A gas mixing device

CN224404847UActive Publication Date: 2026-06-26JIANGSU YICUO SEMICON EQUIP CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
JIANGSU YICUO SEMICON EQUIP CO LTD
Filing Date
2025-07-21
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

Existing gas mixing devices suffer from problems such as complex structure, high cost, uneven mixing, poor flowability, and difficulty in achieving precise control and adjustment.

Method used

Design a columnar gas mixing device with a sandwich-type layered structure. It uses vortex airflow for gas mixing, and achieves precise control and mixing of the gas through an internal mixing plate and air intake plate. Combined with a heating layer, it can improve the mixing efficiency.

Benefits of technology

It achieves uniform gas mixing, reduces mechanical resistance, improves mixing efficiency and accuracy, reduces manufacturing costs, and is suitable for mixing different gases.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a kind of gas mixing device, it includes the body of cylindrical structure, the body is internally provided with front cavity and rear cavity, a block is arranged between front cavity and rear cavity, a pipeline that passes through block is provided in the middle of block, and front cavity, rear cavity, block are all provided with air hole on the pipeline of front cavity, the pipeline of rear cavity, and gas is flowed into to the air hole on block by the pipeline air hole of front cavity, finally, from the pipeline air hole of rear cavity, and mixing disc is installed in front cavity and rear cavity, at least 2 gas inlets and gas outlets are provided on front cavity and rear cavity.The utility model whole structure is simple and reasonable, practical convenient, high in work efficiency, and mixing effect is good, it is convenient to install, small in size and high in performance.
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Description

Technical Field

[0001] This utility model belongs to the field of gas mixing technology and relates to a gas mixing device. Background Technology

[0002] Gas mixing devices with different gas compositions: Before gas mixing, MFC precisely controls the mass flow rate to quantitatively distribute the gas components. Since the molar molecular weight and Reynolds number of the gases are different, these factors need to be considered during the mixing process. In order to achieve uniform dispersion in the mixed gas, a special flow channel structure is required to achieve the mixing purpose and provide the downstream with more accurate gas mixing.

[0003] Existing gas mixing equipment has high processing requirements, long processing time, and high manufacturing and delivery times for processing single products. Due to uneven mixing ratios, stratification occurs, and the uniformity of different gas distributions fails to achieve the most precise mixing ratio. Furthermore, different gas states have different viscosity coefficients, and the internal structure cannot be modified or adjusted for different flow rates. Other solutions, such as using motors or drive shafts, achieve uniform mixing, or employ complex flow channel designs, resulting in complex overall structures, high costs, and significantly reduced gas flowability. The complex internal structure of the gas path also leads to high resistance coefficients. Alternatively, purchasing pre-made gas cylinders is also too costly.

[0004] To address this problem, a gas mixing device was designed. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of the existing technology and provide an IGBT single-tube heating device that is simple and reasonable in structure, practical and convenient, efficient in operation, has good mixing effect, easy to install, small in size and high in performance, and has good sealing performance.

[0006] This utility model is achieved through the following technical solution: a gas mixing device, comprising a columnar body, wherein a front cavity and a rear cavity are provided inside the body, a partition is arranged between the front cavity and the rear cavity, a pipe is provided through the partition to connect the front cavity and the rear cavity, and air holes are provided on the pipe in the front cavity, the pipe in the rear cavity, and the partition. Gas flows into the air holes on the partition through the pipe in the front cavity, and finally flows out from the pipe in the rear cavity. A mixing plate is installed in both the front cavity and the rear cavity, and at least two air inlets and air outlets are provided on the front cavity and the rear cavity.

[0007] Preferably, the partition is a solid columnar block with a circular air inlet plate and a circular air outlet plate installed on the top and bottom, and the area of ​​the air inlet plate and the air outlet plate is larger than the partition, so that a recessed mixing chamber is formed on the outside of the partition. Furthermore, ventilation holes communicating with the mixing chamber are opened on the air inlet plate and the air outlet plate, and mixing plates are installed on both sides of the air inlet plate and the air outlet plate.

[0008] Preferably, the mixing plate consists of a base plate and air intake plates. One end of the air intake plate is fixed to the base plate, and the other end is fixed to the air inlet plate or the air outlet plate. A through hole is provided on the pipe between the base plate and the air inlet plate and the air outlet plate, serving as the inlet and outlet of the mixing plate. The air intake plates all face the through hole.

[0009] Preferably, the mixing plate on one side of the air inlet plate is an upper mixing plate, and the mixing plate on the other side of the air outlet plate is a lower mixing plate. The through hole on the pipe in the middle of the upper mixing plate is a lower through hole, which is connected to the first air inlet, allowing the first gas to be directly introduced into the upper mixing plate. An upper through hole is provided on the pipe above the upper mixing plate, which is located in the upper chamber. At least one second air inlet is provided in the upper chamber, which allows the second gas to flow through the through hole in the upper chamber into the upper mixing plate below for gas mixing. The through hole on the pipe in the lower mixing plate is an air outlet, through which the mixed gas flows out to the air outlet.

