Exposure system for a substrate

Abstract

The utility model relates to excimer laser technical field especially convenient to butt joint's excimer laser gas supply module pipeline, including laser main part, the one end outside of laser main part is provided with three -way valve, one end of three -way valve is provided with first screw thread connection pipe, the bottom of first screw thread connection pipe is provided with second screw thread connection pipe, the outside of first screw thread connection pipe is provided with swivel, the outside bottom of swivel is provided with connecting sleeve, the bottom of second screw thread connection pipe is provided with sensor main part, utilize three -way valve according to the demand nimblely inject gas into laser main part, or guide flow to the first screw thread connection pipe in bypass, rotate swivel around first screw thread connection pipe and drive connecting sleeve rotation, make it rotate around second screw thread connection pipe, utilize connecting sleeve and connect fixed second screw thread connection pipe, gas delivery is detected to sensor main part and carries out operation to correct the equipment through the same quick -release port connection, shorten the downtime, reduce gas leakage risk.

Description

Technical Field

[0001] This utility model relates to the field of excimer laser technology, and in particular to an excimer laser gas supply module pipeline that is easy to connect. Background Technology

[0002] An excimer laser is a gas laser that uses excimer molecules as its working substance and outputs high-energy pulsed laser light in the ultraviolet band. The gas supply module precisely mixes and delivers the working gas to the excimer laser cavity and various optical modules, ensuring the efficient and stable operation of the excimer laser.

[0003] Currently, when testing the gas supply module of an excimer laser, it is often necessary to disassemble and reassemble the sensors one by one. The disassembly and reassembly operations are time-consuming and require a lot of downtime, which affects the efficient use of the laser. In addition, frequent disassembly and reassembly operations are also more likely to cause gas leakage, resulting in poor gas supply tightness of the laser.

[0004] Therefore, in view of the fact that the existing gas supply module pipeline requires frequent disassembly and assembly when detecting the gas supply status, an excimer laser gas supply module pipeline that is easy to connect can be designed. By adding a quick-release bypass, all pressure sensors can be connected to the standard calibration equipment through the same quick-release port without disassembling the original gas circuit, shortening downtime, reducing the risk of gas leakage, and thus effectively enhancing the practical value of the excimer laser. Utility Model Content

[0005] To overcome the problem that most excimer laser gas supply module detection often requires individual sensor disassembly and assembly, which is time-consuming, requires a lot of downtime, and frequent disassembly and assembly can easily lead to gas leakage, this utility model is proposed.

[0006] The technical solution of this utility model is as follows: a gas supply module pipeline for an excimer laser that is easy to connect, including a laser body, an inlet pipe, a three-way valve, a first threaded connecting pipe, a second threaded connecting pipe, a rotating ring, a connecting sleeve, a flow guide plate, a sensor body, and a pressure calibrator. An inlet pipe is provided on the outer side of one end of the laser body, a three-way valve is provided on one end of the inlet pipe, a first threaded connecting pipe is provided on one end of the three-way valve, a second threaded connecting pipe is provided below the bottom end of the first threaded connecting pipe, a rotating ring is provided on the outer side of the first threaded connecting pipe, a connecting sleeve is provided at the bottom end of the outer side of the rotating ring, a flow guide plate is connected through the bottom end of the second threaded connecting pipe, multiple sensor bodies are provided below the flow guide plate, and a pressure calibrator is provided on the outer side of the laser body.

[0007] Preferably, by setting up an air inlet pipe connected to an injection pipe, gas is injected into a three-way valve through the air inlet pipe. The three-way valve is used to flexibly inject gas into the laser body as needed, or to guide the injected gas to a bypass first threaded connecting pipe, which is then connected to a second threaded connecting pipe. A rotating ring around the first threaded connecting pipe drives a connecting sleeve to rotate synchronously. The connecting sleeve is rotated around the second threaded connecting pipe, and the connecting sleeve is used to connect and fix the second threaded connecting pipe and the first threaded connecting pipe. The gas injected into the first threaded connecting pipe is transported to the sensor body through a guide plate. The sensor body detects the injected gas, and a pressure calibrator is used to calibrate the pressure of the injected gas. This allows for connection to a standard calibration device through a single quick-release port without disassembling the original gas path, shortening downtime, reducing the risk of gas leakage, and enhancing the practical value of the excimer laser.

[0008] Preferably, one end of the three-way valve is connected through to the laser body, the three-way valve is connected to the flange of the first threaded connecting pipe, the swivel is rotatably connected to the thread of the first threaded connecting pipe, and the connecting sleeve is rotatably connected to the thread of the second threaded connecting pipe.

