Cooling assembly and splinter device

Abstract

The utility model provides a kind of cooling assembly and split device, cooling assembly includes: supply module, thermostatic module and injection module;Thermostatic module is connected with supply module, and thermostatic module includes refrigerating plant and temperature control device;Refrigerating plant is used to adjust the temperature of coolant circulating in thermostatic module;Temperature control device is used to obtain the real-time temperature of coolant, and when real-time temperature distinguishes from preset temperature, the output power of refrigerating plant is adjusted;Injection module is connected with the outlet end of thermostatic module, to spray coolant to the surface of battery piece to be handled.Such, by increasing thermostatic module, it can guarantee the temperature of coolant circulating in thermostatic module constant, and equal with preset temperature, on the one hand, it can avoid the situation that the cooling effect is influenced due to coolant temperature is too high, leading to the success rate of split to drop, on the other hand, it can also keep the temperature of coolant constant, improve the consistency of battery piece cutting, and then improve product yield.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, specifically to a cooling component and a wafer dicing device. Background Technology

[0002] In the production process of crystalline silicon solar modules, in order to reduce costs, increase efficiency, and improve the output power of crystalline silicon solar modules, the cells are usually diced by laser non-destructive dicing and then connected in series.

[0003] In the laser non-destructive scribing and splitting process, a grooving laser is used to groove and orient the two ends of the solar cell, and then a heating laser is used to heat the solar cell. At the same time, coolant is sprayed onto the solar cell to create a temperature difference, which causes thermal stress inside the solar cell, thereby splitting it into two parts along the grooving direction.

[0004] In the current production method, the temperature of the coolant is unstable, resulting in poor consistency in the cutting of battery cells; and when the temperature of the coolant is high, it will also affect the cooling effect, leading to a decrease in the success rate of cell cutting. Utility Model Content

[0005] In view of this, the present invention aims to provide a cooling component and a cell cleaving device to solve the problem in the prior art where the temperature of the coolant is unstable, resulting in a decrease in the consistency of cell cutting and the success rate of cell cleaving.

[0006] To solve the above-mentioned technical problems, this utility model provides a cooling assembly, comprising:

[0007] Supply module;

[0008] A constant temperature module is connected to the supply module; the constant temperature module includes a refrigeration device and a temperature control device.

[0009] The refrigeration device is used to adjust the temperature of the refrigerant flowing in the constant temperature module; the temperature control device is used to obtain the real-time temperature of the refrigerant, and adjust the output power of the refrigeration device when the real-time temperature differs from the preset temperature.

[0010] The spray module is connected to the outlet end of the constant temperature module to spray the refrigerant onto the surface of the battery cell to be treated.

[0011] In one embodiment, the supply module includes a first storage cavity and a supply pipeline;

[0012] The temperature control module is disposed inside the first storage cavity or the supply pipeline, or the temperature control module is connected to the first storage cavity through the supply pipeline.

[0013] In one embodiment, the temperature control module includes a second storage chamber;

[0014] The refrigeration device and the temperature control device are disposed inside or outside the second storage cavity;

[0015] The second storage chamber has an inlet end and an outlet end; the inlet end is connected to the first storage chamber through the supply pipeline, and the outlet end is connected to the injection module.

[0016] In one embodiment, the capacity of the second storage cavity is less than or equal to the capacity of the first storage cavity.

[0017] In one embodiment, the cooling assembly further includes a high-pressure module, and the injection module includes an injection section;

[0018] The injection section is connected to the outlet end of the constant temperature module and the outlet end of the high pressure module, respectively.

[0019] In one embodiment, the injection module further includes a refrigerant channel and a high-pressure channel;

[0020] The injection unit is connected to the outlet end of the constant temperature module through the refrigerant channel. A first valve body is provided in the refrigerant channel, and the first valve body is used to open or close the refrigerant channel.

[0021] The injection section is connected to the outlet end of the high-pressure module through the high-pressure channel. A second valve body is provided in the high-pressure channel, which is used to open or close the high-pressure channel.

