Fluorescent x-ray analysis device, water leakage management method for fluorescent x-ray analysis device, information storage medium, and computer program product

Abstract

The present application detects water leakage in a spectrometer chamber with high precision and at high speed, and reduces the degree of malfunction of a fluorescent X-ray analysis device in the event of water leakage. A fluorescent X-ray analysis device has a high-voltage power supply that applies a voltage to an electron beam source, an X-ray tube that irradiates a sample disposed in a spectrometer chamber with primary X-rays generated by irradiating a target with an electron beam generated by the electron beam source, a circulating water pump that transports cooling water that cools the target, a vacuum pump that exhausts air from the spectrometer chamber, a vacuum gauge that measures the pressure of the spectrometer chamber, and a control unit that determines that the cooling water has leaked into the interior of the spectrometer chamber and stops the operation of the circulating water pump based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source.

Description

Technical Field

[0001] This invention relates to a fluorescence X-ray analysis device, a method for managing water leakage in a fluorescence X-ray analysis device, an information storage medium, and a computer program product. Background Technology

[0002] Fluorescence X-ray analysis apparatuses are known as devices for analyzing the elements contained in a sample. These apparatuses irradiate the sample with single X-rays and analyze the sample based on the intensity and energy of the emitted fluorescent X-rays. In the analysis of light elements, the spectrometer is made a vacuum to prevent absorption of X-rays by air. Fluorescence X-ray analysis apparatuses have an X-ray tube that generates single X-rays. The target and anode of the X-ray tube generate heat during X-ray generation, and are therefore cooled with cooling water.

[0003] Near the anode, which is in continuous contact with cooling water, damage can occur in the flow path due to wear or vibration, and cooling water may sometimes leak into the interior of the X-ray tube. The leaked cooling water passes through the thinner X-ray window of the X-ray tube and is drawn into the vacuum-controlled spectrophotometer. If the fluorescence X-ray analyzer continues to operate at this point, further damage may occur. Therefore, upon detecting a cooling water leak, it is necessary to quickly stop the operation of the device to mitigate the severity of the malfunction.

[0004] For example, Patent Document 1 discloses a rotating cathode type X-ray generating device that uses a tray to receive cooling water leaks. When a predetermined water level is reached, a water detection sensor detects the leak, stops the electron beam used for target irradiation, and issues a warning. Patent Document 2 discloses a method for determining whether a liquid-cooled electron tube has a cooling water leak based on changes in water pressure. Patent Document 3 discloses a method for detecting water leakage in an electromagnetic wave generating device using a float-type switching device. Patent Document 4 discloses a method for manufacturing an X-ray tube that uses a flow sensor to detect cooling water leaks and stop the water supply. Patent Document 5 discloses an X-ray diffraction device with a safety device that stops the test when a cooling water leak in the X-ray tube is detected.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 2-197098

[0008] Patent Document 2: Japanese Patent Application Publication No. 7-235266

[0009] Patent Document 3: Japanese Patent Application Publication No. 2001-327855

[0010] Patent Document 4: Japanese Patent Application Publication No. 9-167563

[0011] Patent Document 5: Japanese Patent Application Publication No. 8-189907 Summary of the Invention

[0012] The problem that the invention aims to solve

[0013] If the leak detection sensor is placed in the spectrometer, the size and location of other components inside the spectrometer will be limited. Furthermore, depending on the size of the spectrometer, sometimes the sensor cannot be placed at all. Additionally, depending on the type of sensor, leaks may not be detected accurately, and depending on the sensor's placement, leaks may not be detected in their early stages, resulting in a certain amount of cooling water leaking into the spectrometer.

[0014] The present invention was made in view of the above-mentioned problems, and its object is to provide a fluorescence X-ray analysis device that can detect water leakage inside the spectrometer with high precision and speed, and mitigate the degree of failure in the event of water leakage.

