A multi-beam irradiation target chamber

By introducing a beam control mechanism and a target positioning mechanism into the target chamber, the problems of beam crossing and target switching in multi-beam irradiation were solved, realizing flexible control of multi-beam irradiation and efficient target adjustment, thus improving the reliability and efficiency of the experiment.

CN224417498UActive Publication Date: 2026-06-26LANZHOU ION CHEMICAL TECHNOLOGY CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
LANZHOU ION CHEMICAL TECHNOLOGY CO LTD
Filing Date
2025-09-29
Publication Date
2026-06-26

Smart Images

  • Figure CN224417498U_ABST
    Figure CN224417498U_ABST
Patent Text Reader

Abstract

The utility model relates to target chamber technical field, specifically disclose a kind of multi-beam irradiation target chamber, including cylinder, cylinder two ends are provided with front end cap and rear end cap, front end cap is located in the one end of cylinder near beam source, and is provided with several beam source connecting cylinders on front end cap, beam control mechanism is set between beam source connecting cylinder and beam passage, the other end of beam passage extends to the region where target material is located, and target material is set in cylinder by target material positioning mechanism. Through the one-to-one correspondence of multiple beam source connecting cylinders and the beam passage in cylinder, the independent on-off control of multi-beam can be realized;Through the setting of target material positioning frame and arc clamping block, both the stability of target material in the irradiation process is ensured, and the convenient replacement of target material can be realized. The problem that the space intersection between different beams when the multi-beam passes through the rigid channel in the conventional target chamber can cause serious scattering effect and non-intended energy deposition superposition;And target material switching and attitude adjustment difficulty.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This utility model belongs to the field of target chamber technology, specifically, it relates to a multi-beam irradiation target chamber. Background Technology

[0002] With the continuous iteration and upgrading of accelerator and irradiation technologies, the target chamber system, as a key device connecting the beam source and the experimental target, has evolved from early single-parameter control to a comprehensive requirement for multi-dimensional, highly dynamic, and coordinated control. Currently, many advanced applications, such as multi-beam coordinated irradiation and extreme environment simulation experiments, require the target chamber to coordinate the effects of beams with different energies and particle types simultaneously, and to achieve precise coupled control of multiple physical quantities such as temperature, pressure, and atmosphere. However, existing target chamber structures are still mainly designed around single-beam irradiation. Their static, fixed channel layout and limited sample carrying methods severely restrict the reliability and process controllability of experiments under complex irradiation environments.

[0003] The rigid channel structure and fixed target position design commonly used in traditional target chambers face significant challenges when multiple beams are running in parallel. On the one hand, spatial intersections between different beams can lead to severe scattering effects and the superposition of unintended energy deposition, causing experimental data deviations or even irreversible sample damage. On the other hand, the lack of rapid and flexible target switching and attitude adjustment mechanisms makes it difficult to support the efficient operating rhythm required for high-throughput screening and multi-condition comparison experiments. These limitations not only reduce the accuracy and reproducibility of experimental data but also restrict the further application of irradiation technology in fields such as new material development and biological sample processing.

[0004] Based on this, the present invention proposes a multi-beam irradiation target chamber to solve the problems existing in the prior art. Utility Model Content

[0005] In view of this, the main objective of this utility model is to provide a multi-beam irradiation target chamber to solve the problems of severe scattering effects and unexpected energy deposition caused by the spatial intersection between different beams when multiple beams pass through a rigid channel in traditional target chambers; as well as the difficulty in target material switching and attitude adjustment.

[0006] To achieve the above objectives, the technical solution of this utility model is implemented as follows:

[0007] A multi-beam irradiation target chamber includes a cylindrical body with a front end cover and a rear end cover at both ends. The front end cover is located at the end of the cylindrical body near the beam source, and a plurality of beam source connecting tubes are provided on the front end cover. Each beam source connecting tube corresponds to a beam channel disposed in the cylindrical body, and a beam control mechanism is provided between the beam source connecting tube and the beam channel. The other end of the beam channel extends to the area where the target material is located. The target material is disposed in the cylindrical body by a target material positioning mechanism, which is disposed on the rear end cover.