[0022] In one embodiment, a pressure regulating valve is also provided in the high-pressure channel, which is used to adjust the pressure in the high-pressure channel.

[0023] In one embodiment, the spray section has a spray nozzle, and the spray section gradually narrows toward the spray nozzle.

[0024] In one embodiment, the temperature control device includes a temperature sensor and a control module, and the temperature sensor and the control module are communicatively connected.

[0025] To address the aforementioned technical problems, this utility model also provides a slicing device, including the cooling components described above.

[0026] Compared with existing cooling devices, the cooling assembly provided in this embodiment of the invention has the following advantages:

[0027] This invention provides a cooling assembly, including a supply module, a constant temperature module, and a spray module. The constant temperature module is connected to the supply module and includes a refrigeration device and a temperature control device. The refrigeration device adjusts the temperature of the refrigerant flowing through the constant temperature module. The temperature control device acquires the real-time temperature of the refrigerant and adjusts the output power of the refrigeration device when the real-time temperature differs from the preset temperature. The spray module is connected to the outlet end of the constant temperature module to spray refrigerant onto the surface of the battery cell to be processed. By adding a constant temperature module, this invention ensures that the temperature of the refrigerant flowing through the constant temperature module is constant and equal to the preset temperature. This avoids the situation where excessively high refrigerant temperature affects the cooling effect and leads to a decrease in the cell cutting success rate. Furthermore, maintaining a constant refrigerant temperature improves the consistency of battery cell cutting, thereby increasing product yield. Attached Figure Description

[0028] Figure 1 The diagram shown is a structural schematic of the first cooling component provided in this embodiment of the present invention.

[0029] Figure 2 The diagram shown is a structural schematic of the second cooling component provided in an embodiment of this utility model.

[0030] Figure 3 The image shown is an exploded view of the cooling assembly provided in an embodiment of this utility model.

[0031] Figure 4 The diagram shown is a structural schematic of the constant temperature module provided in an embodiment of this utility model.

[0032] The explanations of the reference numerals in the accompanying drawings are as follows:

[0033] 1-Supply module; 10-First storage chamber; 11-Supply pipeline; 12-Exhaust chamber;

[0034] 2-Constant temperature module; 20-Refrigeration device; 21-Temperature control device; 22-Second storage chamber; 210-Temperature sensor; 211-Control module;

[0035] 3-Injection module; 30-Injection section; 31-Refrigerant passage; 32-First valve body; 300-Injection port;

[0036] 4-High pressure module; 40-High pressure channel; 41-Second valve body; 42-Pressure regulating valve. Detailed Implementation

[0037] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0038] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "circumferential", "radial", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0040] As those skilled in the art will understand, in the laser scribing and dicing process, a temperature difference needs to be created on the surface of the solar cell to generate thermal stress inside the cell, ultimately causing dicing. In existing technologies, the temperature difference is typically created by simultaneously heating the solar cell with a laser and spraying a coolant onto its surface. The temperature of the coolant directly affects the cutting quality, cell efficiency, and yield.

[0041] The temperature of the refrigerant affects the control of the heat-affected zone on the surface of the solar cells. When the refrigerant temperature is too high, insufficient heat dissipation occurs on the cell surface, leading to accumulated laser energy and localized high temperatures. This can cause microcracks or hidden cracks in the cells, reducing their mechanical strength. Simultaneously, high-temperature refrigerant can also cause heat diffusion defects, affecting the yield of subsequent cell stringing. Conversely, when the refrigerant temperature is too low, it can cause abrupt changes in the internal temperature gradient of the cells, potentially triggering stress cracks. Furthermore, large temperature fluctuations can lead to deviations in the cutting depth, affecting the cell sorting efficiency.

[0042] Therefore, the refrigerant temperature must not only be within a suitable temperature range, but also the fluctuation of the refrigerant temperature must be reduced in order to ensure that the cutting quality of the battery cells, battery efficiency and yield are not affected.