[0015] Technical solutions for solving the problem

[0016] (1) A fluorescence X-ray analysis apparatus of one aspect of the present disclosure is characterized by comprising: a high-voltage power supply that applies a voltage to an electron beam source; an X-ray tube that irradiates a sample disposed in a spectrophotometer with a single X-ray generated by irradiating a target with an electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump that discharges air from the spectrophotometer; a vacuum gauge that measures the pressure of the spectrophotometer; and a control unit that determines, based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, that the cooling water has leaked into the interior of the spectrophotometer, and stops the operation of the circulating water pump.

[0017] (2) According to the above-mentioned fluorescence X-ray analysis device, the control unit determines that the cooling water is leaking when the pressure measured by the vacuum gauge is higher than a specified value and the voltage of the high-voltage power supply applied to the electron beam source is lower than a specified value.

[0018] (3) According to the above-mentioned fluorescence X-ray analysis device, the control unit stops applying voltage to the electron beam source when it determines that the cooling water is leaking.

[0019] (4) According to the above-mentioned fluorescence X-ray analysis device, the control unit stops the operation of the vacuum pump when it is determined that the cooling water is leaking.

[0020] (5) According to the above-mentioned fluorescence X-ray analysis device, the control unit introduces air into the spectrophotometer when it determines that the cooling water is leaking.

[0021] (6) According to the above-described fluorescence X-ray analysis apparatus, it is characterized in that it further comprises an information processing unit including a receiving unit and a display unit for receiving instructions from a user, wherein if the control unit or the information processing unit determines that the cooling water is leaking, the display unit displays that the cooling water may leak into the spectrophotometer, and if the receiving unit receives an instruction from the user to stop the operation of the circulating water pump, the control unit stops the operation of the circulating water pump.

[0022] (7) A method for managing water leakage in a fluorescence X-ray analysis apparatus according to one aspect of the present disclosure, characterized in that the fluorescence X-ray analysis apparatus comprises: a high-voltage power supply that applies a voltage to an electron beam source; an X-ray tube that irradiates a sample disposed in a spectrophotometer with a single X-ray generated by irradiating a target with an electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump that discharges air from the spectrophotometer; and a vacuum gauge that measures the pressure of the spectrophotometer, the method for managing water leakage in the fluorescence X-ray analysis apparatus comprising: a step of determining whether cooling water has leaked into the interior of the spectrophotometer based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and a step of stopping the operation of the circulating water pump if it is determined that cooling water has leaked into the interior of the spectrophotometer.

[0023] (8) An information storage medium of one aspect of this disclosure is a non-transitory computer-readable information storage medium storing a program executed by a computer used in a fluorescence X-ray analysis apparatus, characterized in that the fluorescence X-ray analysis apparatus comprises: a high-voltage power supply that applies a voltage to an electron beam source; an X-ray tube that irradiates a sample disposed in a spectrophotometer with a single X-ray generated by irradiating a target with an electron beam generated by the electron beam source; a circulating water pump that delivers cooling water to cool the target; a vacuum pump that discharges air from the spectrophotometer; and a vacuum gauge that measures the pressure of the spectrophotometer, the program causing the computer to execute: a step of determining whether the cooling water has leaked into the interior of the spectrophotometer based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and a step of stopping the operation of the circulating water pump if it is determined that the cooling water has leaked into the interior of the spectrophotometer.

[0024] (9) A procedure of one aspect of the present disclosure, executed by a computer used in a fluorescence X-ray analysis apparatus, characterized in that the fluorescence X-ray analysis apparatus comprises: a high-voltage power supply that applies a voltage to an electron beam source; an X-ray tube that irradiates a sample disposed in a spectrophotometer with a single X-ray generated by irradiating a target with an electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump that discharges air from the spectrophotometer; and a vacuum gauge that measures the pressure of the spectrophotometer, the procedure causing the computer to perform: a step of determining whether the cooling water has leaked into the interior of the spectrophotometer based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and a step of stopping the operation of the circulating water pump if it is determined that the cooling water has leaked into the interior of the spectrophotometer.