[0010] Preferably, the air intake plates in the middle of the upper and lower mixing discs surround the lower through hole and the air outlet. The air intake plates are provided with an inner layer and an outer layer. The air intake plates of the inner layer are directly opposite the lower through hole and the air outlet. Two adjacent air intake plates of the outer layer are directly opposite one air intake plate of the inner layer. The air intake plates of the inner and outer layers are inclined at a certain angle.

[0011] Preferably, the air-guiding plate has a figure-eight shape on the side facing the lower through hole and the air outlet, and an arc-shaped guide edge is provided at the other end, so that the gas flows into the through hole and the air outlet more smoothly.

[0012] Preferably, the body is also covered with a heating layer, which can rapidly evaporate the internal gas.

[0013] The beneficial effects of this utility model are as follows:

[0014] The gas mixing device designed in this invention, after the gases come into contact and are pressurized, finally forms a vortex airflow, utilizing its own dynamic potential energy for mixing. The mixed airflow completes the mixing of different gases internally without external power, achieving the optimal composition. This invention employs a sandwich-style layered structure, allowing for smooth assembly after the components are manufactured to quality standards. The internal flow channels guide the airflow through the air-drawing plates (fins) and finally converge. This entire process achieves precise gas control and mixing.

[0015] The micro-cylindrical internal structure of this invention is a cleverly designed flow channel that divides the mixed gas and mixes it to achieve an ideal mixing state. This helps to ensure the quality of the mixed gas and maintain a constant pressure for the downstream process. It is a practical mechanical structure design. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0018] Figure 3 This is a schematic diagram of the structure of this utility model after removing the heating layer and the outer shell.

[0019] Figure 4 This is a schematic diagram of the mixing disc in this utility model. Detailed Implementation

[0020] To enable those skilled in the art to more clearly understand the purpose, technical solution and advantages of this utility model, the present utility model will be further described below in conjunction with the accompanying drawings and embodiments.

[0021] In the description of this utility model, it should be understood that the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "inner", "outer", "horizontal", and "vertical" are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0022] The present invention will now be described in detail with reference to the accompanying drawings: Figure 1-2 As shown, a gas mixing device includes a columnar body with a front chamber 1 and a rear chamber 2 inside. A partition 3 is arranged between the front chamber 1 and the rear chamber 2. A pipe 4 is opened in the middle of the partition 3 to connect the front chamber 1 and the rear chamber 2. Air holes 5 are opened on the pipe in the front chamber 1, the pipe in the rear chamber 2, and the partition 3. Gas flows into the air holes 5 on the partition 3 through the air holes 4 in the pipe in the front chamber 1 and finally flows out from the air holes 5 in the pipe in the rear chamber. A mixing plate 6 is installed in both the front chamber 1 and the rear chamber 2. At least two air inlets and air outlets 7 are opened on the front chamber 1 and the rear chamber 2. The partition 3 is a solid columnar block with a circular air inlet plate 8 and a circular air outlet plate 9 installed on the top and bottom. The areas of the air inlet plate 8 and the air outlet plate 9 are larger than those of the partition 3, forming a recessed mixing chamber around the partition 3. Ventilation holes 10 communicating with the mixing chamber are provided on the air inlet plate 8 and the air outlet plate 9. Mixing plates 6 are installed on both sides of the air inlet plate 8 and the air outlet plate 9.

[0023] like Figure 3-4 As shown, the mixing plate 6 is composed of a base plate 11 and an air intake plate 12. One end of the air intake plate 12 is fixed on the base plate 11, and the other end is fixed on the air inlet plate 8 or the air outlet plate 9. A through hole 13 is provided on the pipe between the base plate 11 and the air inlet plate 8 and the air outlet plate 9, which serves as the inlet and outlet of the mixing plate 6. The air intake plates 12 all face the through hole 13. The mixing plate on one side of the air intake plate 8 is the upper mixing plate 14, and the mixing plate on the other side of the air outlet plate 9 is the lower mixing plate 15. The through hole on the pipe in the middle of the upper mixing plate 14 is the lower through hole 16, which is connected to the first air inlet 17, allowing the first gas to be directly introduced into the upper mixing plate 14. An upper through hole 18 is provided on the pipe above the upper mixing plate 14, which is located in the upper chamber 19. At least one second air inlet 20 is provided in the upper chamber 19, allowing the second gas to flow through the through hole in the upper chamber 19 into the lower upper mixing plate 14 for gas mixing. The through hole on the pipe in the lower mixing plate 15 is the air outlet 21, through which the mixed gas flows out to the air outlet 7.