[0043] Based on this, please refer to Figures 1 to 4 This utility model provides a cooling assembly, including: a supply module 1, a constant temperature module 2, and a spray module 3; the constant temperature module 2 is connected to the supply module 1, and the constant temperature module 2 includes a refrigeration device 20 and a temperature control device 21; the refrigeration device 20 is used to adjust the temperature of the refrigerant flowing in the constant temperature module 2; the temperature control device 21 is used to obtain the real-time temperature of the refrigerant, and adjust the output power of the refrigeration device 20 when the real-time temperature differs from the preset temperature; the spray module 3 is connected to the outlet end of the constant temperature module 2 to spray refrigerant onto the surface of the battery cell to be processed.

[0044] With this configuration, by setting up a constant temperature module 2, the refrigeration device 20 is used to adjust the refrigerant temperature, while the temperature control device 21 is used to monitor the refrigerant temperature. When the real-time temperature of the refrigerant differs from the preset temperature, the output power of the refrigeration device 20 is adjusted to ensure that the refrigerant temperature remains stable at the preset temperature. On the one hand, this avoids the situation where the cooling effect is affected by the refrigerant temperature being too high, which would lead to a decrease in the cell cutting success rate. On the other hand, it can also maintain a constant refrigerant temperature, improve the consistency of cell cutting, and thus improve the product yield.

[0045] Optionally, the preset temperature can be between 10℃ and 15℃, for example, 10℃, 12℃, 14℃, or 15℃. It should be noted that the real-time temperature differs from the preset temperature; it refers to the real-time temperature being outside the preset temperature range. For example, the preset range could be 12℃ ± 0.5℃. When the real-time temperature is between 11.5℃ and 12.5℃, the temperature control device 21 may not operate. When the real-time temperature is greater than 12.5℃ or less than 11.5℃, the temperature control device 21 needs to increase or decrease the output power of the refrigeration device 20 to adjust the refrigerant temperature, ensuring that the refrigerant temperature remains stable within a preset range.

[0046] In one embodiment, the temperature control device 21 may include a temperature sensor 210 and a control module 211. The control module 211 is communicatively connected to the temperature sensor 210 and the refrigeration device 20. The temperature sensor 210 measures the real-time temperature of the refrigerant and transmits it to the control module 211. The control module 211 determines whether the real-time temperature is within a preset temperature range. If the real-time temperature is outside the preset range, it sends a signal to the refrigeration device 20 to adjust the output power, thereby adjusting the output power of the refrigeration device 20 to maintain the real-time temperature of the refrigerant within the preset range.

[0047] Specifically, the aforementioned cooling device 20 can be a cooling chip, which needs to have cooling power that meets the heat load requirements and corresponding temperature difference capability (the ability to maintain the target temperature difference in a high-temperature environment). When facing the temperature control scenario of micro lasers, the Marlow MT30 cooling chip can be selected; when facing the heat dissipation scenario of high-energy lasers, the Laird PCX12 cooling chip can be selected; when facing the usage requirements of irregular space integration, the Marlow SP8156 cooling chip can also be selected.

[0048] For example, the temperature sensor 210 described above needs to have a high response speed and a large temperature measurement range. It can be an M18767 type temperature sensor or an IRT-CF500 type temperature sensor.

[0049] Alternatively, the aforementioned control module 211 needs to have a certain temperature control accuracy. It can be dynamically adjusted using a proportional-integral-derivative (PID) algorithm. It can be equipped with a built-in control chip to realize functions such as temperature judgment and sending control signals to the refrigeration device 20. It can also be an LTL-WB120-120 type temperature control platform or a corresponding control system.

[0050] In an optional embodiment, the refrigerant can be a liquid refrigerant (e.g., deionized water) or a gaseous refrigerant (e.g., compressed air / nitrogen). Those skilled in the art can select the appropriate type of refrigerant based on the properties of the battery cell to be processed.