[0025] The effects of the invention

[0026] According to the present invention, water leakage inside the spectrometer can be detected with high precision and speed, thereby mitigating the degree of failure of the fluorescence X-ray analysis device in the event of leakage. Attached Figure Description

[0027] Figure 1 This is a diagram that provides a general overview of the overall structure of a fluorescence X-ray analysis device.

[0028] Figure 2 It is a diagram that provides a general overview of the interior of the spectrometer.

[0029] Figure 3 This is a diagram that provides a general overview of an X-ray tube.

[0030] Figure 4 It is a diagram that provides a general overview of the overall structure of the information processing department.

[0031] Figure 5 This is a flowchart illustrating methods for managing water leaks.

[0032] Figure 6 This is a flowchart for determining whether there is a water leak. Detailed Implementation

[0033] like Figure 1 As shown, it includes a measuring unit 102, a circulating water pump 104, a vacuum pump 106, an information processing unit 108, and a high-voltage power supply 110. The measuring unit 102 includes a preparation chamber 112, a vacuum gate 114, pressure relief valves 116A and 116B, a spectrophotometer 118, an X-ray tube 120, a vacuum gauge 122, and a control unit 124.

[0034] The preparation chamber 112 is a cavity for removing and placing the sample 202, also known as the sample exchange system. The preparation chamber 112 is arranged adjacent to the spectrophotometer 118, and a vacuum gate 114 is disposed between the preparation chamber 112 and the spectrophotometer 118. The vacuum gate 114 is normally closed and opens when the sample 202 is transferred between the preparation chamber 112 and the spectrophotometer 118. A pressure relief valve 116A is a valve that introduces air into the preparation chamber 112. The pressure relief valve 116A is opened manually or under the control of the control unit 124.

[0035] Spectrophotometer 118 is the chamber for analyzing sample 202. Specifically, as... Figure 2 As shown in (a), the spectrophotometer 118 is equipped with a sample stage 204, an X-ray tube 120, a spectrophotometer 206, a detector 208, and a vacuum gauge 122. Furthermore, in this embodiment, a portion of the X-ray tube 120 (the periphery of the window emitting a single X-ray) and a portion of the vacuum gauge 122 are shown located inside the spectrophotometer 118, while the remaining portions of the X-ray tube 120 and the vacuum gauge 122 are located outside the spectrophotometer 118. The pressure relief valve 116B is a valve for introducing air into the spectrophotometer 118. The pressure relief valve 116B is opened manually or under the control of the control unit 124.

[0036] The sample stage 204 is an XY stage on which the sample 202, the object of measurement, is placed. A single X-ray generated by the X-ray tube 120 irradiates the surface of the sample 202. A spectrometer 206 disperses fluorescent X-rays of a specified wavelength emitted from the sample 202. A detector 208 is positioned at the incident point of the fluorescent X-rays dispersed by the spectrometer 206. The detector 208 is, for example, a proportional counter tube. The detector 208 measures the fluorescent X-rays and outputs a pulse signal. A counter (not shown) obtains the intensity of the fluorescent X-rays by counting the pulse signals output from the detector 208. The spectrometer 206 and detector 208 can be set for each element to be analyzed, or a set of spectrometers 206 and detectors 208 can be rotated for measurement. In the case of rotating a set of spectrometers 206 and detectors 208, a mechanism (goniometer) for rotating the spectrometers 206 and detectors 208 is provided in the spectrometer chamber.

[0037] also, Figure 2 The X-ray tube 120 shown in (a) irradiates the lower surface of sample 202 with X-rays from below. That is, Figure 2 (a) illustrates the spectrophotometer 118 of the fluorescence X-ray analysis apparatus 100 in a down-illuminated configuration. Figure 2As shown in (b), the X-ray tube 120 can also irradiate the upper surface of the sample 202 with X-rays from above; that is, the fluorescence X-ray analysis device 100 can also be an up-irradiation type. Furthermore, this disclosure is particularly applicable to large wavelength dispersive fluorescence X-ray analysis devices where high-power water-cooled X-ray tubes are commonly used. However, the present invention can certainly also be used in energy dispersive fluorescence X-ray analysis devices.