[0008] In a preferred embodiment, the beam control mechanism includes a beam control motor, a reduction gear, and a beam control disk. The beam control motor is fixedly mounted on the outside of the cylinder, and a reduction gear is provided at the power output end of the beam control motor. The beam control disk is rotatably mounted inside the cylinder, and a plurality of guide ports are provided on the disk body of the beam control disk. The positions of the guide ports correspond one-to-one with the beam source connecting cylinder and the beam channel.

[0009] In a preferred embodiment, the beam control disk is rotatably disposed in a slot opened on the inner wall of the cylinder, and the two side edges of the beam control disk are in frictional contact with the side wall of the slot through curved surfaces.

[0010] In a preferred embodiment, a ring of locking platforms is provided on the outer peripheral surface of the beam control disk. The locking platforms match and engage with the locking slots. A ring of gears is machined on the outer surface of the locking platforms. The reduction gear penetrates the side wall of the cylinder and meshes with the ring of gears.

[0011] In a preferred embodiment, the depth of the card slot is greater than the thickness of the card platform.

[0012] In a preferred embodiment, the beam channel is fixed inside the cylinder by a channel fixing bracket, which is fixedly disposed inside the cylinder.

[0013] In a preferred embodiment, the target positioning mechanism includes a rotary drive motor, an electric telescopic rod, and a target positioning frame; the rotary drive motor is fixedly mounted on the outside of the rear end cover, its drive end is connected to the electric telescopic rod, the other end of the electric telescopic rod is connected to the target positioning frame, and the target is positioned at one end of the target positioning frame near the beam channel.

[0014] In a preferred embodiment, the target positioning frame is a disc-shaped structure, with a groove matching the shape of the target on the side near the beam channel.

[0015] In a preferred embodiment, target positioning components are symmetrically arranged on the side wall of the target positioning frame, and the target positioning components are matched with the target.

[0016] In a preferred embodiment, the target positioning component includes an arc-shaped locking block and a threaded adjustment component. The arc-shaped locking block is disposed inside the groove of the target positioning frame and matches the target. The threaded adjustment component is threadedly connected to the side wall of the target positioning frame and is rotatably connected to the arc-shaped locking block through a bearing.

[0017] Compared with the prior art, this utility model provides a multi-beam irradiation target chamber, which has the following beneficial effects:

[0018] 1. By connecting multiple beam source tubes on the front cover to the beam channels inside the tube one-to-one, and coordinating with the rotation of the beam control disk, independent on / off control of multiple beams can be achieved. When it is necessary to use beams of different energies or types simultaneously, the beam control disk can be rotated by the beam control motor to precisely switch the transmission paths of each beam, avoiding beam overlap and interference, and significantly improving the flexibility of multi-parameter coupling experiments.

[0019] 2. The beam control disk, through a transmission system of reduction gears and a beam control motor, converts the motor's high speed into low-speed, high-torque output, ensuring precise control of the beam control disk's rotation angle. Simultaneously, the slot depth is greater than the stage thickness, avoiding friction between the gear ring and the slot bottom wall, further improving rotational stability. This effectively prevents experimental data distortion caused by beam path deviation, making it particularly suitable for nuclear physics experiments or isotope production where high beam accuracy is required.

[0020] 3. The target positioning mechanism, through the coordination of a rotary drive motor and an electric telescopic rod, realizes the azimuth angle rotation and axial distance adjustment of the target, which can cover the entire spatial range required for multi-beam irradiation and improve the experimental results.

[0021] 4. The groove and arc-shaped locking block design of the target positioning frame, with the arc-shaped locking block fitting against the side wall of the target, not only ensures the stability of the target during irradiation, but also allows for convenient replacement of the target by quickly loosening the threaded adjustment part, which significantly improves the experimental cycle efficiency.