[0051] Please continue to refer to this. Figures 1 to 2 The supply module 1 includes a first storage chamber 10 and a supply pipeline 11. The temperature control module 2 is disposed inside the first storage chamber 10 or the supply pipeline 11, or the temperature control module 2 is connected to the first storage chamber 10 via the supply pipeline 11. Thus, the temperature control module 2 can be disposed inside the supply module 1, for example, in the first storage chamber 10 for storing refrigerant, or in the supply pipeline 11 for circulating refrigerant, to simultaneously control the temperature of a large amount of refrigerant, thereby improving temperature control efficiency. The temperature control module 2 can also be disposed outside the supply module 1, close to the injection module 3. The refrigerant flowing into the temperature control module 2 via the supply pipeline 11 can precisely control the temperature of a small amount of refrigerant. Furthermore, because the temperature control module 2 is close to the injection module 3, the flow time is shorter, and the refrigerant sprayed by the injection module 3 is less affected by ambient temperature, further ensuring temperature stability.

[0052] The first storage chamber 10 is a closed cavity capable of storing a large amount of refrigerant. It has an inlet and an outlet. The inlet is connected to a supply device (such as a water source device or a gas source device), and the outlet is connected to the constant temperature module 2 and / or the injection module 3 through the supply pipeline 11.

[0053] In some embodiments, please refer to Figure 4 The constant temperature module 2 includes a second storage chamber 22; a refrigeration device 20 and a temperature control device 21 are disposed inside or outside the second storage chamber 22; the second storage chamber 22 has an inlet end and an outlet end, the inlet end is connected to the first storage chamber 10 through a supply pipe 11, and the outlet end is connected to the injection module 3. Thus, the constant temperature module 2 has a second storage chamber 22 independent of the first storage chamber 10, and the refrigeration device 20 and temperature control device 21 are disposed inside or outside the second storage chamber 22, enabling independent temperature control of the refrigerant in the second storage chamber 22. Furthermore, the outlet end of the second storage chamber 22 is directly connected to the injection module 3, allowing the refrigerant after temperature control to be directly sprayed out through the injection module 3 and function, reducing the probability of the temperature-controlled refrigerant fluctuating again due to ambient temperature.

[0054] like Figure 4 As shown, the refrigeration device 20 is disposed outside the second storage cavity 22 and is in contact with the outer wall of the second storage cavity 22. Therefore, the second storage cavity 22 should be made of a material with high thermal conductivity, such as metal materials such as silver, copper, and aluminum, or polymer composite materials such as silicone and epoxy resin.

[0055] Preferably, the capacity of the second storage chamber 22 is less than or equal to the capacity of the first storage chamber 10. The refrigeration device 20 controls the temperature of the refrigerant in the smaller capacity second storage chamber 22. Compared with the larger capacity first storage chamber 10, this can improve the temperature control efficiency and reduce the energy consumption of the refrigeration device 20, thereby achieving the goal of environmental protection and energy saving.

[0056] Please refer to Figures 1 to 3 The cooling assembly also includes a high-pressure module 4, and an injection module 3 including an injection section 30. The injection section 30 is connected to the outlet end of the constant temperature module 2 and the outlet end of the high-pressure module 4, respectively. The injection section 30 is connected to both the constant temperature module 2 and the high-pressure module 4. On the one hand, it can directly inject the refrigerant after temperature control by the constant temperature module 2, reducing the probability of temperature fluctuations in the refrigerant. On the other hand, it can utilize the pressure difference formed by the high-pressure module 4 to improve the smoothness of refrigerant injection by the injection section 30, avoiding situations where refrigerant injection is obstructed due to the small size of the injection section 30.

[0057] Specifically, the high-pressure module 4 has an inlet end and an outlet end. The inlet end is connected to the air source equipment, and the outlet end is connected to the injection section 30. During the process of the injection section 30 injecting refrigerant outward, the high-pressure module 4 can appropriately increase the air pressure in the pipeline to force the refrigerant outward from the injection port 300 of the injection section 30, thereby reducing the possibility of poor refrigerant injection or blockage of the injection port 300.

