Temperature-controllable aluminum nitride sintering furnace

Abstract

The utility model discloses a controllable temperature aluminum nitride sintering furnace, including sintering furnace body, the inside of sintering furnace body is equipped with electric heating tube and high temperature optical thermometer respectively, the left side of sintering furnace body is equipped with PLC controller, and the input of PLC controller is electrically connected to external power supply, and the input of electric heating tube is electrically connected to the output of PLC controller, and the output of high temperature optical thermometer is electrically connected to the input of PLC controller, and the left side of sintering furnace body is equipped with air circulation equipment, still including flow guide mechanism, flow guide mechanism: it includes flow guide ring, flow guide hole, swivel ring and air hole, the flow guide ring sets up in the inside of sintering furnace body respectively, and this controllable temperature aluminum nitride sintering furnace passes through the position of air hole and flow guide hole coincides with change, adjusts the in and out position of circulating air in the inside of sintering furnace body, makes the air along different track and circulates in the inside of sintering furnace body, makes the temperature control effect of aluminum nitride sintering furnace more uniform.

Description

Technical Field

[0001] This utility model relates to the field of aluminum nitride sintering furnace technology, specifically a temperature-controlled aluminum nitride sintering furnace. Background Technology

[0002] An aluminum nitride sintering furnace is a device used for sintering aluminum nitride materials. It typically consists of a furnace body, a heating device, and a control system. The furnace body is generally made of high-temperature and corrosion-resistant materials to withstand the high-temperature sintering process. The heating device can use resistance heaters or induction heaters to heat the material in the furnace body to the required temperature. The control system controls parameters such as heating temperature, temperature distribution within the furnace, and sintering time to ensure sintering quality. In the prior art, patent publication number CN209013750U proposes a high-temperature hydrogen sintering furnace for aluminum nitride ceramics, including a furnace body, the upper opening of which is covered by an upper furnace cover. The furnace body is closed at the bottom by a movable furnace bottom that can be raised and lowered. The furnace body is equipped with a low-volatility furnace lining, which is made of all-metal tungsten-molybdenum material. The volatilization rate is extremely low at high temperatures, so it will not contaminate the aluminum nitride material in the furnace and effectively improve the quality of the aluminum nitride substrate. The low-volatility furnace lining is equipped with a uniform temperature heater, which includes a main heater and top auxiliary heaters and bottom auxiliary heaters located at the top and bottom of the furnace. Although the temperature inside the furnace can be controlled, the fixed position of the furnace inlet and outlet results in a certain air flow trajectory inside the furnace, which can easily lead to uneven temperature regulation inside the furnace. Utility Model Content

[0003] The technical problem to be solved by this utility model is to overcome the existing defects and provide a temperature-controlled aluminum nitride sintering furnace. By changing the position of the overlap between the pores and the guide holes, the entry and exit positions of the circulating air inside the sintering furnace body are adjusted, so that the air circulates along different trajectories inside the sintering furnace body, making the temperature control effect of the aluminum nitride sintering furnace more uniform, which can effectively solve the problems in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a temperature-controlled aluminum nitride sintering furnace, comprising a sintering furnace body, wherein an electric heating tube and a high-temperature optical thermometer are respectively installed inside the sintering furnace body, a PLC controller is installed on the left side of the sintering furnace body, the input terminal of the PLC controller is electrically connected to an external power supply, the input terminal of the electric heating tube is electrically connected to the output terminal of the PLC controller, the output terminal of the high-temperature optical thermometer is electrically connected to the input terminal of the PLC controller, an air circulation device is installed on the left side of the sintering furnace body, and a flow guiding mechanism is also included;

[0005] The flow guiding mechanism includes flow guiding rings, flow guiding holes, rotating rings, and air holes. The flow guiding rings are respectively set inside the sintering furnace body. The air inlet and outlet of the sintering furnace body are respectively connected to the adjacent flow guiding rings. The inner arc surface of the flow guiding rings is provided with annularly distributed flow guiding holes. The inner side of the flow guiding rings is rotatably connected to the rotating rings. The outer arc surface of the rotating rings is provided with air holes. By changing the position of the air holes and the flow guiding holes, the position of the circulating air entering and exiting inside the sintering furnace body is adjusted, so that the air circulates along different trajectories inside the sintering furnace body, making the temperature control effect of the aluminum nitride sintering furnace more uniform.