[0009] Preferably, a control panel is provided on the outside of the laser body, and the control panel is electrically connected to the three-way valve and the pressure calibrator.

[0010] Preferably, a sealing sleeve is provided at the bottom end of the first threaded connecting pipe, and a sealing ring groove is provided at the top end of the second threaded connecting pipe. The sealing sleeve and the sealing ring groove are fitted and rotated together. A limit ring is provided at the bottom end of the first threaded connecting pipe, and the limit ring is located between the first threaded connecting pipe and the sealing sleeve.

[0011] Preferably, multiple sets of first guide tubes are equidistantly arranged at the bottom of the guide plate, and a solenoid valve is arranged on the outside of the first guide tube. The solenoid valve is electrically connected to the control panel, and the sensor body is arranged at the bottom of the first guide tube.

[0012] Preferably, a second guide tube is provided at the bottom of the sensor body, one end of which is connected to the pressure calibrator, and an exhaust pipe is provided on one side of the pressure calibrator.

[0013] Preferably, the outer side of the air intake pipe is provided with a threaded groove, the rear end of the air intake pipe is provided with a sealing ring, the inner side of the air injection pipe port is threadedly rotatably connected to the threaded groove, and the front end of the air injection pipe port is fitted into the groove of the sealing ring.

[0014] The beneficial effects of this utility model are:

[0015] Before using the laser, gas is injected into a three-way valve through the inlet pipe. The three-way valve is used to flexibly inject gas into the laser body as needed, or to guide the injected gas to the bypass first threaded connecting pipe. The rotating ring around the first threaded connecting pipe drives the connecting sleeve to rotate synchronously. The connecting sleeve rotates around the second threaded connecting pipe, and the connecting sleeve connects and fixes the second threaded connecting pipe and the first threaded connecting pipe. The gas injected into the first threaded connecting pipe is transported to the sensor body through the guide plate. The sensor body detects the injected gas, and the pressure of the injected gas is calibrated by a pressure calibrator. This solves the problem that most excimer lasers require individual sensor disassembly and assembly when detecting the gas supply module, which is time-consuming and prone to gas leakage due to frequent disassembly and assembly. This enhances the practical value of excimer lasers. Attached Figure Description

[0016] Figure 1 The diagram shows a three-dimensional structure of the gas supply module pipeline for an excimer laser that is easy to connect to the present invention.

[0017] Figure 2 The diagram shows a three-dimensional structural schematic of the pressure calibrator for the gas supply module pipeline of the excimer laser, which is easy to connect to the present invention.

[0018] Figure 3 The diagram shown is a three-dimensional cross-sectional view of the connecting sleeve and sealing sleeve of the excimer laser gas supply module pipeline that is easy to connect according to this utility model.

[0019] Figure 4 The diagram shows a three-dimensional structure of a three-way valve for an excimer laser gas supply module pipeline that is easy to connect to.

[0020] Explanation of reference numerals in the attached drawings: 1. Laser body; 101. Control panel; 2. Inlet pipe; 201. Threaded groove; 202. Sealing ring; 3. Three-way valve; 4. First threaded connecting pipe; 401. Sealing sleeve; 5. Second threaded connecting pipe; 501. Sealing ring groove; 6. Rotary ring; 601. Limiting ring; 7. Connecting sleeve; 8. Flow guide plate; 801. First flow guide pipe; 802. Solenoid valve; 9. Sensor body; 901. Second flow guide pipe; 10. Pressure calibrator; 1001. Exhaust pipe. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0022] Please see Figure 1 and Figure 2This utility model provides an embodiment of an excimer laser gas supply module pipeline that is easy to connect, including a laser body 1, an inlet pipe 2, a three-way valve 3, a first threaded connecting pipe 4, a second threaded connecting pipe 5, a swivel ring 6, a connecting sleeve 7, a flow guide plate 8, a sensor body 9, and a pressure calibrator 10. An inlet pipe 2 is provided on the outer side of one end of the laser body 1, and a three-way valve 3 is provided at one end of the inlet pipe 2. One end of the three-way valve 3 is connected to the laser body 1, and the first threaded connecting pipe 4 is provided at one end of the three-way valve 3. The three-way valve 3 is flange-connected to the first threaded connecting pipe 4. A second threaded connecting pipe 5 is provided below the bottom end of the first threaded connecting pipe 4. A rotating ring 6 is provided on the outside of the first threaded connecting pipe 4. The rotating ring 6 is threadedly rotatably connected to the first threaded connecting pipe 4. A connecting sleeve 7 is provided at the bottom end of the outside of the rotating ring 6. The connecting sleeve 7 is threadedly rotatably connected to the second threaded connecting pipe 5. A flow guide plate 8 is connected through the bottom end of the second threaded connecting pipe 5. Multiple sensor bodies 9 are provided below the flow guide plate 8. A pressure calibrator 10 is provided on the outside of the laser body 1.