[0058] As an optional embodiment, the injection module 3 further includes a refrigerant channel 31 and a high-pressure channel 40; the injection unit 30 is connected to the outlet end of the thermostatic module 2 through the refrigerant channel 31, and a first valve body 32 is provided in the refrigerant channel 31 for opening or closing the refrigerant channel 31; the injection unit 30 is connected to the outlet end of the high-pressure module 4 through the high-pressure channel 40, and a second valve body 41 is provided in the high-pressure channel 40 for opening or closing the high-pressure channel 40.

[0059] With this configuration, when a water outlet signal is received from inside the device, the first valve body 32 and the second valve body 41 open simultaneously. Under the pressure difference of the high-pressure gas, the constant-temperature refrigerant is sprayed from the spray section 30 onto the surface of the battery cell to be treated, so as to form a temperature difference on the surface of the battery cell. When a water shut-off signal is received from inside the device, the first valve body 32 and the second valve body 41 close simultaneously. At this time, the spray section 30 stops spraying refrigerant.

[0060] Exemplary, such as Figure 1 and Figure 2 As shown, the first valve body 32 can also be installed on the supply pipeline 11 between the supply module 1 and the thermostatic module 2 to connect or disconnect the refrigerant supply from the supply module 1 to the thermostatic module 2; the second valve body 41 can also be directly installed at the outlet end of the high-pressure module 4 to connect or disconnect the gas supply to the high-pressure module 4. The first valve body 32 and the second valve body 41 can also be installed at other locations on the cooling assembly, as long as it can ensure that the first valve body 32 can disconnect the refrigerant supply and the second valve body 41 can disconnect the gas supply.

[0061] Preferably, a pressure regulating valve 42 can also be provided in the high-pressure channel 40. The pressure regulating valve 42 is used to adjust the pressure in the high-pressure channel 40, thereby adjusting the flow rate of the refrigerant sprayed from the injection section 30, so as to avoid the refrigerant flow rate being too high and causing damage to the surface of the battery cell; or the refrigerant flow rate being too low and affecting the cooling efficiency of the battery cell.

[0062] exist Figure 1 and Figure 2 In this embodiment, the pressure regulating valve 42 is located on one side of the high-pressure module 4. In some other embodiments, the pressure regulating valve 42 can also be located on the injection module 3. Those skilled in the art can adjust the location of the pressure regulating valve 42 in combination with spatial layout constraints.

[0063] In some embodiments, the jet section 30 has a jet nozzle 300, and the jet section 30 gradually narrows towards the jet nozzle 300 to form a conical structure. The conical jet section 30 can optimize hydrodynamic performance, create an acceleration effect at the jet nozzle 300, enhance the jet impact force, and also suppress turbulence and improve the stability of the jet; furthermore, the size of the inlet end of the conical structure is larger than the size of the jet nozzle 300, which can accommodate larger particles and reduce the risk of clogging.

[0064] For preferred options, please refer to [the following]. Figure 1 and Figure 2 The cooling assembly may also include an exhaust chamber 12, which is disposed on the supply pipe 11 and located between the first storage chamber 10 and the constant temperature module 2. This arrangement allows the exhaust chamber 12 to expel air accumulated in the supply pipe 11, preventing air from forming airlocks in the supply pipe 11 and hindering refrigerant flow, thus ensuring smooth refrigerant flow within the supply pipe 11 and improving the working efficiency of the cooling assembly.

[0065] To address the aforementioned technical problems, this utility model embodiment also provides a dicing device, including the cooling component described above. With this configuration, by using the cooling component, the real-time temperature of the refrigerant can be monitored, and when the real-time temperature differs from the preset temperature, the output power of the cooling device 20 can be adjusted. This ensures that the refrigerant temperature remains stable, preventing temperature instability from affecting cutting efficiency and product yield. Simultaneously, it also maintains a constant refrigerant temperature, preventing temperature fluctuations from affecting cutting consistency.