[0038] X-ray tube 120 applies voltage to electron beam source 302 and irradiates sample 202 arranged in spectrophotometer 118 with a single X-ray generated by electron beam irradiation target 304. Figure 3 This is a schematic diagram showing an X-ray tube 120. The X-ray tube 120 has an electron beam source 302, a target 304, an anode 306, and piping 310.

[0039] For example, in the case where the X-ray tube 120 is a thermionic type, the electron beam source 302 is a filament, and an electron beam is generated by applying a negative voltage from a high-voltage power supply 110. The target 304 is disposed in contact with the anode 306, and a cooling water flow pipe 310 is connected to the back of the anode 306. The anode 306 is formed of a material with high thermal conductivity. A positive voltage is applied to the anode 306 by the high-voltage power supply 110, and the electron beam generated from the electron beam source 302 irradiates the target 304, generating primary X-rays. The material of the target 304 is appropriately selected based on the energy of the absorption end of the element being measured, to produce primary X-rays with high excitation efficiency. The electron beam source 302 and the target 304 are arranged inside a vacuum-vented housing (e.g., a glass tube). This housing has an opening for extracting primary X-rays, and an X-ray window 308 is provided on the opening, consisting of a film formed of a material that transmits primary X-rays. This film is, for example, formed of beryllium. Since most of the energy of the electron beam irradiating the target 304 is converted into heat, the target 304 and anode 306 become high-temperature during the measurement. The target 304 and anode 306 are cooled by allowing cooling water to flow through the interior of the piping 310.

[0040] Furthermore, the electron beam source 302 may sometimes be damaged due to wear or other reasons. In this case, even if the high-voltage power supply 110 applies a high voltage between the electron beam source 302 and the anode 306, the predetermined current (electron beam) cannot flow. Additionally, if the vacuum level decreases due to air intrusion into the X-ray tube 120 or leakage of cooling water, discharge may occur inside the X-ray tube 120, making it impossible to apply the predetermined high voltage. When no normal voltage is applied between the electron beam source 302 and the anode 306, the high-voltage power supply 110 sends a voltage abnormality signal to the control unit 124. The voltage abnormality signal can also be sent from the high-voltage power supply 110 to the information processing unit 108, from which the information processing unit 108 provides instructions to the control unit 124, as described later.

[0041] Vacuum gauge 122 measures the pressure inside the spectroscopic chamber 118. Specifically, vacuum gauge 122 may be a thermal conductivity vacuum gauge such as a Pirani vacuum gauge. Vacuum gauge 122 measures the pressure inside the spectroscopic chamber 118 and sends the measured pressure to the control unit 124. The measured pressure is sent from vacuum gauge 122 to information processing unit 108, which can instruct the control unit 124 (to stop applying voltage to the electron beam source 302, described later, and to instruct the circulating water pump 104, vacuum pump 106, etc.). Vacuum gauge 122 can be any vacuum gauge other than a thermal conductivity vacuum gauge, as long as it can measure the pressure inside the spectroscopic chamber 118 (especially the pressure caused by water vapor). For example, vacuum gauge 122 may be a U-shaped vacuum gauge, an elastic vacuum gauge, a McLaren vacuum gauge, a thermionic vacuum gauge, etc.

[0042] The control unit 124 controls the operation of each structure included in the measuring unit 102, the vacuum pump 106, and the circulating water pump 104 according to the instructions of the information processing unit 108. Furthermore, the control unit 124 controls the operation of the vacuum pump 106, the circulating water pump 104, and the pressure relief valves 116A and 116B in case of water leakage, based on signals from the high-voltage power supply 110 and the vacuum gauge 122. Specifically, the control unit 124 stops the operation of the vacuum pump 106 when the sample 202 is removed from the preparation chamber 112, and activates the vacuum pump 106 before and during the measurement. Additionally, the control unit 124 activates the circulating water pump 104 during the measurement and stops its operation when a cooling water leak is detected. Furthermore, the control unit 124 obtains the intensity of the fluorescent X-rays from a counter (not shown) and sends this intensity to the information processing unit 108.