[0023] Please see Figure 1 and Figure 3 In this embodiment, a control panel 101 is provided on the outside of the laser body 1. The control panel 101 is electrically connected to the three-way valve 3 and the pressure calibrator 10. The internal passage of the three-way valve 3 can be flexibly controlled through the control panel 101, and the operating standard of the pressure calibrator 10 can be controlled through the control panel 101.

[0024] A sealing sleeve 401 is provided at the bottom end of the first threaded connecting pipe 4, and a sealing ring groove 501 is provided at the top end of the second threaded connecting pipe 5. The sealing sleeve 401 is fitted and rotated with the sealing ring groove 501. A limiting ring 601 is provided at the bottom end of the first threaded connecting pipe 4. The limiting ring 601 is located between the first threaded connecting pipe 4 and the sealing sleeve 401. The installation position of the second threaded connecting pipe 5 is defined by the sealing ring groove 501. The sealing sleeve 401 is embedded in the sealing ring groove 501 to enhance the sealing performance at the connection between the second threaded connecting pipe 5 and the first threaded connecting pipe 4. The rotation range of the rotating ring 6 is limited by the limiting ring 6 to prevent the rotating ring 6 from slipping.

[0025] Please see Figure 1 and Figure 2In this embodiment, multiple sets of first guide pipes 801 are equidistantly arranged at the bottom end of the flow guide plate 8. A solenoid valve 802 is arranged on the outside of the first guide pipe 801. The solenoid valve 802 is electrically connected to the control panel 101. The sensor body 9 is arranged at the bottom end of the first guide pipe 801. A second guide pipe 901 is arranged at the bottom end of the sensor body 9. One end of the second guide pipe 901 is connected to the pressure calibrator 10. An exhaust pipe 1001 is arranged through one side of the pressure calibrator 10. The airflow is guided to the sensor body 9 through the first guide pipe 801. The opening and closing of the first guide pipe 801 is flexibly controlled by the solenoid valve 802 to detect the pressure distribution of the gas branch respectively. The airflow is delivered to the pressure calibrator 10 through the second guide pipe 901. Finally, the residual gas is discharged and recovered through the exhaust pipe 1001.

[0026] Please see Figure 4 In this embodiment, a threaded groove 201 is provided on the outer side of the air intake pipe 2, and a sealing ring 202 is provided at the rear end of the air intake pipe 2. The inner side of the air injection pipe port is threadedly rotatably connected to the threaded groove 201, and the front end of the air injection pipe port is fitted and connected to the groove of the sealing ring 202. The air pipe port is threadedly rotatably connected through the threaded groove 201, and the air tightness between the air intake pipe 2 and the air pipe is ensured by the sealing ring 202.

[0027] Before using the laser, the second threaded connecting pipe 5 is inserted below the first threaded connecting pipe 4, so that the sealing sleeve 401 is embedded in the sealing ring groove 501. Then, the connecting sleeve 7 is rotated downwards around the first threaded connecting pipe 4 and the rotating ring 6, so that the connecting sleeve 7 is threadedly connected to the second threaded connecting pipe 5. The limiting ring 601 abuts against the rotating ring 6 to complete the docking operation between the second threaded connecting pipe 5 and the first threaded connecting pipe 4.

[0028] Subsequently, the flow direction of the internal passage of the three-way valve 3 is controlled by the control panel 101. Gas is injected into the three-way valve 3 through the air inlet pipe 2. The three-way valve 3 guides the injected gas to the bypass first threaded connecting pipe 4. The gas injected into the first threaded connecting pipe 4 is delivered to the guide plate 8.

[0029] At this time, the corresponding first guide pipe 801 is opened by the solenoid valve 802, and the gas is delivered to the corresponding sensor body 9 through the first guide pipe 801. The sensor body 9 is used to detect the injected gas. The gas is then delivered to the pressure calibrator 10 through the second guide pipe 901. The pressure calibrator 10 is used to calibrate the pressure of the injected gas. Finally, the residual gas is discharged and recovered through the exhaust pipe 1001.