[0022] This invention solves the problems of severe scattering effects and unexpected energy deposition caused by spatial intersections between different beams when multiple beams pass through a rigid channel in traditional target chambers, as well as the difficulties in target material switching and attitude adjustment. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of the multi-beam irradiation target chamber of this utility model;

[0025] Figure 2 This is a front view of the multi-beam irradiation target chamber of this utility model;

[0026] Figure 3 This is a cross-sectional view of the multi-beam irradiation target chamber of this utility model;

[0027] Figure 4 This is a schematic diagram of the structure of the cylindrical body of this utility model;

[0028] Figure 5 This is a schematic diagram of the beam control disk of this utility model;

[0029] Figure 6 This is a schematic diagram of the beam channel structure of this utility model;

[0030] Figure 7 This is a schematic diagram of the target positioning mechanism of this utility model;

[0031] Figure 8 This is a schematic diagram of the target positioning component of this utility model.

[0032] [Explanation of Key Component Symbols]

[0033] 1. Cylinder body; 11. Slot; 2. Front end cover; 3. Rear end cover; 4. Beam control mechanism; 41. Beam control motor; 42. Reduction gear; 43. Beam control disc; 431. Guide port; 432. Clamping platform; 433. Gear ring; 5. Target positioning mechanism; 51. Rotary drive motor; 52. Electric telescopic rod; 53. Target positioning frame; 54. Target positioning component; 541. Arc-shaped clamping block; 542. Threaded adjustment component; 6. Beam source connecting cylinder; 7. Beam channel; 8. Target; 9. Channel fixing frame. Detailed Implementation

[0034] The structure of the multi-beam irradiation target chamber will be further described in detail below with reference to the accompanying drawings and embodiments of the present invention.

[0035] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0036] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments as described in this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0037] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0038] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0039] As per the instruction manual Figures 1-8 As shown, this utility model provides a technical solution:

[0040] A multi-beam irradiation target chamber includes a cylindrical body 1. A front cover 2 and a rear cover 3 are connected to both ends of the cylindrical body 1 via flanges, forming a complete sealed space. The front cover 2 is located at the end of the cylindrical body 1 near the beam source, and several beam source connecting cylinders 6 are fixedly installed on the front cover 2. Each beam source connecting cylinder 6 is connected to an external beam source via a flange and corresponds one-to-one with a beam channel 7 located inside the cylindrical body 1. A beam control mechanism 4 is provided between the beam source connecting cylinder 6 and the beam channel 7 to adjust the flow state of the corresponding beam channel 7, achieving independent control of multiple beams. The other end of the beam channel 7 extends to the area where the target material 8 is located, ensuring precise beam irradiation of the target. The target material 8 is fixed inside the cylindrical body 1 by a target positioning mechanism 5, which is installed on the rear cover 3, enabling rapid clamping and position calibration of the target material 8.

[0041] In this embodiment, the cylinder 1 serves as the main structure, providing a sealed environment for beam transmission and target irradiation. A shielding layer is provided on the outside of the cylinder 1 to prevent beam radiation leakage and avoid external interference. The flange connection design between the front cover 2 and the rear cover 3 facilitates the maintenance and replacement of internal components. The target chamber, through the coordination of the beam control mechanism 4 and the target positioning mechanism 5, can adapt to multi-beam parallel irradiation scenarios, meeting the needs of precise beam control and efficient target switching in fields such as nuclear physics experiments and material modification.

[0042] Specifically, the cylinder 1, the front cover 2, and the rear cover 3 are all made of stainless steel. The wall thickness of the cylinder 1 is 10mm, and the inner wall is polished with a surface roughness Ra≤0.8μm to reduce energy loss caused by scattering during beam transmission.

[0043] In a preferred embodiment, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the beam control mechanism 4 includes a beam control motor 41, a reduction gear 42, and a beam control disk 43. The beam control motor 41 is fixedly mounted on the outside of the cylinder 1, and its power output end is connected to the reduction gear 42. The beam control disk 43 is rotatably disposed inside the cylinder 1, and has several guide ports 431 on its disk. The positions of the guide ports 431 correspond one-to-one with the beam source connecting cylinder 6 and the beam channel 7, and the beam control disk 43 is driven by the reduction gear 42 through an external gear ring.

