, the method of heating the target gas with heating components has low maintenance and upkeep costs, long service life, and low power consumption (e.g., the power of heating component 100 is about 3000W).
[0056] In some embodiments, such as Figure 1 As shown, the heating assembly 110 includes: a first gas pipe assembly 111, a gas valve 112, a second gas pipe assembly 113, a heating unit 114, and a third gas pipe assembly 115. The first gas pipe assembly 111 is connected to an external gas supply device 300. The gas valve 112 is connected to the first gas pipe assembly 111 and is configured to control the on / off state of the target gas. The second gas pipe assembly 113 is connected to the gas valve 112. The heating unit 114 is connected to the second gas pipe assembly 113 and is configured to heat the target gas. The third gas pipe assembly 115 is connected to the heating unit 114 and is also connected to the reaction chamber.
[0057] For example, the first tracheal assembly 111 includes: at least one trachea and / or at least one connector.
[0058] For example, the external gas supply device 300 includes: a gas source and a gas source cabinet, the gas source cabinet being able to receive the target gas provided by the gas source, and the first gas pipe assembly 111 being connected to the gas source cabinet.
[0059] For example, the air valve 112 is a pneumatic diaphragm valve or a ball valve, etc.
[0060] For example, the second tracheal assembly 113 includes at least one trachea and / or at least one connector.
[0061] For example, the third tracheal assembly 115 includes: at least one trachea and / or at least one connector.
[0062] For example, the trachea described in this application embodiment can be a microcentrifuge tube (Eppendorf tube, abbreviated as EP tube), the material of the trachea can be stainless steel, and the connector is used for sealed connection of the trachea or other components.
[0063] For example, the connector described in the embodiments of this application may be a vacuum sealing connector (VCR) connector.
[0064] For example, the first tracheal assembly 111, the air valve 112, the second tracheal assembly 113 and the heating unit 114 may be located outside the receiving chamber, and the third tracheal assembly 115 is connected to the reaction chamber.
[0065] In the above embodiments, the heating component 110 of this structure is simple in structure, low in cost, and easy to maintain and install.
[0066] Figure 3 The diagram shown is a schematic representation of the heating unit and temperature detection assembly provided in an exemplary embodiment of this application. Figure 4 The diagram shown is a structural schematic of a heating unit and a temperature detection component provided in another exemplary embodiment of this application.
[0067] In some embodiments, such as Figure 3 and Figure 4As shown, the heating unit 114 includes: a housing assembly 1141, a heating pipe, a heating wire, a first connector 1142, and a second connector 1143. The housing assembly 1141 has a cavity, a first through hole, and a second through hole. The heating pipe is at least partially disposed in the cavity, having a first end and a second end, which extend out of the cavity through the first and second through holes, respectively. The heating wire is disposed in the cavity and configured to heat the heating pipe. The first end of the heating pipe is connected to a second pipe assembly 113 via the first connector 1142. The second end of the heating pipe is connected to a third pipe assembly 115 via the second connector 1143.
[0068] For example, the housing assembly 1141 includes a support sheet metal 11411 and two flanges 11412. The two flanges 11412 are respectively connected to both ends of the support sheet metal 11411, one flange 11412 having a first through hole and the other flange 11412 having a second through hole.
[0069] For example, the first connector 1142 is a VCR connector.
[0070] For example, the second connector 1143 is a VCR connector.
[0071] In the above embodiments, the heating unit 114 has a simple structure, low cost, and is easy to maintain and install.
[0072] In some embodiments, the heating pipe has a spiral portion, which is spiral-shaped, and a heating wire is wound around the spiral portion.
[0073] In the above embodiments, this structure allows the target gas to be fully heated within the heating pipe.
[0074] In some embodiments, such as Figure 3 and Figure 4 As shown, the heating assembly 110 also includes a temperature detection assembly 116. The heating unit 114 is connected to the temperature detection assembly 116, and the temperature detection assembly 116 is connected to the third gas tube assembly 115. The temperature detection assembly 116 is configured to detect the temperature of the heated target gas.
[0075] In the above embodiments, by setting the temperature detection component 116, the temperature of the heated target gas can be accurately monitored.
[0076] In some embodiments, such as Figure 3 and Figure 4As shown, the temperature detection assembly 116 includes a temperature detection connector 1161 and a temperature sensor (not shown). The temperature detection connector 1161 has three interconnected ends. The first end of the temperature detection connector 1161 is connected to the heating unit 114, and the second end of the temperature detection connector 1161 is connected to the third gas tube assembly 115. The temperature sensor has a detection end (such as a probe) that extends into the third end of the temperature detection connector 1161 and is configured to detect the temperature of the heated target gas.