[0066] In some embodiments, the method of using the finning device having the above-described cooling components may be:

[0067] Refrigerant is injected into the first storage chamber 10, and a preset temperature is set through the control module 211. The refrigerant temperature is adjusted by the refrigeration device 20, and the refrigerant temperature is monitored in real time by the temperature sensor 210 until the refrigerant temperature reaches the preset temperature.

[0068] After receiving the water discharge signal from the flaming device, the first valve body 32 and the second valve body 41 are opened, and the constant temperature refrigerant is sprayed outward from the injection port 300 of the injection section 30 under the drive of the high pressure module 4.

[0069] Upon receiving the water shut-off signal from the sharding device, the first valve body 32 and the second valve body 41 are closed, and the spraying unit 30 stops spraying the constant-temperature refrigerant.

[0070] During the above process, the refrigeration unit 20, temperature sensor 210 and control module 211 work together to maintain a constant refrigerant temperature. At the same time, the operator can adjust the pressure regulating valve 42 according to the actual situation to adjust the refrigerant injection speed.

[0071] Optionally, the opening and closing of the first valve body 32 and the second valve body 41 in the above-mentioned cooling assembly, the reception of water outlet and water shut-off signals, and the adjustment of the pressure regulating valve 42 can be linked with the built-in control chip or operating system to achieve automated control, or can be manually controlled by the operator. Regarding automated control, the LTL-WB120-120 temperature control platform can be referenced or used; this embodiment does not impose any limitations on this.

[0072] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications or equivalent substitutions made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A cooling assembly, characterized in that, include: Supply module; A constant temperature module is connected to the supply module; the constant temperature module includes a refrigeration device and a temperature control device. The refrigeration device is used to adjust the temperature of the refrigerant flowing in the constant temperature module; the temperature control device is used to obtain the real-time temperature of the refrigerant, and adjust the output power of the refrigeration device when the real-time temperature differs from the preset temperature. The spray module is connected to the outlet end of the constant temperature module to spray the refrigerant onto the surface of the battery cell to be treated.

2. The cooling assembly according to claim 1, characterized in that, The supply module includes a first storage cavity and a supply pipeline; The temperature control module is disposed inside the first storage cavity or the supply pipeline, or the temperature control module is connected to the first storage cavity through the supply pipeline.

3. The cooling assembly according to claim 2, characterized in that, The temperature control module includes a second storage chamber; The refrigeration device and the temperature control device are disposed inside or outside the second storage cavity; The second storage chamber has an inlet end and an outlet end; the inlet end is connected to the first storage chamber through the supply pipeline, and the outlet end is connected to the injection module.

4. The cooling assembly according to claim 3, characterized in that, The capacity of the second storage cavity is less than or equal to the capacity of the first storage cavity.

5. The cooling assembly according to claim 1, characterized in that, The cooling assembly also includes a high-pressure module, and the injection module includes an injection section; The injection section is connected to the outlet end of the constant temperature module and the outlet end of the high pressure module, respectively.

6. The cooling assembly according to claim 5, characterized in that, The injection module also includes a refrigerant channel and a high-pressure channel; The injection unit is connected to the outlet end of the constant temperature module through the refrigerant channel. A first valve body is provided in the refrigerant channel, and the first valve body is used to open or close the refrigerant channel. The injection section is connected to the outlet end of the high-pressure module through the high-pressure channel. A second valve body is provided in the high-pressure channel, which is used to open or close the high-pressure channel.

7. The cooling assembly according to claim 6, characterized in that, The high-pressure channel is also equipped with a pressure regulating valve, which is used to adjust the pressure in the high-pressure channel.

8. The cooling assembly according to claim 5, characterized in that, The spray section has a spray nozzle, and the spray section gradually narrows towards the spray nozzle.

9. The cooling assembly according to claim 1, characterized in that, The temperature control device includes a temperature sensor and a control module, and the temperature sensor and the control module are communicatively connected.

10. A dicing device, characterized in that, Includes the cooling component as described in any one of claims 1 to 9.

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