A mask rapid film pasting tool

Abstract

This utility model relates to the field of film application tools, specifically to a quick film application tool for photomasks, including a base for supporting the tool. This quick film application tool for photomasks, through the arrangement of a placement seat, rubber pressure rollers, pressure rollers, and a traction plate, is driven to the bottom of the placement seat via an electric slide rail. Then, a cylinder switch is activated to push a connecting plate downwards. As the connecting plate descends, it simultaneously lowers the rubber pressure rollers, pressure rollers, and traction plate. The traction plate's descent causes its rear end to rotate outside the fixed frame, allowing it to tilt and adhere to the photomask surface. Next, a roll of film is unloaded. The roll has a film conforming to the shape of the photomask. During unloading, the bending position of the traction plate causes the film to lift and adhere to the rear side of the photomask surface. Then, as the placement seat moves, the film moves with the photomask and adheres to the surface. Afterwards, the pressure rollers compact the adhered film, and finally, the rubber pressure rollers further compact it.

Description

Technical Field

[0001] This utility model relates to the field of film application tools, specifically to a mask plate quick film application tool. Background Technology

[0002] Mask application tools are specialized equipment used in semiconductor manufacturing, photolithography, and micro / nano fabrication to precisely apply protective or functional films to the surface of a mask. Their core function is to automatically or semi-automatically apply thin films (such as polyethylene terephthalate (PET), polyimide (PI), or fluoropolymers) with a thickness of only 0.1-2 μm onto the mask surface without bubbles or wrinkles, protecting the photolithographic pattern from particle contamination or achieving specific optical functions.

[0003] A search revealed a mask application device (publication number CN221049030U) comprising a base, a mask placement platform, and an application device. The mask placement platform is movably mounted on the base and has a positioning frame for accommodating the mask to be applied. The application device includes two clamping platforms and a driving mechanism. The two clamping platforms are movably connected to the base and located above the positioning frame. The driving mechanism is located on the base and is drively connected to the two clamping platforms. The driving mechanism drives the two clamping platforms to move closer or further apart, enabling them to clamp and fix optical films of different types. In this invention, the driving mechanism allows the two clamping platforms to clamp optical films of different types by moving them closer or further apart, thus improving the versatility of the device.

[0004] The mask application equipment in the aforementioned patent involves a complex process when applying film to the mask, making it difficult to achieve rapid application and thus affecting the overall efficiency of the application.

[0005] Therefore, it is necessary to invent a mask-mounted quick-applying tool to solve the above problems. Utility Model Content

[0006] The purpose of this utility model is to provide a quick mask application tool. First, the entire mask is placed on a placement seat and moved to the bottom of the seat via an electric slide rail. Then, a cylinder switch is activated to push the connecting plate downwards. As the connecting plate descends, it simultaneously lowers the rubber pressure roller and pressure wheel, which in turn lowers the traction plate, causing its rear end to rotate outside the fixed frame. This allows the traction plate to tilt and adhere to the mask surface. Next, a roll of film is unwound. The roll has a film conforming to the shape of the mask. During unwinding, the bending position of the traction plate causes the film to lift and adhere to the rear side of the mask surface. Then, as the placement seat moves, the film moves with the mask and adheres to the surface. The pressure roller then compacts the applied film to prevent air bubbles. Finally, the rubber pressure roller further compacts it. This solves the problem in the aforementioned patent's mask application equipment, where the entire process is too complex and cannot achieve rapid application, thus affecting the overall efficiency of the application.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a mask quick-applying tool, including a base for supporting the applicator;

[0008] An electric slide rail is fixedly installed above the base for conveying and placing the seat. An electric slider is slidably connected to the outside of the electric slide rail, and a seat is fixedly connected above the electric slider.