[0043] The circulating water pump 104 delivers cooling water to the cooling target 304. Specifically, the circulating water pump 104 has a cooling mechanism that functions to cool the water inside the circulating water pump 104. The circulating water pump 104 is connected to the piping 310 of the X-ray tube 120 via connecting pipes and delivers cooled water to the X-ray tube 120. The cooling water delivered from the circulating water pump 104 returns to the circulating water pump 104 via other connecting pipes. In this way, the circulating water pump 104 cools the water, which serves as a refrigerant, while circulating the water between the X-ray tube 120 and the circulating water pump 104, thereby cooling the anode 306. Alternatively, the circulating water pump 104 may not have a cooling mechanism and may be configured such that a separate cooling mechanism is provided outside the circulating water pump 104, or that water is drawn in from the outside without circulation.

[0044] Vacuum pump 106 expels air from preparation chamber 112 and spectrophotometer 118. Specifically, vacuum pump 106 is a pump that creates a vacuum within the chamber of a dry pump or molecular pump, etc., and operates according to the instructions of control unit 124. Furthermore, in Figure 1In this configuration, a vacuum pump 106 is connected to the preparation chamber 112 and the spectrophotometer 118, but it is preferable to have a separate vacuum pump 106.

[0045] The information processing unit 108 communicates with the control unit 124 and controls the transmission and reception of measurement data, as well as the operation of each structure connected to the control unit 124. Specifically, for example, such as... Figure 4 As shown, the information processing unit 108 is a computer connected to the control unit 124, and includes an arithmetic unit 402, a storage unit 404, a display unit 406, an input / output unit 408, and an internal bus 410.

[0046] The arithmetic unit 402 is a CPU (Central Processing Unit) that acts as a processor and performs various calculations. For example, the arithmetic unit 402 executes various calculations or measurement programs related to the analysis of the sample 202 based on the intensity of the fluorescent X-rays obtained from the control unit 124.

[0047] Storage unit 404 is a non-transitory computer-readable information storage medium that stores programs executed by the computer used in the fluorescence X-ray analysis apparatus 100. Specifically, for example, storage unit 404 is a device capable of statically storing information such as RAM (Random Access Memory), HDD (Hard Disk Drive), or SSD (Solid State Drive). Storage unit 404 stores a program for managing water leakage. This program causes the computer to perform the following steps: determining whether cooling water has leaked into the spectrometer 118 based on both the pressure measured by vacuum gauge 122 and the voltage applied to the electron beam source 302; and stopping the operation of the circulating water pump 104 if it is determined that cooling water has leaked into the spectrometer 118. Details of this step will be described later.

[0048] Display unit 406 is a flat panel display such as an LCD monitor, and displays images. If control unit 124 determines that there is a cooling water leak, display unit 406 indicates that cooling water may be leaking into the beam splitter 118.

[0049] Input / output unit 408 is one or more interfaces for exchanging information between the computer and external devices, and is one or more devices used by the user to input information, such as a keyboard, mouse, touch panel, etc. Furthermore, input / output unit 408 may include various ports for wired connections and controllers for wireless connections. Input / output unit 408 obtains the intensity of fluorescent X-rays incident on detector 208 from control unit 124. In addition, input / output unit 408 also functions as a receiving unit for receiving instructions from the user to stop the operation of circulating water pump 104.

[0050] The internal bus 410 connects the arithmetic unit 402, the storage unit 404, the display unit 406, and the input / output unit 408 to each other.