[0006] Furthermore, the guide ring includes an inlet ring and an outlet ring, both of which are located inside the sintering furnace body. The inlet and outlet rings are longitudinally alternating, and the pores inside the inlet and outlet rings are symmetrical about the axis of the sintering furnace body. The outlet rings are all connected to the outlet of the sintering furnace body. The rear end of the outer arc surface of the inlet ring is connected to the inlet of the sintering furnace body. The heating tubes are respectively located at the rear end of the inlet ring, and the high-temperature optical thermometers are respectively located on the inner arc surface of the inlet ring. Rotary rings are rotatably connected inside both the inlet and outlet rings to guide the inlet and outlet positions of the air inside the sintering furnace body.

[0007] Furthermore, the air guide ring also includes a baffle and a connecting hole. A baffle is provided in the middle between the inner and outer arc walls of the air intake ring, and the surface of the baffle is provided with a connecting hole to guide air to contact the heating component.

[0008] Furthermore, the flow guiding mechanism also includes an external gear ring, a transmission gear, a drive gear, and a rotating column. The outer arc surface of the rotating ring is provided with an external gear ring, and the lower end of the air inlet ring and the air outlet ring are provided with a drive housing. The front and rear inner walls of the drive housing are rotatably connected to the transmission gear through a rotating shaft, and the front and rear inner walls of the drive housing are rotatably connected to the drive gear through a rotating column. The external gear ring, transmission gear, and drive gear corresponding to the vertical position mesh in sequence to facilitate the rotation of the rotating ring.

[0009] Furthermore, the flow guiding mechanism also includes a drive motor, which is located at the rear end of the sintering furnace body. The longitudinally distributed rotating columns are connected end to end in sequence, and the last rotating column is fixedly connected to the output shaft of the drive motor. The input end of the drive motor is electrically connected to the output end of the PLC controller to provide power for the rotation of the rotating ring.

[0010] Furthermore, the bottom wall of the drive housing at the lower end of the air intake ring and the air outlet ring are equipped with micro switches, and the outer arc surface of the rotating column is equipped with a top post. The top post is installed in conjunction with the micro switch, and the output end of the micro switch is electrically connected to the input end of the PLC controller to detect the rotation position of the rotating ring.

[0011] Furthermore, the inner arc surface of the sintering furnace body is provided with a heat insulation lining to prevent heat from dissipating outward.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: This temperature-controlled aluminum nitride sintering furnace has the following advantages:

[0013] By changing the position where the air pores and guide holes overlap, the entry and exit positions of the circulating air inside the sintering furnace are adjusted, allowing the air to circulate along different trajectories inside the sintering furnace, thus making the temperature control effect of the aluminum nitride sintering furnace more uniform. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a structural schematic diagram of the internal side cross-section of the sintering furnace body of this utility model;

[0016] Figure 3 This is an enlarged structural diagram of section B of the present invention;

[0017] Figure 4 This is a partial exploded structural diagram of the flow guiding mechanism of this utility model;

[0018] Figure 5 This is a structural schematic diagram of the internal cross-section of the sintering furnace body of this utility model;

[0019] Figure 6 This is an enlarged structural diagram of point A in this utility model.