[0077] For example, the first end of the temperature detection connector 1161 is connected to the heating gas pipe through the second connector 1143, and the temperature detection assembly 116 also includes a third connector 1162, the second end of the temperature detection connector 1161 is connected to the third gas pipe assembly 115 through the third connector 1162.
[0078] For example, the third connector 1162 is a VCR connector.
[0079] In the above embodiments, this structure can accurately measure the temperature of the heated target gas, and the structure is simple, easy to install and maintain, and has a low cost.
[0080] In some embodiments, such as Figure 1 As shown, the inner cavity 220 has a first end and a second end that are disposed opposite to each other. Wherein, as... Figure 1 As shown, the third tracheal assembly 115 includes a first branch assembly 1151, a second branch assembly 1152, and a third branch assembly 1153. The first branch assembly 1151 is connected to the heating unit 114. The second branch assembly 1152 is connected to the first branch assembly 1151 and extends through the first end of the inner cavity 220 into the reaction chamber. The third branch assembly 1153 is connected to the first branch assembly 1151 and extends through the second end of the inner cavity 220 into the reaction chamber.
[0081] For example, the first branch assembly 1151 includes: at least one trachea and / or at least one connector.
[0082] For example, the second branch assembly 1152 includes: at least one trachea and / or at least one connector.
[0083] For example, the third branch assembly 1153 includes: at least one trachea and / or at least one connector.
[0084] In the above embodiments, by simultaneously introducing the target gas into the reaction chamber through the second branch assembly 1152 and the third branch assembly 1153, the target gas can be introduced into the reaction chamber more evenly, thereby heating the boat structure more evenly.
[0085] In some embodiments, the heating pipe is made of stainless steel.
[0086] In related technologies, in order to minimize deformation, allow heat radiation to spread better, and facilitate observation of the heating wire inside the pipe, auxiliary heating pipes are usually made of quartz. Quartz is easily damaged at high temperatures. However, the above factors have less impact on the choice of materials for heating pipes. Heating pipes can be made of stainless steel, which is not easily damaged at high temperatures, thus extending the service life of the heating pipes.
[0087] In some embodiments, such as Figure 1 As shown, the first gas tube assembly 111 includes a fourth branch assembly 1111, a fifth branch assembly 1112, and a sixth branch assembly 1113. The fourth branch assembly 1111 is connected to the external gas supply device 300. The fifth branch assembly 1112 is connected to the fourth branch assembly 1111 and also to the gas valve 112. The sixth branch assembly 1113 is connected to the fourth branch assembly 1111 and also to the reaction chamber. The target gas supplied by the external gas supply device 300 can enter the reaction chamber through the fourth branch assembly 1111 and the sixth branch assembly to control the volume of the target gas entering the reaction chamber and adjust the gas pressure in the reaction chamber to a preset value.
[0088] For example, the fourth branch assembly 1111 includes: at least one trachea and / or at least one connector.
[0089] For example, the fifth branch assembly 1112 includes: at least one trachea and / or at least one connector.
[0090] For example, the sixth branch assembly 1113 includes: at least one trachea and / or at least one connector.
[0091] In the above embodiments, with this structure, the gas path for introducing heated target gas into the reaction chamber and the gas path for introducing target gas into the reaction chamber to regulate the pressure of the reaction chamber can share the fourth branch component 1111, thereby saving materials and reducing costs.
[0092] Figure 5 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.
[0093] Based on the same concept, such as Figure 2 and Figure 5As shown in the illustration, this application also provides a processing apparatus 400, which includes a reactor 200, an external gas supply device 300, and a heating structure 100 as described in any of the above embodiments. The reactor 200 has an outer cavity 210 and an inner cavity 220. The outer cavity 210 has a receiving chamber, and the inner cavity 220 has a reaction chamber. The inner cavity 220 is disposed within the receiving chamber, and the reaction chamber is configured to accommodate at least two boat structures arranged sequentially in a vertical direction. The boat structures are configured to carry products. The external gas supply device 300 is configured to provide a target gas. The heating plate 120 of the heating structure 100 is disposed in the receiving chamber and is configured to heat the inner cavity 220. The heating component 110 of the heating structure 100 is at least partially disposed outside the receiving chamber. The heating component 110 is connected to the external gas supply device 300 and the reaction chamber and is configured to receive the target gas provided by the external gas supply device 300, heat the target gas, and deliver the heated target gas to the reaction chamber so that the heated target gas heats the boat structure.