[0051] The control unit 124 determines that cooling water has leaked into the spectrometer 118 based on both the pressure measured by the vacuum gauge 122 and the voltage applied to the electron beam source 302, and stops the operation of the circulating water pump 104. Specifically, for example, the control unit 124 determines that cooling water is leaking if the pressure measured by the vacuum gauge 122 is higher than a predetermined value and the voltage applied to the electron beam source 302 is lower than a predetermined value. Then, in the case of determining a cooling water leak, the control unit 124 stops applying voltage to the electron beam source 302. Furthermore, in the case of determining a cooling water leak, the control unit 124 stops the operation of the vacuum pump 106. Furthermore, in the case of determining a cooling water leak, the control unit 124 introduces air into the spectrometer 118. Additionally, in... Figure 1 In the middle, the high-voltage power supply 110 stops the operation of the circulating water pump 104 and the vacuum pump 106 via the control unit 124, but the high-voltage power supply 110 can also directly instruct the circulating water pump 104 and the vacuum pump 106 without going through the control unit 124.

[0052] Reference Figure 5 and Figure 6 The flow chart of the leakage management method illustrates the detailed functions of the control unit 124. First, the sample 202 is placed on the sample stage 204 (S502). Specifically, with the vacuum gate 114 closed, the user places the sample 202 in the preparation chamber 112 and seals the preparation chamber 112 airtightly.

[0053] Next, the measurement begins (S504). Specifically, for example, the information processing unit 108 executes a measurement program, which displays given information related to the measurement on the display unit 406. The user inputs measurement conditions such as measurement time and starts the measurement via the input / output unit 408, such as the mouse or keyboard. The information processing unit 108 instructs the control unit 124 to perform the measurement according to these measurement conditions.

[0054] When the control unit 124 receives an instruction to begin the measurement, it controls the vacuum pump 106 to expel the air inside the preparation chamber 112. When the pressure in the preparation chamber 112 falls below a predetermined value, the control unit 124 opens the vacuum gate 114, allowing the transport device (not shown) to transport the sample 202 from the preparation chamber 112 to the sample stage 204 of the spectrophotometer 118. The control unit 124 instructs the high-voltage power supply 110 to begin the measurement, and the high-voltage power supply 110 applies voltage to the electron beam source 302 of the X-ray tube 120. The electron beam generated from the electron beam source 302 irradiates the target 304, and a single X-ray is generated from the target 304. The generated single X-ray is irradiated onto the sample 202 disposed in the spectrophotometer 118. Furthermore, the control unit 124 instructs the X-ray tube 120 to irradiate with a single X-ray and instructs the circulating water pump 104 to deliver cooling water to the X-ray tube 120. Upon receiving this instruction, the circulating water pump 104 circulates water between itself and the X-ray tube 120.

[0055] When the measurement begins, a determination of presence or absence is performed before the measurement ends. Figure 6 The leakage process is shown in S508. Furthermore, Figure 6 The process shown can be compared with Figure 5 The process shown can be executed independently at regular intervals, or it can be executed when the control unit 124 receives a voltage abnormality signal.

[0056] When the control unit 124 receives a voltage abnormality signal (S602), it determines whether the pressure in the spectrometer 118 is higher than a predetermined value (S604). Then, if the pressure in the spectrometer 118 is higher than the predetermined value, it is determined that water leakage has occurred in the spectrometer 118 (S606). Specifically, water leakage is determined to have occurred when the pressure in the spectrometer 118 is greater than a predetermined absolute value (e.g., 1 Pa). Alternatively, water leakage can also be determined to have occurred when the pressure in the spectrometer 118 exceeds a predetermined multiple (e.g., 1000 times) of the pressure during normal measurement.

[0057] Furthermore, when no normal voltage is applied between the electron beam source 302 and the anode 306, the control unit 124 receives a voltage anomaly signal from the high-voltage power supply 110. Additionally, the pressure measured by the vacuum gauge 122 is obtained by the control unit 124 at regular intervals. Since the information processing unit 108 and the control unit 124 can communicate with each other, either the information processing unit 108 or the control unit 124 can determine whether a leak has occurred.

[0058] If no leakage is detected in S508 and the predetermined time has elapsed in S506, the measurement ends. When the measurement ends, the analysis results are displayed on the display unit 406. On the other hand, if leakage is detected in S508, the display unit 406 displays a warning indicating that cooling water may leak into the spectrophotometer 118.