[0009] A support frame is fixed above the center of the base. A cylinder is fixedly installed above the support frame. A connecting plate is fixedly connected to the output end of the cylinder. A rubber pressure roller is installed below the connecting plate. First connecting rods are fixedly connected to the lower two sides of the connecting plate. Pressure rollers are rotatably connected inside the first connecting rods. Second connecting rods are fixedly connected to the lower two sides of the connecting plate. A traction plate is hinged inside the second connecting rod.

[0010] A fixing frame is fixed above the rear side of the base. An unwinding drum is rotatably connected to the upper part of the fixing frame, and a winding drum is rotatably connected to the lower part of the fixing frame.

[0011] Preferably, a detachable limiting block is installed around the upper perimeter of the placement base, and an adjustment groove is provided on both sides of the inner side of the limiting block, with a bolt passing through the inner side of the adjustment groove.

[0012] Preferably, the upper two sides of the support frame are fixedly connected with sliding rods, and the sliding rods move through the inner two sides of the support frame.

[0013] Preferably, a fixing sleeve is fixedly provided on both sides of the inner side of the connecting plate, a telescopic rod is slidably connected inside the fixing sleeve, a spring is sleeved on the lower end of the telescopic rod, and a connecting block is fixedly connected to the lower end of the telescopic rod, with a rubber pressure roller rotatably connected to the connecting block.

[0014] Preferably, the pressure roller is located on the front side of the traction plate, and the rear side of the traction plate is hinged to the fixing frame.

[0015] Preferably, the traction plate is rotatably connected to the fixing frame, and the unwinding drum is covered with a film that is wound around the outside of the traction plate.

[0016] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0017] This invention, through the arrangement of a placement seat, rubber pressure rollers, pressure rollers, and a traction plate, enables rapid film application to a photomask. First, the entire photomask is placed on the placement seat and moved to the bottom via an electric slide rail. Then, a cylinder switch is activated to lower the connecting plate. As the connecting plate descends, it simultaneously lowers the rubber pressure rollers and pressure rollers, causing the traction plate to descend and rotate its rear end outside the fixed frame. This allows the traction plate to tilt and adhere to the photomask surface. Next, the film is unwound, and the film surface has a film conforming to the shape of the photomask. During unwinding, the bending position of the traction plate causes the film to lift and adhere to the rear side of the photomask surface. As the placement seat moves, the film moves with the photomask and adheres to the surface. The pressure rollers then compact the adhered film to prevent air bubbles, and finally, the rubber pressure rollers further compact it. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the placement base structure of this utility model;

[0021] Figure 3 This is a schematic diagram of the internal structure of the support frame and fixing frame of this utility model;

[0022] Figure 4 This is a schematic diagram of the rubber pressure roller structure of this utility model;

[0023] Figure 5 This is a schematic diagram of the traction plate structure of this utility model.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Base; 2. Electric slide rail; 3. Electric slider; 4. Placement seat; 5. Limit block; 6. Adjustment groove; 7. Bolt; 8. Support frame; 9. Cylinder; 10. Connecting plate; 11. Fixing sleeve; 12. Telescopic rod; 13. Spring; 14. Connecting block; 15. Rubber pressure roller; 16. First connecting rod; 17. Pressure roller; 18. Second connecting rod; 19. Traction plate; 20. Fixing frame; 21. Unwinding drum; 22. Rewinding drum. Detailed Implementation

[0026] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0027] This utility model provides, for example Figure 1-5 The mask quick-applying tool shown includes a base 1 for supporting the tool;

[0028] An electric slide rail 2 is fixedly installed above the base 1 and is used to transport the placement seat 4. An electric slider 3 is slidably connected to the outside of the electric slide rail 2, and the placement seat 4 is fixedly connected above the electric slider 3.

[0029] A support frame 8 is fixed above the base 1 at the center position. A cylinder 9 is fixedly installed above the support frame 8. A connecting plate 10 is fixedly connected to the output end of the cylinder 9. A rubber pressure roller 15 is installed below the connecting plate 10. A first connecting rod 16 is fixedly connected to both sides below the connecting plate 10. A pressure roller 17 is rotatably connected inside the first connecting rod 16. A second connecting rod 18 is fixedly connected to both sides below the connecting plate 10. A traction plate 19 is hinged inside the second connecting rod 18.

