A vacuum chamber gate valve capable of continuous feeding and discharging

By introducing valve connecting components and limiting structures into the vacuum chamber gate valve, the problem of insufficient sealing of existing vacuum chamber gate valves in variable speed production is solved, and automatic continuous feeding and discharging control of the vacuum chamber is realized.

CN224414392UActive Publication Date: 2026-06-26HEFEI SEMITECH TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
HEFEI SEMITECH TECH CO LTD
Filing Date
2025-07-25
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

Existing vacuum chamber gate valves cannot meet the actual sealing requirements of variable speed production in continuous production processes, resulting in the inability to achieve automatic control of continuous feeding and discharging.

Method used

By installing a valve block at the end of the cylinder's telescopic rod, and installing valve connecting components and sealing plates on both sides of the valve block, combined with limit blocks, transverse bearings and guide components, a stable connection and synchronous movement between the valve block and the sealing plate are achieved, ensuring that the sealing plate can effectively seal or open the inlet and outlet channels during variable speed production.

Benefits of technology

It enables automatic and continuous opening and closing control of valves during variable speed production, ensuring the sealing of the vacuum chamber and the continuity of production, and avoiding motion interference caused by speed changes.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN224414392U_ABST
    Figure CN224414392U_ABST
Patent Text Reader

Abstract

The utility model discloses a kind of vacuum cavity gate valves of continuous feeding and discharging production, involve vacuum cavity valve technical field.The utility model includes cylinder, the lower portion of cylinder is provided with valve cavity, the output end of cylinder is installed with valve block, one group of valve link assembly is arranged in the both sides of valve block, two groups of valve link assembly are installed with sealing plate, the distance of sealing plate and valve block is adjustable;The both sides of valve cavity bottom are provided with guide assembly, limit block is installed in the bottom of valve cavity, limit bearing is installed in the both sides of limit block, sealing plate is located when bottom and limit bearing rolling connection in lowest position;Valve cavity is close to the side of sealing plate and is provided with vacuum cavity butt joint O ring, vacuum cavity butt joint O ring middle part is provided with vacuum cavity feeding and discharging passageway.The utility model is connected by multiple valve link assembly by valve block and sealing plate, realizes the continuous automatic feeding and discharging control function of valve, and can freely adjust the control of valve opening and closing speed when feeding and discharging.
Need to check novelty before this filing date? Find Prior Art