[0094] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.
[0095] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.
[0096] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.
[0097] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.
[0098] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.
Claims
1. A heating structure, characterized in that, The invention is applied to a reactor having an outer cavity and an inner cavity, the outer cavity having a receiving chamber and the inner cavity having a reaction chamber, the inner cavity being disposed within the receiving chamber, the reaction chamber being configured to receive a boat structure, and the boat structure being configured to carry products. The heating structure includes: A heating plate, disposed in the receiving chamber, is configured to heat the inner cavity; A heating component, at least partially disposed outside the receiving chamber, communicating with an external gas supply device and the reaction chamber, is configured to receive a target gas provided by the external gas supply device, heat the target gas, and deliver the heated target gas to the reaction chamber so that the heated target gas heats the boat structure.
2. The heating structure according to claim 1, characterized in that, The reaction chamber is configured to accommodate at least two boat structures arranged sequentially in a vertical direction.
3. The heating structure according to claim 1 or 2, characterized in that, The heating component includes: The first air tube assembly is connected to the external air supply device; A gas valve, connected to the first gas tubing assembly, is configured to control the on / off state of the target gas; The second air tube assembly is connected to the air valve; A heating unit, connected to the second gas tube assembly, is configured to heat the target gas; The third gas tube assembly is connected to the heating unit and the reaction chamber.
4. The heating structure according to claim 3, characterized in that, The heating unit includes: A housing assembly having a cavity, a first through hole, and a second through hole; A heating pipe is at least partially disposed in the cavity. The heating pipe has a first end and a second end, and the first end and the second end of the heating pipe extend out of the cavity through the first through hole and the second through hole, respectively. A heating wire, disposed in the cavity, is configured to heat the heating gas tube; The first connector connects the first end of the heating gas pipe to the second gas pipe assembly. The second connector connects the second end of the heating pipe to the third pipe assembly.
5. The heating structure according to claim 4, characterized in that, The heating pipe has a spiral section, which is spiral-shaped, and the heating wire is wound around the spiral section; And / or, the heating pipe is made of stainless steel.
6. The heating structure according to claim 3, characterized in that, The heating components also include: A temperature detection component is provided, wherein the heating unit is connected to the temperature detection component, the temperature detection component is connected to the third gas tube assembly, and the temperature detection component is configured to detect the temperature of the heated target gas.
7. The heating structure according to claim 6, characterized in that, The temperature detection component includes: A temperature detection connector having three interconnected ends, the first end of which is connected to the heating unit, and the second end of which is connected to the third gas pipe assembly. A temperature sensor having a detection end that extends into the third end of the temperature detection connector and is configured to detect the temperature of the heated target gas.
8. The heating structure according to claim 3, characterized in that, The inner cavity has a first end and a second end that are disposed opposite to each other; The third tracheal assembly includes: The first branch assembly is connected to the heating unit; The second branch assembly is connected to the first branch assembly and extends through the first end of the inner cavity into the reaction chamber; The third branch assembly is connected to the first branch assembly and extends through the second end of the inner cavity into the reaction chamber.
9. The heating structure according to claim 3, characterized in that, The first tracheal assembly includes: The fourth branch assembly is connected to the external air supply device; The fifth branch assembly is connected to the fourth branch assembly and to the air valve; The sixth branch assembly is connected to the fourth branch assembly and to the reaction chamber; The target gas supplied by the external gas supply device can enter the reaction chamber through the fourth branch assembly and the sixth branch group to control the volume of the target gas entering the reaction chamber and adjust the gas pressure of the reaction chamber to a preset gas pressure value.
10. A processing device, characterized in that, include: A reactor having an outer cavity and an inner cavity, the outer cavity having a receiving chamber and the inner cavity having a reaction chamber, the inner cavity being disposed within the receiving chamber, the reaction chamber being configured to receive at least two boat structures arranged sequentially in a vertical direction, the boat structures being configured to carry products; An external gas supply device is configured to provide the target gas; The heating structure according to any one of claims 1 to 9, wherein the heating plate of the heating structure is disposed in the receiving chamber and configured to heat the inner cavity, and the heating component of the heating structure is at least partially disposed outside the receiving chamber, the heating component is connected to the external gas supply device and the reaction chamber, and is configured to receive the target gas provided by the external gas supply device, heat the target gas, and deliver the heated target gas to the reaction chamber so that the heated target gas heats the boat structure.