[0030] The fixing frame 20 is fixed above the rear side of the base 1. The upper part of the fixing frame 20 is rotatably connected to the unwinding drum 21, and the lower part of the fixing frame 20 is rotatably connected to the winding drum 22. First, the entire mask is placed on the placement seat 4 and driven to the bottom of the placement seat 4 by the electric slide rail 2. Then, the cylinder 9 switch is turned on to push the connecting plate 10 down. When the connecting plate 10 descends, it also drives the rubber pressure roller 15 and the pressure roller 17 down. At the same time, it also drives the traction plate 19 down, causing the rear end to rotate outside the fixing frame 20, so that the traction plate 19 tilts and sticks to the surface of the mask. Then, the unwinding drum 21 starts to unwind the film. The surface of the film has a film that conforms to the shape of the mask. During the unwinding process, the bending position of the traction plate 19 causes the film to lift up and stick to the rear side of the mask surface. Then, when the placement seat 4 moves, the film will move with the mask and stick to the surface. Then, the pressure roller 17 presses the film to prevent air bubbles. Finally, the rubber pressure roller 15 presses it to solidify it.

[0031] like Figure 1 and Figure 2As shown, a detachable limiting block 5 is installed around the top of the placement base 4. An adjustment groove 6 is provided on both sides inside the limiting block 5. A bolt 7 passes through the inside of the adjustment groove 6. The limiting block 5 moves outside the bolt 7 through the adjustment groove 6 inside, thereby adjusting and positioning according to the mask of different sizes. After adjustment, the bolt 7 is tightened to limit and fix the limiting block 5.

[0032] like Figure 3 As shown, sliding rods are fixedly connected to the upper two sides of the support frame 8 and the sliding rods move through the inside of the support frame 8. When the cylinder 9 pushes the connecting plate 10, it slides within the support frame 8 through the sliding rods on the upper two sides, thereby enhancing the stability of the connecting plate 10 during the lifting process.

[0033] like Figure 3 and Figure 4 As shown, fixed sleeves 11 are fixedly installed on both sides of the inner side of the connecting plate 10. A telescopic rod 12 is slidably connected inside the fixed sleeve 11. A spring 13 is sleeved on the lower end of the telescopic rod 12. A connecting block 14 is fixedly connected to the lower end of the telescopic rod 12, and the rubber pressure roller 15 is rotatably connected to the connecting block 14. Through the rebound and squeezing action of the telescopic rods 12 on both sides above the rubber pressure roller 15 and the external spring 13, the rubber pressure roller 15 can be tightly pressed against the surface of the mask plate for compaction.

[0034] like Figure 3 and Figure 5 As shown, the pressure roller 17 is located in front of the traction plate 19, and the rear side of the traction plate 19 is hinged to the fixed frame 20. When the connecting plate 10 descends, it drives the second connecting rod 18 and the traction plate 19 to descend. The rear side of the traction plate 19 is hinged to the fixed frame 20, so that the front end of the traction plate 19 forms an inclined effect, allowing the lower part of the front end of the traction plate 19 to be attached to the surface of the mask.

[0035] like Figure 3 and Figure 5 As shown, the traction plate 19 is rotatably connected to the fixing frame 20. The unwinding drum 21 is covered with a film and the film is wound around the outside of the traction plate 19. When the unwinding drum 21 starts to unwind the film, the surface of the film has a film that conforms to the shape of the mask. During the unwinding process, the bending position of the traction plate 19 causes the film to lift up and stick to the back side of the mask surface. Then, when the placement seat 4 moves, the film will move with the mask and stick to the surface. The other end of the film is wound around the outside of the take-up drum 22 for recycling.