[0044] In this embodiment, during operation, the beam control motor 41 drives the beam control disk 43 to rotate via the reduction gear 42. By utilizing the relative positional changes of the guide port 431, the beam source connecting cylinder 6, and the beam channel 7, the on / off state of each beam channel is precisely adjusted. This design achieves rapid switching of the beam path through mechanical transmission, avoiding human operation errors. At the same time, the reduction gear 42 can reduce the motor speed and increase the torque, ensuring the precise positioning of the beam control disk 43 and meeting the requirements for beam distribution flexibility and stability in multi-beam parallel irradiation scenarios.

[0045] Specifically, such as Figure 3 , Figure 4 and Figure 5 As shown, the beam control disk 43 is rotatably disposed in the slot 11 opened in the inner wall of the cylinder 1. The two sides of the beam control disk 43 are in frictional contact with the side wall of the slot 11 through the curved surface to achieve initial positioning. At the same time, a ring of locking platforms 432 is provided on the outer surface of the beam control disk 43. The locking platforms 432 match and engage with the contour of the slot 11 to further enhance the stability of the disk when rotating and avoid axial movement.

[0046] In this embodiment, the transmission structure of the beam control disk 43 is achieved through the cooperation of a gear ring 433 and a reduction gear 42: a gear ring 433 is machined on the outer surface of the mounting plate 432, and the reduction gear 42 penetrates the side wall of the cylinder 1 and directly meshes with the gear ring 433; during operation, the reduction gear 42 is driven by the beam control motor 41, and transmits the rotational torque to the beam control disk 43 through the gear ring 433, precisely controlling its rotation angle, thereby adjusting the correspondence between the guide port 431 and the beam source connecting cylinder 6 and the beam channel 7, and realizing flexible switching of multiple beam flow interruption.

[0047] Specifically, such as Figure 3 , Figure 4 and Figure 5 As shown, the slot 11 is formed on the inner wall of the cylinder 1, and its depth is designed to be greater than the thickness of the mounting platform 432 to ensure that there is a gap between the mounting platform 432 and the bottom wall of the slot 11 after the beam control disk 43 is assembled. The beam control disk 43 achieves initial axial positioning by frictional contact between the curved surfaces of its two sides and the side wall of the slot 11; at the same time, the contour matching and engagement of the mounting platform 432 and the slot 11 further constrains the radial movement of the disk and improves rotational stability.

[0048] In a preferred embodiment, such as Figure 3 and Figure 6 As shown, the beam channel 7 is fixed inside the cylinder 1 by the channel fixing frame 9, and the channel fixing frame 9 is fixedly installed inside the cylinder 1.

[0049] In a preferred embodiment, such as Figure 2 , Figure 3 , Figure 7 and Figure 8 As shown, the target positioning mechanism 5 includes a rotary drive motor 51, an electric telescopic rod 52, and a target positioning frame 53. The rotary drive motor 51 is mounted on the outside of the rear end cover 3 via a motor mounting bracket, and its drive end is connected to the electric telescopic rod 52. This motor drives the target positioning frame 53 to rotate, adjusting the orientation of the target 8. The electric telescopic rod 52 adjusts the relative distance between the target 8 and the beam channel 7 through its telescopic movement, achieving precise control of the irradiation position. The other end of the electric telescopic rod 52 is connected to the target positioning frame 53, and the target 8 is fixedly installed on the end of the target positioning frame 53 near the beam channel 7.

[0050] In this embodiment, the target positioning frame 53, under the coordinated action of the rotary drive motor 51 and the electric telescopic rod 52, can achieve multi-degree-of-freedom adjustment (rotation + axial movement) to ensure that the target 8 is accurately aligned with the beam channel 7, thus meeting the requirements of different irradiation experiments for matching the target position with the beam parameters.