[0024] The air-guiding plates 12 between the upper mixing plate 14 and the lower mixing plate 15 surround the lower through hole 16 and the air outlet. Each air-guiding plate 12 has an inner layer 22 and an outer layer 23. The air-guiding plates 12 of the inner layer 22 face the lower through hole 16 and the air outlet 7, while two adjacent air-guiding plates of the outer layer 23 face one air-guiding plate of the inner layer. Both the inner and outer air-guiding plates 12 are inclined at a certain angle. The side of the air-guiding plate 12 facing the lower through hole and the air outlet has a figure-eight shape, and the other end has an arc-shaped guide edge 24, allowing the gas to flow more smoothly into the through hole and the air outlet. The exterior of the main body is also wrapped with a heating layer 25, which can rapidly evaporate the internal gas.

[0025] The gas mixing device designed in this invention, after the gases come into contact and are pressurized, finally forms a vortex airflow, utilizing its own dynamic potential energy for mixing. The mixed airflow completes the mixing of different gases internally without external power, achieving the optimal composition. This invention employs a sandwich-style layered structure, allowing for smooth assembly after the components are manufactured to quality standards. The internal flow channels guide the airflow through the fins, finally converging it. This entire process achieves precise gas control and mixing.

[0026] The micro-cylindrical internal structure of this invention is a cleverly designed flow channel that diverts the mixed gas, achieving an ideal mixing state. This helps ensure the quality of the mixed gas and maintains a constant pressure for downstream processes. The internal structure design of this invention guarantees excellent gas mixing, has a low mechanical resistance coefficient, and its ingenious construction allows the airflow to reach the ideal mixing state through two diffusion stages, while the influence of gravity is negligible.

[0027] In this invention, the first and second gases can be boron trifluoride and hydrogen, or a mixture of boron trifluoride and hydrogen. This invention uses an MFC mass flow controller to control the inflow and outflow of gases, enabling the mixing of different gaseous components to achieve optimal mixing, similar to the optimal ratio of compressed air and fuel in an internal combustion engine cylinder. The gas mixing and formulation are completed under MFC control.

[0028] The specific embodiments described herein are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A gas mixing device comprising a columnar body, characterized in that: The main body has a front cavity and a rear cavity, with a partition between the front cavity and the rear cavity. A pipe is opened in the middle of the partition to connect the front cavity and the rear cavity. Air holes are opened on the pipe in the front cavity, the pipe in the rear cavity, and the partition. Gas flows into the air hole on the partition through the pipe in the front cavity and finally flows out from the pipe in the rear cavity. A mixing plate is installed in both the front cavity and the rear cavity. At least two air inlets and air outlets are opened on the front cavity and the rear cavity.

2. The gas mixing device according to claim 1, characterized in that: The partition is a solid columnar block with a circular air inlet plate and a circular air outlet plate installed on the top and bottom. The area of ​​the air inlet plate and the air outlet plate is larger than the partition, so that a recessed mixing chamber is formed on the outside of the partition. Ventilation holes communicating with the mixing chamber are opened on the air inlet plate and the air outlet plate. A mixing plate is installed on both sides of the air inlet plate and the air outlet plate.

3. The gas mixing device according to claim 2, characterized in that: The mixing plate consists of a base plate and air intake plates. One end of the air intake plate is fixed to the base plate, and the other end is fixed to the air inlet plate or the air outlet plate. A through hole is provided on the pipe between the base plate and the air inlet plate and the air outlet plate, which serves as the inlet and outlet of the mixing plate. All the air intake plates face the through hole.

4. The gas mixing device according to claim 3, characterized in that: The mixing plate on one side of the intake plate is the upper mixing plate, and the mixing plate on the other side of the outlet plate is the lower mixing plate. The through hole on the pipe in the middle of the upper mixing plate is the lower through hole, which is connected to the first air inlet, allowing the first gas to be directly introduced into the upper mixing plate. An upper through hole is provided on the pipe above the upper mixing plate, located in the upper chamber. At least one second air inlet is provided in the upper chamber, allowing the second gas to flow through the through hole in the upper chamber into the lower upper mixing plate for gas mixing. The through hole on the pipe in the lower mixing plate is the air outlet, through which the mixed gas flows out to the air outlet.

5. The gas mixing device according to claim 4, characterized in that: The air intake plates between the upper and lower mixing discs surround the lower through hole and the air outlet. The air intake plates are provided with an inner layer and an outer layer. The air intake plates of the inner layer are directly opposite the lower through hole and the air outlet. Two adjacent air intake plates of the outer layer are directly opposite one air intake plate of the inner layer. The air intake plates of the inner and outer layers are inclined at a certain angle.

6. The gas mixing device according to claim 5, characterized in that: The air-guiding plate has a figure-eight shape on the side facing the lower through hole and the air outlet, and an arc-shaped guide edge is provided at the other end to make the gas flow into the through hole and the air outlet more smoothly.

7. The gas mixing device according to claim 1, characterized in that: The body is also wrapped with a heating layer, which can quickly evaporate the internal gas.