[0059] Based on the warning displayed on the display unit 406, the user inputs whether the measurement should be stopped or continued into the information processing unit 108. Upon receiving the instruction from the user to stop the measurement from the receiving unit, the control unit 124 stops the operation of the circulating water pump 104 (S514).

[0060] In addition, the control unit 124 stops applying voltage to the electron beam source 302 (S516).

[0061] Then, the control unit 124 stops the operation of the vacuum pump 106. In addition, the control unit 124 opens the pressure relief valve 116B to introduce air into the spectrophotometer 118 (S518). At this time, the control unit 124 may also open the pressure relief valve 116A to introduce air into the preparation chamber 112.

[0062] As described above, according to this disclosure, whether water leakage has occurred is determined using both the measurement value of the vacuum gauge 122 and the voltage applied by the high-voltage power supply 110. When liquid water leaks into the vacuum spectrometer 118, the water evaporates, and the pressure in the spectrometer 118 increases. If it is simply a matter of not applying a normal voltage to the electron beam source 302, various causes other than water leakage are conceived as an anomaly generated in the fluorescence X-ray analysis apparatus 100. However, in most cases, the state where a normal voltage is not applied to the electron beam source 302 and the vacuum level of the spectrometer 118 deteriorates is due to water leakage into the spectrometer 118. Therefore, according to the present invention, it is possible to quickly and accurately determine whether water leakage has occurred without adding a water leakage detection sensor.

[0063] This invention is not limited to the above embodiments and various modifications are possible. The structure of the fluorescence X-ray analysis device 100 described above is an example and is not limited thereto. It can also be replaced by a structure that is substantially the same as the structure shown in the above embodiments, a structure that has the same effect, or a structure that achieves the same purpose.

[0064] For example, in Figure 1 In this context, the functions of the control unit 124 can be included within the functions of the information processing unit 108. Figure 5 In this process, steps S510 and S512 can also be omitted. If a leak is detected, the circulating water pump 104 will be stopped immediately without human intervention. Furthermore, steps S514, S516, and S518 can be in a different order and can be substituted.

[0065] Explanation of reference numerals in the attached figures

[0066] 100 Fluorescence X-ray Analysis Device, 102 Measurement Unit, 104 Circulating Water Pump, 106 Vacuum Pump, 108 Information Processing Unit, 110 High Voltage Power Supply, 112 Preparation Chamber, 114 Vacuum Gate, 116 Pressure Relief Valve, 118 Spectrometer, 120 X-ray Tube, 122 Vacuum Gauge, 124 Control Unit, 202 Sample, 204 Sample Stage, 206 Collimator, 208 Detector, 302 Electron Beam Source, 304 Target, 306 Anode, 308 X-ray Window, 310 Piping, 402 Computation Unit, 404 Storage Unit, 406 Display Unit, 408 Input / Output Unit, 410 Internal Bus.

Claims

1. A fluorescence X-ray analysis device, characterized in that, have: A high-voltage power supply that applies voltage to the electron beam source; An X-ray tube is used to irradiate a sample placed in a spectrometer with a single X-ray generated by irradiating a target with an electron beam produced by the electron beam source. A circulating water pump that delivers cooling water to the target; A vacuum pump that expels air from the spectrophotometer; A vacuum gauge, which measures the pressure in the spectroscopic chamber; and The control unit determines, based on both the pressure measured by the vacuum gauge and the voltage applied to the high-voltage power supply of the electron beam source, that cooling water has leaked into the spectrometer, and then stops the operation of the circulating water pump. At least a portion of the X-ray tube is located inside the spectrometer. The pressure measured by the vacuum gauge becomes higher due to the leakage of the cooling water. The voltage applied to the electron beam source by the high-voltage power supply is reduced due to leakage of the cooling water.

2. The fluorescence X-ray analysis apparatus according to claim 1, characterized in that, If the pressure measured by the vacuum gauge is higher than a specified value and the voltage of the high-voltage power supply applied to the electron beam source is lower than a specified value, the control unit determines that the cooling water is leaking.