[0051] Specifically, such as Figure 7 and Figure 8 As shown, the target positioning frame 53 has a disc-shaped structure. A groove matching the shape of the target 8 is provided on the side near the beam channel 7 to achieve initial positioning and quick clamping of the target 8. Target positioning components 54 are also symmetrically arranged on the side wall of the target positioning frame 53. The target positioning frame 53 is connected to the rotary drive motor 51 via an electric telescopic rod 52. Under the drive of the rotary drive motor 51, the orientation of the target 8 can be adjusted, and the axial distance between the target 8 and the beam channel 7 can be adjusted by the telescopic movement of the electric telescopic rod 52, meeting the requirements for precise control of the target position in multi-beam irradiation scenarios.

[0052] Specifically, such as Figure 7 and Figure 8 As shown, the target positioning component 54 includes an arc-shaped locking block 541 and a threaded adjusting component 542. The arc-shaped locking block 541 is disposed inside the groove of the target positioning frame 53 and is used to cooperate with the target 8 to fix the target 8. The threaded adjusting component 542 is threadedly connected to the side wall of the target positioning frame 53 and is rotatably connected to the arc-shaped locking block 541 through a bearing. It is used to adjust the position of the arc-shaped locking block 541 in the target positioning frame 53 by rotating the threaded adjusting component 542, so as to achieve precise positioning of the target 8.

[0053] In this embodiment, the fine-tuning function is achieved through threaded transmission, which not only ensures the stability of the target material 8 during the irradiation process, but also allows for convenient replacement of the target material 8 by quickly loosening the threaded adjustment part 542, thus balancing positioning accuracy and operational efficiency.

[0054] Specifically, the aforementioned cylinder 1, front end cover 2, rear end cover 3, beam control motor 41, and rotary drive motor 51 are all existing technologies. The beam control motor 41 and rotary drive motor 51 are servo motors, which will not be described in detail here.

[0055] The usage process and operating principle of the multi-beam irradiation target chamber described in this utility model include:

[0056] Step 1: Preparation: Connect multiple beam sources to the beam source connecting cylinder 6 on the front end cover 2 via flanges, ensuring a tight seal; select the target material 8 according to experimental requirements, embed it into the groove of the target positioning frame 53, and push the arc-shaped locking block 541 to clamp the side wall of the target material 8 by rotating the threaded adjustment component 542 to complete the target fixation; check whether the internal components of the cylinder 1 (such as the beam control disk 43 and the target positioning frame 53) are in their initial positions, and ensure that the beam channel 7 and the target material 8 are unobstructed.

[0057] Step 2: Beam control: Start the beam control motor 41, which drives the beam control disk 43 to rotate through the reduction gear 42. Utilize the correspondence between the guide port 431 on the disk and the beam source connecting cylinder 6 and beam channel 7 to adjust the on / off state of each beam (for example, when a certain beam needs to be turned on, rotate the beam control disk 43 to align the guide port 431 with the beam source connecting cylinder 6 and beam channel 7); control the rotation angle of the beam control disk 43 through the transmission ratio of the reduction gear 42 to ensure the accuracy of beam path switching.

[0058] Step 3: Target positioning: Start the rotary drive motor 51 to drive the target positioning frame 53 to rotate, adjust the azimuth angle of the target 8 to align it with the target beam channel 7; adjust the axial distance between the target 8 and the beam channel 7 by the telescopic movement of the electric telescopic rod 52 to ensure that the target 8 is in the optimal position for beam irradiation (such as the focal point or energy deposition area).

[0059] Step 4: Irradiation execution: Turn on the beam source, and multiple beams are precisely irradiated onto the surface of the target material 8 through the beam source connecting tube 6, the guide port 431 and the beam channel 7; monitor the temperature of the target material 8 in real time (through thermocouples or infrared sensors) and beam parameters (such as energy and dose). If adjustments are needed, the beam path or target position can be dynamically corrected through the beam control motor 41 or the electric telescopic rod 52.

[0060] Step 5: End: Turn off the beam source, rotate the threaded adjustment part 542 in the opposite direction to loosen the arc-shaped locking block 541, and take out the target material 8; reset the beam control disk 43 and the target positioning frame 53 to the initial position, clean the inside of the cylinder 1 (such as removing residual radiation or debris), and turn off the power supply of the equipment.