[0020] In the diagram: 1 Sintering furnace body, 2 PLC controller, 3 Heating tube, 4 High-temperature optical thermometer, 5 Flow guiding mechanism, 51 Flow guiding ring, 511 Inlet ring, 512 Outlet ring, 513 Baffle, 514 Connecting hole, 52 Flow guiding hole, 53 Rotating ring, 54 Air hole, 55 External gear ring, 56 Transmission gear, 57 Drive gear, 58 Rotating column, 59 Drive motor, 6 Top column, 7 Micro switch, 8 Heat insulation liner. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-6This embodiment provides a technical solution: a temperature-controlled aluminum nitride sintering furnace, including a sintering furnace body 1, providing space for sintering aluminum nitride material. The furnace body 1 is internally equipped with an electric heating tube 3 and a high-temperature optical thermometer 4. A PLC controller 2 is located on the left side of the furnace body 1. The input terminal of the PLC controller 2 is electrically connected to an external power supply, and the input terminal of the electric heating tube 3 is electrically connected to the output terminal of the PLC controller 2. The PLC controller 2 controls the start and stop of the entire device. The output terminal of the high-temperature optical thermometer 4 is electrically connected to the input terminal of the PLC controller 2. When the electric heating tube 3 is activated, the heat generated by the electric heating tube 3 is used to sinter the aluminum nitride material. During the sintering process, the high-temperature optical thermometer 4 is used to sinter the aluminum nitride material. Temperature gauge 4 detects the temperature of aluminum nitride material. PLC controller 2 adjusts the power of electric heating tube 3 based on the data detected by high-temperature optical thermometer 4 to control the internal temperature of sintering furnace body 1. An air circulation device is provided on the left side of sintering furnace body 1. The air circulation device is equipped with a circulation pump. The outlet of the circulation pump is connected to the inlet of sintering furnace body 1 through a pipe. The inlet of the circulation pump is connected to the outlet of sintering furnace body 1. The input end of the circulation pump is electrically connected to the output end of PLC controller 2. During sintering, the circulation pump is started to circulate the air inside sintering furnace body 1, thereby improving the uniformity of heat distribution inside sintering furnace body 1. It also includes a flow guiding mechanism 5.

[0023] The flow guiding mechanism 5 includes a flow guiding ring 51, flow guiding holes 52, a rotating ring 53, and air holes 54. The flow guiding rings 51 are respectively disposed inside the sintering furnace body 1. The air inlet and outlet of the sintering furnace body 1 are respectively connected to adjacent flow guiding rings 51. The inner arc surface of each flow guiding ring 51 is provided with annularly distributed flow guiding holes 52. A rotating ring 53 is rotatably connected inside each flow guiding ring 51. The outer arc surface of each rotating ring 53 is provided with air holes 54. Each flow guiding ring 51 includes an inlet ring 511 and an outlet ring 512, both disposed inside the sintering furnace body 1. The inlet ring 511 and outlet ring 512 are longitudinally alternating. The air holes 54 inside the inlet ring 511 and the outlet ring 512 are symmetrical about the axis of the sintering furnace body 1. All rings 512 are connected to the air outlet of the sintering furnace body 1. The rear end of the outer arc surface of the air inlet ring 511 is connected to the air inlet of the sintering furnace body 1. The electric heating tubes 3 are respectively set inside the rear end of the air inlet ring 511. The high-temperature optical thermometers 4 are respectively set on the inner arc surface of the air inlet ring 511. The inner arc walls of the air inlet ring 511 and the air outlet ring 512 are rotatably connected to the inside. The inner arc walls of the air inlet ring 511 and the air outlet ring 512 are respectively in contact with the inner arc surface of the adjacent rotating ring 53. The guide ring 51 also includes a partition 513 and a connecting hole 514. A partition 513 is provided in the middle between the inner and outer arc walls of the air inlet ring 511. The surface of the partition 513 is respectively provided with a connecting hole 514. During the air circulation process, air enters the inner arc surface of the air inlet ring 511 through the air inlet of the sintering furnace body 1. At the rear end, the heat generated by the heating element 3 is converted into hot air. The hot air then enters the inner front end of the inlet ring 511 through the connecting hole 514. Under the obstruction of the rotating ring 53, the hot air is discharged from the air hole 54. Similarly, the air inside the sintering furnace body 1 will enter the outlet ring 512 through the air hole 54 inside the outlet ring 512, and finally be discharged from the outlet of the sintering furnace body 1. The air inlet and outlet positions of the sintering furnace body 1 are guided by changing the position of the air hole 54, so that the air enters and exits the sintering furnace body 1 from different positions and angles. The flow guiding mechanism 5 also includes an external gear ring 55, a transmission gear 56, a drive gear 57, and a rotating column 58. The outer arc surface of the rotating ring 53 is provided with an external gear ring 55. The lower end of the inlet ring 511 and the outlet ring 512 are provided with a drive housing. The front and rear inner walls of the shell are rotatably connected by a transmission gear 56 via a rotating shaft. The front and rear inner walls of the drive shell are rotatably connected by a drive gear 57 via a rotating column 58. The external gear ring 55, transmission gear 56, and drive gear 57 in the vertical position mesh sequentially. The flow guiding mechanism 5 also includes a drive motor 59, which is located at the rear end of the sintering furnace body 1. The longitudinally distributed rotating columns 58 are connected end to end in sequence. The rearmost rotating column 58 is fixedly connected to the output shaft of the drive motor 59. The input end of the drive motor 59 is electrically connected to the output end of the PLC controller 2. When the drive motor 59 is started, the output shaft of the drive motor 59 drives the rotating column 58 and drive gear 57 to rotate. Through the meshing transmission of the transmission gear 56, the external gear ring 55 drives the rotating ring 53 to rotate.The position of the vent 54 is changed. Microswitches 7 are installed on the bottom wall of the drive housing at the lower end of the inlet ring 511 and outlet ring 512. Top posts 6 are installed on the outer arc surface of the rotating column 58. The top posts 6 are installed in conjunction with the microswitches 7. The output terminal of the microswitches 7 is electrically connected to the input terminal of the PLC controller 2. During the rotation of the rotating column 58, the rotating column 58 drives the top posts 6 to rotate. When the top post 6 contacts the detection terminal of the microswitches 7, the microswitches 7 send a signal to the PLC controller 2 to determine the rotation position of the rotating column 58, indicating that the vent 54 coincides with the guide hole 52. A heat insulation liner 8 is installed on the inner arc surface of the sintering furnace body 1. The heat insulation liner 8 is a galvanized heat insulation liner, which prevents heat from dissipating outwards.