[0036] The working principle of this utility model is as follows: First, connect the external power supply. Then, according to the size of the mask, move the adjustment grooves 6 inside the four sets of limiting blocks 5 above the placement seat 4 outside the bolts 7 to adjust and position the mask according to different sizes. After adjustment, tighten the bolts 7 to limit and fix the limiting blocks 5. Next, place the mask inside the four sets of limiting blocks 5 above the placement seat 4 for positioning. Then, turn on the electric slide rail 2 switch, which drives the external electric slider 3 and the placement seat 4 to move on the base 1, so that the placement seat 4 moves to the bottom. Then, turn on the cylinder 9 switch to push the connecting plate 10 down. When the connecting plate 10 descends, it also drives the rubber pressure roller 15 and pressure wheel 17 down, which in turn drives the traction plate 19 down, causing its rear end to rotate outside the fixing frame 20, so that the traction plate 19 is in an inclined state and attached to the upper surface of the mask. Next, the unwinding drum 21 begins to unwind the film. The surface of the film has a film that conforms to the shape of the mask. During the unwinding process, the bending position of the traction plate 19 causes the film to lift up and adhere to the back side of the mask surface. Then, the electric slide rail 2 drives the placement seat 4 to move back, and the film moves with the winding drum 22 to rewind the film. When the mask above the placement seat 4 moves, the entire film adheres to the surface of the mask. Then, the pressure roller 17 presses the film to prevent air bubbles. Finally, the rubber pressure roller 15, the telescopic rod 12, and the spring 13 push the film back to press it to the top of the mask. Finally, the placement seat 4 moves to the initial position, and the operator removes the mask with the film applied. This completes the process of using the mask quick-applying tool.

[0037] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A reticle rapid tape attaching tool, characterized by: Includes a base (1) for supporting the film application tool; An electric slide rail (2) is fixedly installed above the base (1) for conveying the placement seat (4). An electric slider (3) is slidably connected to the outside of the electric slide rail (2), and the placement seat (4) is fixedly connected above the electric slider (3). A support frame (8) is fixed above the base (1) at the center position. A cylinder (9) is fixedly installed above the support frame (8). A connecting plate (10) is fixedly connected to the output end of the cylinder (9). A rubber pressure roller (15) is installed below the connecting plate (10). A first connecting rod (16) is fixedly connected to both sides below the connecting plate (10). A pressure wheel (17) is rotatably connected inside the first connecting rod (16). A second connecting rod (18) is fixedly connected to both sides below the connecting plate (10). A traction plate (19) is hinged inside the second connecting rod (18). A fixing frame (20) is fixed above the rear side of the base (1). A unwinding drum (21) is rotatably connected to the upper part of the fixing frame (20), and a winding drum (22) is rotatably connected to the lower part of the fixing frame (20).

2. The mask quick-applying tool according to claim 1, characterized in that: The upper perimeter of the placement base (4) is equipped with detachable limiting blocks (5), and the inside of the limiting blocks (5) is provided with adjustment grooves (6) on both sides, and bolts (7) pass through the inside of the adjustment grooves (6).

3. The mask quick-applying tool according to claim 1, characterized in that: The upper two sides of the support frame (8) are fixedly connected with sliding rods, which move through the inside of the support frame (8).

4. The mask quick-applying tool according to claim 1, characterized in that: The connecting plate (10) has fixed sleeves (11) on both sides inside. The fixed sleeves (11) are slidably connected to the inside of the telescopic rod (12). The lower end of the telescopic rod (12) is sleeved with a spring (13). The lower end of the telescopic rod (12) is fixedly connected to a connecting block (14), and the rubber roller (15) is rotatably connected to the connecting block (14).

5. The mask quick-applying tool according to claim 1, characterized in that: The pressure roller (17) is located in front of the traction plate (19), and the rear side of the traction plate (19) is hinged to the fixing frame (20).

6. The mask quick-applying tool according to claim 1, characterized in that: The traction plate (19) is rotatably connected to the fixing frame (20), and the unwinding drum (21) is covered with a film and the film is wound around the outside of the traction plate (19).

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