3. The fluorescence X-ray analysis apparatus according to claim 1 or 2, characterized in that, If the control unit determines that the cooling water is leaking, it stops applying voltage to the electron beam source.

4. The fluorescence X-ray analysis apparatus according to claim 1 or 2, characterized in that, If the control unit determines that there is a cooling water leak, it stops the operation of the vacuum pump.

5. The fluorescence X-ray analysis apparatus according to claim 1 or 2, characterized in that, If the control unit determines that the cooling water is leaking, it introduces air into the spectrophotometer.

6. The fluorescence X-ray analysis apparatus according to claim 1 or 2, characterized in that, It also includes an information processing unit that includes a receiving unit for receiving user instructions and a display unit. If the control unit or the information processing unit determines that there is a cooling water leak, the display unit will indicate that the cooling water may have leaked into the spectrometer. When the receiving unit receives an instruction from the user to stop the operation of the circulating water pump, the control unit stops the operation of the circulating water pump.

7. A method for managing water leakage in a fluorescence X-ray analysis device, characterized in that, The fluorescence X-ray analysis device has the following features: A high-voltage power supply that applies voltage to the electron beam source; An X-ray tube is used to irradiate a sample placed in a spectrometer with a single X-ray generated by irradiating a target with an electron beam produced by the electron beam source. A circulating water pump that delivers cooling water to the target; A vacuum pump that expels air from the spectroscopic chamber; and A vacuum gauge is used to measure the pressure in the spectroscopic chamber. At least a portion of the X-ray tube is located inside the spectrometer. The pressure measured by the vacuum gauge becomes higher due to the leakage of the cooling water. The voltage applied to the electron beam source by the high-voltage power supply is reduced due to the leakage of the cooling water. The water leakage management method of the fluorescence X-ray analysis device has the following characteristics: The step of determining whether cooling water has leaked into the interior of the spectrometer based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and The step of stopping the operation of the circulating water pump when it is determined that the cooling water has leaked into the interior of the spectrometer.

8. An information storage medium, which is a non-transitory computer-readable information storage medium storing a program executed by a computer used in a fluorescence X-ray analysis apparatus, characterized in that, The fluorescence X-ray analysis device has the following features: A high-voltage power supply that applies voltage to the electron beam source; An X-ray tube is used to irradiate a sample placed in a spectrometer with a single X-ray generated by irradiating a target with an electron beam produced by the electron beam source. A circulating water pump that delivers cooling water to the target; A vacuum pump that expels air from the spectroscopic chamber; and A vacuum gauge is used to measure the pressure in the spectroscopic chamber. At least a portion of the X-ray tube is located inside the spectrometer. The pressure measured by the vacuum gauge becomes higher due to the leakage of the cooling water. The voltage applied to the electron beam source by the high-voltage power supply is reduced due to the leakage of the cooling water. The program causes the computer to execute: The step of determining whether cooling water has leaked into the interior of the spectrometer based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and The step of stopping the operation of the circulating water pump when it is determined that the cooling water has leaked into the interior of the spectrometer.

9. A computer program product, executed by a computer used in a fluorescence X-ray analysis apparatus, characterized in that, The fluorescence X-ray analysis device has the following features: A high-voltage power supply that applies voltage to the electron beam source; An X-ray tube is used to irradiate a sample placed in a spectrometer with a single X-ray generated by irradiating a target with an electron beam produced by the electron beam source. A circulating water pump that delivers cooling water to the target; A vacuum pump that expels air from the spectroscopic chamber; and A vacuum gauge is used to measure the pressure in the spectroscopic chamber. At least a portion of the X-ray tube is located inside the spectrometer. The pressure measured by the vacuum gauge becomes higher due to the leakage of the cooling water. The voltage applied to the electron beam source by the high-voltage power supply is reduced due to the leakage of the cooling water. The computer program product causes the computer to execute: The step of determining whether cooling water has leaked into the interior of the spectrometer based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and The step of stopping the operation of the circulating water pump when it is determined that the cooling water has leaked into the interior of the spectrometer.

Images