[0024] The working principle of the temperature-controlled aluminum nitride sintering furnace provided by this utility model is as follows: During use, aluminum nitride material is placed inside the sintering furnace body 1. The electric heating tube 3 is activated via the PLC controller 2, utilizing the heat generated by the electric heating tube 3 to sinter the aluminum nitride material. During the sintering process, a high-temperature optical thermometer 4 is used to detect the temperature of the aluminum nitride material. The PLC controller 2 adjusts the power of the electric heating tube 3 based on the data detected by the high-temperature optical thermometer 4, thereby controlling the internal temperature of the sintering furnace body 1. During temperature control, the drive motor 59 is activated. The output shaft of the drive motor 59 drives the rotating column 58 and the drive gear 57 to rotate. Through the meshing transmission gear 56, the external gear ring 55 drives the rotating ring 53 to rotate, thus adjusting the position of the air pores 54. The air circulation device on the left side of the sintering furnace body 1 is used to circulate the air inside the sintering furnace body 1. The air enters the rear end of the air inlet ring 511 through the air inlet of the sintering furnace body 1, absorbs the heat generated by the electric heating tube 3 and is converted into hot air. Then the hot air enters the front end of the air inlet ring 511 through the connecting hole 514. Under the obstruction of the rotating ring 53, the hot air is discharged from the air hole 54. Similarly, the air inside the sintering furnace body 1 will enter the air outlet ring 512 through the air hole 54 inside the air outlet ring 512 and finally be discharged from the air outlet of the sintering furnace body 1. The air inlet and outlet positions of the sintering furnace body 1 are guided by changing the position of the air hole 54, so that the air enters and exits the sintering furnace body 1 from different positions and angles, and the heat distribution inside the sintering furnace body 1 is more uniform.

[0025] It is worth noting that the PLC controller 2 disclosed in the above embodiments can be an NX7 model PLC controller. The heating element 3, high-temperature optical thermometer 4, drive motor 59 and micro switch 7 can be freely configured according to the actual application scenario. The heating element 3 can be an MCH model ceramic heating element, the high-temperature optical thermometer 4 can be a WGG2-323 model high-temperature optical thermometer, the drive motor 59 can be an HC-KFS model servo motor, and the micro switch 7 can be an LXW5-11G1 model micro switch. The PLC controller 2 controls the operation of the heating element 3, high-temperature optical thermometer 4, drive motor 59 and micro switch 7 using methods commonly used in the prior art.