[0061] All content not described in detail in this specification is prior art known to those skilled in the art, and the model parameters of each component are not specifically limited; conventional equipment can be used. Control elements not mentioned in this technical solution are prior art and are therefore not shown in the figures, and will not be described further here.

[0062] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the scope of protection of the present utility model.

Claims

1. A multi-beam irradiation target chamber, comprising a cylindrical body (1), wherein a front end cap (2) and a rear end cap (3) are provided at both ends of the cylindrical body (1), characterized in that, The front end cover (2) is located at one end of the cylinder (1) near the beam source, and a plurality of beam source connecting cylinders (6) are provided on the front end cover (2). The beam source connecting cylinders (6) correspond one-to-one with the beam channels (7) provided in the cylinder (1), and a beam control mechanism (4) is provided between the beam source connecting cylinders (6) and the beam channels (7). The other end of the beam channels (7) extends to the area where the target material (8) is located. The target material (8) is set in the cylinder (1) through the target material positioning mechanism (5). The target material positioning mechanism (5) is set on the rear end cover (3).

2. The multi-beam irradiation target chamber as described in claim 1, characterized in that, The beam control mechanism (4) includes a beam control motor (41), a reduction gear (42) and a beam control disk (43). The beam control motor (41) is fixedly installed on the outside of the cylinder (1), and a reduction gear (42) is provided at the power output end of the beam control motor (41). The beam control disk (43) is rotatably installed inside the cylinder (1), and several guide ports (431) are opened on the disk of the beam control disk (43). The positions of the guide ports (431) correspond one-to-one with the beam source connecting cylinder (6) and the beam channel (7).

3. The multi-beam irradiation target chamber as described in claim 2, characterized in that, The beam control disk (43) is rotatably disposed in the slot (11) opened on the inner wall of the cylinder (1), and the two sides of the beam control disk (43) are in frictional contact with the side wall of the slot (11) through the curved surface.

4. The multi-beam irradiation target chamber as described in claim 3, characterized in that, The outer circumferential surface of the beam control disk (43) is provided with a ring of locking platform (432), which matches and engages with the locking slot (11). A ring of gear (433) is machined on the outer surface of the locking platform (432), and the reduction gear (42) penetrates the side wall of the cylinder (1) and meshes with the gear (433).

5. A multi-beam irradiation target chamber as described in claim 4, characterized in that, The depth of the card slot (11) is greater than the thickness of the card platform (432).

6. A multi-beam irradiation target chamber as described in claim 1, characterized in that, The beam channel (7) is fixed inside the cylinder (1) by a channel fixing frame (9), which is fixed inside the cylinder (1).

7. A multi-beam irradiation target chamber as described in claim 1, characterized in that, The target positioning mechanism (5) includes a rotary drive motor (51), an electric telescopic rod (52), and a target positioning frame (53). The rotary drive motor (51) is fixedly installed on the outside of the rear end cover (3), and its drive end is connected to the electric telescopic rod (52). The other end of the electric telescopic rod (52) is connected to the target positioning frame (53). The target (8) is located at one end of the target positioning frame (53) near the beam channel (7).

8. A multi-beam irradiation target chamber as described in claim 7, characterized in that, The target positioning frame (53) is a disc-shaped structure, and a groove matching the shape of the target (8) is provided on the side near the beam channel (7).

9. A multi-beam irradiation target chamber as described in claim 7, characterized in that, The side wall of the target positioning frame (53) is also symmetrically provided with target positioning parts (54), which are matched with the target (8).

10. A multi-beam irradiation target chamber as described in claim 9, characterized in that, The target positioning component (54) includes an arc-shaped locking block (541) and a threaded adjusting component (542). The arc-shaped locking block (541) is located inside the groove of the target positioning frame (53) and matches the target (8). The threaded adjusting component (542) is threadedly connected to the side wall of the target positioning frame (53) and is rotatably connected to the arc-shaped locking block (541) through a bearing.