[0030] When using the laser, the laser body 1 is controlled to operate normally through the control panel 101, and the flow direction of the internal passage of the three-way valve 3 is controlled at the same time. Gas is injected into the three-way valve 3 through the air inlet pipe 2, and the gas is injected into the laser body 1 through the three-way valve 3.

[0031] Through the above steps, by setting up an air inlet pipe 2 connected to an injection pipe, gas is injected into a three-way valve 3 through the air inlet pipe 2. The three-way valve 3 is used to flexibly inject gas into the laser body 1 as needed, or to guide the injected gas to the bypass first threaded connecting pipe 4, and connect the second threaded connecting pipe 5 and the first threaded connecting pipe 4. Rotate the rotating ring 6 around the first threaded connecting pipe 4, thereby driving the connecting sleeve 7 to rotate synchronously. Rotate the connecting sleeve 7 to make it rotate around the second threaded connecting pipe 5. The connecting sleeve 7 is used to connect and fix the second threaded connecting pipe 5 and the first threaded connecting pipe 4. The gas injected into the first threaded connecting pipe 4 is transported to the sensor body 9 through the guide plate 8. The sensor body 9 is used to detect the injected gas, and the pressure calibrator 10 is used to calibrate the injected gas pressure. Thus, the standard calibration equipment can be connected through the same quick-release port without disassembling the original gas circuit, shortening downtime and reducing the risk of gas leakage.

[0032] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. An excimer laser gas supply module pipeline that is easy to connect to, comprising a laser body (1) and an inlet pipeline (2), characterized in that: It also includes a three-way valve (3), a first threaded connecting pipe (4), a second threaded connecting pipe (5), a swivel (6), a connecting sleeve (7), a flow guide plate (8), a sensor body (9), and a pressure calibrator (10). An air inlet pipe (2) is provided on the outer side of one end of the laser body (1). A three-way valve (3) is provided on one end of the air inlet pipe (2). A first threaded connecting pipe (4) is provided on one end of the three-way valve (3). A second threaded connecting pipe (5) is provided below the bottom end of the first threaded connecting pipe (4). A swivel (6) is provided on the outer side of the first threaded connecting pipe (4). A connecting sleeve (7) is provided at the bottom end of the outer side of the swivel (6). A flow guide plate (8) is connected through the bottom end of the second threaded connecting pipe (5). Multiple sensor bodies (9) are provided below the flow guide plate (8). A pressure calibrator (10) is provided on the outer side of the laser body (1).

2. The excimer laser gas supply module pipeline for easy docking according to claim 1, characterized in that: One end of the three-way valve (3) is connected through to the laser body (1), the three-way valve (3) is connected to the flange of the first threaded connecting pipe (4), the swivel (6) is connected to the first threaded connecting pipe (4) by a thread, and the connecting sleeve (7) is connected to the second threaded connecting pipe (5) by a thread.

3. The excimer laser gas supply module pipeline for easy docking according to claim 1, characterized in that: A control panel (101) is provided on the outside of the laser body (1), and the control panel (101) is electrically connected to the three-way valve (3) and the pressure calibrator (10).

4. The excimer laser gas supply module pipeline for easy docking according to claim 1, characterized in that: The bottom end of the first threaded connecting pipe (4) is provided with a sealing sleeve (401), and the top end of the second threaded connecting pipe (5) is provided with a sealing ring groove (501). The sealing sleeve (401) and the sealing ring groove (501) are fitted and rotated together. The bottom end of the first threaded connecting pipe (4) is provided with a limiting ring (601), which is located between the first threaded connecting pipe (4) and the sealing sleeve (401).

5. The excimer laser gas supply module pipeline for easy docking according to claim 3, characterized in that: Multiple sets of first guide tubes (801) are equidistantly arranged at the bottom end of the guide plate (8). A solenoid valve (802) is arranged on the outside of the first guide tube (801). The solenoid valve (802) is electrically connected to the control panel (101). The sensor body (9) is located at the bottom end of the first guide tube (801).

6. The excimer laser gas supply module pipeline for easy docking according to claim 5, characterized in that: The bottom of the sensor body (9) is provided with a second guide pipe (901), one end of the second guide pipe (901) is connected to the pressure calibrator (10), and an exhaust pipe (1001) is provided on one side of the pressure calibrator (10).

7. The excimer laser gas supply module pipeline for easy docking according to claim 1, characterized in that: The outer side of the air intake pipe (2) is provided with a threaded groove (201), and a sealing ring (202) is provided at the rear end of the air intake pipe (2). The inner side of the air injection pipe port is threadedly connected to the threaded groove (201), and the front end of the air injection pipe port is fitted into the groove of the sealing ring (202).

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