[0026] The above are merely embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A temperature-controlled aluminum nitride sintering furnace, comprising a sintering furnace body (1), wherein an electric heating tube (3) and a high-temperature optical thermometer (4) are respectively provided inside the sintering furnace body (1), a PLC controller (2) is provided on the left side of the sintering furnace body (1), the input terminal of the PLC controller (2) is electrically connected to an external power supply, the input terminal of the electric heating tube (3) is electrically connected to the output terminal of the PLC controller (2), the output terminal of the high-temperature optical thermometer (4) is electrically connected to the input terminal of the PLC controller (2), and an air circulation device is provided on the left side of the sintering furnace body (1), characterized in that: It also includes a flow guiding mechanism (5); The flow guiding mechanism (5) includes a flow guiding ring (51), a flow guiding hole (52), a rotating ring (53), and a vent (54). The flow guiding ring (51) is respectively located inside the sintering furnace body (1). The air inlet and outlet of the sintering furnace body (1) are respectively connected to the adjacent flow guiding ring (51). The inner arc surface of the flow guiding ring (51) is provided with annularly distributed flow guiding holes (52). The interior of the flow guiding ring (51) is rotatably connected to a rotating ring (53). The outer arc surface of the rotating ring (53) is provided with a vent (54).

2. The temperature-controlled aluminum nitride sintering furnace according to claim 1, characterized in that: The guide ring (51) includes an inlet ring (511) and an outlet ring (512). Both the inlet ring (511) and the outlet ring (512) are located inside the sintering furnace body (1). The inlet ring (511) and the outlet ring (512) are longitudinally alternating. The air holes (54) inside the inlet ring (511) and the air holes (54) inside the outlet ring (512) are symmetrical about the axis of the sintering furnace body (1). The exhaust ring (512) is connected to the exhaust port of the sintering furnace body (1), the rear end of the outer arc surface of the intake ring (511) is connected to the intake port of the sintering furnace body (1), the electric heating tube (3) is respectively set in the inner rear end of the intake ring (511), the high temperature optical thermometer (4) is respectively set in the inner arc surface of the intake ring (511), and the intake ring (511) and the exhaust ring (512) are rotatably connected to the inside.

3. The temperature-controlled aluminum nitride sintering furnace according to claim 2, characterized in that: The guide ring (51) also includes a partition (513) and a connecting hole (514). The middle part between the inner and outer arc walls of the air intake ring (511) is provided with a partition (513), and the surface of the partition (513) is provided with a connecting hole (514).

4. The temperature-controlled aluminum nitride sintering furnace according to claim 2, characterized in that: The flow guiding mechanism (5) also includes an external toothed ring (55), a transmission gear (56), a drive gear (57), and a rotating column (58). The outer arc surface of the rotating ring (53) is provided with an external toothed ring (55). The lower ends of the air intake ring (511) and the air outlet ring (512) are provided with drive housings. The front and rear inner walls of the drive housing are rotatably connected to the transmission gear (56) through a rotating shaft. The front and rear inner walls of the drive housing are rotatably connected to the drive gear (57) through a rotating column (58). The external toothed ring (55), transmission gear (56), and drive gear (57) corresponding to the vertical position mesh in sequence.

5. The temperature-controlled aluminum nitride sintering furnace according to claim 4, characterized in that: The flow guiding mechanism (5) also includes a drive motor (59), which is located at the rear end of the sintering furnace body (1). The longitudinally distributed rotating columns (58) are connected end to end in sequence. The last rotating column (58) is fixedly connected to the output shaft of the drive motor (59). The input end of the drive motor (59) is electrically connected to the output end of the PLC controller (2).

6. The temperature-controlled aluminum nitride sintering furnace according to claim 4, characterized in that: The bottom wall of the drive housing at the lower end of the air intake ring (511) and the air outlet ring (512) is provided with a micro switch (7), and the outer arc surface of the rotating column (58) is provided with a top column (6). The top column (6) is installed in conjunction with the micro switch (7), and the output end of the micro switch (7) is electrically connected to the input end of the PLC controller (2).

7. The temperature-controlled aluminum nitride sintering furnace according to claim 1, characterized in that: The inner arc surface of the sintering furnace body (1) is provided with a heat insulation lining plate (8).

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